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7534991 |
Athermalized birefringent filter apparatus and method
An athermalized birefringent filter for shifts in center wavelength and in bandwidth incorporates fixed retarder elements such as quartz or film retarders, along with electrically-variable retarder...
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7485847 |
Displacement sensor employing discrete light pulse detection
Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source...
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7469058 |
Method and system for a maskless lithography rasterization technique based on global optimization
Provided are a method and system for determining states of spatial light modulator (SLM) pixels in a lithography system configured to print a desired pattern. The method includes determining...
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7442930 |
Method for correcting distortions in electron backscatter diffraction patterns
A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron...
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7436503 |
Dark field inspection apparatus and methods
Accordingly, the present invention provides methods and apparatus for performing a darkfield inspection on a specimen having periodic structures thereon while substantially reducing or eliminating...
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7423279 |
Systems and methods that detect changes in incident optical radiation
Systems, methods and sensors detect changes in incident optical radiation. Current is driven through one or more active areas of a detector while the incident optical radiation illuminates the...
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7400458 |
Imaging optics with wavelength dependent aperture stop
An imaging system includes a wavelength dependent aperture stop, which transmits light with different ranges of wavelengths through apertures of different diameters. Thus, different colored light...
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7385179 |
Optical encoder for measuring displacement
At least one exemplary embodiment is directed to an optical encoder which includes a first diffraction grating having a desired optical effective aperture ratio at an appropriate gap position so as...
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7368745 |
Pattern recognition system
A star pattern recognition system ( 1 ) comprises an optical filter arrangement ( 10 ) in the form of an array ( 12 ) of independently tiltable mirrors (M 1 ), (M 2 ). Light from a distant...
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7241995 |
Electron microscope equipped with magnetic microprobe
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The...
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7214935 |
Transmission electron microscopy sample preparation method for electron holography
A method for preparing a transmission electron microscopy (TEM) sample for electron holography includes forming a sacrificial material over an area of interest on the sample, and polishing the...
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7115849 |
Wavefront coding interference contrast imaging systems
Contrast Imaging apparatus and methods with Wavefront Coding aspheric optics and post processing increase depth of field and reduce misfocus effects in imaging Phase Objects. The general...
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7105799 |
Apparatus and method for an electronically tuned, wavelength-dependent optical detector
An electronically tuned, wavelength-dependent optical detector is provided. The electronically tuned, wavelength-dependent optical detector is a modified metal-semiconductor-metal photodetector...
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6909105 |
Method and device for representing an object
A process for obtaining an object image of at least one object ( 40 ) is described, wherein at least two partial images of the object ( 40 ) are taken under differing object conditions which are...
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6906839 |
System and method for recovering phase information of a wave front
A system and method for recovery of phase information from recorded intensity values is disclosed. In one aspect, a phase filter is placed in a plane, which may be the back focal plane (BFP) of a...
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6900900 |
Apparatus and method for enabling high resolution film thickness and thickness-uniformity measurements
A high-resolution and high-speed film thickness and thickness uniformity measurement method is disclosed in this invention. The disclosed method includes a step a) of measuring a film thickness at...
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6832003 |
Method and apparatus for reading and verifying holograms
A system and method for reading the information stored in holograms and other diffractive objects. The information is read by analyzing the diffraction pattern produced when a laser beam is focused...
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6687036 |
Multiplexed optical scanner technology
High speed optical scanner systems and methods using optical multiplexing of wavelengths and spatial codes. In one form, a wavelength multiplexed optical scanner (W-MOS) is disclosed, wherein...
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6686994 |
UV compatible programmable spatial filter
Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter...
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6555817 |
Method and apparatus for correcting magnetic field distortions in electron backscatter diffraction patterns obtained in an electron microscope
A system and method for correcting automatically the distortions in electron background diffration (EBSD) patterns which result from magnetic fields produced by some scanning electron microscopes...
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6548820 |
Optical synthetic aperture array
A synthetic aperture system for producing a non-periodic pattern in a region of overlap. The system includes a source of electromagnetic radiation producing a plurality of electromagnetic beams, a...
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6522410 |
Method for processing low coherence interferometric data
A method of processing interferometric data relating to a sample having multiple reflective surfaces, includes the steps of: specifying a set of acceptance ranges for peaks of interest in the...
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6496273 |
Position determining apparatus for coordinate positioning machine
Described is a device which enables toolsetting on a machine tool. The device includes a light emitting unit ( 10 ) and a light detecting unit ( 14 ). A light source ( 30 ) causes a light beam ( 12...
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6292319 |
Thin retroreflective marker for identifying an object
A cartridge for a data storage disk drive has a thin retroreflective marker. Light from a source is reflected from the marker almost exactly on its incident path. A planar light shaping optical...
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6224732 |
Method and apparatus for separating particles
A dispersing medium containing plural types of particles is let to flow in a flow path formed in a flow cell. The flow cell is irradiated with interfering light to form interference fringes of a...
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6208006 |
Thin film spatial filters
Thin film spatial filters are disclosed. The filters are constructed with a continuous thin film of low resistance conductor (for example with a resistance of from 10 -2 to 10 8 Ohms-cm) with...
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6140660 |
Optical synthetic aperture array
A synthetic aperture system for producing a non-periodic pattern in a region of overlap. The system includes a source of electromagnetic radiation producing a plurality of electromagnetic beams, a...
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6031607 |
System and method for inspecting pattern defect
The invention is a pattern defect inspection system and method for improving the inspection speed, simplifying the system, and enlarging the inspection object, in which a correlation circuit (24)...
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6008899 |
Apparatus and method for optical pulse measurement
Practical third-order frequency-resolved optical grating (FROG) techniques for characterization of ultrashort optical pulses are disclosed. The techniques are particularly suited to the measurement...
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5978053 |
Characterization of collimation and beam alignment
An apparatus and method for characterizing light beam collimation and alignment. A liquid crystal device receiving a light beam from a collimation lens has a lenslet array generated thereon. A...
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5920430 |
Lensless joint transform optical correlator for precision industrial positioning systems
A lensless joint transform correlator optically determines the relative position of two pinholes placed in parallel arms of a Mach-Zehnder interferometer. The Fraunhaufer diffraction patterns...
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5644514 |
Interpolation circuit for measuring device
An interpolation circuit for a measuring device capable of increasing a resolution and providing a velocity proportional output. Both sin θ signal and cos θ signal outputted from a sensor is fed...
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5623360 |
Time delay beam formation
Optical systems are disclosed which are capable of generating and rapidly changing time delays of electrical signals for true time delay beam formation and beam steering and for signal processing...
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5617203 |
Optical detector employing an optically-addressed spatial light modulator
In an optical detector, a light source irradiates coherent light onto an objective. A Fourier transform lens receives the light diffracted and scattered at the objective and Fourier transforms the...
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5534704 |
Optical image correlator and system for performing parallel correlation
An optical image processor which may be used for optical image correlation comprises a liquid crystal spatial light modulator for displaying an input image as a two dimensional array of pixels. An...
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5528370 |
Apparatus and method for measuring variations in thickness of an optical interference element
In a system for measuring variations in thickness of an optical etalon, a light source and a diffraction grating are mounted on a base structure with an axle. A lever arm is affixed to the axle,...
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5513284 |
Method and a device for correlating two or more optical pulse signals
The object of the invention is to provide a method which makes it possible to determine the correlation between two optical signals, which makes it possible to correlate two optical signals,...
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5440426 |
Optical spatial filtering for attenuating the zero diffractive orders of mutually incoherent light beams
Method and apparatus for forming an image of an object by optical projection with a focusing system comprising the steps of collimating a set of at least two mutually incoherent light beams from...
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5436462 |
Video contour measurement system employing moire interferometry having a beat frequency pattern
An electroptic metrology system uses Moire interferometry to generate contour information on the surface of an object. Interfering coherent beams generate a n image on the object's surface that...
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5431192 |
Light box for use in web inspection apparatus and method
An apparatus and method for inspecting and guiding a web utilizes a curved outer convex cloth guiding surface (A) on arcuate sections such as extrusions provided respectively at the top and bottom...
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5418380 |
Optical correlator using ferroelectric liquid crystal spatial light modulators and Fourier transform lenses
An optical correlator uses ferroelectric liquid crystal spatial light modulators (FLC-SLM's) in both the reference and filter planes. The SLM's include an electrically addressable memory to store...
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5361312 |
Method and apparatus for phase evaluation of pattern images used in optical measurement
The invention relates to measuring a phase-modulated signal 5. The signal is measured along at least five different steps (P1-P5) corresponding to preselected phase angles of the carrier wave 4....
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5315100 |
Photoelectric conversion apparatus for detecting movement of object with spatial filter electrode
A photoelectric conversion apparatus includes a pair of opposite electrodes, and an amorphous silicon film. The amorphous silicon film is sandwiched between the pair of opposite electrodes and...
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5276498 |
Adaptive spatial filter for surface inspection
An inspection apparatus for a light diffracting surface employs a planar array of individually addressable light valves for use as a spatial filter in an imaged Fourier plane of a diffraction...
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5264912 |
Speckle reduction track filter apparatus for optical inspection of patterned substrates
An apparatus used to inspect patterned wafers and other substrates with periodic features for the presence of particles, defects and other aperiodic features in which a spatial filter placed in the...
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5222156 |
Object information processing apparatus
An object information processing apparatus includes a focussing unit for focussing light information from an object point; a light transmission unit for transmitting the light information from the...
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5172000 |
Spatial filter for optically based defect inspection system
In an imaging system (10) for detecting defects in a specimen (14) having a repetitive pattern (16), a spatial filter (50) receives a spatial frequency spectrum produced by a Fourier transform lens...
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5159474 |
Transform optical processing system
The Fourier transform optical processing system of the present invention includes generating an electrical signal in response to a first image and modulating a beam of coherent light with means...
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5151822 |
Transform digital/optical processing system including wedge/ring accumulator
A transform digital optical processing system generates a transform signal of an image. Fourier or other well-known transforms may be employed. The transform signal may be generated in one of two...
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5122648 |
Apparatus and method for automatically focusing an interference microscope
Automatic focusing of an interference microscope is accomplished by directly sensing an interference pattern produced by a white light source with an auxiliary point detector. A beamsplitter...
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