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5073053 |
Color discrimination apparatus for color ink ribbon
In the present invention, a long and narrow color ink ribbon in which ink supply portions are repeatedly formed with the same arrangement is formed, a ribbon carrying means which moves the color...
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5072126 |
Promixity alignment using polarized illumination and double conjugate projection lens
Alignment of two objects such as a mask and a wafer is achieved using crossed polarizer imaging and polarization sensitive targets to enhance signal contrast in proximity alignment. Two linearly...
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5070250 |
Position detection apparatus with adjustable beam and interference fringe positions
A position detection apparatus has a substrate on which a diffraction grating is formed and an alignment optical system for illuminating the diffraction grating with a pair of coherent light beams...
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5059808 |
Alignment method for patterning
There is disclosed an alignment method comprising the steps of irradiating an alignment light toward an alignment mark whose surface has a high reflectance, the alignment mark being coated by a...
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5047651 |
Arrangement for measuring a deviation from its line of a movable web of foil
The arrangement comprises a tracking sensor with a light source, an optical means and a receiver with two photosensitive detectors, as well as a measuring apparatus with a computing unit. The...
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5044752 |
Apparatus and process for positioning wafers in receiving devices
An apparatus is provided for loading and/or unloading wafers from a holding cassette to a quartz boat without scraping the wafer on the slots contained in the quartz boat; the apparatus comprising...
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5028797 |
An alignment system for align first and second objects using alignment marks
An alignment system for aligning a mask and a wafer into a predetermined positional relationship uses alignment marks provided on the mask and the water. In this system, light from a light source...
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5025168 |
Alignment apparatus including three beams and three gratings
A light source emits light having two components which ave slightly-different frequencies and which have different planes of polarization. The emitted light is separated into first, second, and...
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5024156 |
Safety device for the control of web-fed rotary printing machines
A safety device for control of a roller rotary printing machine includes a plurality of sensors positioned either before or behind a web advancing device for recognizing tears or other damages in a...
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5021673 |
Web transport with anti-skew arrangement
"Anti-wander" web-transport arrangements wherein web-means are intermittently advanced, while being monitored for misalignment along the transport-path, and also being automatically urged back into...
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5021674 |
Process for determining the location of edges and photoelectronic scanning device for scanning edges
A process and device for determining the location of at least one edge of a moving web within a measurement zone and in which a linear array of liquid crystal light modulators is interposed between...
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5017792 |
Method and apparatus for detecting a sheet strip material misfeed condition
A plurality of individual openings provided in a sheet strip material by a stamping device are passed in succession past a monitoring station positioned adjacent the outlet of the stamping device....
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5015849 |
Index marking system
A detection system is disclosed for detecting the presence of a marking material placed on a textile substrate prior to a series of dyeing and finishing steps. Following such steps, the substrate...
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5015866 |
Stage apparatus in exposing apparatus
In an exposing apparatus for copy transferring a pattern formed on a mask onto a substrate, the substrate is supported on a leveling stage mounted on a two-dimensionally movable stage....
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5013156 |
Optical density measurement apparatus in the context of labeling and other devices
A system to apply a bar-code label or the like upon a product or to apply a protective laminate strip or the like upon a bar-code label or the like which is already in place upon a product. The...
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5008705 |
Autofocus system for microlithography
The autofocus system disclosed herein utilizes grazing angle illumination of a spot on the surface of a semiconductor wafer approximately on the axis of the projection lens so that the position of...
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5004348 |
Alignment device
An apparatus for aligning a mask and a substrate by detecting diffracted light from a first and second diffraction gratings. The apparatus comprises an illumination light source for irradiating...
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4993837 |
Method and apparatus for pattern detection
A method and a system for pattern detection are disclosed in which a laser beam high in directivity is emitted from a laser beam source, the laser beam emitted from the laser beam source is...
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4987448 |
Skewing detection mechanism for printer employing continuous recording form
A skewing detection mechanism for a printer of type wherein an image is formed onto a continuous recording form. A pivotally movable sensor is arranged in abutted and biased relation to the...
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4978841 |
Automatic leveling system and a method of leveling a workpiece based on focus detection
An automatic leveling system and a method of use of the leveling system that is suited for use with electronic components. The system uses an automatic laser focus system to focus on three separate...
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4972326 |
Method and apparatus for recording a flaw in a fabric web
Apparatus and a method records a flaw in a fabric web during a flaw inspection. The flaw is recorded by a mark placed on the fabric web along with the X- and Y-values of a system of points defining...
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4972088 |
Register mark detection
A method of and apparatus for detecting a register mark on an elongate web (3) is described. The web (3) carries a number of copies of an image (4) spaced apart along the web (3) and a region of...
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4962318 |
Alignment system for exposure apparatus
An exposure apparatus for transferring a mask pattern to a wafer having a surface photoresist layer. The apparatus is comprised of first and second detectors and a determination unit. The first...
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4958082 |
Position measuring apparatus
An exposure apparatus for exposing a pattern on a substrate to be exposed having a predetermined mark formed thereon includes a stage for supporting the substrate to be exposed thereon, moving...
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4955780 |
Wafer positioning apparatus
A wafer positioning apparatus includes at least first, second and third optical position detectors for detecting a circumference portion of a wafer. The first to third optical position detectors...
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4952815 |
Focusing device for projection exposure apparatus
A projection exposure apparatus for projecting the image of an object on a first plane onto a second plane through a projection optical system, comprising: reference mark device provided in the...
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4948982 |
Device for detecting a missing copy by detecting the presence or absence of a colored area on a surface
An optical scanner scans the surface of printed material at a particular position of the surface to determine if the surface is properly marked. The output level of the scanner at that position is...
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4945252 |
Continuous web registration
A web structure with electromagnetic radiation shifting indicia is disclosed. The indicia provide signals used in controlling various processes to be performed on the web as well as for controlling...
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4943733 |
Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment
A projection optical apparatus has a projection optical system for projecting an image of a reticle pattern on a stage-mounted semi-conductor wafer and includes a light-emitting surface of the...
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4941745 |
Projection aligner for fabricating semiconductor device having projection optics
A projection aligner having a projection optics which project circuit patterns of reticles on a wafer next by step, comprising an X-Y stage mounting the wafer and moved to an X or Y direction by a...
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4938598 |
Method and apparatus for position detection on reduction-projection system
The present invention is of an apparatus, in a reduction-projection exposure apparatus, for reduction-projection position detection comprising illuminating means for illuminating a registration...
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4937593 |
Print head position control system
A print head position control system for a printer in which a print head moves along a track and in which a light source illuminates along the track and a photodetector receives the light to...
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4937459 |
Alignment signal detecting device
An alignment signal detecting device including a polarization-plane rotating element and a polarization beam splitter, co-operative to selectively define different optical paths for the same...
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4926048 |
Process of performing work on a continuous web
A web structure with electromagnetic radiation shifting indicia is disclosed. The indicia provide signals used in controlling various processes to be performed on the web as well as for controlling...
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4926049 |
Reflection type photoelectric switch
A reflection type photoelectric switch adapted to project light to an object to be detected and sense the object on the basis of reflected light therefrom, which comprises a split-type composite...
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4918320 |
Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment
A method of aligning a semiconductor wafer, usable in a step-and-repeat type exposure apparatus for projecting, in a reduced scale, images of a pattern formed on a reticle upon different shot areas...
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4906852 |
Projection alignment method and apparatus
A projection alignment method of aligning a mask and a wafer with each other through an optical imaging system and an apparatus for performing the method are disclosed. The apparatus comprises an...
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4904087 |
Method for aligning photomasks
Photomasks (11, 12) are aligned on opposite sides of a wafer by directing light beams through zone plates (13 A-C) in one photomask and through aligned transparent slits (14 A-C) on the other...
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4902900 |
Device for detecting the levelling of the surface of an object
A device for detecting the levelling of an object disposed on a plane substantially perpendicular to the optic axis of main objective optical means and worked by a radiation beam from the main...
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4900939 |
System for processing and conveying substrate
A substrate processing system basically comprises a coater-developer apparatus, an exposure processing apparatus and a conveyance controlling apparatus. The coater-developer apparatus comprises a...
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4896605 |
Method of cut position determination for printing machines
A method of cut position determination for printing machines, wherein in order to ensure a synchronous running of the paper webs (P1-P4) to be folded and cut into newspapers (16) on a printing...
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4892426 |
Paper movement monitor
A monitor (18,26,28) monitors movement of paper (12) through a printer (16). The paper movement sensors (18,26) comprise one central wheel (70) or a pair of spaced edge wheels (158) each operating...
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4891528 |
Microprocessor-controlled apparatus for detecting and guiding a web wherein right and left eyespots are formed to determine right and left edges
An apparatus for detecting and guiding a web includes a web scanner bar unit that extends across the entire width of the web path for controlling a steering mechanism to maintain a more precise...
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4886974 |
Mark detecting device for detecting the center of a mark by detecting its edges
A mark detecting device detects a mark in accordance with an electric signal obtained by photoelectrically converting the scatteringly reflected lights from edges of the mark. More particularly,...
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4886973 |
Sheet strip material misfeed detector
A plurality of individual openings provided in a sheet strip material by a stamping device are passed in succession through a monitoring station positioned adjacent the outlet of the stamping...
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4881100 |
Alignment method
An alignment method usable in an apparatus for transferring images of a pattern of a mask onto different portions of a semiconductor wafer in a step-and-repeat manner, is disclosed. In this...
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4880308 |
Aligning apparatus
An apparatus for aligning a first substrate with a second substrate, comprising: means for relative movement of first and second substrates, first alignment mark means an first substrate, second...
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4871955 |
System for strictly positioning an object along an axis
This invention relates to a system for strictly positioning along an axis an object such as a wafer of semi-conducting material during a process of constructing integrated circuits, wherein it...
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4870289 |
Apparatus for controlling relation in position between a photomask and a wafer
A system for controlling the relation in position between a photomask and a wafer for use in manufacturing apparatus of a highly integrated circuit such as large scale integration (LSI). The...
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4870288 |
Alignment method
A method of detecting a position of a wafer, including memorizing a pattern of a part of the wafer, comparing a pattern of another part of the wafer at a position which is in a predetermined...
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