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7615767 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid...
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7615766 |
Target supplier
A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier...
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7615749 |
Infrared light emitting device, infrared light detecting device, time-domain pulsed spectrometer apparatus, and infrared light emitting method
There is provided an infrared light emitting device that is capable of polarizing emission light without causing loss of the emission light and having a simple configuration. Included are a...
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7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method
A lithographic apparatus includes a radiation system including a radiation source for the production of a radiation beam, and a contaminant trap arranged in a path of the radiation beam. The...
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7608846 |
Extreme ultra violet light source device
An EUV (extreme ultra violet) light source device in which a degree of vacuum or cleanness in a plasma generation chamber is improved while the construction is simplified. The device includes a...
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7605386 |
Optical device with raster elements, and illumination system with the optical device
The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical...
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7605385 |
Electro-less discharge extreme ultraviolet light source
An electrode-less discharge source of extreme ultraviolet (EUV) radiation ( 10 ) efficiently assembles a hot, dense, uniform, axially stable plasma column ( 5 ) with magnetic pressure and inductive...
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7601977 |
Phase-matched terahertz emitter
Methods and apparatus are disclosed for directing optical radiation to make multiple passes across an extended region of an electro-optic material, where during each pass the electro-optic material...
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7601960 |
Control for UV water disinfection
A UV light source water disinfection system includes a UV light source that is driven or controlled by a ballast. Improved start-up scenarios are provided by use of a separate heating wire around...
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7599470 |
Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination
The invention is directed to an arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency, particularly for application in...
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7598509 |
Laser produced plasma EUV light source
An EUV light source is disclosed that may include a laser source, e.g. CO 2 laser, a plasma chamber, and a beam delivery system for passing a laser beam from the laser source into the plasma...
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7598508 |
Gaseous extreme-ultraviolet spectral purity filters and optical systems comprising same
Spectral-purity filters (SPFS) are disclosed that produce a stream of “SPF gas” through which a beam of light, particularly a beam including extreme ultraviolet (EUV) light, is allowed to pass....
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7598507 |
Adjustable lithography blocking device and method
The present invention provides, in one embodiment, a method ( 100 ) of manufacturing a semiconductor device. A conventionally formed reticle is positioned over a resist located on a substrate ( 110...
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7598506 |
Low-temperature adjustable blackbody apparatus
An adjustable, low-temperature blackbody radiation system includes a blackbody enclosure having an optical port formed therein, and a cold element provided within the blackbody enclosure adjacent...
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7598503 |
Lithographic apparatus and cleaning method therefor
A lithographic apparatus is disclosed. The apparatus includes a source for supplying hydrogen radicals, a guide for use in conjunction with the source, for directing hydrogen radicals to an...
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7598501 |
Sterilization of handles and other gripping surfaces
A self-sterilizing handle or other gripping apparatus. The apparatus and method of the invention have to do with sterilizing a gripping surface with germicidal ultraviolet light. Embodiments of an...
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7592610 |
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby
A top layer of a predetermined metal is provided on a mirror for use in a lithographic apparatus having source to provide radiation of a desired wavelength. The source generates a stream of...
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7592598 |
Illumination system particularly for microlithography
There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength ≦193 nm....
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7589337 |
LPP EUV plasma source material target delivery system
An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source...
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7589336 |
Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors
Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV...
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7586113 |
EUV illumination system
An illumination system is used to illuminate a specified illumination field of an object surface with EUV radiation. The illumination system has an EUV source and a collector to concentrate the EUV...
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7586104 |
Non-heating type fluid sterilizing apparatus
A non-heating type fluid sterilizing apparatus can efficiently sterilize a fluid having high turbidity and a large quantity of solid matter or a fluid such as blood having low transmissivity of...
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7580110 |
Exposure apparatus and exposure method
An exposure apparatus and exposure method that produces plasma from a target material, generates pulsed light, and carries out exposure with the pulsed light. In particular, a light emitting...
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7579609 |
Coupling light of light emitting resonator to waveguide
A waveguide conduit is constructed and adapted to capture the light emitted by the at least one nano-resonant structure. The nano-resonant structure emits light in response to excitation by a beam...
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7576343 |
Method and apparatus for generating laser produced plasma
The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the...
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7566891 |
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV...
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7566890 |
UV light source
An ultraviolet generator powered by a microwave source, such as a magnetron, is disclosed. The generator has an elongated inner element, preferably an electric conductor in the form of a polished...
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7564030 |
Method and system for forming temporary images
The presently described embodiments comprise a system that includes a color changing medium, an erasing device using heat or long wavelength infrared light as the erasing source, a writing device...
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7560716 |
Free electron oscillator
A beam of charged particles (e.g., an electron beam) from a charged particle source can be selectively applied to a pair of electrodes. For example, the charged particles can be electrons that are...
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7560706 |
UV germicide device for cosmetics and cosmetic implements
A cosmetics and cosmetic implement germicidal device is provided, having a main housing and an implement support for receiving cosmetics/implements. The support may be a tray or one or more shelves...
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7557366 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
An apparatus for producing radiation by an electrically operated discharge has a first electrode, a second electrode. and a capacitor bank. The electrodes are configured at a distance from each...
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7554103 |
Increased tool utilization/reduction in MWBC for UV curing chamber
A pump liner is used to direct a laminar flow of purge gas across a workpiece to remove contaminants or species outgassed or otherwise produced by the workpiece during processing. The pump liner...
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7547391 |
Blood irradiation system, associated devices and methods for irradiating blood
Embodiments of the present application are directed to devices, systems and methods for irradiating fluids (e.g., blood) with ultraviolet light, and corresponding related components, systems and...
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7544960 |
Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method
A fabrication method of an optical element having a multilayer film includes the steps of forming a multilayer film on a substrate, measuring a secondary radiation radiated from the multilayer film...
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7541604 |
Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings
The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying...
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7541603 |
Radiation system and lithographic apparatus comprising the same
An optical sensor apparatus for use in an extreme ultraviolet lithographic system is disclosed. The apparatus includes an optical sensor comprising a sensor surface and a removal mechanism...
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7535013 |
Extreme UV radiation exposure tool and extreme UV radiation source device
To effectively eliminate radiation outside the band with a wavelength of 13.5 nm which has adverse effects on exposure without reducing the intensity of the EUV radiation with a wavelength of 13.5...
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7531820 |
Arrangement and method for the generation of extreme ultraviolet radiation
The object of an arrangement and a method for the generation of extreme ultraviolet radiation is to construct the radiation source with an increased lifetime of the electrodes for using various...
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7528397 |
Thermal infrared signage method with application to infrared weapon sight calibration
A method of creating signage visible by infrared cameras and infrared weapon sights is provided. Particular application is made to the calibration of infrared weapon sights. An improved calibration...
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7528396 |
Solid state simulator of missile UV signatures
Apparatus for simulating ultraviolet (UV) signatures of missiles includes a memory, control electronics, drive electronics and at least one solid-state UV-radiation emitter. Waveform data that is...
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7528395 |
Radiation source, lithographic apparatus and device manufacturing method
A radiation source comprises an anode and a cathode that are configured and arranged to create a discharge in a gas or vapor in a space between anode and cathode and to form a plasma pinch so as to...
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7525111 |
High repetition rate laser produced plasma EUV light source
An EUV light source and method include a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of a target ignition site to confine the plasma to the vicinity of the...
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7525106 |
Exposure apparatus, pressure control method for the same, and device manufacturing method
An exposure apparatus exposes a substrate in a vacuum atmosphere through an optical system. The apparatus includes a partition which separates a first space including at least part of the optical...
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7521702 |
Extreme ultraviolet light source and extreme ultraviolet light source target
An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy...
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7518135 |
Reducing fast ions in a plasma radiation source
A radiation source with an anode and a cathode to create a discharge in a discharge space between the anode and the cathode is disclosed. A plasma is formed in the radiation source which generates...
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7518134 |
Plasma radiation source for a lithographic apparatus
A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and...
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7518133 |
Integrated searchlight lighthead
A lighthead for a dual-mode searchlight including a generally concave housing with an attached infrared (IR) light source assembly, an insulating barrier and air gap between the visible and IR...
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7518132 |
Light source apparatus, exposure apparatus and device fabrication method
A light source apparatus for generating a plasma and supplying a light irradiated from the plasma to an optical system, said light source apparatus includes a chamber for accommodating a region...
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7518128 |
Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned
A cleaning arrangement is provided for use in an EUV lithographic apparatus, for example an EUV lithographic apparatus with a Sn source. The cleaning arrangement includes a gas source for a...
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7516700 |
Infra-red emitting decoy flare
An infra-red emitting decoy flare comprising a rupturable container 13 housing combustible flakes 1 and ignition means 20 for igniting the combustible flakes 1 . Each of the combustible...
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