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7705325 |
Sterilization device for a stethoscope and associated apparatus
A sterilization device for a stethoscope is provided, comprising a cover member and an ultraviolet light source. The stethoscope includes a chestpiece member having a face portion adapted to...
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7705333 |
Extreme ultra violet light source apparatus
In an extreme ultra violet light source apparatus that exhausts debris including fast ions and neutral particles by the effect of a magnetic field, neutral particles emitted from plasma are...
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7705332 |
Nanometer-scale lithography using extreme ultraviolet/soft x-ray laser interferometry
Direct patterning of nanometer scale features by interferometric lithography using a 46.9 nm laser is described. Multiple exposures using a Lloyd's mirror interferometer permitted printing of...
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7705334 |
Extreme ultraviolet radiation source device
An extreme ultraviolet radiation source device comprises a vessel; an electric discharge section including a pair of main discharge electrodes; a material supply unit which supplies an extreme...
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7696500 |
Fused test source
A test source that combines infrared energy and visible light to produce a uniform output of energy in the visible and infrared spectra is disclosed. The test source includes an infrared energy...
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7696493 |
Radiation system and lithographic apparatus
The invention relates to a radiation system for generating electromagnetic radiation. The radiation system includes a pair of electrodes constructed and arranged to generate plasma of a first...
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7696492 |
Radiation system and lithographic apparatus
A radiation system for generating a beam of radiation that defines an optical axis is provided. The radiation system includes a plasma produced discharge source for generating EUV radiation. The...
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7692172 |
System and method for germicidal sanitizing of an elevator or other enclosed structure
A system for sanitizing an enclosed structure comprises a first sensor, a second sensor, a third sensor, a germicidal ultraviolet light source, a motor, and a controller. The first sensor detects...
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7692171 |
Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors
Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV...
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7692170 |
Radiation apparatus
Disclosed is a radiation apparatus for technical uses, especially a UV crosslinking apparatus of a printing press, coating machine, or similar. Said radiation apparatus comprises at least one...
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7692169 |
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
A method for filtering particles out of a beam of radiation propagating from a radiation source is provided. The method includes passing the beam of radiation through a filter having a first...
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7692159 |
Self-sterilizing input device
A system and method for sterilizing a surface on an input device is disclosed. A chamber is configured to enclose an input device such as a keyboard and is configured to be switched between an open...
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7688948 |
Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology
A method and an apparatus generate radiation in the wavelength range from about 1 nm to about 30 nm by an electrically operated discharge, which can be used in lithography or in metrology. A...
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7687781 |
External light shielding film and optical filter for display apparatus having the same
Disclosed is an external light shielding film. The external light shielding film comprises a transparent substrate; and an external light shielding pattern formed on a surface of the transparent...
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7687788 |
Debris prevention system, radiation system, and lithographic apparatus
A debris prevention system is constructed and arranged to prevent debris that emanates from a radiation source from propagating with radiation from the radiation source into or within a...
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7683354 |
Water treating reactor for the drinkability thereof
A water treating device includes a cylindrical housing having a longitudinal axis, an inlet and an outlet. Water to be treated enters the inlet, flows through the cylindrical housing and out the...
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7683292 |
Method for cooking a food with infrared radiant heat
An oven using radiant heat at infrared wavelengths optimized for producing rapid and uniform cooking of a wide variety of foods. The infrared oven toasts, bakes, broils, and reheats food at a much...
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7683343 |
Treatment system comprising a dielectric barrier discharge lamp
A treatment system or treatment reactor (1) comprising at least one dielectric barrier discharge lamp (2) with a first electrode (20) and a housing (10) for containing a medium (3) like a fluid...
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7683355 |
Extreme ultra violet light source apparatus
An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light...
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7671346 |
Light emitting apparatus and method for curing inks, coatings and adhesives
A UV curing apparatus and method is provided for enhancing the distribution and application of UV light to UV photo initiators in a UV curable ink, coating or adhesive. The UV curing apparatus and...
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7671349 |
Laser produced plasma EUV light source
A device is disclosed which may comprise a system generating a plasma at a plasma site, the plasma producing EUV radiation and ions exiting the plasma. The device may also include an optic, e.g., a...
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7663121 |
High efficiency UV curing system
An ultraviolet (UV) cure chamber enables curing a dielectric material disposed on a substrate and in situ cleaning thereof. A tandem process chamber provides two separate and adjacent process...
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7663127 |
EUV debris mitigation filter and method for fabricating semiconductor dies using same
According to one exemplary embodiment, an extreme ultraviolet (EUV) source collector module for use in a lithographic tool comprises an EUV debris mitigation filter. The EUV debris mitigation...
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7659529 |
Method and apparatus for vibration reduction in laser system line narrowing unit wavelength selection optical element
A method and apparatus is disclosed that may comprise an ultraviolet light source; an optical element within an optical path of the light source mounted on an optical element mount; a vibration...
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7655925 |
Gas management system for a laser-produced-plasma EUV light source
Devices and corresponding methods of use are described herein which may comprise an enclosing structure defining a closed loop flow path and a system generating a plasma at a plasma site, e.g....
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7652272 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
A light source chamber in an Extreme Ultraviolet (EUV) lithography system may include a secondary plasma to ionize debris particles created by the light source and a foil trap to trap the ionize...
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7652430 |
Broadband plasma light sources with cone-shaped electrode for substrate processing
Broadband radiation may be generated by supplying a gas mixture containing hydrogen and/or deuterium and/or helium and/or neon to an enclosure, generating a plasma inside the enclosure with the gas...
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7652265 |
Air treatment system
An air treatment system includes a housing defining a chamber, and an ultraviolet lamp positioned within the chamber. The housing further defines an air inlet at a first end portion of the housing...
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7649187 |
Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated
The invention is directed to an arrangement for generating extreme ultraviolet (EUV) radiation based on a plasma that is generated by electric discharge. It is the object of the invention to...
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7646004 |
Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating...
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7642522 |
Device for irradiating liquids with UV radiation in a throughflow
The invention relates to a device for irradiating an absorbing liquid, for example waste water to be disinfected, in a throughflow. Said device comprises at least two radiator units having one...
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7642527 |
Multi-attribute light effects for use in curing and other applications involving photoreactions and processing
Systems and methods that provide multi-attribute light effects, including one or more channels for each light effect, preferably both channels being provided in an array of solid state light emitters.
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7642533 |
Extreme ultraviolet light source
The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber....
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7638780 |
UV cure equipment with combined light path
The present invention relates to a curing assembly comprising at least two light sources combined into one light path, wherein the light sources are capable of curing a material exposed to the...
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7630475 |
Gas discharge source, in particular for EUV radiation
A gas discharge source for EUV radiation and/or soft X-ray radiation is arranged in a vacuum chamber and includes at least two electrodes, each with a circular periphery and rotatably mounted for...
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7629593 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
A lithographic apparatus includes a radiation system constructed to provide a beam of radiation from radiation emitted by a radiation source. The radiation system includes a contaminant trap...
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7626188 |
Light source device for producing extreme ultraviolet radiation and method of generating extreme ultraviolet radiation
Electrode ablation is controlled in EUV light source device that gasifies a raw material by irradiation with an energy beam and produces a high-temperature plasma using electrodes a raw material...
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7622727 |
Extreme UV radiation source device
An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an...
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7619233 |
Light source
At least one exemplary embodiment is directed to a light source which includes a plasma generator configured to generate plasma, a mirror configured to reflect light that is produced by the plasma,...
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7619227 |
Method of reducing radiation-induced damage in fused silica and articles having such reduction
A method of repairing radiation-induced damage and reducing accumulated laser-induced wavefront distortion and polarization-induced birefringence in a fused silica article, such as a lens in a DUV...
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7619232 |
Method and device for producing extreme ultraviolet radiation or soft X-ray radiation
A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target...
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7619234 |
Ultraviolet monitoring system
An ultraviolet radiation emission unit includes a housing and an aperture located on the housing. A radiation source includes a light emitting diode configured to emit radiation having a wavelength...
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7615749 |
Infrared light emitting device, infrared light detecting device, time-domain pulsed spectrometer apparatus, and infrared light emitting method
There is provided an infrared light emitting device that is capable of polarizing emission light without causing loss of the emission light and having a simple configuration. Included are a...
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7615766 |
Target supplier
A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier...
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7615767 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid...
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7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method
A lithographic apparatus includes a radiation system including a radiation source for the production of a radiation beam, and a contaminant trap arranged in a path of the radiation beam. The...
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7605385 |
Electro-less discharge extreme ultraviolet light source
An electrode-less discharge source of extreme ultraviolet (EUV) radiation (10) efficiently assembles a hot, dense, uniform, axially stable plasma column (5) with magnetic pressure and inductive...
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7605386 |
Optical device with raster elements, and illumination system with the optical device
The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical...
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7601960 |
Control for UV water disinfection
A UV light source water disinfection system includes a UV light source that is driven or controlled by a ballast. Improved start-up scenarios are provided by use of a separate heating wire around...
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7601977 |
Phase-matched terahertz emitter
Methods and apparatus are disclosed for directing optical radiation to make multiple passes across an extended region of an electro-optic material, where during each pass the electro-optic material...
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