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8198613 Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device  
The EUV light source device eliminates radiation other than EUV radiation from the light which it emits, and supplies only the EUV radiation to an exposure device. A composite layer consisting of a...
8198612 Systems and methods for heating an EUV collector mirror  
As disclosed herein, a device may comprise a substrate made of a material comprising silicon, the substrate having a first side and an opposed second side; an EUV reflective multi-layer coating...
8198611 Laser beam formatting module and method for fabricating semiconductor dies using same  
According to one exemplary embodiment, a laser beam formatting module for use in a lithographic system to fabricate a semiconductor wafer comprises an aperture plate having, for example, a circular...
8198614 Terahertz wave generator and method of generating high-power terahertz waves using the same  
The present invention relates to a terahertz wave generator and a method of generating high-power terahertz waves using the terahertz wave generator. The terahertz wave generator includes a hollow...
8193514 Apparatus and method for curing surface coated materials  
The invention is directed to an apparatus and methods for curing a surface that is coated with a curable resin, such as an ultraviolet light-curable surface coating. The method involves directing...
8193515 Sports ball sterilizer  
A system for sterilizing a sports ball comprises a housing; a door for the housing for opening and closing the housing and for permitting manual location of a ball in the housing; a sterilizing...
8182094 Light source unit and image projection apparatus having the same  
A light source unit and an image projection apparatus are provided. The light source unit includes: a light source part including a light source and a reflective member which reflects light emitted...
8185350 Systems and methods for operational verification of a missile approach warning system  
A coupler that generates and emits a simulated missile signature for assessing the operational capability of a missile approach warning system. The coupler may be directly attached to the system by...
8173986 Laser-heated infrared source  
Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is...
8173984 Extreme ultraviolet light source apparatus  
An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV...
8173975 Method and device for removing particles generated by means of a radiation source during generation of short-wave radiation  
A method for removing contaminant particles, such as atoms, molecules, clusters, ions, and the like, produced by a radiation source during generation of short-wave radiation having a wavelength of...
8173985 Beam transport system for extreme ultraviolet light source  
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target...
8164077 Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element  
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating...
8164076 Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light  
An extreme ultraviolet light source apparatus, which is to generate an extreme ultraviolet light by irradiating a target with a main pulse laser light after irradiating the target with a prepulse...
8158961 Ophthalmic lens case equipped with an ultraviolet light source  
A container (101) for contact lenses is provided which comprises a chamber (105) adapted to store an ophthalmic lens in a fluid medium, a window for viewing a lens disposed in the chamber, and a UV...
8158960 Laser produced plasma EUV light source  
A device is disclosed herein which may include a plasma generating system comprising a source of target material droplets and a laser producing a beam irradiating the droplets at an irradiation...
8158956 Photoactivatable paint curing device and method  
A device and method for curing photoactivatable paint coatings. An exemplary device may include a light chamber housing supported by a frame and undercarriage, the wall portions of the light...
8158959 Extreme ultraviolet light source apparatus  
An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a...
8153999 Terahertz wave generating device and apparatus using the same  
Provided is a terahertz wave optical device that can be used as a terahertz wave generating device including: an optical switch portion for generating a carrier abruptly by irradiation with...
8153998 Temperature radiator  
A temperature radiator, which comprises an emission surface emitting a thermal radiation, is provided with a radiation converter to which a laser beam is irradiated. The radiation converter...
8154000 Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources  
The invention is directed to an arrangement for generating EUV radiation based on a hot plasma using liquid emitter material. The object of the invention is to find a novel possibility for...
8148699 Fluid treatment system  
The present invention relates to a fluid treatment system comprising: an inlet; an outlet; and a fluid treatment zone disposed between the inlet and the outlet. The fluid treatment zone has...
8143606 Extreme ultra violet light source device  
An extreme ultra violet light source device of a laser produced plasma type, in which charged particles such as ions emitted from plasma can be efficiently ejected. The extreme ultra violet light...
8142052 Medical light solidifying device  
A medical light solidifying device includes a housing box, a rotary work table, a lighting source reflection body, and an LED lighting source set. The rotary work table is rotatably located in the...
8138487 System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber  
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to...
8134132 Exposure device having an array of light emitting diodes  
A device and method for exposing light sensitive substrates to a concentrated light source. The device is suitable for curing substances such as photosensitive sensitive inks, adhesives, and...
8134136 Ex-situ removal of deposition on an optical element  
A collector assembly with a radiation collector, a cover plate and a support member connecting the radiation collector to the cover plate are provided. The cover plate is designed to cover an...
8129700 Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light source  
Solid tin (Sn) is used as a target, a CO2 laser is used as an excitation source for the target, and after the size of debris emitted from plasma is decreased to a nanometer or smaller size by...
8129702 Radiation system with contamination barrier  
A radiation system includes a contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris coming from the radiation source. The contamination...
8125333 Methods, systems and apparatus for monochromatic UV light sterilization  
The present disclosure provides for methods, systems and apparatus for monochromatic UV light sterilization of container systems and/or container-packaged products. More particularly, the present...
8115900 Lithographic apparatus and device manufacturing method  
A lithographic apparatus is arranged to project a pattern from a patterning device onto a substrate is disclosed. The lithographic apparatus includes an illumination system and an outlet connected...
8101931 RF screen assembly for microwave powered UV lamps  
An RF screen for microwave powered UV lamp systems is provided. The RF screen is formed of a single sheet of conductive material in which a mesh pattern has been formed. The screen includes a...
8101130 Gas ionization source  
A gas ionizer includes a photocatalyst activated with an electric field to emit electrons. The photocatalyst is also illuminated with an ultraviolet light source. The ionized gas is passed through...
8101930 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device  
The present invention relates to a method of increasing the operation lifetime of an optical collector unit (33)) arranged in an irradiation device. The irradiation device at least comprises a...
8097867 Irradiation device  
Radiation apparatus for technical use, with a large number of stretched-out radiation sources emitting in or between the UV and IR ranges and a large number of main reflector segments that are bent...
8097092 Method of cleaning and after treatment of optical surfaces in an irradiation unit  
The present invention relates to a method of cleaning and after treatment of optical surfaces in an irradiation unit, said irradiation unit comprising a radiation source (1, 31) emitting...
8097861 System and method for germicidal sanitizing of an elevator or other enclosed structure  
A system for sanitizing an enclosed structure comprises a first sensor, a second sensor, a third sensor, a germicidal ultraviolet light source, a motor, and a controller. The first sensor detects...
8093571 Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device  
An EUV light source of the present invention is capable of using a saturable absorber stably and continuously in a high heat load state. A saturable absorber (SA) device is disposed on a laser beam...
8089057 Radiation converter and irradiation arrangement containing said converter  
Light therapy in the visible spectral region, for which radiation sources emitting UV radiation are provided, uses fluorescent films that age during operation such that the intensity of the light...
8084752 Ultraviolet treatment device  
A keyboard and touchpad or mouse UV treatment system with optical sensor and inclined slide is described. A proximity sensor, microcontroller firmware, and motorized mechanism allow activation of...
8084757 Contamination prevention in extreme ultraviolet lithography  
Embodiments of the present invention provide methods and apparatus for removing debris particles using a stream of charged species. One embodiment of the present invention provides an apparatus for...
8080212 Method and apparatus for high speed activation of oxygen scavenging compositions  
The invention is a method, triggering unit, and system for activating an oxygen scavenging composition at high speeds. The triggering unit includes a plurality of UV lamps that can operate at...
8080812 Multi-attribute light effects for use in curing and other applications involving photoreactions and processing  
Systems and methods that provide multi-attribute light effects, including one or more channels for each light effect, preferably both channels being provided in an array of solid state light emitters.
8076659 Foil trap and extreme ultraviolet light source device using the foil trap  
An extreme ultraviolet (EUV) light source device and foil trap, the device including a vessel; an EUV radiating species supply means that feeds an extreme ultraviolet radiating species into the...
8076655 Method of cleaning optical surfaces of an irradiation unit in a two-step process  
The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step...
8071965 Projection optical system and projection-type image display apparatus  
There is a need for providing a projection optical system that is appropriate for maintaining high resolution with low distortion, miniaturizing a reflector, decreasing the number of reflectors,...
8071963 Debris mitigation system and lithographic apparatus  
A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source. The system includes a contamination barrier constructed and arranged to rotate about...
8067755 Production device and production method for an optical device component having a grating structure  
A production device and a production method for a grating-type optical component enabling formation of a variety types of FBGs using a single phase mask and an optical component made by the...
8067756 Extreme ultraviolet light source apparatus  
In an extreme ultraviolet light source apparatus generating an extreme ultraviolet light from a plasma generated by irradiating a target, which is a droplet D of molten Sn, with a laser light, and...
8067749 Cleanable helical modules  
The invention relates to cleanable spiral modules and a method for production thereof.