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8344339 Source-collector module with GIC mirror and tin rod EUV LPP target system  
A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an...
8338801 Lighting system for preventing plant disease damage  
A lighting system for preventing a plant disease damage is provided with an ultraviolet light source which emits ultraviolet ray including UV-B in a wavelength region of 255 to 340 nm, a visible...
8338809 Ultraviolet reflector with coolant gas holes and method  
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a...
8338797 Debris mitigation device with rotating foil trap and drive assembly  
The present invention relates to a debris mitigation device for use with a radiation source (2) generating optical radiation, in particular extreme ultraviolet radiation (EUV) or soft x-rays, and...
8338808 Ultraviolet radiation lamp and source module and treatment system containing same  
The present invention relates to an ultraviolet radiation lamp. The lamp comprises: (i) a substantially sealed cavity comprising a mercury-containing material; and (ii) a heating unit disposed...
8330131 Source-collector module with GIC mirror and LPP EUV light source  
A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector...
8330121 Dynamic display and control of UV source for sanitization in mobile devices  
A mobile sanitizer movable across a surface to sanitize the surface. The sanitizer may comprise an ultraviolet light source that illuminates the surface and a microprocessor control. The control...
8324595 Outdoor water treatment apparatus to kill bacteria with ultraviolet light  
Bacteria in water 9 exposed outdoors are effectively killed with ultraviolet (UV) light by suppressing post-treatment increase in the bacteria population due to photoreactivation. The apparatus...
8324600 Apparatus and method for measuring and controlling target trajectory in chamber apparatus  
An apparatus for measuring and controlling a target trajectory within a chamber apparatus for generating extreme ultraviolet light from plasma generated by irradiating a droplet target supplied...
8324601 Extreme ultra violet light source apparatus  
An extreme ultra violet light source apparatus by which EUV light can be efficiently obtained uses a driver laser which can realize a desired pulse width with substantially homogeneous intensity....
8319200 Radiation source, lithographic apparatus and device manufacturing method  
A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a laser constructed and arranged to generate a beam of radiation directed to a plasma...
8319201 Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave  
A plasma generating system is disclosed having a source of target material droplets, e.g. tin droplets, and a laser, e.g. a pulsed CO2 laser, producing a beam irradiating the droplets at an...
8319199 Irradiation sources and methods  
Irradiating assemblies can have a housing with a reflector extending linearly parallel to a lamp. Radiation can be emitted from one opening, for example in a bottom portion of the housing, as well...
8312641 UV LED curing appartus with improved illumination and timer control  
The present invention is related to an UV LED curing apparatus, and more particularly, to a portable UV LED curing apparatus with improved illumination and timer control to solidify a UV hardening...
8314398 EUV light source components and methods for producing, using and refurbishing same  
A method is disclosed for in-situ monitoring of an EUV mirror to determine a degree of optical degradation. The method may comprise the steps/acts of irradiating at least a portion of the mirror...
8314408 UVLED apparatus for curing glass-fiber coatings  
A UVLED apparatus and method provide efficient curing of an optical-fiber coating onto a drawn glass fiber. The apparatus and method employ one or more UVLEDs that emit electromagnetic radiation...
8309943 Laser-driven light source  
An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized...
8308313 Jet driven rotating ultraviolet lamps for curing floor coatings  
A machine for applying ultraviolet light to curable coatings on floors and other wide area surfaces. A housing encloses rotating arms carrying UV lamps spinning about a central axis. Rotation is...
8309944 Grazing incidence neutron optics  
Neutron optics based on the two-reflection geometries are capable of controlling beams of long wavelength neutrons with low angular divergence. The preferred mirror fabrication technique is a...
8304752 EUV light producing system and method utilizing an alignment laser  
A method for producing extreme ultraviolet light includes producing a target material at a target location; supplying pump energy to a gain medium of at least one optical amplifier that has an...
8299445 Lighting apparatus for controlling plant disease  
Disclosed is a lighting device for use in the control of a plant disease, which has a light source capable of emitting light containing ultraviolet ray. The light source can emit both of UV-B...
8296493 Combination electronic device dock and dissinfector  
Disclosed is a disinfecting docking station for at least one portable electronic device, such as a medical technician's tablet computer, that has at least one recharging connector. An enclosure is...
8294128 Apparatus with plasma radiation source and method of forming a beam of radiation  
An apparatus for forming a beam of electromagnetic radiation. The apparatus includes a plasma radiation source, a foil trap provided with a plurality of thin foils that extend substantially...
8294129 Extreme ultraviolet light source apparatus  
An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV...
8288735 Photoemission induced electron ionization  
A monitor that can detect at least one molecule. The monitor includes a housing with a passage that can receive a sample, and a photocathode that is located within the housing. The monitor also...
8288743 Apparatus for and method of withdrawing ions in EUV light production apparatus  
An ion withdrawal apparatus that withdraws ions emitted from a plasma in an EUV light production apparatus in which a target at an EUV light production point is irradiated with laser light to be...
8289694 Disaster-proof storage unit having transmission capabilities  
A storage device includes a memory and a wireless transmitter, both contained in a disaster-proof enclosure. The memory is configured to receive and store data, and the wireless transmitter is...
8283644 Measuring in-situ UV intensity in UV cure tool  
Provided are improved apparatus and methods for radiative treatment. In some embodiments, a semiconductor processing apparatus for radiative cure includes a process chamber and a radiation assembly...
8283643 Systems and methods for drive laser beam delivery in an EUV light source  
An EUV light source device is described herein which may comprise a laser beam travelling along a beam path, at least a portion of the beam path aligned along a linear axis; a material for...
8283639 Self-sterilizing input device  
A system and method for sterilizing a surface on an input device is disclosed. A chamber is configured to enclose an input device such as a keyboard and is configured to be switched between an open...
8274064 System and apparatus for dermatological treatment  
Exemplary embodiments of system and apparatus can be provided for treating various dermatological and biological conditions using electromagnetic energy in the form of optical radiation. For...
8269179 Illumination system and filter system  
A lithographic apparatus includes an illumination system configured to condition a radiation beam, a projection system configured to project the radiation beam onto a substrate, and a filter system...
8269190 Method and system for achieving optimal UV water disinfection  
Methods and systems are provided for enhancing the ultraviolet output of a water disinfection apparatus by: (i) maintaining the source of the UV radiation at a stable operating temperature and,...
8269200 Terahertz radiation device and method of generating terahertz radiation  
A method and device for generating terahertz radiation comprising a substrate; a plurality of segments of polar crystal material formed on the substrate, the segments having an internal electric...
8269199 Laser heated discharge plasma EUV source  
A self-magnetically confined lithium plasma which also may have an applied axial magnetic field is irradiated at sub-critical density by a carbon dioxide laser to generate extreme ultraviolet...
8263950 Radiation source  
A radiation source may include a radiation emitter for emitting radiation, a collector for collecting radiation emitted by the radiation emitter, and an outlet configured, in use, to introduce a...
8263953 Systems and methods for target material delivery protection in a laser produced plasma EUV light source  
A device is disclosed herein which may comprise a chamber, a source providing a stream of target material droplets delivering target material to an irradiation region in the chamber along a path...
8258994 IR jamming system for defense against missiles with IR-sensitive homing heads  
In an IR jamming system for defense against missiles with IR-sensitive homing heads, one or more jamming beams are generated, whose diameter is less than that of the optical aperture of the...
8256441 Method for cleaning optical element of EUV light source device and optical element cleaning device  
A method for cleaning an optical element of an extreme ultraviolet light source device for removing, from the optical element in a chamber, scattered matter generated together with extreme...
8258485 Source-collector module with GIC mirror and xenon liquid EUV LPP target system  
A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an...
8253123 Method and device for generating EUV radiation or soft X-rays with enhanced efficiency  
The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is...
8253122 Infrared physiotherapeutic apparatus  
An infrared physiotherapeutic apparatus is provided. The infrared physiotherapeutic apparatus includes a supporting element, an infrared radiating element, and a first and second electrode. The...
8247771 Device for detection and/or emission of electromagnetic radiation and method for fabricating such a device  
The device for detection and/or emission of radiation has an encapsulation micropackage in a vacuum or under reduced pressure that comprises a cap and a substrate delineating a sealed housing. The...
8242474 Extreme ultraviolet light generation apparatus  
An extreme ultraviolet light generation apparatus used in combination with a laser system, the apparatus may include: a chamber provided with at least one inlet port for introducing a laser beam...
8242473 Radiation source  
A radiation source includes a chamber, a supply constructed and arranged to supply a substance to the chamber at a location that allows the substance to pass through an interaction point within the...
8242475 UV liquid gel solidifying device for nail art  
A UV liquid gel solidifying device includes a support member, a UV LED module, a top cover, and a base. The UV LED module is installed on the support member and emits light into a first chamber of...
8242695 Laser driven light source  
An laser driven light source comprises a bulb that encloses a discharge medium, a laser beam unit for emitting a laser beam, wherein the laser beam is focused in the bulb for generating a...
8242471 Radiation source and lithographic apparatus including a contamination trap  
A radiation source includes a radiation emitter configured to emit radiation, a collector configured to collect the radiation, and a contamination trap configured to trap contamination emitted by...
8242472 Extreme ultraviolet light source device and control method for extreme ultraviolet light source device  
[Problem] An extreme ultraviolet light source device in accordance with the present invention corrects an optical performance of a laser beam in an appropriate manner.[Means for Resolution]A guide...
8242460 Ultraviolet treatment apparatus  
A process module for treating a dielectric film and, in particular, a process module for exposing, for example, a low dielectric constant (low-k) dielectric film to ultraviolet (UV) radiation is...