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8455832 Systems and methods for emitting radiant energy  
Field balancing may be performed with an irradiation system including a plurality of adjustable radiant-energy emitters. The irradiation system powers the radiant-energy emitters from a power...
8455849 Method and apparatus for modulating wafer treatment profile in UV chamber  
A method and apparatus for providing a uniform UV radiation irradiance profile across a surface of a substrate is provided. In one embodiment, a substrate processing tool includes a processing...
8445877 Extreme ultraviolet light source apparatus and target supply device  
A nozzle protection device capable of protecting a target nozzle from heat of plasma without disturbing formation of a stable flow of a target material in an LPP type EUV light source apparatus....
8445876 Extreme ultraviolet light source apparatus  
An extreme ultraviolet (EUV) light source apparatus in which a location or posture shift of an EUV collector mirror can be detected. The apparatus includes: a chamber; a target supply mechanism for...
8444918 Water purifier  
The disclosed water purifier comprises an outer wall, a RAW water inflow section that allows inflow of RAW water from outside said outer wall, a purifying section, an ultraviolet ray sterilizing...
8445875 Optical crystal and terahertz wave generation device and method  
An optical crystal includes a first non-linear optical crystal that generates terahertz waves corresponding to a difference frequency component in incident light with two different wavelengths by a...
8440988 Pulsed discharge extreme ultraviolet source with magnetic shield  
A magnetically shielded, efficient plasma generation configuration for a pulsed discharge extreme ultraviolet (EUV) light source comprises two opposed convex electrodes mounted with axes parallel...
8436328 Extreme ultraviolet light source apparatus  
In an EUV light source apparatus, a collector mirror is protected from debris damaging a mirror coating. The EUV light source apparatus includes: a chamber in which extreme ultraviolet light is...
8435702 Manufacturing method of semiconductor device and manufacturing method of mask  
Provided is a technique capable of improving the dimensional accuracy of a transfer pattern in a lithography technique in which EUV light is used and the EUV light is incident obliquely on a mask...
8431916 Radiation source and lithographic apparatus  
A source configured to generate EUV radiation includes a fuel droplet generator configured to deliver a droplet of fuel to an interaction point, optics configured to deliver fuel vaporizing and...
8426834 Method and apparatus for the generation of EUV radiation from a gas discharge plasma  
The invention relates to a method and an apparatus for generating EUV radiation from a gas discharge plasma. The object of the invention, to generate EUV radiation from a gas discharge plasma by...
8421043 Solid state radiation source array  
A solid state radiation source array is provided, the array comprising at least one solid state ultraviolet radiation source and at least one solid state infrared radiation source.
8414779 Method and apparatus for liquid disinfection using light transparent conduit  
A UV disinfection system and methods of UV disinfection are provided. The disinfection system may include a UV transparent conduit to carry a flowing liquid to be disinfected, the conduit having an...
8410460 Pattern defect inspection method and its apparatus  
The pattern defect inspection apparatus and its method of the present invention comprises: a recipe setting unit for setting an inspection recipe and/or a review recipe; an illumination optical...
8405051 Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method  
A method for removal of a deposition on an uncapped multilayer mirror of an apparatus. The method includes providing a gas that includes one or more of H2, D2, and DH, and one or more additional...
8405055 Source module, radiation source and lithographic apparatus  
A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a fuel supply configured to supply a fuel to a plasma formation site; a laser configured to...
8399867 Extreme ultraviolet light source apparatus  
An EUV light source apparatus in which contamination or damage of optical elements and other component elements by debris can be suppressed to realize longer lives of them. The EUV light source...
8399869 UV luminaire having a plurality of UV lamps, particularly for technical product processing  
In various embodiments, a UV luminaire may include a housing which is designed for accommodating a plurality of UV lamps and a protective atmosphere, wherein the housing is subdivided in such a...
8399868 Tools, methods and devices for mitigating extreme ultraviolet optics contamination  
Devices, tools, and methods for mitigating contamination of an optics surface used in extreme ultraviolet (EUV) applications disclosed. The method may include providing an optically reflective...
8399870 Extreme ultraviolet light source device and control method for extreme ultraviolet light source device  
A guide laser beam that has an optical axis and a beam diameter substantially equivalent to those of a driver pulsed laser beam is introduced into an amplification system that amplifies a laser...
8395134 Radiation source cartridge and module containing same  
There is disclosed an elongate radiation source cartridge. The cartridge comprises: (i) an elongate radiation source assembly having a proximal portion and distal portion, the distal portion of the...
8395135 Device and a method for curing patterns of a substance at a surface of a foil  
A device is described for curing patterns of a substance at a surface of a foil. The device a carrier facility for carrying the foil within an object plane, a photon radiation source arranged at a...
8395133 Apparatus and method of adjusting a laser light source for an EUV source device  
An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies...
8390922 Phase matching for difference frequency generation and nonlinear optical conversion for planar waveguides via vertical coupling  
A high index contrast waveguide based source for radiation. In some embodiments, the radiation is in the 0.5-14 Terahertz regime. Waveguides are provided that permit the generation of radiation at...
8388850 System and method of water treatment  
A mobile water treatment system is disposed on a trailer of a truck. There is an intake filter, an intake hose, a pump or multiple pumps for water intake and sending water throughout the system, a...
8388167 LED lamps and LED driver circuits for the same  
LED lamp has LEDs aimed rearwards with either a concave mirror to the rear of each LED, or one concave mirror to the rear of two or more LEDs, collecting the light from the LEDs to form a forward...
8389956 Laryngoscope disinfector  
A laryngoscope disinfector characterized by a drawer that provides positioning for laryngoscopes in the drawer so that all surfaces of the laryngoscopes are exposed to ultraviolet radiation. The...
8378315 Windshield repair device and method for repairing windshield  
A windshield repair device includes a bridge, an injector attached to the bridge and at least one UV, e.g., light emitting diode (LED), light source attached to the bridge or integrated into bridge...
8378322 Micro-channel-cooled high heat load light emitting device  
Micro-channel-cooled UV curing systems and components thereof are provided. According to one embodiment, a lamp head module includes an optical macro-reflector, an array of LEDs and a micro-channel...
8378323 Sterilizing toybox apparatus  
The sterilizing toybox apparatus addresses illness risk, especially with children, by providing UV light sterilization within. UV lighting is offered both above and beyond toys within the...
8368305 Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation  
The present invention relates to an electrode device (1, 2) for gas discharge sources and to a gas discharge source having one or two of said electrode devices (1, 2). With the proposed design of...
8368041 System and method for compensating for thermal effects in an EUV light source  
A method and apparatus for compensating for thermal effects on the focal spot of a lens used to focus a laser beam on a target material at an irradiation site in a laser produced plasma (LPP)...
8368039 EUV light source glint reduction system  
An apparatus includes a light source having a gain medium for producing an amplified light beam of a source wavelength along a beam path to irradiate a target material in a chamber and to generate...
8368040 Radiation system and lithographic apparatus  
A radiation system includes a target material supply configured to supply droplets of target material along a trajectory, and a laser system that includes an amplifier and optics. The optics are...
8362451 Hand carry type portable curing apparatus using long-arc UV lamp  
A hand carry type portable curing apparatus using a long-arc UltraViolet (UV) lamp for concentrating the external air on the long-arc UV lamp and enhancing cooling efficiency by disposing a fan at...
8357914 UV disinfecting apparatus  
A disinfecting apparatus comprises a housing, an ultraviolet (UV) light, and a dispensing mechanism. The housing is designed to receive contaminated pens and dispense disinfected pens. The UV light...
8358069 Lighting method of light source apparatus  
A method of lighting a light source apparatus that has a discharge lamp, a reflection mirror for reflecting light emitted from the discharge lamp, a light emission optical system for irradiating a...
8354657 Extreme ultra violet light source apparatus  
In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The apparatus...
8350238 Device patterning using irradiation  
In one embodiment, a method for creating a pattern in a layer of an organic electronic device that includes selectively irradiating a portion of the layer is provided, and devices and...
8350239 Pen specific for erasable media usage  
Exemplary embodiments provide materials and methods for a pen that can include a writing end for writing an image on an erasable medium and an erasing end for locally erasing an image from the...
8350240 Device and method for generating and detecting coherent electromagnetic radiation in the THz frequency range  
The present invention concerns a device for generating and detecting coherent electromagnetic radiation (8) in the THz frequency range, comprising an optically parametric oscillator (2) for...
8350228 Germicidal fixture and methods  
The present disclosure relates to adapting a commonly used lighting fixture that is generally specified as the primary lighting source for illuminating a particular area as the apparatus for...
8347819 Pet litter box employing ultraviolet irradiation  
A litter box for pets is provided having a container defined by a bottom and side walls and a germicidal ultraviolet light lamp positioned parallel to the bottom of the container and around the...
8343429 Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same  
In a target supply unit of an extreme ultraviolet light source apparatus for generating extreme ultraviolet light by applying a laser beam to a target material to turn the target material into...
8344339 Source-collector module with GIC mirror and tin rod EUV LPP target system  
A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an...
8338801 Lighting system for preventing plant disease damage  
A lighting system for preventing a plant disease damage is provided with an ultraviolet light source which emits ultraviolet ray including UV-B in a wavelength region of 255 to 340 nm, a visible...
8338809 Ultraviolet reflector with coolant gas holes and method  
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a...
8338797 Debris mitigation device with rotating foil trap and drive assembly  
The present invention relates to a debris mitigation device for use with a radiation source (2) generating optical radiation, in particular extreme ultraviolet radiation (EUV) or soft x-rays, and...
8338808 Ultraviolet radiation lamp and source module and treatment system containing same  
The present invention relates to an ultraviolet radiation lamp. The lamp comprises: (i) a substantially sealed cavity comprising a mercury-containing material; and (ii) a heating unit disposed...
8330131 Source-collector module with GIC mirror and LPP EUV light source  
A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector...