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7265369 |
Method and system for detecting chemical substance
A chemical detecting apparatus includes a substrate 10 for chemicals in gas-to-be-monitored to be adsorbed to, a substrate adsorption rate improving means 12 which enhances the adsorption of...
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7265365 |
Apparatus for curing a coating on a three-dimensional object
An apparatus is provided for curing a curable coating on a three-dimensional object having at least a top surface and a side surface, with the object being advanced along a generally horizontal...
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7262423 |
Radiation system and lithographic apparatus
A radiation system for generating a beam of radiation is disclosed. The radiation system includes a pulsed EUV source for generating EUV radiation, and a spectral filter mounted in front of the EUV...
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7259382 |
Tanning lamp having grooved periphery
The present disclosure provides a device and method for exposing a person to ultraviolet radiation in tanning wavelengths which is emitted from a discharge lamp having a plurality of grooves formed...
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7256407 |
Lithographic projection apparatus and reflector assembly for use therein
A lithographic projection apparatus includes reflector assembly, a foil trap, and a housing that is constructed and arranged to contain the reflector assembly and the foil trap. The reflector...
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7256408 |
Gas supply unit, gas supply method and exposure system
A gas supply unit supplies gas to a certain space via a channel, and includes a first switch mechanism located in the channel for selectively changing the channel of the gas.
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7253557 |
Light source provided with a housing enclosing voltage regulator means and method of manufacturing thereof
A light source for testing sites using a fluorescent dye is described. The light source can include a low voltage lamp or a low heat generating lamp.
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7250621 |
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
The invention is directed to a method and an arrangement for the plasma-based generation of intensive short-wavelength radiation, particularly EUV radiation. The object of the invention, to find a...
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7251012 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
A lithographic apparatus is disclosed. The apparatus includes an illumination system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning...
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7250620 |
EUV lithography filter
Filters for EUV lithography, methods of manufacture thereof, and methods of filtering in an EUV lithography system are disclosed. The filter comprises a nanotube material layer sandwiched by two...
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7250611 |
LED curing apparatus and method
A radiation curing apparatus comprises a plurality of solid state radiation sources to generate radiation that cures a first material. The solid state radiation sources can be disposed in an array...
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7250610 |
UV light disinfection device
A UV disinfection device having a contact chamber, the chamber being a container with an interior, a top portion and a bottom portion. A partition is positioned in the interior to form a first and...
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7250619 |
Powered sterile solution device
The disclosure below relates to apparatus and methods for producing medicament using sub-optimal water sources. One embodiment of the disclosure is directed to an apparatus comprising a preliminary...
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7247870 |
Systems for protecting internal components of an EUV light source from plasma-generated debris
Systems and methods are disclosed for protecting an EUV light source plasma production chamber optical element surface from debris generated by plasma formation. In one aspect of an embodiment of...
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7238957 |
Methods and apparatus for presenting images
An imaging system for presenting an image to a viewer comprises a radiation source configured to generate radiation having different spectral characteristics, and multiple independently operable...
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7239686 |
Method and arrangement for producing radiation
A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under...
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7235801 |
Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby
A grazing incidence mirror includes a mirror substrate and a mirror surface layer, the mirror surface layer including a first layer and a second layer, the first layer being positioned between the...
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7235792 |
Color-tuned volumetric light using high quantum yield nanocrystals
A light source of coaxially stacked volumetric light cells that can be used either in a lamp or a display. Each light cell is composed of high quantum yield nanocrystals in a silica aerogel matrix...
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7233013 |
Radiation source for the generation of short-wavelength radiation
In a radiation source for the generation of short-wavelength radiation, it is the object of the invention to effectively increase the protection of the collimator optics by a buffer gas without...
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7230258 |
Plasma-based debris mitigation for extreme ultraviolet (EUV) light source
A light source chamber in an Extreme Ultraviolet (EUV) lithography system may include a secondary plasma to ionize debris particles created by the light source and a foil trap to trap the ionize...
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RE39689 |
Apparatus for securing CCD board at a fixed position within a range of motion
Apparatus for fixing the position of an optical sensor within a range of motion in relation to an optical apparatus. The fixing apparatus provides permits a range of motion through five degrees of...
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7227162 |
Method and apparatus for providing tuning of spectral output for countermeasure devices
A countermeasure device includes an emitter having a surface. A band gap material is integral with the surface of the emitter. A series of apertures are formed in the band gap material. A heat...
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7217941 |
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an...
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7217936 |
System and method for product sterilization using UV light source
System and method for sterilization, using UV light source(s), of products, e.g., polymer-based products, whether positioned within or external to their packaging, using monochromatic, continuous...
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7217939 |
Capillary tubing
A method and an arrangement for generating x-ray or EUV radiation are disclosed. Target material is supplied from a container for target material to a jet-forming orifice in an interaction chamber...
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7217938 |
Filter device with a UVC lamp and a cleaning arrangement for said UVC lamp
A filter device with a UVC lamp for filtering fluids, with a lamp housing, which is installed in a flow of the fluid to be filtered and has a principal axis, is characterized by the fact that at...
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7214950 |
Transition radiation apparatus
In one embodiment of the present invention, thermal deformation or bending of membranes in a transition radiation emitting structure can be reduced by providing flex regions in the membranes or the...
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7211813 |
High-intensity UV-C gun and methods of use
A portable high-intensity ultraviolet (UV-C) light gun is provided, the gun comprised of a high-intensity UV-C emitting light bulb mounted into a gun assembly. The gun assembly includes means for...
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7208747 |
Adjustment of distance between source plasma and mirrors to change partial coherence
According to an embodiment of the invention, an adjustable EUV light source may be used for photolithography. The EUV light source, such as an electrode, is mounted in an adjustable housing. The...
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7202490 |
LED modifying apparatus and method
A radiation modifying apparatus comprises a plurality of solid state radiation sources to generate radiation that modifies a first material such as by curing or creating alignment through...
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7202484 |
Infant stimulation and environment sterilizing device
A cognitive stimulating sterilizing device for providing visual, tactile and, or audible stimulation for infants while selectively sterilize select items and the surrounding ambient, including a...
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7199384 |
Inductively-driven light source for lithography
An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of...
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7196478 |
Circuit arrangement
A driver for driving a gas discharge lamp includes an inductive ballast implemented as auto-transformer having a central tap, connected between one output terminal and a first input terminal, and a...
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7196343 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
An optical element including an anti-reflection (AR) coating is configured to reflect Extreme-Ultra-Violet (EUV) radiation only.
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7196342 |
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which...
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7196841 |
Lighting system, particularly for use in extreme ultraviolet (EUV) lithography
A lighting system, particularly for use in extreme ultraviolet (EUV) lithography, comprising a projection lens for producing semiconductor elements for wavelengths ≦193 nm is provided with a...
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7193229 |
Lithographic apparatus, illumination system and method for mitigating debris particles
A lithographic apparatus includes a source for generating radiation, an illumination system for conditioning the radiation, a patterning device for patterning the conditioned radiation, and a...
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7183717 |
Inductively-driven light source for microscopy
An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of...
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7180082 |
Method for plasma formation for extreme ultraviolet lithography-theta pinch
A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm....
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7180081 |
Discharge produced plasma EUV light source
An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a...
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7180083 |
EUV light source collector erosion mitigation
An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface...
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7175712 |
Light emitting apparatus and method for curing inks, coatings and adhesives
A UV curing apparatus and method is provided for enhancing the distribution and application of UV light to UV photo initiators in a UV curable ink, coating or adhesive. The UV curing apparatus and...
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7173267 |
Extreme ultra violet light source device
An LPP EUV light source device for forming a uniform droplet target regardless of a frequency of a drive signal applied to a vibrator. The LPP EUV light source device includes: a chamber in which...
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7173266 |
Ultraviolet irradiating device
In an ultraviolet irradiating device in which a controller section and plural head portions used to cure ultraviolet curable resin used in the adhesion of a part are connected by an electric cable,...
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7164144 |
EUV light source
A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprises a target delivery system adapted to deliver moving plasma initiation targets and an EUV...
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7157724 |
Detection lamp
A light source for testing sites using a fluorescent dye is described. The light source can include a low voltage lamp or a low heat generating lamp. An emission from the fluorescent dye can be...
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7154109 |
Method and apparatus for producing electromagnetic radiation
According to one aspect of the invention, a method and apparatus for producing electromagnetic radiation is provided. The apparatus may include a chamber wall enclosing a plasma emission chamber to...
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7150806 |
Spiral-shaped lamp for UV curing of coatings and bonding for a digital versatile disk (DVD) or compact disk (CD)
A spiral-shaped lamp ( 10 ) is used for disk manufacturing processes, such as curing of coating or bonding, to provide uniform intensity of UV energy to the circular disk without requiring relative...
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7148498 |
Externally controlled electromagnetic energy spot curing system
The present invention provides an electromagnetic energy spot curing system which utilizes an external signal from a processor to control the operation of the curing unit. The processor is external...
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7149033 |
UV visual light beam combiner
An improved light beam combiner is disclosed that creates a more uniform light source across the UV, Visual, and NIR range. It is an optical mechanical device made up of a standard high low...
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