|
Match
|
Document |
Document Title |
|
|
7629594 |
Lithographic apparatus, and device manufacturing method
A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second...
|
|
|
7629598 |
Particle beam irradiation method using depth and lateral direction irradiation field spread and particle beam irradiation apparatus used for the same
In a particle beam irradiation method and a particle beam irradiation apparatus in which depth direction irradiation field spread and lateral direction irradiation field spread are performed, an...
|
|
|
7629593 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
A lithographic apparatus includes a radiation system constructed to provide a beam of radiation from radiation emitted by a radiation source. The radiation system includes a contaminant trap...
|
|
|
7626186 |
Mobile electron beam radiation sterilizing apparatus
A mobile electron beam radiation sterilizing apparatus includes a movable chassis vehicle; a cabinet body installed on the chassis vehicle; an electron accelerator, which generates electron beam...
|
|
|
7626179 |
Electron beam induced resonance
We describe an ultra-small structure that produces visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate...
|
|
|
7622726 |
Dual neutron-gamma ray source
A dual neutron-gamma ray source comprises a compact neutron generator, a shield, a collimator, and an internal gamma target. The shield surrounds the compact neutron generator. The collimator...
|
|
|
7622727 |
Extreme UV radiation source device
An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an...
|
|
|
7622709 |
Variable-ratio neutron-gamma ray source
A variable-ratio neutron-gamma ray source comprises a neutron generator, a shield, a collimator, and an external gamma target. The neutron generator generates neutrons and the shield reduces...
|
|
|
7619231 |
Laser-beat-wave photocathode electron accelerator and electron radiation apparatus using the same
An electron radiation apparatus is provided. The electron radiation apparatus includes a beat-wave laser system generating a laser beat wave, an electron emitter emitting a density-modulated...
|
|
|
7619234 |
Ultraviolet monitoring system
An ultraviolet radiation emission unit includes a housing and an aperture located on the housing. A radiation source includes a light emitting diode configured to emit radiation having a wavelength...
|
|
|
7619232 |
Method and device for producing extreme ultraviolet radiation or soft X-ray radiation
A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 10 6 W/cm 2 onto a...
|
|
|
7615766 |
Target supplier
A target supplier accelerates a target material injected from a nozzle such that a velocity of the target material after accelerated is kept within a predetermined range. The target supplier...
|
|
|
7615767 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid...
|
|
|
7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method
A lithographic apparatus includes a radiation system including a radiation source for the production of a radiation beam, and a contaminant trap arranged in a path of the radiation beam. The...
|
|
|
7608846 |
Extreme ultra violet light source device
An EUV (extreme ultra violet) light source device in which a degree of vacuum or cleanness in a plasma generation chamber is improved while the construction is simplified. The device includes a...
|
|
|
7605385 |
Electro-less discharge extreme ultraviolet light source
An electrode-less discharge source of extreme ultraviolet (EUV) radiation ( 10 ) efficiently assembles a hot, dense, uniform, axially stable plasma column ( 5 ) with magnetic pressure and inductive...
|
|
|
7601977 |
Phase-matched terahertz emitter
Methods and apparatus are disclosed for directing optical radiation to make multiple passes across an extended region of an electro-optic material, where during each pass the electro-optic material...
|
|
|
7601976 |
Dual beam system
A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic...
|
|
|
7601971 |
Charged beam gun
The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. An...
|
|
|
7598501 |
Sterilization of handles and other gripping surfaces
A self-sterilizing handle or other gripping apparatus. The apparatus and method of the invention have to do with sterilizing a gripping surface with germicidal ultraviolet light. Embodiments of an...
|
|
|
7598506 |
Low-temperature adjustable blackbody apparatus
An adjustable, low-temperature blackbody radiation system includes a blackbody enclosure having an optical port formed therein, and a cold element provided within the blackbody enclosure adjacent...
|
|
|
7593447 |
Rotary disk laser module
A rotary disk module, having a rotary disk is interposed between a pair of heat sinks each spaced from the rotary disk by a gap. A motor is installed for driving the rotary disk to rotate. The gaps...
|
|
|
7589334 |
Ion beam delivery equipment and an ion beam delivery method
The invention is intended to increase the number of patients treatable using one wheel having a thickness varied in the rotating direction to change energy of an ion beam passing the wheel. Ion...
|
|
|
7586112 |
Particle therapy system
A particle therapy system capable of increasing the number of patients treated in one treatment room per unit time. The particle therapy system comprises a charged particle beam generator for...
|
|
|
7579609 |
Coupling light of light emitting resonator to waveguide
A waveguide conduit is constructed and adapted to capture the light emitted by the at least one nano-resonant structure. The nano-resonant structure emits light in response to excitation by a beam...
|
|
|
7573053 |
Polarized pulsed front-end beam source for electron microscope
A method and an electron source are provided for generating polarized electrons for an electron microscope. The electron source includes a photoemissive cathode and a low-power drive laser. The...
|
|
|
7566890 |
UV light source
An ultraviolet generator powered by a microwave source, such as a magnetron, is disclosed. The generator has an elongated inner element, preferably an electric conductor in the form of a polished...
|
|
|
7566891 |
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV...
|
|
|
7564049 |
Pattern drawing system, electrically charged beam drawing method, photomask manufacturing method, and semiconductor device manufacturing method
A pattern drawing system includes a beam irradiating mechanism which irradiates electrically charged beams on a film to be drawn, a coefficient calculating section which calculates a backward...
|
|
|
7560716 |
Free electron oscillator
A beam of charged particles (e.g., an electron beam) from a charged particle source can be selectively applied to a pair of electrodes. For example, the charged particles can be electrons that are...
|
|
|
7558373 |
X-ray generator employing hemimorphic crystal and ozone generator employing it
An x-ray generator comprising a vessel 1 in which a low pressure gas atmosphere is maintained, hemimorphic crystal supporting means 3 a and 3 b provided in the vessel, at least a pair of...
|
|
|
7554080 |
Entanglement processes and system
The states of matter system ( 110 ) having only ones basis state that couples to an excited state can be entangled using measurements of photons during transitions from the excited state. High...
|
|
|
7541602 |
System and method for noninvasively monitoring conditions of a subject
A method and system are presented for use in determining one or more parameters of a subject. A region of interest of the subject is irradiated with acoustic tagging radiation, which comprises at...
|
|
|
7530616 |
Mobile radiation therapy
The invention provide techniques for diagnosing medical conditions and providing appropriate treatment at a patient's home residence. A mobile x-ray team can be dispatched to the patient's home...
|
|
|
7528395 |
Radiation source, lithographic apparatus and device manufacturing method
A radiation source comprises an anode and a cathode that are configured and arranged to create a discharge in a gas or vapor in a space between anode and cathode and to form a plasma pinch so as to...
|
|
|
7525111 |
High repetition rate laser produced plasma EUV light source
An EUV light source and method include a magnetic plasma confinement mechanism creating a magnetic field in the vicinity of a target ignition site to confine the plasma to the vicinity of the...
|
|
|
7518134 |
Plasma radiation source for a lithographic apparatus
A radiation source is disclosed that includes an anode and a cathode that are configured and arranged to create a discharge in a substance in a discharge space between the anode and the cathode and...
|
|
|
7518135 |
Reducing fast ions in a plasma radiation source
A radiation source with an anode and a cathode to create a discharge in a discharge space between the anode and the cathode is disclosed. A plasma is formed in the radiation source which generates...
|
|
|
7518128 |
Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned
A cleaning arrangement is provided for use in an EUV lithographic apparatus, for example an EUV lithographic apparatus with a Sn source. The cleaning arrangement includes a gas source for a...
|
|
|
7511281 |
Ultraviolet light treatment chamber
This invention relates generally to methods and apparatuses for the treatment of liquids and gases using ultraviolet light. In one embodiment, a substantially enclosed chamber coated with a...
|
|
|
7507979 |
Composite dipole array systems and methods
Methods and systems for generating and imaging THz electromagnetic radiation using a composite dipole array made up of novel structures of non-linear dipole strings with dual frequency resonances...
|
|
|
7501642 |
Radiation source
A radiation source generates short-wavelength radiation, such as extreme ultraviolet radiation, for use in lithography. Rotating electrodes are provided which dip into respective baths of liquid...
|
|
|
7501641 |
Dual hemispherical collectors
A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a...
|
|
|
7499633 |
Infrared heater
An infrared heater includes a support body and a heat source irradiating device. The heat source irradiating device includes a reflecting hood, a hood body, two non-planar symmetric arc bodies...
|
|
|
7498593 |
Terahertz radiation sources and methods
The invention relates to improved terahertz radiation sources and associated methods. A terahertz radiation source is described, comprising: an emitter ( 202 ) comprising a semiconductor material (...
|
|
|
7498586 |
Ion source control system
A gridless ion source operates from a control system ( 201 ) that generates an anode voltage ( 215 ) comprising a mains rectified signal such that the anode voltage modulates between a first...
|
|
|
7498574 |
Tunable photonic crystal
An infrared emitter, which utilizes a photonic crystal (PC) structure to produce electromagnetic emissions with a narrow band of wavelengths, includes a semiconductor material layer, a dielectric...
|
|
|
7491954 |
Drive laser delivery systems for EUV light source
An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may...
|
|
|
7488962 |
Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma
The invention is directed to an arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma. It is the object of the invention to find a novel possibility...
|
|
|
7485883 |
Variable wavelength radiation source
An apparatus for selectively producing one or more of a plurality of wavelength distributions of radiation. The apparatus comprises a primary UV radiation source and one or more wavelength...
|