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7391039 |
Semiconductor processing method and system
A secondary electron image generated by an electron beam is detected by a secondary electron/secondary ion detector while a silicon substrate is etched by a focused ion beam from a back surface of...
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7391038 |
Technique for isocentric ion beam scanning
A technique for isocentric ion beam scanning is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for isocentric ion beam scanning. The apparatus may...
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7391036 |
Sample surface inspection apparatus and method
The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the...
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7391034 |
Electron imaging beam with reduced space charge defocusing
One embodiment pertains to an apparatus which impinges a focused electron beam onto a substrate. The apparatus includes an irradiation source and at least two non-axisymmetric lenses. The...
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7391015 |
System and method for data collection in recursive mass analysis
Systems, methods, and computer programming for collecting data using a mass spectrometer comprising a particle detector or other mass analyzer. A data collection such as a tree or array structure...
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7388218 |
Subsurface imaging using an electron beam
A method of navigating or endpointing a microscopic structure by subsurface imaging using a beam of electrons having sufficient energy to penetrate the surface and produce a subsurface image. For...
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7388216 |
Pattern writing and forming method
A pattern forming method is proposed for easy correction of a pattern-size variation occurring in an etching process. An energy beam is radiated onto a resist-applied target while the energy beam...
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7388215 |
Pattern drawing method, stamper manufacturing method, and pattern drawing apparatus
A pattern drawing method capable of drawing a pattern such that opposite ends of a formation region on an inner periphery side and an outer periphery side are substantially linearly formed. A...
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7388213 |
Method of registering a blank substrate to a pattern generating particle beam apparatus and of correcting alignment during pattern generation
We have developed a method of registration of a particle beam to internal alignment targets present within photoresist areas which are to be imaged. The method does not affect the photoresist, so...
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7388199 |
Probe manufacturing method, probe, and scanning probe microscope
A probe is made by attaching a carbon nanotube 12 to a mounting base end 13 , which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the...
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7385210 |
Device for spectroscopy using charged analytes
A device for spectroscopy using charged analytes has an electron generator, which sends electrons through membrane into a charging chamber. The thermal strain of the membrane may be lowered...
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7385209 |
Micromachining process, system and product
Ion beam lithography technique wherein a higher amount of radiation energy is deposited to predetermined regions in the bulk if a suitable substrate. By selecting the radiation nature, its energy...
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7385208 |
Systems and methods for implant dosage control
A system for implantation dosage control. A first interface receives scan position information. A second interface receives beam current information specifying a first beam current value between...
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7385203 |
Charged particle beam extraction system and method
A charged particle beam extraction system and method capable of ensuring higher safety when extraction of an ion beam is on/off-controlled during irradiation of the ion beam for treatment. The...
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7385185 |
Molecular activation for tandem mass spectroscopy
In a tandem mass spectrometer means are provided for molecular activation of ions prior to fragmentation. An embodiment of a tandem mass spectrometer comprises a first collision cell receiving...
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7381979 |
Rotating irradiation apparatus
A rotating irradiation apparatus includes a rotating gantry 3 including a front ring 19 and a rear ring 20 and is provided with a beam delivery device 11 and an irradiation device 4. The...
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7381943 |
Neutral particle beam processing apparatus
The present invention relates to a neutral particle beam processing apparatus. More specifically, the present invention relates to a neutral particle beam processing apparatus comprising a plasma...
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7378672 |
Particle beam therapeutic apparatus
A particle beam therapeutic apparatus can ensure the uniformity of dose distribution by overlapping the desired loci of the irradiation of a particle beam a reduced number of times. A flow of a...
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7378668 |
Method and apparatus for applying charged particle beam
In a charged particle beam applying apparatus such as an electron beams lithography system, there is a technology that facilitates positional adjustment of a crossover and improves throughput of...
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7377228 |
System for and method of gas cluster ion beam processing
System and method of gas-cluster ion beam processing is realized by incorporating improved beam and workpiece neutralizing components. Larger GCIB current transport is enabled by low energy...
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7375357 |
Permanent magnet radiation dose delivery enhancement
The present invention provides a plurality of permanent magnets to enhance radiation dose delivery of a high energy particle beam. The direction of the magnetic field from the permanent magnets may...
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7375356 |
Electron-beam exposure system
An electron-beam exposure system includes: density-per-area map generating means configured to divide a certain area on which an electron beam is irradiated into meshes, to figure out a ratio of an...
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7375355 |
Ribbon beam ion implanter cluster tool
An ion implantation cluster tool for implanting ions into a workpiece is provided, wherein a plurality of beamline assemblies having a respective plurality of ion beamlines associated therewith are...
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7375354 |
Ion implanting method and apparatus
The ion implanting method uses both reciprocatively scanning an ion beam in an X direction and reciprocatively mechanically driving a substrate in a Y direction orthogonal thereto. An implanting...
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7375345 |
Exposed conductor system and method for sensing an electron beam
A detector is disclosed for sensing an intensity of an electron beam generated along a path. An exemplary detector includes an exposed conductor attached to a support which is configured to locate...
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7375327 |
Method and device for measuring quantity of wear
A method and device to accurately obtain very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. A quantity of wear on the surface of a...
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7372195 |
Electron beam source having an extraction electrode provided with a magnetic disk element
An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam...
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7372053 |
Rotating gantry of particle beam therapy system
A rotating gantry includes a link frame for supporting a plurality of rollers which rotatably support the rotating gantry, a brake for releasing a braking force applied to at least one of the...
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7372052 |
Electron beam method and apparatus for reducing or patterning the birefringence of halogenated optical materials
A controlled electron beam and heat will decrease the birefringence of a halogenated optical material under tensile stress. The electron beam and heat irradiation will occur in a chamber under near...
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7372051 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a...
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7372049 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element
An EUV lithographic apparatus includes an EUV radiation source, an optical element and a cleaning device. The cleaning device includes a hydrogen radical source and a flow tube in communication...
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7372047 |
Charged particle system and a method for measuring image magnification
A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision...
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7368740 |
Configuration management and retrieval system for proton beam therapy system
In a complex, multi-processor software controlled system, such as proton beam therapy system (PBTS), it may be important to provide treatment configurable parameters that are easily modified by an...
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7368739 |
Multilayer detector and method for sensing an electron beam
A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer...
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7368738 |
Advanced pattern definition for particle-beam exposure
In a pattern definition device for use in a particle-beam exposure apparatus a plurality of blanking openings ( 910 ) are arranged within a pattern definition field (bf) composed of a plurality of...
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7368735 |
Charged beam drawing data creation method, charged beam drawing method, charged beam drawing apparatus and semiconductor device manufacturing method
Drawing-data creating method includes selecting charged beam drawing-apparatus dividing drawing area into main fields, subfields and unit fields (U-fields), dividing design data (D-data)...
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7368713 |
Method and apparatus for inspecting semiconductor device
A method and apparatus for inspecting a wafer during a semiconductor device fabrication process. The apparatus performs, only via observation from the wafer's top surface, inspection and...
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7365343 |
Apparatus and process for filling a medicament into a container
Apparatus for introducing a medicament into containers, especially vials, in which the containers are passed through an enclosure and exposed therein to a sterilising electron beam. The containers...
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7365324 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover...
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7361914 |
Means to establish orientation of ion beam to wafer and correct angle errors
One or more aspects of the present invention pertain to a measurement component that facilitates determining a relative orientation between an ion beam and a workpiece. The measurement component is...
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7361913 |
Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control
An ion implanter includes a source of a stationary, planar ion beam, a set of beamline components that steer the ion beam along a normal beam path as determined by first operating parameter values,...
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7361909 |
Method and apparatus for correcting drift during automated FIB processing
A method and apparatus for correcting drift of the beam irradiation position during automated FIB (focused ion beam) processing with a reference image-setting unit, an image read-in unit for...
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7361905 |
Substrate processing apparatus and maintenance method therefor
A substrate processing apparatus comprises a chamber. The chamber includes a container and an upper lid for closing an upper opening of the container. On the upper side of the chamber, an elevator...
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7361892 |
Method to increase low-energy beam current in irradiation system with ion beam
A method to increase low-energy beam current according to this invention is applied to an irradiation system with ion beam comprising a beam generation source, a mass analysis device, a beam...
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7358510 |
Ion implanter with variable scan frequency
An ion implanter includes an ion beam generator configured to generate an ion beam, a scanner configured to scan the ion beam in at least one direction at a scan frequency, and a controller. The...
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7358505 |
Apparatus for fabricating a reconstitution assembly
What is disclosed is an apparatus and method for assembling a reconstitution assembly ( 1 ) having a reconstitution device ( 10 ) having a first end connected to a flexible diluent container ( 12...
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7358491 |
Method and apparatus for the depth-resolved characterization of a layer of a carrier
The present invention relates to a method for the depth-resolved characterization of a layer of a carrier. This involves firstly producing a cutout in the layer of the carrier with a sidewall and...
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7355189 |
Charged particle therapy system, range modulation wheel device, and method of installing range modulation wheel device
The invention provides a charged particle therapy system capable of increasing the number of patients treated. An irradiation filed forming apparatus for irradiating a charged particle beam...
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7355175 |
Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam
There is disclosed a method and apparatus for automatically correcting a charged-particle beam with an aberration corrector without the operator performing manual operations. The apparatus has an...
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7351988 |
Beam allocation apparatus and beam allocation method for medical particle accelerators
The invention relates to a beam allocation apparatus ( 21 ) for medical particle accelerators and also to a beam allocation method. This beam allocation apparatus ( 21 ) should manage a plurality...
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