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6720563 |
Ion implantation apparatus and ion implantation method
In an ion implantation apparatus, a reduction of an energy contanimination is achieved when ions are implanted into a wafer with a low energy. A beam transportation efficiency between mutually...
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6720556 |
Electron spectroscopy employing controlled surface charging
A method of examining a sample, including: performing a first spectroscopic analysis of a surface portion of the sample when the sample surface portion is in a first electrical charge state;...
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6717141 |
Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like
In order to improve the resolution of an electron beam in a scanning electron microscope or the like in which a Wien filter is employed for particle detection purposes, the beam is caused to have...
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6717157 |
Mask inspecting apparatus
The mask inspecting apparatus is incorporated into an electron beam proximity exposure apparatus in which a mask is arranged in proximity to a wafer, and a mask pattern formed on the mask is...
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6717162 |
Method for treating a target volume with a particle beam and device implementing same
The invention concerns a method for treating a target volume with a particle beam, in particular a proton beam, which consists in generating said particle beam using an accelerator and in producing...
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6717154 |
Evaluation of irradiated foods and other items with telemetric dosimeters and associated methods
Methods for quantifying the irradiation dose received by an item or items, such as food items and medical items, undergoing irradiation-based sterilization, includes the steps of monitoring a...
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6717145 |
Mapping electron microscopes exhibiting improved imaging of specimen having chargeable bodies
Mapping electron microscopes are disclosed in which the amount of charging of the specimen is controlled to between a minimum amount needed to view an image and a maximum amount beyond which a...
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6713773 |
Irradiation system and method
An irradiation system includes a radiation source for providing a radiation beam at a controlled power level. A product location system provides product so that the radiation beam impinges on the...
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6710359 |
Methods and apparatus for scanned beam uniformity adjustment in ion implanters
Methods and apparatus are provided for adjusting the profile of a scanned ion beam. The spatial distribution of the unscanned ion beam is measured. The ion beam is scanned at an initial scan speed,...
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6710338 |
Focused ion beam system
A portion of an ion optical column is formed using a dielectric bushing to support metallic optical elements, electrically isolate them, and form a vacuum chamber around those elements. In...
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6710362 |
Device for irradiating a tumor tissue
The invention relates to an apparatus and a method for irradiating tumor tissue ( 3 ) of a patient ( 10 ) by means of an ion beam ( 2 ). For that purpose, the apparatus has a deflecting device ( 1...
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6707228 |
Method for adjusting frequency of electronic component
A method for adjusting the frequency of an electronic component device includes the step of etching an electrode disposed on a surface of the electronic component device by irradiating an ion beam...
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6696018 |
System and method for sterilization of biological connections
A sterilization system seals a first end portion of a first tube and a second end portion of a second tube under sterile conditions. The sterilization system includes a sterilization chamber and an...
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6696693 |
Electron beam irradiation apparatus and method
An electron beam irradiation apparatus is employed for irradiating combustion exhaust gas with an electron beam to remove toxic components from the exhaust gas. The electron beam irradiation...
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6693283 |
Beam scanning system for a heavy ion gantry
The present invention relates to a scanning System for a heavy ion gantry comprising a scanner magnet ( 1-2; 3-4 ) for a high energy ion beam used in a heavy ion cancer therapy facility having a...
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6693290 |
Electron beam processing device
The present invention provides an electron beam processing device capable of preventing the adhesion of contaminants to an exposed irradiation part of an electron beam tube, particularly a window...
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6690022 |
Ion beam incidence angle and beam divergence monitor
A device for measuring an incidence angle of an ion beam impinging a planar substrate includes an aperture plate having an aperture for intercepting the ion beam and passing a beam portion...
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6690023 |
Methods and apparatus for providing a broadband tunable source of coherent millimeter, sub-millimeter and infrared radiation utilizing a non-relativistic electron beam
Techniques for super broadband operation of a long wavelength free-electron laser (FEL) on a non-relativistic electron beam are described. Because of the physical nature of the underlying...
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6683319 |
System and method for irradiation with improved dosage uniformity
A system and method for providing irradiation to material shapes an electron beam into a profile having a substantially rectangular intensity distribution. The profile is deflected onto the...
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6683318 |
Ion beam therapy system and a method for operating the system
An ion beam therapy system and method for operating the system includes a source of ions ( 300 ), an accelerator system ( 400 ) and an ion beam transport system ( 60 ) for directing an ion beam to...
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6683307 |
Scanning type charged particle beam microscope
A scanning type charged particle beam microscope has a scanning signal generator for generating a scanning signal, a scanning device for scanning a surface of a sample to generate a scanned image...
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6683317 |
Electrically insulating vacuum coupling
An electrically insulating vacuum coupling for use in an ion implanter for connecting any two parts of the vacuum chamber housing together while maintaining the electrical potentials of the two...
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6683308 |
Method and apparatus for measuring thickness of thin film
A film thickness measuring apparatus applies an electron beam to a thin film as a measurement object formed on a substrate, and measures a value of substrate current that flows in the substrate...
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6683320 |
Through-the-lens neutralization for charged particle beam system
An electron source provides electrons that are directed through the final lens of an ion optical column to neutralize at least a portion of the accumulated charge on a sample. The invention can...
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6677593 |
Planar flow-by electrode capacitive electrospray ion source
An electrospray ion source includes a chamber including a channel region therein, the channel including at least one inlet for directing a solution into the channel and at least a first and a...
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6677594 |
Scanning wheel for ion implantation process chamber
A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer 7 on which a wafer is supported. Each wafer support element 3 has a...
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6677599 |
System and method for uniformly implanting a wafer with an ion beam
A method is provided for uniformly implanting a wafer with an ion beam. The wafer is generally of the type with a surface area in the form of a disk with a diameter and center. The ion beam is...
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6674254 |
Method and apparatus for tuning particle accelerators
An improved method, system, and apparatus for tuning a particle accelerator is provided which includes tuning side cavities while placing adjancent cavities in a de-tuned condition. A conductor is...
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6670624 |
Ion implanter in-situ mass spectrometer
An apparatus for the in-situ detection of ions in a beam of an ion implanter device includes a mass spectrometer device having inner and outer walls and, a system for generating and directing an...
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6670625 |
Method and apparatus for correcting multipole aberrations of an electron beam in an EBT scanner
A method and apparatus are disclosed for reducing variation in a spot size of an electron beam at a target due to multipole aberrations in an electron beam tomography (EBT) scanner. A magnitude of...
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6670618 |
Method of checking an isocentre and a patient-positioning device of an ion beam therapy system
The present invention relates to a method of checking an isocentre and a patient-positioning device of an ion beam therapy system that comprises a grid scanner device, arranged in a beam guidance...
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6667486 |
Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same
The present invention provides a high-precision and high-speed electron beam exposure technique which corrects the position of each beam in a multi-beam exposure method without using a deflection...
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6667483 |
Apparatus using charged particle beam
An apparatus using charged particle beam is provided with means for detecting positional difference between a target position on a chip pattern within an observation visual field of a microscope...
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6661014 |
Methods and apparatus for oxygen implantation
An oxygen ion containing plasma is generated using a hot filament ion source. The oxygen ions in the plasma come from an oxide source (e.g., a metal oxide) which has a lower free energy of...
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6657192 |
Method of determining degree of charge-up induced by plasma used for manufacturing semiconductor device and apparatus therefor
In a method for determining the degree of charge-up induced by plasma used for manufacturing a semiconductor device and an apparatus therefor, a predetermined region on a surface of a wafer on...
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6657212 |
Electron beam measurement method and electron beam irradiation processing device
An electron beam irradiation processing device including an electron beam tube and a current detection unit disposed outside of the window of the electron beam tube. The electron beam tube is...
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6657210 |
Electron beam exposure method, a method of constructing exposure control data, and a computer-readable medium
An electron beam exposure method is provided to draw partial patterns on a plurality of element exposure regions, two-dimensionally aligned on a wafer, with a plurality of electron beams, thereby...
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6657515 |
Tuning mechanism for a superconducting radio frequency particle accelerator cavity
A tuning mechanism for a superconducting radio frequency particle accelerator cavity, wherein the cavity comprises a number of axially aligned cells held by a frame, with at least one active cell...
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6656333 |
Process for making patterned magnetic recording media employing a nonfunctional lubricant
A magnetically patterned hard disk is made by sputtering the magnetic layers, sputtering the carbon layer, applying a nonfunctional lubricant, buff/wiping the disk to remove sputtering debris and...
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6653641 |
Bulk material irradiation system and method
A bulk material irradiation system includes an input for inserting bulk material. A bulk material tube is connected to the input, forming a path for bulk material flow. A pressurizing assembly is...
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6651582 |
Method and device for irradiating an ion beam, and related method and device thereof
When ion beam 14 is irradiated onto a substrate 2 to conduct processing such as ion injection, plasma 30 emitted from a plasma generating device 20 is supplied to a portion close to the...
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6649920 |
Cell projection using an electron beam
An electron-beam cell projection process uses a trial exposure of a test wafer by using cell apertures for use in the cell projection of the target wafer. A design difference and an actual...
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6646274 |
Lithographic projection apparatus
A lithographic projection device according to the present invention includes a first radiation source which supplies a projection beam of radiation of a first type, a mask table for holding a mask,...
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6646277 |
Charging control and dosimetry system for gas cluster ion beam
A method and apparatus for gas cluster ion beam (GCIB) processing uses X-Y scanning of the workpiece relative to the GCIB. A neutralizer reduces surface charging of the workpiece by the GCIB. A...
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6642531 |
Contamination control on lithography components
Contamination control apparatus and methods for the removal of particulate contamination on EUV mirrors and reflective masks are provided. Embodiments in accordance with the present invention...
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6639222 |
Device and method for extracting a constituent from a chemical mixture
A device for separating a chemical mixture into its constituents includes a central cathode that is aligned axially within a cylindrical plasma chamber. An anode, made of the chemical mixture...
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6639231 |
Method of obtaining a performance parameter for an ion implanter and an ion implanter employing the method
A performance parameter for an ion implanter is obtained by monitoring vacuum pressure in a vacuum chamber of the implanter to identify pulses of said pressure caused by outgassing from the wafer...
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6639232 |
Pattern writing method employing electron beam writing device of variable-shaped vector scan system
A first region of an object ( 10 ) to be written corresponding to a shot region (H 1 ) is irradiated with an electron beam ( 11 ) for a standard shot period (T 1 ). A pattern (M 1 ) is thereby...
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6639234 |
Method for checking beam steering in an ion beam therapy system
The invention relates to a method of checking the beam guidance of an ion beam therapy system that comprises a grid scanner device, arranged in a beam guidance system ( 6, 8 ), having vertical...
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6635882 |
Gantry system and method for operating same
The invention relates to a gantry system for adjusting and aligning an ion beam onto a target from a freely determinable effective treatment angle. The ion beam therein is introduced in the...
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