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7391038 Technique for isocentric ion beam scanning  
A technique for isocentric ion beam scanning is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for isocentric ion beam scanning. The apparatus may...
7385206 Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method  
A sample processing apparatus includes a probe, a probe mover for moving the probe such that the probe is brought into contact with a part of a sample, an adhering device for adhering the probe to...
7385185 Molecular activation for tandem mass spectroscopy  
In a tandem mass spectrometer means are provided for molecular activation of ions prior to fragmentation. An embodiment of a tandem mass spectrometer comprises a first collision cell receiving...
7381971 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope  
We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and...
7381970 Specimen stage for charged-particle scanning microscopy  
A specimen stage for charged-particle scanning microscopy comprises a non-magnetic platform for supporting a specimen, at least one probe pin assembly including a probe pin for contacting a...
7375346 Positioning device and method of initializing a positioning device  
In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position...
7375325 Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor  
In a method for preparing a sample for electron microscopic examinations, in particular with a transmission electron microscope (TEM), a) a substrate containing the sample to be prepared on...
7372027 Electron beam apparatus and method for manufacturing semiconductor device  
A sample chamber and a column are connected to each other and comprise a magnetic substance. An exhaust section controls a pressure in the sample chamber and the column. A stage controller controls...
7368729 Method, apparatus and system for specimen fabrication by using an ion beam  
A method and system for separating and preparing a sample for analysis from a wafer without contaminating the wafer with an element such as Ga. A first ion beam is irradiated on a sample and...
7361915 Beam current stabilization utilizing gas feed control loop  
One or more aspects of the present invention pertain to stabilizing the current or density of an ion beam within an ion implantation system by selectively adjusting a lone parameter of feed gas...
7361905 Substrate processing apparatus and maintenance method therefor  
A substrate processing apparatus comprises a chamber. The chamber includes a container and an upper lid for closing an upper opening of the container. On the upper side of the chamber, an elevator...
7355188 Technique for uniformity tuning in an ion implanter system  
A technique for uniformity tuning in an ion implanter system is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for ion beam uniformity tuning. The...
7350404 Scanning type probe microscope and probe moving control method therefor  
The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12 . The...
7348576 Technique for ion beam angle process control  
A technique for ion beam angle process control is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for ion beam angle process control in an ion implanter...
7348571 Scanning mechanism for scanning probe microscope and scanning probe microscope  
A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the...
7323695 Reciprocating drive for scanning a workpiece  
A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is...
7301157 Cluster tool for microscopic processing of samples  
A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the...
7301146 Probe driving method, and probe apparatus  
A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the...
7297944 Ion beam device and ion beam processing method, and holder member  
An apparatus has a holder member ( 21 ) which holds a sample ( 3 ), and a removing beam source ( 13 ) which irradiates an inert ion beam onto a cross section ( 4 ) of the sample ( 3 ) held by a...
7291847 Specimen tip and tip holder assembly  
A specimen tip holder assembly for mounting a specimen tip in a transmission electron microscope (TEM) is described. The specimen tip holder assembly comprises a tip holder for supporting a...
7285778 Probe current imaging  
A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of...
7282707 Method and apparatus for handling a sample plate for use in mass analysis  
A new sample plate handling apparatus for use with mass analysis, and methods for use the same have been developed. The sampling plate handling apparatus comprises a sample plate receiver which...
7278299 Method of processing vertical cross-section using atomic force microscope  
An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for...
7276712 Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter  
An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and an implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion...
7267520 Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights  
The present invention is directed to a scanning apparatus and method for processing a workpiece, wherein the scanning apparatus comprises a wafer arm and moving arm fixedly coupled to one another,...
7263162 Sample mounts for microcrystal crystallography  
Sample mounts ( 10 ) for mounting microcrystals of biological macromolecules for X-ray crystallography are prepared by using patterned thin polyimide films ( 12 ) that have curvature imparted...
7259380 Scanning mechanism of an ion implanter  
This invention discloses a scanning mechanism of an ion implanter. The mechanism is a PR-PRR type parallel mechanism with two subchains and two DOFs, driving the wafer holder to scan when the first...
7253423 Technique for uniformity tuning in an ion implanter system  
A technique for uniformity tuning in an ion implanter system is disclosed. In one particular exemplary embodiment, the technique may be realized as a method for uniformity tuning in an ion...
7253419 Apertured plate support mechanism and charged-particle beam instrument equipped therewith  
An apertured plate support mechanism used in an electron beam lithography machine. The apertured plate is held to a plate holder. The plate support mechanism has the plate holder for holding the...
7253408 Environmental cell for a scanning probe microscope  
An environmental cell for use with a scanning probe microscope includes a cell chamber, a probe mounted to the cell chamber, a puck selectively connected to the cell chamber, a sample holder...
7247848 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus  
The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a...
7238953 Specimen holder for an electron microscope and method for reducing thermal drift in a microscope  
A specimen holder for an electron microscope, comprising a rod-shaped part, which is provided near one end with a tip, which tip is arranged to receive a specimen, the rod-shaped part, in use,...
7235784 Transmission electron microscope and image observation method using it  
Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is...
7233438 Specimen temperature adjusting apparatus  
A specimen temperature adjusting apparatus includes a specimen stage that the observation specimen is to be placed on and a temperature adjustment element that is attached to the specimen stage....
7230257 Electron beam exposure apparatus  
An electron beam exposure apparatus comprising: column 1 for irradiating an electron beam to wafer 10 serving as a sample; sample chamber 3 having vacuum pump 40 as a vacuum exhaustion unit...
7230254 Movable carriage for a lithographic apparatus and device manufacturing method  
A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed...
7230253 Carrier and analyzing apparatus including the carrier  
A carrier, and an analyzing apparatus including the carrier, the carrier including a sample holder having a guide groove, a sample receiver on which to mount the sample holder, the sample receiver...
7227140 Method, system and device for microscopic examination employing fib-prepared sample grasping element  
A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a...
7220973 Modular manipulation system for manipulating a sample under study with a microscope  
A modular manipulation system and method for using such modular manipulation system for manipulating a sample under study with a microscope are provided. According to at least one embodiment, a...
7220963 Light weight portable scanning electron microscope  
We have developed a particular combination of elements and devices which enables the portability of a scanning electron microscope (SEM). In particular the combination enables a small size,...
7205541 Charged particle beam apparatus  
An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in...
7191092 Methods and systems for controlling motion of and tracking a mechanically unattached probe  
Methods and systems for controlling motion of and tracking a mechanically unattached magnetic probe are disclosed. One system for controlling motion of mechanically unattached magnetic probe may...
7189969 Methods and systems for controlling motion of and tracking a mechanically unattached probe  
Methods and systems for controlling motion of and tracking a mechanically unattached magnetic probe are disclosed. One system for controlling motion of mechanically unattached magnetic probe may...
7176470 Technique for high-efficiency ion implantation  
A technique for high-efficiency ion implantation is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus for high-efficiency ion implantation. The...
7176458 Method and apparatus for specimen fabrication  
A specimen fabrication apparatus including: an ion source, an optical system for irradiating a projection ion beam to a sample, wherein the optical system includes a patterning mask to form a ion...
7173253 Object-moving method, object-moving apparatus, production process and produced apparatus  
A method of moving an object includes a step of fixing the object to an object-moving device, a step of moving the object to a prescribed position by the object-moving device, and a step of...
7166839 Apparatus for measuring a three-dimensional shape  
Conventionally, there is no method for quantitatively evaluating the three-dimensional shape of an etched pattern in a non-destructive manner and it takes much time and costs to determine etching...
7157722 Positioning device and method of initializing a positioning device  
In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position...
7138628 Method and apparatus for specimen fabrication  
A specimen fabrication apparatus including: a specimen chamber, a sample stage in the specimen chamber, to mount a specimen substrate, a transfer unit to extract a micro-specimen from the specimen...
7126134 Sample manipulator  
A sample manipulator that utilizes electrostatic traveling waves to selectively displace one or more samples deposited on its face is disclosed. The sample manipulator enables an operator to...
Matches 1 - 50 out of 587 1 2 3 4 5 6 7 8 9 10 11 12 >