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7622722 |
Ion implantation device with a dual pumping mode and method thereof
An ion implantation device with a dual pumping mode and method thereof for use in producing atomic or molecular ion beams are disclosed. In one particular exemplary embodiment, an ion implantation...
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7612348 |
Transverse magnetic field voltage isolator
A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The...
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7601972 |
Inspection system by charged particle beam and method of manufacturing devices using the system
An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement...
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7566884 |
Specimen holder for electron microscope
A specimen holder has two levers on which probes for current measurement are carried. The levers are in contact with a spherical body, the spherical body acting as a pivotal point. When the levers...
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7564044 |
Method of inspecting thin film magnetic head element using scanning electron microscope, and inspecting holding jig
A method of efficiently inspecting a thin film magnetic head is provided. The method including holding a slider bar having a plurality of the thin film magnetic head elements in a row by an...
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7550744 |
Chamberless substrate handling
without substantially touching the surface, having annular rings forming annular orifices, one of the rings forming an air bearing portion and having passages through which a flow of a gas can be...
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7550743 |
Chamberless substrate handling
A particle beam system having a beam source for generating a particle beam and a vacuum air bearing. The beam source is mounted to a first side of the vacuum air bearing, with an active side of the...
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7544954 |
Device for operating gas in vacuum or low-pressure environment and for observation of the operation
A device for operating gas in the vacuum or low-pressure environment and for observation of the operation includes a housing. The housing has a thinner part formed at a side thereof, and at least...
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7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same
A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with...
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7456413 |
Apparatus for evacuating a sample
The invention relates to an apparatus for evacuating samples. A sample 4 is hereby placed in a cavity 3 of a sheet 1 with a smooth surface 2 . A sole plate 5 Is placed upon this smooth...
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7442924 |
Repetitive circumferential milling for sample preparation
A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it....
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7435973 |
Material processing system and method
A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to a...
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7431813 |
Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment
Sealing structure provided between a transfer chamber and a chamber, such as a process chamber, connected to the transfer chamber includes an insert member, a docking member, and annular seals. The...
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7432511 |
Method of operating liquid in the vacuum or low-pressure environment and observing the operation and device for the operation and observation
A method of operating liquid in a vacuum or low-pressure environment and observing the operation and a device for the operation and the observation respectively, including the steps of preparing a...
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7417242 |
Method of measuring ion beam position
A system, apparatus, and method for determining position and two angles of incidence of an ion beam to a surface of a workpiece is provided. A measurement apparatus having an elongate first and...
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7414250 |
Cryogenic variable temperature vacuum scanning tunneling microscope
A cryogenic variable temperature scanning tunneling microscope of novel design and component configuration, for use in conjunction with a variety of low temperature methodologies.
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7408175 |
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
A substrate inspection apparatus 1 - 1 (FIG. 1 ) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23 - 1 ;...
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7394076 |
Moving vacuum chamber stage with air bearing and differentially pumped grooves
A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The...
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7388211 |
Semi-closed observational environment for electron microscope
A semi-closed observational environment for an electron microscope includes a housing having at least two spacers for partitioning itself into a receiving chamber, a gas chamber below the receiving...
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7381969 |
Load lock control
A control for pressurizing a load lock. The control initiates pressurization of the loadlock interior by coupling a source of gas to the loadlock interior. A representative load lock includes a...
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7381968 |
Charged particle beam apparatus and specimen holder
Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is...
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7372027 |
Electron beam apparatus and method for manufacturing semiconductor device
A sample chamber and a column are connected to each other and comprise a magnetic substance. An exhaust section controls a pressure in the sample chamber and the column. A stage controller controls...
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7342237 |
Lithographic apparatus and device manufacturing method
A lithographic apparatus comprising: an illumination system for providing a projection beam of radiation; a gas pressure controlled article clamp for clamping an article to be placed in a beam path...
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7341393 |
Mechanism for sealing
A mechanism for connecting first and second members through a sealing member sandwiched therebetween includes a position adjustment portion which adjusts a position of the first member in a...
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7339167 |
Charged particle beam apparatus
A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam...
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7335879 |
System and method for sample charge control
A system and method for characterizing and charging a sample. The system includes a vacuum chamber, a first apparatus in the vacuum chamber and configured to characterize a sample, and a second...
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7323695 |
Reciprocating drive for scanning a workpiece
A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is...
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7321125 |
Transverse magnetic field voltage isolator
A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The...
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7312464 |
Ion implantation apparatus
An ion implantation apparatus structure is provided that does not allow gas to accumulate in the vicinity of a wafer when implantation ions to the wafer. The ion implantation apparatus includes a...
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7301157 |
Cluster tool for microscopic processing of samples
A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the...
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7291847 |
Specimen tip and tip holder assembly
A specimen tip holder assembly for mounting a specimen tip in a transmission electron microscope (TEM) is described. The specimen tip holder assembly comprises a tip holder for supporting a...
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7288774 |
Transverse magnetic field voltage isolator
An SEM wherein the entire imaging apparatus of the SEM is supported on air bearings. A multi-stage differentially pumped vacuum seal area provides a localized vacuum zone for wafer examination. A...
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7259380 |
Scanning mechanism of an ion implanter
This invention discloses a scanning mechanism of an ion implanter. The mechanism is a PR-PRR type parallel mechanism with two subchains and two DOFs, driving the wafer holder to scan when the first...
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7119343 |
Mechanical oscillator for wafer scan with spot beam
The present invention is directed to a scanning apparatus and method for processing a substrate, wherein the scanning apparatus comprises a first link and a second link rigidly coupled to one...
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7112805 |
Vacuum processing apparatus and vacuum processing method
The invention provides a semiconductor fabrication apparatus capable of preventing increase of carriage time of samples, deterioration of sample output, increase of footprint and increase of...
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7095699 |
Detection apparatus, detection method and electron beam irradiation apparatus
A detection apparatus, a detection method and an electron beam irradiation apparatus for detecting deflection electrons in order to precisely focus even if a vacuum seal valve is provided. An...
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7078706 |
Chamber, exposure apparatus, and device manufacturing method
Disclosed is a chamber having a static-pressure bearing disposed therein, the chamber including an inside pressure gauge for detecting an inside pressure of said chamber, and a pressure controller...
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7075092 |
Charged particle beam microscope with minicolumn
One embodiment of the present invention is an electron microscope that includes: (a) a main vacuum chamber housing a stage therein and connected to a vacuum pump; (b) a load lock for loading a...
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6995379 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
A lithographic projection apparatus in which a vacuum chamber provided with a vacuum generator constructed and arranged to generate a vacuum beam path for the projection beam, wherein the apparatus...
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6987272 |
Work piece transfer system for an ion beam implanter
A work piece transfer apparatus for use with an ion beam implanter for treating a work piece at sub-atmospheric pressure. The work piece transfer apparatus includes an evacuable load lock system in...
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6987271 |
Chamber sensor port, chamber and electron beam processor
A pressure sensing port includes an inner block airtightly attached to an inside of a port attachment opening and having a first through hole extending along the axis of the port attachment opening...
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6979831 |
Method and apparatus for a formatter following electron beam substrate processing system
Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a...
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6953939 |
Testing apparatus using scanning electron microscope
A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test...
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6943352 |
Particle detectors
A charged particle detector is provided for use in an electron microscope. The detector has a chamber for receiving charged particles generated by the interaction between a particle beam generated...
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6936826 |
Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like
A coupling in a metrology system for placement between a floating inspection chamber and a fixed transfer chamber. The coupling prevents transfer of vibrations between the chambers and seals a...
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6927399 |
Devices and methods for detecting the position of a beam
A device is proposed for the precision rotation of samples on a diffractometer, especially for X-ray or synchrotron radiation diffraction experiments, comprising:
a centering element ( 26 )...
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6911656 |
Rotational stage for high speed, large area scanning in focused beam systems
A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear...
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6903348 |
Wafer holding apparatus for ion implanting system
An ion implanting system and a wafer holding apparatus therefor are provided. The ion implanting system includes x- and y-axis rotating parts; first and second angle measuring circuits; and a...
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6897443 |
Portable scanning electron microscope
We have developed a particular combination of elements and devices which enables the portability of a scanning electron microscope (SEM). In particular the combination enables a small size,...
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6878950 |
Method of reducing heat-induced distortion of photomasks during lithography
The present invention relates generally to methods, apparatus and materials to reduce or minimize the heating of a substrate (and associated distortions of the photomask) caused by electron-beam...
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