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7391038 Technique for isocentric ion beam scanning  
A technique for isocentric ion beam scanning is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for isocentric ion beam scanning. The apparatus may...
7381971 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope  
We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and...
7381968 Charged particle beam apparatus and specimen holder  
Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is...
7348571 Scanning mechanism for scanning probe microscope and scanning probe microscope  
A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the...
7348570 Unsupported, electron transparent films and related methods  
Unsupported, electron transparent film useful in supporting a sample for imaging and analysis by transmission electron microscopy; methods for making and using the unsupported, electron transparent...
7345289 Sample support prepared by semiconductor silicon process technique  
A sample support of the present invention is prepared such that a silicon substrate is used as a raw material, the thickness structure having a shape and a thickness of 10 μm or less is prepared...
7345288 Sample holder and ion-beam processing system  
A sample holder and ion-beam processing system are offered which permit a good sample adapted for observation (such as TEM (transmission electron microscopy) observation). The sample holder has a...
7342237 Lithographic apparatus and device manufacturing method  
A lithographic apparatus comprising: an illumination system for providing a projection beam of radiation; a gas pressure controlled article clamp for clamping an article to be placed in a beam path...
7323695 Reciprocating drive for scanning a workpiece  
A reciprocating drive system, method, and apparatus for scanning a workpiece are provided, wherein a motor comprising a rotor and stator operable to individually rotate about a first axis is...
7315023 Method of preparing a sample for examination in a TEM  
A method of preparing a sample for examination in a TEM, where the sample is attached to a probe tip point, uses a TEM sample holder form embodied in a TEM sample holder coupon. The probe-tip...
7304313 Low-pressure chamber for scanning electron microscopy in a wet environment  
A specimen enclosure assembly ( 100 ) for use in an electron microscope and including a rigid specimen enclosure dish ( 102 ) having an aperture ( 122 ) and defining an enclosed specimen placement...
7291847 Specimen tip and tip holder assembly  
A specimen tip holder assembly for mounting a specimen tip in a transmission electron microscope (TEM) is described. The specimen tip holder assembly comprises a tip holder for supporting a...
7282707 Method and apparatus for handling a sample plate for use in mass analysis  
A new sample plate handling apparatus for use with mass analysis, and methods for use the same have been developed. The sampling plate handling apparatus comprises a sample plate receiver which...
7259380 Scanning mechanism of an ion implanter  
This invention discloses a scanning mechanism of an ion implanter. The mechanism is a PR-PRR type parallel mechanism with two subchains and two DOFs, driving the wafer holder to scan when the first...
7253419 Apertured plate support mechanism and charged-particle beam instrument equipped therewith  
An apertured plate support mechanism used in an electron beam lithography machine. The apertured plate is held to a plate holder. The plate support mechanism has the plate holder for holding the...
7238953 Specimen holder for an electron microscope and method for reducing thermal drift in a microscope  
A specimen holder for an electron microscope, comprising a rod-shaped part, which is provided near one end with a tip, which tip is arranged to receive a specimen, the rod-shaped part, in use,...
7235784 Transmission electron microscope and image observation method using it  
Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is...
7217934 Wafer scanning device  
The wafer scanning device causes a wafer to scan in a vacuum area and includes a holder 10 to hold a wafer, a ball screw 20 to move the holder 10 to scan, a motor 50 to drive the ball screw...
7196338 Ultra-thin sample preparation for transmission electron microscopy  
In accordance with the invention, there is a method of fabricating a material for transmission electron microscopy comprising removing a first portion from a material having a thickness of (d 1 )...
7191092 Methods and systems for controlling motion of and tracking a mechanically unattached probe  
Methods and systems for controlling motion of and tracking a mechanically unattached magnetic probe are disclosed. One system for controlling motion of mechanically unattached magnetic probe may...
7173253 Object-moving method, object-moving apparatus, production process and produced apparatus  
A method of moving an object includes a step of fixing the object to an object-moving device, a step of moving the object to a prescribed position by the object-moving device, and a step of...
7157702 High resolution atom probe  
A three dimensional atom probe comprising a sharp specimen ( 10 ) coupled to a mounting means ( 12 ) where emission of charged particles is caused by application of a potential to the specimen tip...
7154092 Method of three-dimensional image reconstruction and transmission electron microscope  
Method of three-dimensional image reconstruction and transmission electron microscope capable of producing three-dimensional images. When a TEM image is taken at each tilt angle of a specimen, the...
7151269 Sample inspection apparatus  
A sample inspection apparatus comprises a sample support; a detection system for detecting radiation emitted by or transmitted through a sample on the sample support in response to radiation...
7126133 Kit for preparing a tem sample holder  
A kit for preparing TEM sample holders includes at least one TEM coupon made of a sheet of material and having one or more paths from its edge to a TEM sample holder form embodied in the TEM...
7126132 Apparatus for preparing a TEM sample holder  
The preferred embodiment further includes a press for cutting a TEM sample holder from a TEM coupon and joining a probe-tip point with an attached sample to the TEM sample holder. The press...
7119344 Electron beam device having a specimen holder  
An electron beam device having a specimen holder, in particular for a transmission electron microscope (TEM), which makes it possible to identify the specimen holder in a simple manner is...
7119343 Mechanical oscillator for wafer scan with spot beam  
The present invention is directed to a scanning apparatus and method for processing a substrate, wherein the scanning apparatus comprises a first link and a second link rigidly coupled to one...
7115882 TEM sample holder  
A TEM sample holder is formed by cutting the TEM sample holder form from a coupon in a press. The cutting at the same time joins the tip point of a nano-manipulator probe tip with the formed TEM...
7112790 Method to prepare TEM samples  
A method for preparing a transmission electron microscopy (TEM) sample is provided which includes removing a portion of a substrate using a focused ion beam tool and securing the removed portion to...
7109487 Particle beam device  
A particle beam device, in particular an electron microscope, having at least two particle beam columns and one object slide having a receiving surface for receiving an object. The particle beam...
7109481 Matrix-assisted laser desorption and ionization (MALDI) sample plate releasably coupled to a sample plate adapter  
Embodiments of the present invention describe a MALDI (matrix-assisted laser desorption and ionization) sample plate body that includes a reusable sample plate and a sample plate adapter that are...
7109477 Automatic sample loader for use with a mass spectrometer  
An automatic sample loader is for use in association with a mass spectrometer and at least one vial containing a sample. The loader includes a vial block, an insertion head, an insertion tube, a...
7091497 Particle-optical device for irradiating an object  
The invention provides a particle-optical device for irradiating an object with a beam of particles. The device comprises a housing in which are located positioning means 1 for positioning the...
7091496 Electron microscopic inspection apparatus  
Both wafers on which copper wiring was performed and wafers on which non-copper wiring was performed can be inspected by a single unit of electron microscopic inspection apparatus with no...
7087906 Bellows with spring anti-gravity device  
Embodiments of the present invention are directed to apparatus and methods of attenuating vibration, particularly for modern stepper machines and other types of vibration sensitive equipment. The...
7078706 Chamber, exposure apparatus, and device manufacturing method  
Disclosed is a chamber having a static-pressure bearing disposed therein, the chamber including an inside pressure gauge for detecting an inside pressure of said chamber, and a pressure controller...
7053383 Method and apparatus for rapid sample preparation in a focused ion beam microscope  
A coupon for preparing a TEM sample holder comprises a sheet of material that includes a TEM sample holder form. There is at least one section of the sheet connecting the TEM sample holder form to...
7038218 Inspection by a transmission electron microscope of a sample  
A method of manufacturing a transmission electron microscope inspection sample. The sample is mounted into a recess in the mount and the sample is grinded to a preset target thickness. A recess for...
7034316 Sample carrier for carrying a sample to be irradiated with an electron beam  
Sample carriers for use in Transmission Electron Microscopes (TEMs) and freely commercially available have the form of a gauze with a strengthening edge. The thickness of these known sample...
7015483 Focused ion beam system  
A focused ion beam system comprises a specimen chamber, a FIB column, a SEM stage, a side entry stage, a TEM specimen holder, a micro-sampling manipulator, and a SEM holder exchanger chamber. The...
7005652 Sample-stand for scanning electron microscope  
The present invention is a sample-stage for a scanning electron microscope. The sample stage has a U-shaped base, horizontally oriented with the closed end forming the right side. A bottom member...
6995380 End effector for supporting a microsample  
An end effector for supporting a microsample during instrumental analysis, including a generally planar body and a cantilever tip configured to be associated with the microsample.
6995379 Lithographic apparatus, device manufacturing method, and device manufactured thereby  
A lithographic projection apparatus in which a vacuum chamber provided with a vacuum generator constructed and arranged to generate a vacuum beam path for the projection beam, wherein the apparatus...
6979831 Method and apparatus for a formatter following electron beam substrate processing system  
Embodiments of the invention generally provide an electron beam substrate processing system. In one embodiment, the present invention provides an electron beam substrate processing system where a...
6972417 Apparatus and methods for patterning a reticle blank by electron-beam inscription with reduced exposure of the reticle blank by backscattered electrons  
Apparatus and methods are disclosed for inscribing a pattern on a reticle blank to produce a lithography reticle. As a reticle blank is inscribed using a charged particle beam (e.g., electron...
6967336 System for precise position registration  
An apparatus for enabling accurate retaining of a precise position, such as for reacquisition of a microscopic spot or feature having a size of 0.1 mm or less, on broad-area surfaces after non-in...
6956222 Lithographic apparatus and method of manufacturing a device  
A lithographic projection apparatus includes a radiation system for providing a beam of radiation and a support structure for supporting a patterning device. The patterning device serves to pattern...
6927399 Devices and methods for detecting the position of a beam  
A device is proposed for the precision rotation of samples on a diffractometer, especially for X-ray or synchrotron radiation diffraction experiments, comprising: a centering element ( 26 )...
6911656 Rotational stage for high speed, large area scanning in focused beam systems  
A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear...
Matches 1 - 50 out of 191 1 2 3 4 >