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8183539 |
High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter
The present invention provides a mass analyzing magnet which can bend a very wide charged particle ribbon beams through angles between 90 to 200 degrees. The shorter dimension of the ribbon beam is...
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8173984 |
Extreme ultraviolet light source apparatus
An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV...
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8173980 |
Gas cluster ion beam system with cleaning apparatus
A processing system is provided for irradiating a substrate with a gas cluster ion beam (GCIB). The system includes a vacuum vessel that has an interior and is configured to support the substrate...
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8168958 |
Ionizing-radiation-responsive compositions, methods, and systems
A method, composition and system respond to ionizing radiation to adjust biological activity. In some approaches the ionizing radiation is X-ray or extreme ultraviolet radiation that produces...
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8168957 |
Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic...
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8164074 |
Ionizing-radiation-responsive compositions, methods, and systems
A method, composition and system respond to ionizing radiation to adjust biological activity. In some approaches the ionizing radiation is X-ray or extreme ultraviolet radiation that produces...
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8164070 |
Collimator magnet for ion implantation system
A collimator magnet (CM) usable in an ion implantation system provides an exit ion beam with a large aperture, substantially parallel in one plane or orthogonal planes. The CM includes identical...
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8164052 |
Mass spectrometer
A mass spectrometer is disclosed comprising an Electron Transfer Dissociation cell (1). Positive analyte ions are fragmented into fragment ions upon colliding with singly charged negative reagent...
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8158959 |
Extreme ultraviolet light source apparatus
An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a...
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8153993 |
Front plate for an ion source
The present invention relates to a front plate for an ion source that is suitable for an ion implanter. The front plate according to the invention comprises obverse and reverse sides, an exit...
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8153992 |
Ionization emitter, ionization apparatus, and method for manufacturing ionization emitter
Provided is an ionization emitter which can reduce a dead volume without deteriorating separating capacity. An ionization emitter (2) is provided with a tip (1) composed of a columnar or conical...
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8143589 |
Stable emission gas ion source and method for operation thereof
A method of operating a focused ion beam device for emitting during operation a focused ion beam including ions of a gas generated at a first partial pressure, comprising cleaning an emitter tip...
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8143590 |
Ion source apparatus
An ion source apparatus has an ion source assembly and a neutralizer. The ion source assembly has a body, a heat-dissipating device, an anode chunk and a gas distributor. The heat-dissipating...
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8143591 |
Covering wide areas with ionized gas streams
Ion delivery manifolds with a gas transport channel, for receiving an ionized gas stream, and plural outlets that divide the gas stream into plural neutralization gas streams that are directed...
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8138473 |
Mass spectrometry unit
A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure...
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8134130 |
Ion source with corner cathode
An ion source may include first, second, and third electrodes. The first electrode may be a repeller having a V-shaped groove. The second electrode may be an electron emitter filament disposed...
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8129676 |
Surface enhanced Raman spectroscopy detection with ion separation pre-filter
Detecting and identifying ions using surface enhanced Raman spectroscopy (SERS) and an ion separation pre-filter, such as an ion spectrometer, are provided. The combination of an ion separator as a...
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8129675 |
Neutral/ion reactor in adiabatic supersonic gas flow for ion mobility time-of-flight mass spectrometry
The content of the invention comprises a concept of reactor for isolated ion transformations induced by collisions with neutral species. This reactor is also an interface between mobility cell and...
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8128869 |
Air sanitization system with variable speed fan
An air sanitization system including a reactive oxygen species generator, a variable speed fan, a pathogen sensor and a controller. The reactive oxygen species generator generates reactive oxygen...
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8124942 |
Plasma igniter for an inductively coupled plasma ion source
A focused ion beam (FIB) system is disclosed, comprising an inductively coupled plasma ion source, an insulating plasma chamber containing the plasma, a conducting source biasing electrode in...
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8124941 |
Increasing current in charged particle sources and systems
Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb...
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8119984 |
Method and apparatus for generation of reagent ions in a mass spectrometer
A front-end reagent ion source for a mass spectrometer is disclosed. Reagent vapor is supplied to a reagent ionization volume located within a chamber of the mass spectrometer and maintained at a...
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8116060 |
Ionizer
An ionizer includes a fan for blowing air, the fan being provided in an air blowing port which opens in a case, and a plurality of discharge electrodes for generating positive and negative ions by...
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8110814 |
Ion sources, systems and methods
Ion sources, systems and methods are disclosed.
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8110797 |
Electrospray ionization mass spectrometry methodology
A method of enhanced speciation of both positive and negatives species in an analyte is disclosed. The method can include producing a first analyte solution comprising an analyte composition and an...
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8106366 |
Ion beam control apparatus and method
Provided are an ion beam control apparatus and a control method for controlling an ion beam energy expansion level and an ion beam size in a radial direction. An ion beam control apparatus Sa is...
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8106367 |
Method and ionizer for bipolar ion generation
An ionizer includes a high voltage AC generator, and a planar ion emitter mounted on an insulating substrate and having an array of planar needles that protrude from an edge of the substrate. The...
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8106353 |
Apparatus and method of photo fragmentation
A method of photo-fragmentation is provided generating a beam of ions from a sample with an ion source, filtering the beam of ions in a filtering region to select desired ions, and...
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8101922 |
Modular gas ion source
A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical...
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8101921 |
Apparatus and method for inducing controllable jets in liquids
A method for inducing a controllable jet in a transparent liquid is disclosed. The method comprises providing a gas-liquid interface, providing a laser source and generating a beam comprising a...
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8101923 |
System and method for spatially-resolved chemical analysis using microplasma desorption and ionization of a sample
A method and system for desorbing and ionizing molecules from a sample for mass spectrometry using a microplasma device is disclosed. The system and method relies upon a microplasma device, or...
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8101488 |
Hydrogen implantation with reduced radiation
Embodiments of the present invention provide for a system for accelerating hydrogen ions. A hydrogen generator holding a supply of water is configured to generate a flow of hydrogen gas from the...
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8097860 |
Multiple nozzle gas cluster ion beam processing system and method of operating
A gas cluster ion beam (GCIB) processing system using multiple nozzles for forming and emitting at least one GCIB and methods of operating thereof are described. The GCIB processing system may be...
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RE43078 |
Atmospheric pressure ion source
A non-radioactive atmospheric pressure device for ionization of analytes comprises an atmospheric pressure chamber having an inlet for carrier gas, a first electrode at one end, and a...
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8093563 |
Ion beam stabilization
Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
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8089052 |
Ion source with adjustable aperture
An ion implanter system including an ion source for use in creating a stream or beam of ions. The ion source has an ion source chamber housing that at least partially bounds an ionization region...
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8084737 |
Array-based ion storage system and method therefor
An array-based ion storage system includes an ion generation section, and an ion storage section having a first end electrode coupled to the ion generation section and having multiple holes, a...
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8080783 |
Atmospheric pressure ion source for mass spectrometry
A multiple function atmospheric pressure ion source interfaced to a mass spectrometer comprises multiple liquid inlet probes configured such that the sprays from two or more probes intersect in a...
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8080930 |
Self-regenerating nanotips for low-power electric propulsion (EP) cathodes
Spindt-type field-emission cathodes for use in electric propulsion (EP) systems having self-assembling nanostructures that can repeatedly regenerate damaged cathode emitter nanotips. A nanotip is...
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8076650 |
Multi-source plasma focused ion beam system
The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter...
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8071956 |
Cleaning of an extraction aperture of an ion source
An ion source includes an arc chamber housing defining an arc chamber having an extraction aperture, and a wiper assembly comprising a wiper positioned outside the arc chamber in a parked position...
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8071958 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
A method of manufacturing a semiconductor device includes the steps of: providing a supply of molecules containing a plurality of dopant atoms into an ionization chamber, ionizing said molecules...
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8072149 |
Unbalanced ion source
A dual unbalanced indirectly heated cathode (IHC) ion chamber is disclosed. The cathodes have different surface areas, thereby affecting the amount of heat radiated by each. In the preferred...
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8071941 |
Mass spectrometer
A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration...
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8063337 |
Mass spectrometry injection system and apparatus
An apparatus for use in mass spectrometry comprising an injector body, an injection tube coupled to the injector body, and a shielding assembly disposed between the injector body and the injection...
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8063382 |
Ozone-free ionic wind
In one embodiment, an air mover may include a first electrode, a second electrode and an ionization device to selectively ionize molecules in an electric field between the first and second...
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8049426 |
Electrostatic fluid accelerator for controlling a fluid flow
An electrostatic fluid accelerator includes an electrode array comprising an array of corona discharge electrodes and an array of accelerating electrodes for moving a fluid. A detector is...
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8044370 |
Gas ion source with high mechanical stability
A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal...
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8044343 |
Gas analyzer
A plurality of molecule components included in a gas are to be ionized at the same time by PI method. For instance, a plurality of molecule components included in a gas generated at a certain...
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8039795 |
Ion sources for improved ionization
Improved apparatuses and methods are provided for ionizing samples and analyzing the samples with mass spectrometry.
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