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7626662 |
Method for fabricating liquid crystal (LC) alignment
A method for fabricating liquid crystal (LC) alignment includes the steps of processing an alignment film having a plurality of liquid crystal molecules with a single or plurality of plasma...
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7626180 |
Charged particle beam apparatus, method for controlling charged particle, and frequency adjustment apparatus
An ion gun 11 supplies an Ar gas into a main body 111 from a gas inlet 114 , causes DC hot cathode discharge between a filament 113 and an anode 112 to generate Ar plasma. Next, a voltage...
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7622727 |
Extreme UV radiation source device
An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an...
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7622722 |
Ion implantation device with a dual pumping mode and method thereof
An ion implantation device with a dual pumping mode and method thereof for use in producing atomic or molecular ion beams are disclosed. In one particular exemplary embodiment, an ion implantation...
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7622721 |
Focused anode layer ion source with converging and charge compensated beam (falcon)
A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of...
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7622713 |
Method and apparatus for normalizing performance of an electron source
A method for operating a mass spectrometer includes determining a first performance characteristic while operating the mass spectrometer with a first electron emitter, storing first information...
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7619224 |
Generation, acceleration, focusing and collection of a high-brightness, space-charge-dominated circular charged-particle beam
A high-brightness, space-charge-dominated circular charged-particle beam system includes a flat circular emitter that emits charge particles to form a space-charge-dominated circular...
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7615767 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid...
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7609067 |
Electronic portion of an ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement
Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an...
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7609003 |
Ion implantation system and control method
Ion implantation with high brightness, ion beam by ionizing gas or vapor, e.g. of dimers, or decaborane, by direct electron impact ionization adjacent the outlet aperture ( 46, 176 ) of the...
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7605382 |
Ion implanter
The ion implanter has: an ion source which generates an ion beam; electron beam sources which emit an electron beam to be scanned in the Y direction in the ion source; a power source for the...
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7605379 |
Cold-cathode-based ion source element
An ion source element includes a cold cathode, a grid electrode, and an ion accelerator. The cold cathode, the grid electrode, and the ion accelerator are arranged in that order and are...
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7601971 |
Charged beam gun
The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. An...
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7601970 |
Alternating current negative ion and silver ion generator
Disclosed herein is an AC negative ion and silver ion generator. The AC negative ion generator includes an AC power supply unit, an oscillation unit, a switching unit, a boosting unit, and an...
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7598500 |
Ion source and metals used in making components thereof and method of making same
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for...
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7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device
A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of...
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7592604 |
Charged particle beam apparatus
The present invention provides a charged particle beam apparatus capable of preventing the charging-up of the specimen without using a large-scale facility. A scanning electron microscope 100 ...
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7589328 |
Gas field ION source for multiple applications
A focused ion beam device is described. The device includes an ion beam column including an enclosure for housing an emitter with an emitter area for generating ions, a first gas inlet adapted to...
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7586109 |
Technique for improving the performance and extending the lifetime of an ion source with gas dilution
A technique improving the performance and extending the lifetime of an ion source with gas dilution is disclosed. In one particular exemplary embodiment, the technique may be realized as a method...
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7586101 |
Ion sources for ion implantation apparatus
The invention relates to improving the efficiency of ion flow from an ion source, by reducing heat loss from the source both in the ion chamber of the ion source and its constituent parts (e.g. the...
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7586100 |
Closed loop control and process optimization in plasma doping processes using a time of flight ion detector
A method of controlling a plasma doping process using a time-of-flight ion detector includes generating a plasma comprising dopant ions in a plasma chamber proximate to a platen supporting a...
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7586099 |
Vacuum plasma generator
A vacuum plasma generator (VPG) includes an output connector for electrical connection of the VPG to at least one electrode of a plasma chamber. The VPG includes a mains connector for connection of...
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7586098 |
Ion stripper device made of carbon nanotubes or fullerenes
A system and method for developing a solid state stripper device is described that more effectively strips off negative carbon ions to produce positively charged carbon ions. In one embodiment the...
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7586092 |
Method and device for non-contact sampling and detection
A system for the stand-off detection of trace amounts of analyte materials such as explosives, chemical warfare agents, toxic industrial chemicals, and the like includes an ion source that is...
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7576339 |
Ion implantation apparatus and method for obtaining non-uniform ion implantation energy
An ion implantation apparatus includes an ion beam source for generating an ion beam; an implantation energy controller disposed on a path of the ion beam for controlling the ion implantation...
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7576322 |
Non-contact detector system with plasma ion source
A system for the non-contact detection of analyte chemicals, including explosives, chemical warfare agents and the like, employs a non-equilibrium plasma that is maintained at a temperature...
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7576320 |
Photoelectric ion source photocathode regeneration system
An explosive detection system based on an ion mobility spectrometer detects the presence of trace molecules in air. Such instruments require an ion source to ionize the trace molecules. An ion...
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7573572 |
Drift tube amplifier and method to amplify current
A drift tube amplifier having an input and an output. The drift tube amplifier including a current-to-voltage converter for converting input current to a voltage, a band pass filter assembly for...
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7573050 |
Column simultaneously focusing a particle beam and an optical beam
Column for simultaneously producing a focused particle beam and a focused light beam and method for treating a sample using the column. The column has lateral walls, an input electrode having a...
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7569837 |
Ion source
It is a technical challenge to provide a small-sized ion source excellent in operability. An ion source of the present invention includes: a cylindrical insulation tube ( 2 ) opened upward and...
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7566883 |
Thermal transfer sheet for ion source
One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable...
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7564042 |
Ion beam apparatus having plasma sheath controller
An ion beam apparatus includes a plasma chamber with a grid assembly installed at one end of the plasma chamber and a plasma sheath controller disposed between the plasma chamber and the grid...
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7564025 |
Multipole devices and methods
The present invention provides, inter alia, a multipole ion guide for moving and guiding ions, particularly in a mass spectrometer. The multipole ion guide comprises multiple rods with a resistive...
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7557362 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution
Ion sources and methods for generating an ion beam with a controllable ion current density distribution. The ion source includes a discharge chamber and an electromagnet adapted to generate a...
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7554106 |
Partial ion implantation apparatus and method using bundled beam
An ion implantation apparatus comprises an ion beam source for generating an initial ion beam, a bundled ion beam generator adapted to change the initial ion beam into a bundled ion beam based on a...
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7550741 |
Inertial electrostatic confinement fusion
A device for accelerating ions between a potential towards a central point in space is disclosed. The device can be used to accelerate ions along a collision path with other accelerated ions or...
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7550740 |
Focused ION beam apparatus
A focused ion beam apparatus enables an ion beam to be focused highly accurately on a sample at the beam spot position of the case of the absence of magnetic field without causing isotope...
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7550719 |
Electron beam source device available for detecting life span of filament
An electron beam source device is provided in which the disconnection and deterioration of a filament of the electron beam source device can be accurately predicted and determined, so as to avoid...
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7547899 |
Charged beam dump and particle attractor
A system, method, and apparatus for mitigating contamination during ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end...
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7547898 |
Particulate prevention in ion implantation
A system and method for mitigating contamination in an ion implantation system is provided. The system comprises an ion source, a power supply operable to supply power to a filament and mirror...
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7547891 |
Ion sampling apparatuses in fast polarity-switching ion sources
The present invention provides ion sampling apparatuses that can be used in a fast polarity-switching electric field. In some embodiments, the ion sampling apparatus comprises a capillary made with...
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7547878 |
Neutral/Ion reactor in adiabatic supersonic gas flow for ion mobility time-of-flight mass spectrometry
The content of the invention comprises a concept of reactor for isolated ion transformations induced by collisions with neutral species. This reactor is also an interface between mobility cell and...
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7544952 |
Multivalent ion generating source and charged particle beam apparatus using such ion generating source
A multicharged ions generating source that is easy to manufacture, excellent in controllability and maintainability, high in degree of ionization and large in beam intensity and a charged particle...
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7544933 |
Method and system for desorption atmospheric pressure chemical ionization
A desorption atmospheric pressure chemical ionization (DAPCI) system delivers a primary ion beam composed of an inert, high velocity gas and solvent ions to a surface to effect desorption and...
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7541597 |
Automatic cleaning of ion sources
The invention relates to the automatic cleaning of ion sources inside mass spectrometers, especially the cleaning of ion sources where the ions are generated by matrix-assisted laser desorption...
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7534997 |
Mass spectrometer interface for atmospheric ionization ion sources
A mass spectrometer sample input interface comprises a desolvation apparatus defining a desolvation pathway along which a desolvation gas flows, in a direction from upstream to downstream, the...
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7531819 |
Fluorine based cleaning of an ion source
A deposit cleaning system for removing deposits from interior surfaces of ion sources and/or electrodes includes a fluorine source, a throttle mechanism, and a controller. The fluorine source...
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7531796 |
Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods
Detected is a secondary electron generated by irradiating a focused ion beam while performing etching a sample section and the around through scan-irradiating the focused ion beam. From a changing...
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7528550 |
Ion implantation system and control method
An ion implantation is disclosed that includes an ionization chamber having a restricted outlet aperture and configured so that the gas or vapor in the ionization chamber is at a pressure...
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7528368 |
Electrospray ionization process and add-on device with sample injection tip
A process for ionizing a liquid can comprising flowing the liquid through a capillary wire bonding tip and applying sufficient voltage to electrospray the liquid sample as it exits therefrom. The...
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