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8183526 Mirror monochromator for charged particle beam apparatus  
One embodiment relates to an apparatus for generating a charged particle beam with reduced energy width. A charged particle source is configured to generate a charged particle beam with a range of...
8183539 High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter  
The present invention provides a mass analyzing magnet which can bend a very wide charged particle ribbon beams through angles between 90 to 200 degrees. The shorter dimension of the ribbon beam is...
8183543 Multi-beam source  
A multi-beam source for generating a plurality of beamlets of energetic electrically charged particles. The multi-beam source includes an illumination system generating an illuminating beam of...
8183545 Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing  
There is provided a charged particle beam writing apparatus in which data processing is optimized by automatically dividing process regions on which parallel distributed processing is performed. A...
8178856 Charged particle beam writing apparatus and method thereof  
A charged particle beam writing apparatus includes a charge amount distribution calculation unit configured to calculate a charge amount distribution which is charged by irradiation of a charged...
8178849 Objective lens  
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of...
8178850 Chromatic aberration corrector for charged-particle beam system and correction method therefor  
An aberration corrector has two stages of multipole elements each of which has a thickness along the optical axis. Each multipole element produces a static electric or magnetic field of 3-fold...
8173976 Linear ion processing apparatus with improved mechanical isolation and assembly  
An ion processing apparatus includes a plurality of electrodes, first and second insulators, a housing, and a plurality of compliant first supports and second supports. Each electrode has a length...
8173979 Generating and visualizing an ion beam profile  
A method for generating and visualizing an ion beam profile is provided. The method includes specifying an incidence direction of a particle beam, specifying a target region that is to be...
8173948 Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner  
An optical coupling apparatus for a dual column charged particle beam tool allowing both optical imaging of an area of an integrated circuit, as well as localized heating of the integrated circuit...
8173335 Beam ablation lithography  
Provided are beam ablation lithography methods capable of removing and manipulating material at the nanoscale. Also provided are nanoscale devices, nanogap field effect transistors, nano-wires,...
8173963 Phase-shifting element and particle beam device having a phase-shifting element  
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the...
8168956 Scanning transmission electron microscope and method of aberration correction therefor  
A scanning transmission electron microscope (STEM) and method of aberration correction have autocorrelation function calculation means, aberration coefficient calculation means, and feedback...
8168962 Method and apparatus for uniformly implanting a wafer with an ion beam  
Initially, an ion beam is formed as an elongated shape incident on a wafer, where the shape has a length along a first axis longer than a diameter of the wafer, and a width along a second axis...
8168946 Charged particle separation apparatus and charged particle bombardment apparatus  
A charged particle separation apparatus that separates ionized gas clusters is disclosed. The charged particle separation apparatus includes an electric field applying part including two electrodes...
8164066 Magnetic lens, method for focusing charged particles and charged particle energy analyzer  
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece...
8164070 Collimator magnet for ion implantation system  
A collimator magnet (CM) usable in an ion implantation system provides an exit ion beam with a large aperture, substantially parallel in one plane or orthogonal planes. The CM includes identical...
8164060 System and method for a charged particle beam  
System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for...
8164068 Mask health monitor using a faraday probe  
In an ion implanter, an ion current measurement device is disposed behind a mask co-planarly with respect to a surface of a target substrate as if said target substrate was positioned on a platen....
8153965 Apparatus and method for merging a low energy electron flow into a high energy electron flow  
An apparatus for merging a low energy electron flow into a high energy electron flow may include: a high energy electron path for accommodating the high energy electron flow; and a plurality of...
8153989 Charged particle beam irradiating apparatus  
The present invention provides a charged particle beam irradiating apparatus capable of simply preventing unevenness or reduction in a peripheral portion of the dose distribution of a charged...
8153990 Particle beam therapy system  
A particle beam therapy system that is capable of irradiating a target area with an irradiation beam suitable for a particle beam therapy using a spot scanning method includes a synchrotron, a beam...
8153991 Direct write lithography system  
A direct write lithography system. The system includes a converter having an array of light controllable electron sources, each field emitter being arranged for converting light into an electron...
8148680 Ion transfer arrangement with spatially alternating DC and viscous ion flow  
A method of transporting gas and entrained ions between higher and lower pressure regions of a mass spectrometer comprises providing an ion transfer conduit 60 between the higher and lower pressure...
8148702 Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns  
The invention is directed to an arrangement for the illumination of a substrate with a plurality of individually shaped, controllable particle beams, particularly for electron beam lithography in...
8148698 Charged particle beam writing apparatus  
A blanking deflector 23 is of the coaxial type and includes a rod-like inner electrode 231 and a cylindrical outer electrode 232 enclosing the inner electrode 231 such that an air gap through which...
8148679 Efficient atmospheric pressure interface for mass spectrometers and method  
An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening...
8143588 Deflector array, exposure apparatus, and device manufacturing method  
A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the...
8138484 Magnetic scanning system with improved efficiency  
Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner that includes first and second magnetic elements having a beam path region therebetween. One or...
8134130 Ion source with corner cathode  
An ion source may include first, second, and third electrodes. The first electrode may be a repeller having a V-shaped groove. The second electrode may be an electron emitter filament disposed...
8130045 Digital self excited loop  
A process that provides the ability to incorporate a self exciting loop (SEL) algorithm into a digital LLRF system. The present digital SEL provides for conversion from the Cartesian domain to the...
8129677 Method and apparatus for surface desorption ionization by charged particles  
An apparatus and method for generating analyte ions from a sample. An ion generating device is provided having a chamber with an outlet and a surface having a material and means for applying a high...
8129695 System and method for controlling deflection of a charged particle beam within a graded electrostatic lens  
A method and apparatus for controlling deflection, deceleration, and focus of an ion beam are disclosed. The apparatus may include a graded deflection/deceleration lens including a plurality of...
8129693 Charged particle beam column and method of operating same  
A charged particle beam column includes a charged particle beam source to generate a charged particle beam; an objective lens to focus the charged particle beam in an object plane; a first...
8129699 Multi-field charged particle cancer therapy method and apparatus coordinated with patient respiration  
The invention relates generally to treatment of solid cancers. More particularly, the invention relates to a multi-field imaging and/or a multi-field charged particle cancer therapy method and...
8129694 Negative ion beam source vacuum method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a negative ion beam source vacuum method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton...
8124947 Ion implanter having combined hybrid and double mechanical scan architecture  
A system and method are provided for implanting ions into a workpiece in a plurality of operating ranges. A desired dosage of ions is provided, and a spot ion beam is formed from an ion source and...
8124940 Charged particle beam apparatus  
Disclosed herein is a scanning electron microscope having a function for positioning an object point of an objective lens at a defined position even under an electronic optical condition in which...
8110813 Charged particle optical system comprising an electrostatic deflector  
A charged particle optical system comprising a beamlet generator for generating a plurality of beamlets of charged particles and an electrostatic deflector for deflecting the beamlets. The...
8110820 Ion beam apparatus and method for ion implantation  
A multipurpose ion implanter beam line configuration constructed for enabling implantation of common monatomic dopant ion species and cluster ions, the beam line configuration having a mass...
8106366 Ion beam control apparatus and method  
Provided are an ion beam control apparatus and a control method for controlling an ion beam energy expansion level and an ion beam size in a radial direction. An ion beam control apparatus Sa is...
8106358 Layered scanning charged particle microscope with differential pumping aperture  
A scanning charged particle apparatus includes a layered charged particle beam column package; a sample holder; and a layered differential pumping aperture that assists in maintaining two different...
8101911 Method and device for improved alignment of a high brightness charged particle gun  
A charged particle gun alignment assembly for emitting a charged particle beam along an optical axis of a charged particle beam device is described. The charged particle gun alignment assembly is...
8097866 Apparatus for measuring beam characteristics and a method thereof  
An apparatus and a method for detecting particle beam characteristics are disclosed. In one embodiment, the apparatus may have a body including a first end and second end and at least one detector...
8097848 Scanning electron microscope  
In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that...
8093565 Wind and temperature spectrometer with crossed small-deflection energy analyzer  
A wind and temperature spectrometer (WTS) may detect the angular and energy distributions of neutral atoms/molecules and ions in two mutually perpendicular planes. The measured energy distribution...
8093564 Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises an ion beam focusing method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton beam...
8093552 Electric field separator device and process  
A process and device is provided for the separation of electronegative molecules from non electronegative molecules using electric fields. The molecules are ionized in a non thermal discharge...
8093563 Ion beam stabilization  
Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
8089054 Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a charged particle beam acceleration and/or extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel...
Matches 1 - 50 out of 2246 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >