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9040935 Blanking apparatus, drawing apparatus, and method of manufacturing article  
The present invention provides a blanking apparatus comprising a plurality of blankers configured to respectively blank a plurality of beams with respect to a target position on an object, and a...
9040942 Electron beam lithography with linear column array and rotary stage  
One embodiment relates to an apparatus for electron beam lithography which includes a linear array of reflection electron beam lithography columns and a rotary stage. Each column is separately...
9040936 Bunch length compression method for free electron lasers to avoid parasitic compressions  
A method of bunch length compression method for a free electron laser (FEL) that avoids parasitic compressions by 1) applying acceleration on the falling portion of the RF waveform, 2) compressing...
9040911 Scanning electron microscope  
Conventionally, in a general-purpose scanning electron microscope, the maximum accelerating voltage which can be set is low, and hence thin crystal samples which can be observed under normal...
9033964 Target structure used for generating charged particle beam, method of manufacturing the same and medical appliance using the same  
Provided are a target structure used for generating a charged particle beam, a method of manufacturing the same, and a medical appliance using the same. The target structure includes a target...
9035249 Multi-beam system for high throughput EBI  
A scanning charged particle beam device configured to image a specimen is described. The scanning charged particle beam device includes a source of charged particles, a condenser lens for...
9029796 Drift tube manufacturing method and drift tube  
A drift tube manufacturing method and a drift tube which can reduce cost while securing an adequate level of particle beam focusing performance. The method includes: a magnet housing stage of...
9024272 Pattern measuring apparatus  
A pattern measuring apparatus which can identify a kind of gaps formed by a manufacturing process having a plurality of exposing steps such as SADP, particularly, which can suitably access a gap...
9018596 Charged particle vortex wave generation  
A device for imparting an orbital angular momentum to a charged particle wave propagating along a beam axis in a charged particle beam generating apparatus is described. The device comprises a...
9018601 Multi-field charged particle cancer therapy method and apparatus coordinated with patient respiration  
The invention relates generally to treatment of solid cancers. More particularly, the invention relates to a multi-field imaging and/or a multi-field charged particle cancer therapy method and...
9012866 Compact proton therapy system with energy selection onboard a rotatable gantry  
Systems and apparatuses for providing particle beams for radiation therapy with a compact design and suitable to a single treatment room. The radiation system comprises a stationary cyclotron...
9012873 Treatment planning system, device for calculating a scanning path and particle therapy system  
In a particle therapy treatment planning system for creating treatment plan data, the movement of a target (patient's affected area) is extracted from plural tomography images of the target, and...
9006644 Monolayer and/or few-layer graphene on metal or metal-coated substrates  
Disclosed is monolayer and/or few-layer graphene on metal or metal-coated substrates. Embodiments include graphene mirrors. In an example, a mirror includes a substrate that has a surface...
9006652 Phase shift method for a TEM  
A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the...
9006677 Fan beam modulator for ion beams providing continuous intensity modulation  
An intensity modulator for controlling the intensity of ions, such as protons, controllably block a portion of sub-areas of an area beam to control the average intensity within that sub-area. A...
9006690 Extraction electrode assembly voltage modulation in an ion implantation system  
A method is disclosed for reducing particle contamination in an ion implantation system, wherein an ion beam is created via the ion source operating in conjunction with an extraction electrode...
9000395 Energy filter for charged particle beam apparatus  
This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential...
8993980 Dual stage scanner for ion beam control  
An ion beam scanner includes a first scanner stage having a first opening to transmit an ion beam, the first scanner stage to generate, responsive to a first oscillating deflection signal, a first...
8993979 Beam control assembly for ribbon beam of ions for ion implantation  
A beam control assembly to shape a ribbon beam of ions for ion implantation includes a first bar, second bar, first coil of windings of electrical wire, second coil of windings of electrical wire,...
8993985 Drawing apparatus and method of manufacturing article  
The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, including an aperture array configured to include a plurality...
8987690 High-energy ion implanter  
A high-energy ion implanter includes a beam generation unit that includes an ion source and a mass analyzer, a high-energy multi-stage linear acceleration unit, a high-energy beam deflection unit...
8987692 High brightness electron gun, system using the same, and method of operating thereof  
A charged particle beam source device adapted for generating a charged particle beam is provided. The charged particle beam source device includes an emitter tip adapted for providing charged...
8987678 Encapsulation of electrodes in solid media  
An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a...
8987677 Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof  
The invention relates to a modulation device for use in a charged particle multi-beamlet lithography system. The device includes a body comprising an interconnect structure provided with a...
8987680 Multipole measurement apparatus  
In order to provide a multipole measurement apparatus that can easily obtain table data for an aberration corrector that corrects the aberrations in a charged particle beam apparatus, the...
8987679 Enhanced integrity projection lens assembly  
The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for...
8981321 Charged-particle beam exposure apparatus and method of manufacturing article  
A charged-particle beam exposure apparatus which includes a deflector that deflects a charged-particle beam, and a stage mechanism that drives a substrate, and draws a pattern on the substrate...
8981323 Charged particle beam apparatus, and article manufacturing method  
A charged particle beam apparatus for processing an object using a charged particle beam includes a charged particle lens in which an array of apertures, through each of which a charged particle...
8981322 Multiple nozzle gas cluster ion beam system  
Disclosed is a multi-nozzle and skimmer assembly for introducing a process gas mixture, or multiple process gases mixtures, in a gas cluster ion beam (GCIB) system, and associated methods of...
8981293 System for inspecting flat panel display using scanning electron microscope  
An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect...
8975581 Ion trap  
An ion trap comprising: a first array of magnetic elements arranged to generate a first magnetic field with a degree of homogeneity; and an array of electrodes arranged to generate an...
8975602 Active floor for proton therapy  
An operator positioning apparatus for a proton treatment system includes: a proton beam nozzle to emit a proton beam to a targeted region of a patient; a gantry wheel having a front face to...
8975601 Method and apparatus for electron beam lithography  
A method of manufacturing a wafer with an integrated circuit (IC) layout includes receiving a first plurality of pixels, wherein each of the pixels corresponds to a portion of the IC layout and...
8969798 Abridged ion trap-time of flight mass spectrometer  
An improved trap-TOF mass spectrometer has a set of electrodes arranged to produce both a quadrupolar RF confining field and a substantially homogeneous dipole field. In operation, ions are first...
8969836 Method and apparatus for electron beam lithography  
A system using an energy beam to expose patterns on a wafer includes first mirror elements, a multiplexer element, and second mirror elements. The first and second mirror elements are dynamically...
8969794 Mass dependent automatic gain control for mass spectrometer  
Systems and methods for automatic gain control in mass spectrometers are disclosed. An exemplary system may include a mass spectrometer, comprising a lens configured to receive a supply of ions,...
8969801 Scanning electron microscope  
To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample...
8970138 Particle beam irradiation system and method for operating the same  
A control data about the devices constituting the synchrotron are formed by an initial acceleration control data item, a plural extraction control data items, a plural energy change control data...
8969837 Multi charged particle beam writing method, and multi charged particle beam writing apparatus  
A multi charged particle beam writing method includes dividing a maximum irradiation time per a shot into a digit number of first irradiation time periods, each of which is calculated by...
8969834 Charged particle therapy patient constraint apparatus and method of use thereof  
The invention comprises a rapid patient positioning system including a computer and motor controlled patient constraint system, such as a patient head and/or back support system having multiple...
8963099 Electrode of electrostatic lens and method of manufacturing the same  
An electrode to be used for an electrostatic lens, wherein the electrode at least includes: a first substrate having a first through-hole and a second substrate having a second through-hole; the...
8963107 Beam line design to reduce energy contamination  
Methods and apparatus for reducing energy contamination can be provided to a beam line assembly for ion implantation. Protrusions comprising surface areas and grooves therebetween can face neutral...
8963083 Switchable multi perspective detector, optics therefore and method of operating thereof  
A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection...
8963108 Proton treatment gantry system  
A gantry apparatus for a proton treatment system, including a proton beam nozzle to emit a proton beam to a targeted region of a patient, a gantry wheel to support the proton beam nozzle to direct...
8963081 Mass selector, and ion gun, ion irradiation apparatus and mass microscope  
When a time-of-flight mass selector having a chopper using a deflector selects the masses of the ions, an ion beam is deflected. As a result, at least a part of the ion beams diagonally pass...
8963112 Charged particle cancer therapy patient positioning method and apparatus  
The invention comprises a patient positioning and/or repositioning system, such as a laying, semi-vertical, or seated patient positioning, alignment, and/or control method and apparatus used in...
8957392 Mass spectrometer  
In order to solve a problem in a mass spectrometry that a distribution of an emitted ion and a substance distribution on the measurement object surface are different from each other, which is due...
8957372 Scanning electron microscope  
A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing...
8957390 Electron gun arrangement  
A gun arrangement configured for generating a primary electron beam for a wafer imaging system is described. The arrangement includes a controller configured for switching between a normal...
8957391 RF transformer  
An RF transformer for supplying power as part of a tank circuit, comprising: a primary side, having at least one main winding and at least one shorting winding, the at least one main winding being...