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8399864 Dual beam system  
A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the...
8399863 Charged particle beam apparatus using an electrostatic lens gun  
A charged particle gun includes: a charged particle source; a first extracting electrode arranged in such a manner that a distance between the charged particle source and the first extracting...
8399831 Forming an image while milling a work piece  
Dual beam instruments, comprising a Scanning Electron Microscope (SEM) column for imaging and a Focused Ion Beam (FIB) column for milling, are routinely used to extract samples (lamellae) from...
8399851 Systems and methods for scanning a beam of charged particles  
Systems and methods of an ion implant apparatus include an ion source for producing an ion beam along an incident beam axis. The ion implant apparatus includes a beam deflecting assembly coupled...
8399866 Charged particle extraction apparatus and method of use thereof  
The invention comprises a charged particle beam extraction method and apparatus optionally used in conjunction with charged particle beam radiation therapy of cancerous tumors. The system uses a...
8395132 Ion implanting while growing a III-nitride layer  
A method that includes implantation of dopants while a III-nitride body is being grown on a substrate, and an apparatus for the practice of the method.
8395114 Ion trap, multiple electrode system and electrode for mass spectrometric analysis  
An ion trap, a multiple-electrode-pole system and an electrode pole for mass spectrometric analysis. The electrode pole (1) is a rod and the shape of at least one side of its cross section is...
8389964 Ion implanting apparatus and deflecting electrode  
An ion implanting apparatus includes: an electrostatic accelerating tube for causing an ion beam extracted from an ion source to have a desirable energy, and deflecting the ion beam to be incident...
8389953 Focused ion beam apparatus  
A focused ion beam apparatus includes an ion gun unit having an emitter tip, a gas supply unit that supplies gas to the tip, and an ion source gas supply source. An extracting electrode ionizes...
8389949 Particle beam therapy system and adjustment method for particle beam therapy system  
The objective is to obtain a particle beam therapy system, the irradiation flexibility of which is high and that can reduce the amount of irradiation onto a normal tissue. There are provided a...
8389952 Particle beam irradiation apparatus and particle beam therapy system  
There is provided a particle beam irradiation apparatus in which two or more pairs of scanning electromagnets are utilized so that scanning of a charged particle beam can be performed with a high...
8389950 High performance micro-fabricated quadrupole lens  
This invention provides a method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass...
8389951 Spherical aberration corrector and method of spherical aberration correction  
A spherical aberration corrector and method is offered, which is easy to design and which can correct spherical aberration and even six-fold astigmatism in a charged particle beam instrument. The...
8389937 Incoherent transmission electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the...
8384042 Switching micro-resonant structures by modulating a beam of charged particles  
When using micro-resonant structures, a resonant structure may be turned on or off (e.g., when a display element is turned on or off in response to a changing image or when a communications switch...
8384053 Charged particle beam extraction method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a charged particle beam extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. The system uses a...
8384051 Charged particle beam drawing apparatus and article manufacturing method using same  
The drawing apparatus of the present inventions includes a detector having a size for which the detector can simultaneously detect two adjacent charged particle beams among a plurality of charged...
8384048 Charged particle beam deflection method with separate stage tracking and stage positional error signals  
The invention provides a method for patterning a resist coated substrate carried on a stage, where the patterning utilizes a charged particle beam. The method comprises the steps of: moving the...
8384314 Traveling wave linear accelerator comprising a frequency controller for interleaved multi-energy operation  
An electromagnetic wave having a phase velocity and an amplitude is provided by an electromagnetic wave source to a traveling wave linear accelerator. The traveling wave linear accelerator...
8378321 Charged particle cancer therapy and patient positioning method and apparatus  
The invention comprises a laying, semi-vertical, or seated patient positioning, alignment, and/or control method and apparatus used in conjunction with multi-axis charged particle or proton beam...
8378311 Synchrotron power cycling apparatus and method of use thereof  
The invention comprises a charged particle cancer therapy system or synchrotron system using one or more switches to introduce a corresponding one or more resistors into a circuit linking a power...
8378313 Uniformity of a scanned ion beam  
One embodiment relates to an ion implanter. The ion implanter includes an ion source to generate an ion beam, as well as a scanner to scan the ion beam across a surface of a workpiece along a...
8378312 System, apparatus and method for deflecting a particle beam  
A variety of systems, apparatus and methods for deflecting a particle beam are described. An apparatus comprises at least six electromagnetic portions disposed on a plane. Each of the at least six...
8374830 Grid transparency and grid hole pattern control for ion beam uniformity  
A design process for varying hole locations or sizes or both in an ion beam grid includes identifying a control grid to be modified; obtaining a change factor for the grid pattern; and using the...
8373145 Charged particle cancer therapy system magnet control method and apparatus  
The invention comprises a charged particle beam acceleration, extraction, and/or targeting method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous...
8373121 Magnetic achromatic mass spectrometer with double focusing  
An achromatic magnetic mass spectrometer, for example of the SIMS type with double focusing, comprises means for canceling the four aberrations of the second order, and means for canceling the...
8373137 High resolution energy-selecting electron beam apparatus  
A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and...
8373144 Quasi-annular reflective electron patterning device  
One embodiment relates to an electron-beam apparatus for writing a pattern on a target substrate. The apparatus includes a plurality of arrays of actively-controlled pixel elements at a surface of...
8373146 RF accelerator method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a radio-frequency accelerator method and apparatus used in conjunction with multi-axis charged particle radiation therapy of cancerous tumors. An RF synthesizer provides a...
8373136 Achromatic beam deflector, achromatic beam separator, charged particle device, method of operating an achromatic beam deflector, and method of operating an achromatic beam separator  
An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is...
8368030 Charged particle beam exposure system and beam manipulating arrangement  
A beam manipulating arrangement for a multi beam application using charged particles comprises a multi-aperture plate having plural apertures traversed by beams of charged particles. A frame...
8368015 Particle-optical system  
The present invention relates to a multi-beamlet multi-column particle-optical system comprising a plurality of columns which are disposed in an array for simultaneously exposing a substrate, each...
8368020 Particle beam system  
A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a...
8368019 Particle beam system  
A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a...
8368031 Inspection system by charged particle beam and method of manufacturing devices using the system  
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam...
8362444 Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method  
A patterned beam of radiation is projected onto a substrate. A reflective optical element is used to help form the radiation beam from radiation emitted from a plasma region of a plasma source. In...
8362441 Enhanced integrity projection lens assembly  
The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for...
8362423 Ion trap  
An ion trap 1 comprises a magnetic field generator 2 arranged to generate a magnetic field and an array 3 of electrodes arranged to generate an electrostatic field including a turning point in...
8362443 Objective lens  
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of...
8362428 Transmission electron microscope  
A transmission electron microscope has a target body position on the electron optical axis of the microscope, and an electrically conductive body off the axis of the microscope. The microscope...
8357896 Method of analyzing a substance  
An embodiment of the invention relates to a method of analyzing a substance comprising the steps of: fabricating a structure comprising said substance and at least one graphene layer; carrying out...
8357895 Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method  
A defect inspection method includes generating and applies a charged beam to a sample with patterns; controlling a shape of the charged beam so that a beam width in a first direction perpendicular...
8357894 Microcalorimetry for X-ray spectroscopy  
An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low...
8357911 Particle beam irradiation system and particle beam therapy system  
The objective is to eliminate the effect of the hysteresis of a scanning electromagnet so that there is obtained a particle beam irradiation system that realizes high-accuracy beam irradiation....
8354654 Apparatus and method for ion beam implantation using scanning and spot beams with improved high dose beam quality  
An ion implantation apparatus with multiple operating modes is disclosed. The ion implantation apparatus has an ion source and an ion extraction means for forming a converging beam on...
8354652 Ion source including separate support systems for accelerator grids  
This invention relates to an Ion gun (10) which comprises of plasma generator (11) driven from an RF source (12), a plasma or source chamber (13), having an outlet (14), across which is mounted an...
8354653 Techniques for manufacturing solar cells  
Techniques for manufacturing solar cells are disclosed. In one particular exemplary embodiment, the technique may be comprise disposing the solar cell downstream of an ion source; disposing a mask...
8354638 Electron detection device and scanning electron microscope  
An electron detection device including: one scintillator 31 having an opening through which an electron beam emitted from an electron gun passes; a plurality of photoguides 22 of the same shape,...
8350213 Charged particle beam detection unit with multi type detection subunits  
A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B...
8350226 Methods and systems for treating cancer using external beam radiation  
A radiation system employs magnetic field to move particle beams and radiation sources. The radiation system includes a source operable to produce a particle beam, a scanning magnet operable to...