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8487268 Method for the production of multiplayer electrostatic lens array  
The invention relates to a method for the production of a multilayer electrostatic lens arrangement with at least one lens electrode in general, a method for the production of a phase plate in...
8487269 Combined radiation therapy and magnetic resonance unit  
The invention relates to a combined radiation therapy and magnetic resonance unit. For this purpose, in accordance with the invention a combined radiation therapy and magnetic resonance unit is...
8487252 Particle beam microscope and method for operating the particle beam microscope  
A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion...
8481960 Deceleration lens  
A system and method are disclosed for controlling an ion beam. A deceleration lens is disclosed for use in an ion implanter. The lens may include a suppression electrode, first and second focus...
8481958 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens  
A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle...
8481922 Membrane for holding samples for use with surface ionization technology  
The present invention is a device to restrict the sampling of analyte ions and neutral molecules from surfaces with mass spectrometry and thereby sample from a defined area or volume. In various...
8481962 Distributed potential charged particle detector  
A charged particle beam system for imaging and processing targets is disclosed, comprising a charged particle column, a secondary particle detector, and a secondary particle detection grid...
8481959 Apparatus and method for multi-directionally scanning a beam of charged particles  
Systems and methods of an ion implant apparatus include an ion source for producing an ion beam along an incident beam axis. The ion implant apparatus includes a beam deflecting assembly coupled...
8481961 Shielded capacitive electrode  
A device is described, which is sensitive to electric fields, but is insensitive to stray electrons/ions and unlike a bare, exposed conductor, it measures capacitively coupled current while...
8476606 Drawing apparatus and method of manufacturing article  
A drawing apparatus for drawing a pattern on a substrate with a plurality of charged-particle beams, includes a blanking aperture array including a plurality of apertures, a blanking unit...
8471201 Methods and apparatus for ion sources, ion control and ion measurement for macromolecules  
Disclosed are methods, apparatus, systems, processes and other inventions relating to: ion sources with controlled electro-pneumatic superposition, ion source synchronized to RF multipole, ion...
8471198 Mass spectrometer sampling cone with coating  
A mass spectrometer includes an ion source, which includes a coating or surface formed of a metallic carbide, a metallic boride, a ceramic or DLC, or an ion-implanted transition metal.
8466428 Particle beam irradiation apparatus and particle beam therapy system  
The objective of the present invention is to eliminate noise caused by driving a ridge filter and to achieve a uniform dose distribution without making a patient sense discomfort or anxiety. There...
8466416 Electron detecting mechanism and charged particle beam system equipped therewith  
An electron detecting mechanism having a plate provided with an opening permitting passage of the primary beam, an energy filter, a first light detector, and a second light detector. The plate has...
8466430 Electrostatic lens  
An electrostatic lens includes multiple electrodes each having a through hole, and an insulating spacer that is provided between the electrodes and that fixes an interval between the electrodes....
8466429 Particle beam injector system and method  
Methods and devices enable coupling of a charged particle beam to a radio frequency quadrupole accelerator. Coupling of the charged particle beam is accomplished, at least in-part, by relying on...
8461553 Masked ion implant with fast-slow scan  
An improved method of producing solar cells utilizes a mask which is fixed relative to an ion beam in an ion implanter. The ion beam is directed through a plurality of apertures in the mask toward...
8461525 Charged particle source with integrated energy filter  
A particle source in which energy selection occurs by sending a beam of electrically charged particles eccentrically through a lens so that energy dispersion will occur in an image formed by the...
8461554 Apparatus and method for charge neutralization during processing of a workpiece  
A processing system may include a plasma source for providing a plasma and a workpiece holder arranged to receive ions from the plasma. The processing system may further include a pulsed bias...
8461548 Ion beam irradiation device and method for suppressing ion beam divergence  
To improve an efficiency of utilizing electrons and efficiently suppress an ion beam spread by a space charge effect while eliminating a need for a special magnetic pole structure by effectively...
8461555 Charged particle beam writing method and charged particle beam writing apparatus  
Based on the pattern writing data input to an input unit 20, a control computer 19 divides a predetermined region on which writing is effected by an electron beam 54 into smaller regions each...
8461524 Ion guide with improved gas dynamics and combined noise reduction device  
A mass spectrometry system arrangement includes a curved ion guide, where the curve of the ion guide is positioned such that a portion of the ion optics are visible from at the ion guide entrance,...
8455847 Mask health monitor using a faraday probe  
In an ion implanter, an ion current measurement device is disposed behind a mask co-planarly with respect to a surface of a target substrate as if said target substrate was positioned on a platen....
8455838 Multiple-column electron beam apparatus and methods  
One embodiment disclosed relates an apparatus which includes an electromagnet arranged to provide a large-scale magnetic field in a region. The apparatus further includes an array of multiple...
RE44240 Electron beam exposure system  
The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron...
8445878 Radiation control and minimization system and method  
A radiation control system and method are provided in which radiation delivered to a patient and/or the operator of the equipment is minimized. The radiation control system may be used in a large...
8440964 Multiple ion guide operating at elevated pressures  
A device and method for transporting ions along a longitudinal direction in an elevated gas pressure region. The device includes a multipole ion guide having a set of rods positioned along the...
8436326 Ion beam apparatus and method employing magnetic scanning  
A multipurpose ion implanter beam line configuration comprising a mass analyzer magnet followed by a magnetic scanner and magnetic collimator combination that introduce bends to the beam path, the...
8436317 Wien filter  
This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector, or...
8436302 Phase-shifting element and particle beam device having a phase-shifting element  
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the...
8436327 Multi-field charged particle cancer therapy method and apparatus  
The invention relates to treatment of solid cancers. More particularly, the invention relates to a combined rotation/raster method, referred to as multi-field charged particle cancer therapy. The...
RE44179 Charged particle beam writing method  
A writing method includes emitting a first charged particle beam formed to be a first shape by passing through a first shaping aperture and a second shaping aperture, onto a target workpiece; and...
8431908 Charged particle beam writing apparatus and charged particle beam writing method  
A charged particle beam writing apparatus includes a plurality of tracking calculation units to calculate a deflection amount of the charged particle beam in regard to a movable substrate, a...
8431914 Method and system for manufacturing a surface using charged particle beam lithography with variable beam blur  
A charged particle beam writer system is disclosed comprising a generator for a charged particle beam having a beam blur radius, wherein the beam blur radius may be varied from shot to shot, or...
8426835 Charged particle radiation device  
An electron gun that serves to reduce the quantity of electron stimulated desorption and accomplishes vacuum evacuation efficiently with a sufficient degree of vacuum. An electron source 1 and an...
8426809 Apparatus and method for trapping charged particles and performing controlled interactions between them  
An apparatus and a method for trapping charged particles and performing controlled interactions between them are provided. The apparatus includes a substrate and RF electrodes and dedicated DC...
8421005 Systems and methods for transfer of ions for analysis  
The present invention is a device to restrict the sampling of analyte ions and neutral molecules from surfaces with mass spectrometry and thereby sample from a defined area or volume. In various...
8421029 Wien filter with reduced field leakage  
This invention provides a design of Wien filter for satisfying Wien Condition so as to ensure the Wien filter's performance. At first, to minimize the magnetic flux leaking out of the Wien filter,...
8421028 Device for deflecting or guiding in a particle beam  
A device for deflecting a particle beam out of a beam axis, or for guiding a particle beam into the beam axis, has a simple design, requires little space, and additionally ensures that no area of...
8421030 Charged-particle energy analyzer  
One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side,...
8421031 Particle beam therapy system  
The objective is to obtain a particle beam therapy system that can suppress the effect of a leakage dose. There are provided a scanning nozzle that irradiates in a predetermined direction a...
8421027 Charged particle analyser and method using electrostatic filter grids to filter charged particles  
A charged particle analyzer (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into...
8421379 H-mode drift tube linac, and method of adjusting electric field distribution in H-mode drift tube linac  
An H-mode drift tube linac according to the present invention includes: an accelerator cavity which functions as a vacuum chamber and a resonator; drift tube electrodes for generating accelerating...
8405042 Particle beam therapy system  
The objective of the present invention is to reduce the effect of the hysteresis of a scanning electromagnet so as to obtain a particle beam therapy system that realizes high-accuracy beam...
8405056 Ion acceleration system for medical and/or other applications  
The ion acceleration system or complex (T) for medical and/or other applications is composed in essence by an ion source (1), a pre-accelerator (3) and one or more linear accelerators or linacs...
8405045 Particle beam device with deflection system  
A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective...
8405043 Charged particle extraction device and method of design there for  
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied...
8405044 Achromatically bending a beam of charged particles by about ninety degrees  
Embodiments of the invention provide systems and methods for achromatically bending beam of charged particles by about 90° during radiation treatment. A system may include first, second, third,...
8405052 Ion implanter provided with beam deflector and asymmetrical einzel lens  
An ion implanter has a beam deflector having a pair of magnetic poles facing each other in a z direction, insulating members provided on the respective magnetic poles, at least one pair of...
8399852 Systems and methods for control of multiple charged particle beams  
The systems and methods described herein relate to the use of electrostatic elements or combinations of electrostatic and magnetic elements to confine charged particles in stable recirculating,...