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8648301 Particle beam system having a hollow light guide  
A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam...
8642978 Charged particle cancer therapy dose distribution method and apparatus  
The invention relates generally to treatment of solid cancers. More particularly, a method and apparatus for efficient radiation dose delivery to a tumor is described. Preferably, radiation is...
8642955 Toroidal ion trap mass analyzer with cylindrical electrodes  
A combination of electrodes that are cylindrical and an asymmetric arrangement of cylindrical and planar electrodes are used to create electric fields that compensate for toroidal curvature in a...
8642979 Radiotherapy device and method for balancing a radiotherapy device  
A radiotherapy device having a gantry rotatably mounted to the radiotherapy device with a bearing and a counterweight attached to the gantry. The counterweight has a spatial position relative to...
8642949 Efficient atmospheric pressure interface for mass spectrometers and method  
An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening...
8637820 Scanning electron microscope and inspection method using same  
Provided is a high-resolution scanning electron microscope with minimal aberration, and equipped with an electro-optical configuration that can form a tilted beam having wide-angle polarization...
8637835 Drawing apparatus, method of manufacturing article, and processing apparatus  
A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams includes: a blanking deflector located in a vacuum chamber and configured to blank each of the...
8637834 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements  
A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles,...
8637821 Blocking member for use in the diffraction plane of a TEM  
The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a...
8637819 Cross-section processing and observation apparatus  
Provided is a cross-section processing and observation apparatus, including a control portion for repeatedly executing a process including slice processing by an ion beam and acquisition of a SIM...
8637838 System and method for ion implantation with improved productivity and uniformity  
A scanning system including a scanning element, a beam profiler, analysis system, and a ZFE-limiting element, is disclosed. The scanning element is configured to scan an ion beam over an ion beam...
8637833 Synchrotron power supply apparatus and method of use thereof  
The invention comprises a charged particle cancer therapy system or synchrotron system using a single power supply electrically connected to a plurality of magnet sections to provide a uniform...
8633456 Method for centering an optical element in a TEM comprising a contrast enhancing element  
A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons...
8627822 Semi-vertical positioning method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a semi-vertical patient positioning, alignment, and/or control method and apparatus used in conjunction with charged particle or proton beam radiation therapy of cancerous...
8629417 Extreme ultraviolet light generation apparatus  
An extreme ultraviolet light generation apparatus used in combination with a laser system, the apparatus may include: a chamber provided with at least one inlet port for introducing a laser beam...
8624528 Method and apparatus coordinating synchrotron acceleration periods with patient respiration periods  
The invention relates generally to treatment of solid cancers. More particularly, the invention relates to enhancing synchrotron acceleration cycle usage efficiency by adjusting the synchrotron's...
8624180 Resolution enhancement for ion mobility spectrometers  
In an ion mobility spectrometer in which a gas pushes ions along a spectrometer axis against and over an electrical field barrier, the electric field barrier is generated with a plateau of...
8624478 High voltage shielding arrangement of a charged particle lithography system  
The invention relates to a high voltage shielding arrangement comprising a first metal part and a second metal part positioned in close vicinity to said first metal part. Said second metal part...
8624206 Pattern modification schemes for improved FIB patterning  
An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals....
8618516 Charged-particle beam exposure apparatus and method of manufacturing article  
A charged-particle beam exposure apparatus which includes a deflector that deflects a charged-particle beam, and a stage mechanism that drives a substrate, and draws a pattern on the substrate...
8618497 Drawing apparatus, method of manufacturing article, and information processing apparatus  
The present invention provides a drawing apparatus including a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, a plurality of...
8618499 Electron beam irradiation apparatus  
The present invention has for its object to provide an electron beam irradiation apparatus which can suppress influences the electric fields generated by a plurality of backscattered electron...
8618517 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Pattern measuring apparatus
 
An object of the present invention is to provide a pattern measuring apparatus which performs high-accuracy concavity/convexity determination (e.g., distinguishing between a line segment and...
8618496 Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams  
A charged particle system such as a multi beam lithography system. A manipulator device manipulates one or more charged particle beams. The manipulator device includes at least one through opening...
8618519 Energy degrader and charged particle irradiation system including the same  
An energy degrader includes: an attenuation member that attenuates energy of entering charged particles to a different amount of energy according to an incident position of the charged particles;...
8614429 Multi-axis/multi-field charged particle cancer therapy method and apparatus  
The invention relates to method and apparatus for treatment of solid cancer. More particularly, the invention comprises a multi-axis and/or multi-field charged particle cancer therapy system. The...
8610093 Direct write lithography system  
The invention pertains to a direct write lithography system comprising: A converter comprising an array of light controllable electron sources, each field emitter being arranged for converting...
8610082 Drawing apparatus and method of manufacturing article  
A drawing apparatus performs drawing on a substrate with charged particle beams. The drawing apparatus includes an irradiation optical system including a collimator lens; an aperture array...
8604411 Charged particle beam modulator  
The invention relates to a charged particle lithography system comprising a beam generator for generating a plurality of charged particle beamlets, a beam stop array and a modulation device. The...
8604431 Pattern-height measuring apparatus and pattern-height measuring method  
An electron beam is irradiated on an observation region of a sample surface. An image (SEM image) is acquired based on a detection signal of secondary electrons from a detector disposed obliquely...
8604444 Particle beam irradiation apparatus and particle beam therapy system  
The particle beam irradiation apparatus irradiates a charged particle beam accelerated by a accelerator onto an irradiation subject; the particle beam irradiation apparatus includes a scanning...
8598525 Particle beam system  
A particle beam system comprises a particle beam source for generating a particle beam, an objective lens for focusing the particle beam onto an object plane, wherein the objective lens comprises...
8598543 Multi-axis/multi-field charged particle cancer therapy method and apparatus  
The invention relates to a method and apparatus for treatment of solid cancer. More particularly, the invention comprises a multi-axis and/or multi-field raster beam charged particle cancer...
8598537 Particle beam irradiation system and particle beam therapy system  
The objective is to eliminate the effect of the hysteresis of a scanning electromagnet so that there is obtained a particle beam irradiation system that realizes high-accuracy beam irradiation....
8592777 Integrable magnetic field compensation for use in scanning and transmission electron microscopes  
An arrangement and a method for imaging, examining and processing a sample using electrons. The arrangement comprises an electron microscope for providing electrons, a chamber with a sample holder...
8592761 Monochromator for charged particle beam apparatus  
The monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus comprises a beam adjustment element, two Wien-filter type dispersion units and an...
8593051 Apparatus for producing a charged particle beam  
Apparatus for the production of a charged particle beam, comprising: an ion source plasma chamber (104), having a door (106), and an accelerator (102) mounted on the face of the door remote from...
8592776 Charged particle beam apparatus  
With a multi-beam type charged particle beam apparatus, and a projection charged particle beam apparatus, in the case of off-axial aberration corrector, there is the need for preparing a multitude...
8586923 Low-voltage transmission electron microscopy  
Embodiments of the invention relate to electron microscopy. Example embodiments relate to an apparatus including a first electron beam source, a second electron beam source, and a receiving unit....
8586951 Multi charged particle beam writing apparatus and multi charged particle beam writing method  
In accordance with one aspect of this invention, a multi charged particle beam writing apparatus includes an aperture member, in which a plurality of openings are formed, configured to form...
8586941 Particle beam therapy system and adjustment method for particle beam therapy system  
A particle beam therapy system is provided with high irradiation flexibility that can reduce the amount of irradiation onto normal tissue. There are provided (i) a scanning electromagnet that...
8586949 Charged particle lithography system with intermediate chamber  
A charged particle lithography system for transferring a pattern onto the surface of a target, comprising a main vacuum chamber, a source chamber and an intermediate chamber, both located in the...
8581484 Liquid metal ion gun  
A liquid metal ion gun 3 includes a liquid metal ion source 31 and a beam limiting aperture 33. The liquid metal ion source 31 includes a reservoir 36 and an emitter 35. The reservoir 36 is made...
8581218 Treatment planning system, device for calculating a scanning path and particle therapy system  
In a particle therapy treatment planning system for creating treatment plan data, the movement of a target (patient's affected area) is extracted from plural tomography images of the target, and...
8581215 Charged particle cancer therapy patient positioning method and apparatus  
The invention comprises a patient positioning method and apparatus used in conjunction with multi-axis charged particle or proton beam radiation therapy of cancerous tumors. The patient...
8575563 Compact isocentric gantry  
A gantry for administering proton beam therapy with improvements which reduce the size, weight, costs and radiation beam loss associated with proton beam therapy systems currently commercially...
8575867 Electric field-guided particle accelerator, method, and applications  
A charged particle accelerator having a curvilinear beam trajectory maintained solely by a laterally directed, constant electric field; requiring no magnetic field. A method for controlling the...
8575564 Particle beam irradiation apparatus and particle beam therapy system  
When the IMRT technology for a radiation therapy system utilizing an X-ray or the like is applied as it is to a particle beam therapy system having a conventional wobbler system, there is posed...
8569712 Beam blanker for interrupting a beam of charged particles  
The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains...
8569717 Intensity modulated three-dimensional radiation scanning method and apparatus  
The invention relates to treatment of solid cancers and more particularly to a method and apparatus correlating proton beam intensity with proton delivery efficiency, optionally in a raster beam...