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8723114 Sequential radial mirror analyser  
A sequential radial mirror analyzer (RMA) (100) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen (112) is disclosed. The RMA...
8723135 Ion beam bending magnet for a ribbon-shaped ion beam  
An ion beam bending magnet provides a curved path through the magnet for bending a ribbon-shaped ion beam having its major cross-sectional dimension normal to the bending plane of the magnet. The...
8716672 Charged particle optical system, drawing apparatus, and method of manufacturing article  
The present invention provides a charged particle optical system which emits a charged particle beam, the system including an electrostatic lens, and a grid electrode opposed to the electrostatic...
8716673 Inductively coupled plasma source as an electron beam source for spectroscopic analysis  
A single column inductively coupled plasma source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector,...
8716671 Enhanced integrity projection lens assembly  
The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for...
8716679 Beam irradiation apparatus and beam irradiation control method  
The beam irradiation apparatus is featured by including a transport pipe which is vacuum-evacuated to be used as a transport channel of a beam taken out from an accelerator, a quadrupole magnet...
8710451 Ion beam system and method of operating ion beam system  
An ion beam system comprises a voltage supply system 7 and at least one beam deflector 39 having a plurality of first defection electrodes 51a, 51b, 51c and a plurality of second deflection...
8710455 Charged-particle beam lens  
A charged-particle beam lens includes a plate-like anode, a plate-like cathode, and an insulator disposed between the anode and the cathode. The insulator, the anode, and the cathode have a...
8710462 Charged particle cancer therapy beam path control method and apparatus  
The invention comprises a charged particle beam path coupling an injector, synchrotron accelerator, beam transport system, targeting system, and/or patient interface method and apparatus....
8710453 Charged particle source with multiple selectable particle emitters  
A charged particle source for a focused particle beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM),...
8710452 Charged particle source with integrated electrostatic energy filter  
A charged particle filter with an integrated energy filter, in which the charged particle emitter, the focusing electrodes, and the deflection electrodes are arranged round a straight axis. Where...
8709572 Fabrication of high gradient insulators by stack compression  
Individual layers of a high gradient insulator (HGI) are first pre-cut to their final dimensions. The pre-cut layers are then stacked to form an assembly that is subsequently pressed into an HGI...
8710467 Multi charged particle beam writing apparatus and multi charged particle beam writing method  
In accordance with one aspect of this invention, a multi charged particle beam writing apparatus includes an aperture member, in which a plurality of openings are formed, configured to form...
8710454 High gradient lens for charged particle beam  
Methods and devices enable shaping of a charged particle beam. A dynamically adjustable electric lens includes a series of alternating a series of alternating layers of insulators and conductors...
8704193 RF transformer  
An RF transformer for supplying power as part of a tank circuit, comprising: a primary side, having at least one main winding and at least one shorting winding, the at least one main winding being...
8704175 Scanning electron microscope  
Provided is a scanning electron microscope equipped with a high-speed and high-precision astigmatism measuring means to be used when both astigmatism generated by an electron-beam column and...
8704192 Drawing apparatus and method of manufacturing article  
A drawing apparatus includes an aperture array, a lens array configured to form a plurality of crossovers of a plurality of charged particle beams from the aperture array, and a projection system...
8704197 Accelerator and method for irradiating a target volume  
A device operable to accelerate a particle beam to an energy for irradiating a target volume. The device includes a particle accelerator operable in a first working phase in which particles of the...
8698095 Charged particle beam drawing apparatus and article manufacturing method  
The charged particle beam drawing apparatus of the present invention performs drawing to a substrate with a plurality of charged particle beams. The drawing apparatus includes an electron lens...
8698093 Objective lens with deflector plates immersed in electrostatic lens field  
One embodiment relates to an objective lens utilizing magnetic and electrostatic fields which is configured to focus a primary electron beam onto a surface of a target substrate. The objective...
8692195 Charged particle radiation device  
The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the...
8692218 Charged particle beam exposure apparatus  
An exposure apparatus which draws a pattern on a substrate with a charged particle beam is disclosed. The exposure apparatus includes a blanker which controls, in accordance with a dose pattern...
8692219 Method and apparatus for growing a III-nitride layer  
A method that includes implantation of dopants while a III-nitride body is being grown on a substrate, and an apparatus for the practice of the method.
8686374 Drawing apparatus, and method of manufacturing article  
The present invention provides a drawing apparatus including a generation device configured to generate drawing data, a blanking device configured to blank a beam, and a blanking controller...
8680479 Charged particle analyzer  
An ion entrance opening (15) for introducing ions into an orbit (C) along a sector-shaped electric field entrance optical axis (A) from outside is provided in an outer electrode (11a) of a main...
8680482 Alignment of an atom beam with an electric field in the production of a charged particle source  
A method for aligning the axis of an atom beam with the orientation of an electric field at a particular location within an enclosure for use in creating a charged particle source by photoionizing...
8680480 Beam control assembly for ribbon beam of ions for ion implantation  
A beam control assembly to shape a ribbon beam of ions for ion implantation includes a first bar, second bar, first coil of windings of electrical wire, second coil of windings of electrical wire,...
8674293 Multireflection time-of-flight mass spectrometer  
A method of reflecting ions in a multireflection time of flight mass spectrometer is disclosed. The method includes guiding ions toward an ion mirror having multiple electrodes, and applying a...
8674319 Beam monitor system and particle beam irradiation system  
Disclosed is a beam monitor system in which signals outputted from a plurality of wires are divided in a multi-wire type monitor for measuring a beam profile of a charged particle beam, an...
8674318 Particle beam irradiation apparatus and particle beam therapy system  
The objective of the present invention is to eliminate noise caused by driving a ridge filter and to achieve a uniform dose distribution without making a patient sense discomfort or anxiety. There...
8674317 Sample surface inspection apparatus and method  
The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the...
8674320 Deconvolution of time-gated cathodoluminescence images  
A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating...
8669517 Mass analysis variable exit aperture  
A method and apparatus is provided for reducing unwanted isotopes of an ion implantation species from an ion beamline. The apparatus herein disclosed is a mass analysis variable exit aperture that...
8669537 Charged particle beam writing apparatus and method  
A charged particle beam writing apparatus and a charged particle beam writing method capable of shortening the time necessary to generate shot data and improving writing throughput. A graphic...
8669534 Electrostatic lens for charged particle radiation  
Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident...
8669535 Electron gun  
The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large...
8664591 Adjusting energy of ions ejected from ion trap  
An ion trap includes a trap exit at which an ion energy adjusting device is located. The adjusting device may be configured for focusing a beam of ions ejected from the trap, reducing the energy...
8664620 Particle beam rotational irradiation apparatus  
The particle beam rotational irradiation apparatus is provided with an irradiation nozzle that irradiates a charged particle beam, a beam transport unit that transports the charged particle beam...
8664599 Electron microscope  
An electron microscope is offered which facilitates aberration correction even during high-magnification imaging. The microscope has a spherical aberration corrector, a transfer lens system...
8664619 Hybrid electrostatic lens for improved beam transmission  
A hybrid electrostatic lens is used to shape and focus an ion beam. The hybrid electrostatic lens comprises an Einzel lens defined by an elongated tube having a first and second ends and a first...
8658991 Particle beam irradiation apparatus utilized in medical field  
In order to obtain a particle beam irradiation apparatus that enlarges the dose distribution of beam spots while suppressing a decrease of the maximum available range of a charged particle beam,...
8658970 Ion tunnel ion guide  
An ion guide is disclosed comprising a plurality of axial groupings of electrodes, wherein each axial grouping of electrodes comprises a ring or annular electrode which has been radially segmented...
8658984 Charged particle analysers and methods of separating charged particles  
A method of separating charged particles using an analyzer is provided, the method comprising: causing a beam of charged particles to fly through the analyzer and undergo within the analyzer at...
8658985 Drawing apparatus and method of manufacturing article  
The present invention provides a drawing apparatus including a blanker including a plurality of deflectors configured to respectively deflect the plurality of charged particle beams, and a...
8653472 Electromagnetic field application system  
The present invention is based on the property that the electric and magnetic fields are independent of each other and normal to each other and the property that the deflection of a charged...
8653490 Ion implanter  
The ion implanter includes a deflecting electrode and a shield member. The ion beam has a ribbon shape. The deflecting electrode deflects at least a part of the ion beam in a long side direction...
8653474 Charged particle extraction device and method of design there for  
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied...
8653473 Charged particle beam irradiation device  
A charged particle beam irradiation device includes a particle accelerator that accelerates charged particles and ejects a charged particle beam, a cylindrical outer shell part that is capable of...
8648318 Multiple beam charged particle optical system  
The invention relates to a multiple beam charged particle optical system, comprising an electrostatic lens structure with at least one electrode, provided with apertures, wherein the effective...
8648315 Accelerator having a multi-channel micro-collimator  
An ion accelerator includes a plasma ion source and a micro-collimator. The micro-collimator has a plurality of channels. The length-to-width ratio of each channel is greater than five, and the...