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8890094 Projection lens arrangement  
A projection lens arrangement for a charged particle multi-beamlet system, the projection lens arrangement including one or more plates and one or more arrays of projection lenses. Each plate has...
8884246 Charged particle optical system and scribing apparatus  
An optical system for a charged particle includes a first member though which a charged particle beam is transmitted and a second member to control optically the charged particle beam transmitted...
8884253 System for magnetic shielding  
The invention relates to a system for magnetically shielding a charged particle lithography apparatus. The system comprises a first chamber, a second chamber and a set of two coils. The first...
8884245 Corrector for the correction of chromatic aberrations in a particle-optical apparatus  
The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of...
8884254 Charged particle beam writing apparatus  
A multi charged particle beam writing apparatus includes a stage to mount a target object thereon, an emission unit to emit a charged particle beam, an aperture member, in which a plurality of...
8884244 Dual mode ion implanter  
A system for dual mode operation in an ion implanter may include a movable beam blocker to adjust beam width of an ion beam in a first direction perpendicular to a first local direction of...
8884225 Sample observing device and sample observing method  
An electron beam inspection device observes a sample by irradiating the sample set on a stage with electron beams and detecting the electron beams from the sample. The electron beam inspection...
8878142 Charged particle beam irradiation apparatus  
A charged particle beam irradiation apparatus includes: a transport line configured to transport a charged particle beam; and a rotating gantry rotatable around a rotation axis, wherein the...
8878464 Laser accelerator driven particle brachytherapy devices, systems, and methods  
A laser accelerator driven electronic brachytherapy system, device, and method for particle based treatment of a tumor or other human diseases and conditions.
8878143 Electron beam lithography device and lithographic method  
A high-accuracy and high-speed lithographic pattern is acquired by forming a square lattice matrix beam group with an interval which is an integral multiple of a beam size in a two-dimensional...
RE45206 Lithography system, sensor and measuring method  
Lithography system, sensor and method for measuring properties of a massive amount of charged particle beams of a charged particle beam system, in particular a direct write lithography system, in...
8872126 Target supply device and extreme ultraviolet light generation apparatus  
A target supply device 4 may include a tank 51, formed of a metal, that holds a target material, an insulating member 62 that makes contact with at least part of the periphery of the tank 51, and...
8872139 Settling time acquisition method  
A settling time acquisition method includes writing at least one reference pattern formed by at least one shot of a charged particle beam, writing an evaluation pattern, which has been formed by...
8866109 Charged-particle beam irradiation device  
A charged-particle beam irradiation device, which irradiates an irradiation target with a charged-particle beam, includes a transport line that transports the charged-particle beam and a rotating...
8866102 Electron beam device with tilting and dispersion compensation, and method of operating same  
An electron beam device 100 includes: a beam emitter 102 for emitting a primary electron beam 101; an objective electron lens 127 for focusing the primary electron beam 101 onto a specimen 130,...
8866074 Tandem mass spectrometer and mass spectrometric method  
An ion trap is provided between a collision cell and a time-of-flight mass separator. During a time period in which precursor ions derived from the same compound are selected with a quadrupole...
8866103 Charged particle energy analysers and methods of operating charged particle energy analysers  
A charged particle energy analyzer (10) includes inner and outer cylindrically symmetric electrodes (11,12) arranged coaxially on a longitudinal axis (z-z) of the analyzer. A position-sensitive...
8866077 Mass spectrometer  
A mass spectrometer having a multi-stage differential pumping system with an ion lens provided in a partition wall separating a second intermediate vacuum chamber and a third intermediate vacuum...
8859983 Method of and system for exposing a target  
The invention relates to a method of exposing a target by means of a plurality of beamlets. First, a plurality of beamlets is provided. The beamlets are arranged in an array. Furthermore, a target...
8847180 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article  
A charged particle beam apparatus, which processes an object with a charged particle beam, includes: a detector having a detection surface, and configured to detect a charged particle beam...
8847172 Method for axial alignment of charged particle beam and charged particle beam system  
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts...
8841631 Apparatus and techniques for controlling ion angular spread  
An electrostatic scanner to scan an ion beam in an ion implanter. The electrostatic scanner may include a first scan plate having a first inner surface that faces the ion beam, the first inner...
8841638 Particle beam therapy system  
An particle beam therapy system comprises a scanning electromagnet for scanning a particle beam which travels in a vacuum duct so as to irradiate an irradiation object and an irradiation unit...
8841636 Modulation device and charged particle multi-beamlet lithography system using the same  
The invention relates to a charged-particle multi-beamlet lithography system for transferring a pattern onto the surface of a target. The system includes a beam generator, a beamlet blanker array,...
8841630 Corrector for axial aberrations of a particle-optical lens  
Commercially available High Resolution Transmission Electron Microscopes (HR-TEM) and Scanning Transmission Electron Microscopes (HR-STEM) are nowadays equipped with correctors for correcting the...
8835869 Ion sources and methods for generating an ion beam with controllable ion current density distribution  
Ion sources and methods for generating an ion bean with a controllable ion current density distribution. The ion source includes a discharge chamber having an optical grid position proximate at a...
8835884 Charged particle beam apparatus with cleaning photo-irradiation apparatus  
A charged particle beam apparatus including a charged particle emission gun with which cleaning of a tip is possible without stopping the operation of the charged particle emission gun for a long...
8835867 Multi-axis magnetic lens for focusing a plurality of charged particle beams  
A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or...
8835882 Real time monitoring ion beam  
The invention provides a method to real time monitor the ion beam. Initially, turn on an ion implanter which has a wafer holder, a Faraday cup and a measurement device positioned close to a...
8835881 Drift correction method and pattern writing data generation method  
A writing area of a sample is divided into a plurality of stripes having a width corresponding to an area density of a pattern to be written on the sample with a charged-particle beam. The writing...
8835879 Reduction of deposition by separation of ion beam and neutral flow  
Ion implantation systems that separate the flow of ions from the flow of neutral particles are disclosed. The separation of neutral particles from ions can be achieved by manipulating the flow of...
8835868 Multi charged particle beam writing apparatus  
A multi charged particle beam writing apparatus includes a stage to mount a target object thereon and to be movable, an emission unit to emit a charged particle beam, an aperture member, in which...
8835841 Mass spectrometer and mass spectrometry  
A mass spectrometer possessing both high resolution and durability in a simple, compact structure compared to mass spectrometers of the related art, and characterized in possessing a linear ion...
8829465 Charged particle beam lens having a particular support electrically insulating first and second electrodes from each other  
A charged particle beam lens includes a first electrode including a surface having at least one aperture and a second electrode including a surface having at least one aperture. A support...
8829436 Phase plate and method of fabricating same  
A method of fabricating a phase plate, for use in a transmission electron microscope, with simple process steps is offered. The method includes a step (S100) of forming a first layer on a...
8829461 Scanning apparatus, drawing apparatus, and method of manufacturing article  
A scanning apparatus which performs scan on an object with a charged particle beam includes: a blanking deflector configured to individually blank a plurality of charged particle beams based on...
8829463 Ion carpet for mass spectrometry having progressive electrodes  
An ion transport apparatus for a mass- or ion-mobility-spectrometer comprises: (a) a plurality of strip electrodes in a series on a flat substrate; (b) an ion outlet aperture in the substrate...
8829464 Ion guide array  
An ion guide array is disclosed comprising a first ion guide section and a second ion guide section. Each ion guide section may comprise a plurality of electrodes having an aperture through which...
8822965 Charged particle beam irradiation apparatus  
A charged particle beam irradiation apparatus includes: a scanning electromagnet that scans a charged particle beam; and a degrader that is provided on a downstream side of the scanning...
8822946 Systems and methods of varying charged particle beam spot size  
Methods and devices enable shaping of a charged particle beam. A modified dielectric wall accelerator includes a high gradient lens section and a main section. The high gradient lens section can...
8822920 Charged particle beam apparatus  
In recent years, in association with the miniaturization and high integration of semiconductor manufacturing processes, there have been arising many cases where observation target portions are...
8822945 Focused ion beam apparatus  
A focused ion beam apparatus includes a gas field ion gun unit having an emitter, an ion source gas supply unit for supplying different ion source gases to the emitter, a heater for heating the...
8822913 Inductively-coupled plasma ion source for use with a focused ion beam column with selectable ions  
An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species...
8822911 Focused ion beam apparatus and method of adjusting ion beam optics  
Provided is a focused ion beam apparatus including a control portion configured to: store in advance, in a condenser voltage table, a calculation value of a condenser voltage for obtaining a...
8816297 Microfabricated high-bandpass foucault aperture for electron microscopy  
A variant of the Foucault (knife-edge) aperture is disclosed that is designed to provide single-sideband (SSB) contrast at low spatial frequencies but retain conventional double-sideband (DSB)...
8816276 Electron beam writing apparatus and electron beam writing method  
An electron beam writing apparatus comprising a XY stage that a sample is placed on, an electron optical column, an electron gun emitting an electron beam disposed in the optical column, an...
8809799 Charged particles beam apparatus and charged particles beam apparatus design method  
Problems to be solved: To obtain higher brightness than Langmuir limit. Adjust brightness to the optimum value. Method of resolution: To obtain such beams, the following means and methods are...
8803108 Method for acquiring settling time  
A method for acquiring a settling time according to an embodiment, includes writing a plurality of first patterns, arranged in positions apart from each other by a deflection movement amount, by...
8803103 Inspection system by charged particle beam and method of manufacturing devices using the system  
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam...
8803086 Triple quadrupole mass spectrometer  
Elements are arranged so that a straight ion-beam axis extending from an ion source through a first ion lens and a front-stage quadrupole mass filter and a straight ion-beam axis extending through...