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8957368 Ion tunnel ion guide  
An ion guide is disclosed comprising a plurality of axial groupings of electrodes, wherein each axial grouping of electrodes comprises a ring or annular electrode which has been radially segmented...
8952340 High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision  
A high-frequency acceleration type ion acceleration and transportation apparatus is a beamline after an ion beam is accelerated by a high-frequency acceleration system having an energy spread with...
8952344 Techniques for processing photoresist features using ions  
A method of treating a substrate includes directing first ions over a first range of angles to one or more photoresist features disposed on the substrate, the first ions effective to generate an...
8952339 Chromatic aberration corrector and method of controlling same  
A chromatic aberration corrector and method of controlling this chromatic aberration corrector is offered. The corrector has first and second multipole lenses for producing quadrupole fields and...
8947021 Accelerator and cyclotron  
An accelerator includes an inflector through which a beam entering from an ion source passes and which introduces the beam to an acceleration orbit. The inflector includes a beam convergence unit...
8946659 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size  
An apparatus for transporting a charged particle beam is provided. The apparatus may include: means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the...
8944679 Electrode member, electron energy analyzer, photoelectron energy analyzer, and temperature measuring apparatus  
An electrode member has a plurality of spherical electrode sections wherein the radiuses of the spherical sections are different from each other. The spherical electrode sections are disposed in a...
8946649 Charged particle beam device having an energy filter  
Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles...
8941085 Electron beam lithography systems and methods including time division multiplex loading  
The present disclosure provides a systems and methods for e-beam lithography. One system includes an electron source operable to produce a beam and an array of pixels operable to pattern the beam....
8941077 Deceleration apparatus for ribbon and spot beams  
A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps...
8941086 Charged particle beam irradiation apparatus  
A charged particle beam irradiation apparatus includes: an irradiation section configured to irradiate an irradiated body with a charged particle beam; a gantry in which an irradiation section is...
8933424 Method for measuring transverse beam intensity distribution  
An ion implantation system and method are provided where an ion source generates an ion and a mass analyzer mass analyzes the ion beam. A beam profiling apparatus translates through the ion beam...
8933425 Apparatus and methods for aberration correction in electron beam based system  
One embodiment relates to an apparatus for aberration correction in an electron beam lithography system. An inner electrode surrounds a pattern generating device, and there is at least one outer...
8933423 Charged particle beam device and sample production method  
Provided is a technique to perform FIB milling, in spite of its sample dependency, effectively into a desired shape without influences of individual differences among operators. A charged particle...
8933420 Particle beam therapy system  
A particle beam therapy system comprising a treatment table, a treatment table control unit and an irradiation control unit configured to output an instruction for controlling the treatment table...
8933414 Focused ion beam low kV enhancement  
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential...
8927941 Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens  
A multi charged particle beam writing apparatus according to the present invention includes an aperture member, in which a plurality of openings are formed, to form multiple beams, a blanking...
8927940 Abridged multipole structure for the transport, selection and trapping of ions in a vacuum system  
An abridged multipole structure for the transport and selection of ions along a central axis in a vacuum system is constructed from a plurality of rectilinear electrode structures, each having a...
8927948 Particle beam system and method for operating the same  
A particle beam system includes a charged particle beam source, a beam blanking module connectable to a data network, a focusing lens, a first beam deflection module connectable to the data...
8927931 Scanning electron microscope  
In conventional electron microscopes, orthogonality has been defined for each electron microscope individually in such a manner that a lattice sample is observed, and correction is applied to a...
8921804 High brightness electron gun with moving condenser lens  
A condenser lens arrangement for an electron beam system is described. The condenser lens arrangement includes a magnetic condenser lens adapted for generating a magnetic condenser lens field, the...
8921803 Electrostatic lenses and systems including the same  
A system includes an electrostatic lens in a path between a charged particle source and a detector. The electrostatic lens includes: a first electrode having a first aperture in the path aligned...
8921787 Incoherent transmission electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a...
8921805 Ion beam system and method of operating an ion beam system  
An ion beam system comprises a voltage supply system 7 and at least one beam deflector 39 having at least one first deflection electrode 51a, 51b, 51c and plural second deflection electrodes 52a,...
8916837 Charged particle lithography system with intermediate chamber  
A charged particle lithography system for transferring a pattern onto the surface of a target, comprising a source for generating a charged particle beam, a first chamber housing the source, a...
8916821 Assemblies for ion and electron sources and methods of use  
Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to...
8916841 Particle therapy system  
A particle therapy system is capable of reducing an increase in treatment time caused by the initialization operation of magnets in the execution of the scanning irradiation method successively...
8916843 Inner gantry  
A system includes a patient support and an outer gantry on which an accelerator is mounted to enable the accelerator to move through a range of positions around a patient on the patient support....
8912505 Electron beam focusing electrode and electron gun using the same  
An electron beam focusing electrode and an electron gun using the same may include a plate having a polygonal through-hole; at least a projecting portion formed on at least one side of the...
8912513 Charged particle beam writing apparatus and charged particle beam writing method  
A charged particle beam writing apparatus according to an embodiment, includes a laser displacement meter configured to measure a position of a substrate to be written; a correction unit...
8907306 Multi charged particle beam writing apparatus and multi charged particle beam writing method  
In accordance with one aspect of this invention, a multi charged particle beam writing apparatus includes an aperture member, in which a plurality of openings are formed, configured to form...
8907278 Charged particle beam applied apparatus, and irradiation method  
Provided is a charged particle beam applied apparatus for observing a sample, provided with: a beam-forming section that forms a plurality of charged particle beams on a sample; an energy control...
8907297 Multi-dimensional photocathode system  
A photocathode system includes a plurality of photocathodes, and at least one combining device. The photocathodes have individually adjustable voltages, and each photocathode generates an...
8907300 System and method for plasma control using boundary electrode  
An ion source may include a chamber configured to house a plasma comprising ions to be directed to a substrate and an extraction power supply configured to apply an extraction terminal voltage to...
8907298 Method for axial alignment of charged particle beam and charged particle beam system  
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts...
8907308 Method and apparatus for verifying an irradiation field  
A radiation therapy device includes an irradiation field limiting apparatus. The irradiation field limiting apparatus includes a collimator for adjusting the irradiation field, and a verification...
8907295 Hybrid electrostatic lens with increased natural frequency  
A composite electrostatic rod may include a body comprising a length L and cross sectional area A. The body may include an outer portion comprising a first material, and a core comprising a second...
8905369 Vibration isolation module and substrate processing system  
The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a...
8907311 Charged particle radiation therapy  
A system includes a patient support and an outer gantry on which an accelerator is mounted to enable the accelerator to move through a range of positions around a patient on the patient support....
8907309 Treatment delivery control system and method of operation thereof  
The invention relates to a method and apparatus for control of a charged particle cancer therapy system. A treatment delivery control system is used to directly control multiple subsystems of the...
8907296 Charged particle beam system aperture  
An improved beam-defining aperture structure and method for fabrication is realized. An aperture opening is made in a thin conductive film positioned over a cavity in a support substrate, where...
8901509 Multi-axis charged particle cancer therapy method and apparatus  
The invention comprises a multi-axis charged particle irradiation method and apparatus. The multi-axis controls includes separate or independent control of one or more of horizontal position,...
8901519 Quick regulation of the range of high-energy ion beams for precision irradiation of moving target volumes  
The invention concerns a device and a process for adjusting the range of an ion beam, in particular for irradiation in tumor therapy. For this purpose, first the reference position of a target...
8901510 Particle beam device having a detector arrangement  
A particle beam device has a first column with a first beam axis, the first column having a first particle beam generator and a first objective lens for focusing the first particle beam on an...
8901936 Array test device, method for testing an organic light emitting display device, and method for manufacturing the organic light emitting display device  
A method for testing an array for a pixel circuit of an organic light emitting diode display, which includes a first transistor that transmits a driving current corresponding to a data signal to...
8901511 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Charged particle beam lens and exposure apparatus using the same
 
An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second...
8895920 Mass spectrometer with beam expander  
A mass spectrometer is disclosed comprising a RF confinement device, a beam expander and a Time of Flight mass analyzer. The beam expander is arranged to expand an ion beam emerging from the RF...
8895945 Dose measurement device for plasma-immersion ion implantation  
The present invention relates to a dose-measurement device for ion implantation, the device comprising a module CUR for estimating implantation current, a secondary electron detector DSE, and a...
8895922 Electron beam apparatus  
A method suitable for preparing a specimen for inspection, the method comprising the steps of: irradiating a photocathode so that the photocathode emits electrons from a surface of the...
8890069 Method for detecting defect of substrate  
A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically...