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8148698 Charged particle beam writing apparatus  
A blanking deflector 23 is of the coaxial type and includes a rod-like inner electrode 231 and a cylindrical outer electrode 232 enclosing the inner electrode 231 such that an air gap through...
8148679 Efficient atmospheric pressure interface for mass spectrometers and method  
An ion transfer arrangement for transporting ions between higher and lower pressure regions of the mass spectrometer comprises an ion transfer conduit 60. The conduit 60 has an inlet opening...
8148680 Ion transfer arrangement with spatially alternating DC and viscous ion flow  
A method of transporting gas and entrained ions between higher and lower pressure regions of a mass spectrometer comprises providing an ion transfer conduit 60 between the higher and lower...
8143588 Deflector array, exposure apparatus, and device manufacturing method  
A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the...
8138484 Magnetic scanning system with improved efficiency  
Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner that includes first and second magnetic elements having a beam path region therebetween. One or...
8134130 Ion source with corner cathode  
An ion source may include first, second, and third electrodes. The first electrode may be a repeller having a V-shaped groove. The second electrode may be an electron emitter filament disposed...
8130045 Digital self excited loop  
A process that provides the ability to incorporate a self exciting loop (SEL) algorithm into a digital LLRF system. The present digital SEL provides for conversion from the Cartesian domain to the...
8129677 Method and apparatus for surface desorption ionization by charged particles  
An apparatus and method for generating analyte ions from a sample. An ion generating device is provided having a chamber with an outlet and a surface having a material and means for applying a...
8129694 Negative ion beam source vacuum method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a negative ion beam source vacuum method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton...
8129699 Multi-field charged particle cancer therapy method and apparatus coordinated with patient respiration  
The invention relates generally to treatment of solid cancers. More particularly, the invention relates to a multi-field imaging and/or a multi-field charged particle cancer therapy method and...
8129693 Charged particle beam column and method of operating same  
A charged particle beam column includes a charged particle beam source to generate a charged particle beam; an objective lens to focus the charged particle beam in an object plane; a first...
8129695 System and method for controlling deflection of a charged particle beam within a graded electrostatic lens  
A method and apparatus for controlling deflection, deceleration, and focus of an ion beam are disclosed. The apparatus may include a graded deflection/deceleration lens including a plurality of...
8124947 Ion implanter having combined hybrid and double mechanical scan architecture  
A system and method are provided for implanting ions into a workpiece in a plurality of operating ranges. A desired dosage of ions is provided, and a spot ion beam is formed from an ion source and...
8124940 Charged particle beam apparatus  
Disclosed herein is a scanning electron microscope having a function for positioning an object point of an objective lens at a defined position even under an electronic optical condition in which...
8110813 Charged particle optical system comprising an electrostatic deflector  
A charged particle optical system comprising a beamlet generator for generating a plurality of beamlets of charged particles and an electrostatic deflector for deflecting the beamlets. The...
8110820 Ion beam apparatus and method for ion implantation  
A multipurpose ion implanter beam line configuration constructed for enabling implantation of common monatomic dopant ion species and cluster ions, the beam line configuration having a mass...
8106366 Ion beam control apparatus and method  
Provided are an ion beam control apparatus and a control method for controlling an ion beam energy expansion level and an ion beam size in a radial direction. An ion beam control apparatus Sa is...
8106358 Layered scanning charged particle microscope with differential pumping aperture  
A scanning charged particle apparatus includes a layered charged particle beam column package; a sample holder; and a layered differential pumping aperture that assists in maintaining two...
8101911 Method and device for improved alignment of a high brightness charged particle gun  
A charged particle gun alignment assembly for emitting a charged particle beam along an optical axis of a charged particle beam device is described. The charged particle gun alignment assembly is...
8097866 Apparatus for measuring beam characteristics and a method thereof  
An apparatus and a method for detecting particle beam characteristics are disclosed. In one embodiment, the apparatus may have a body including a first end and second end and at least one detector...
8097848 Scanning electron microscope  
In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM...
8093552 Electric field separator device and process  
A process and device is provided for the separation of electronegative molecules from non electronegative molecules using electric fields. The molecules are ionized in a non thermal discharge...
8093565 Wind and temperature spectrometer with crossed small-deflection energy analyzer  
A wind and temperature spectrometer (WTS) may detect the angular and energy distributions of neutral atoms/molecules and ions in two mutually perpendicular planes. The measured energy distribution...
8093563 Ion beam stabilization  
Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
8093564 Ion beam focusing lens method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises an ion beam focusing method and apparatus used as part of an ion beam injection system, which is used in conjunction with multi-axis charged particle or proton beam...
8089054 Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system  
The invention comprises a charged particle beam acceleration and/or extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel...
8089051 Electron reflector with multiple reflective modes  
One embodiment relates to a method of controllably reflecting electrons from an array of electron reflectors. An incident electron beam is formed from an electron source, and the incident beam is...
8089052 Ion source with adjustable aperture  
An ion implanter system including an ion source for use in creating a stream or beam of ions. The ion source has an ion source chamber housing that at least partially bounds an ionization region...
8084749 Electrode for influencing ion motion in mass spectrometers  
An electrode for influencing ion motion in mass spectrometers, having a dielectric substrate and a conducting layer on portions of the substrate, wherein peripheral borders, edges or convex shapes...
8084751 Detection arrangements in mass spectrometers  
An approach to extending the dynamic range of the detector of a mass spectrometer is described. In one embodiment, in the case of high intensity beams, means are provided to deflect the ion beam,...
8084750 Curved ion guide with varying ion deflecting field and related methods  
An ion guide includes a plurality of curved electrodes and an ion deflecting device. The electrodes are arranged about and radially spaced from a central curved axis, and circumscribe a curved ion...
8080809 Charged particle beam writing apparatus and method thereof  
A charged particle beam writing apparatus includes a unit emitting a charged particle beam, a stage on which a target workpiece to be written is placed, a unit correcting a reference position of a...
8080790 Scanning electron microscope  
An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up,...
8076649 Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam  
A charged particle beam writing apparatus includes a stage on which a target object is placed; an emitting unit configured to emit a charged particle beam to the stage side; a blocking unit...
8076642 Electron beam apparatus and method of operating the same  
An electron beam apparatus is offered which can well detect backscattered electrons or both backscattered electrons and secondary electrons if an electron detector is disposed above an objective...
8071955 Magnetic deflector for an electron column  
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or...
8071943 Mask inspection apparatus and image creation method  
Provided is a mask inspection apparatus including: emitting unit for emitting electron beams onto a sample; electron detecting unit for detecting the quantity of electrons produced, by the...
8071954 Hybrid phase plate  
The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result...
8071942 Sample holder apparatus to reduce energy of electrons in an analyzer system and method  
A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a...
8071964 System and method of performing uniform dose implantation under adverse conditions  
An ion implantation system and associated method includes a scanner configured to scan a pencil shaped ion beam into a ribbon shaped ion beam, and a beam bending element configured to receive the...
8067733 Scanning electron microscope having a monochromator  
A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron...
8067747 Parallel plate electrode arrangement apparatus and method  
A system for guiding an ion beam along an axis (Z), comprises at least one section having upper flat plate strip electrodes (Iu, 2u, 3u, 4u and 5u) and lower flat plate strip electrodes (Id, 2d,...
8063381 Achromatic and uncoupled medical gantry  
A medical gantry that focus the beam from the beginning of the gantry to the exit of the gantry independent of the rotation angle of the gantry by keeping the beam achromatic and uncoupled, thus,...
8058626 Method and apparatus for modifying a ribbon-shaped ion beam  
A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending...
8048329 Methods for implementing highly efficient plasma traps  
A method for minimizing microwave leakage into processing chamber of a microwave plasma system is provided. The method includes securing plasma traps to a plasma tube assembly, which is a...
8049181 Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system  
A lithography method and system have means for determining a convergence value dc from a relation of beam current to beam position drift (or beam dimension drift) produced in the past; means for...
8049187 Charged particle beam irradiating apparatus  
The present invention provides a charged particle beam irradiating apparatus capable of irradiating a charged particle beam using both a wobbler method and a scanning method. A charged particle...
8049180 Achromatic mass separator  
An ion beam device is described. The ion beam device includes an ion beam source for generating an ion beam, the ion beam being emitted along a first axis, an aperture unit adapted to shape the...
8044368 Lens coil cooling of a magnetic lens  
A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic...
8044351 Micro-column with simple structure  
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the...