|
Match
|
Document |
Document Title |
|
|
8183526 |
Mirror monochromator for charged particle beam apparatus
One embodiment relates to an apparatus for generating a charged particle beam with reduced energy width. A charged particle source is configured to generate a charged particle beam with a range of...
|
|
|
8183539 |
High mass resolution low aberration analyzer magnet for ribbon beams and the system for ribbon beam ion implanter
The present invention provides a mass analyzing magnet which can bend a very wide charged particle ribbon beams through angles between 90 to 200 degrees. The shorter dimension of the ribbon beam is...
|
|
|
8178849 |
Objective lens
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of...
|
|
|
8173963 |
Phase-shifting element and particle beam device having a phase-shifting element
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the...
|
|
|
8164066 |
Magnetic lens, method for focusing charged particles and charged particle energy analyzer
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece...
|
|
|
8164070 |
Collimator magnet for ion implantation system
A collimator magnet (CM) usable in an ion implantation system provides an exit ion beam with a large aperture, substantially parallel in one plane or orthogonal planes. The CM includes identical...
|
|
|
8164060 |
System and method for a charged particle beam
System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for...
|
|
|
8158940 |
Magnetic domain imaging system
A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective...
|
|
|
8158954 |
Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
The invention provides a lens system for a plurality of charged particle beams. The lens system comprises an excitation coil providing a magnetic flux to a pole piece unit having a first pole...
|
|
|
8153965 |
Apparatus and method for merging a low energy electron flow into a high energy electron flow
An apparatus for merging a low energy electron flow into a high energy electron flow may include: a high energy electron path for accommodating the high energy electron flow; and a plurality of...
|
|
|
8153997 |
Isotope production system and cyclotron
A cyclotron that includes a magnet yoke having a yoke body that surrounds an acceleration chamber. The cyclotron also includes a magnet assembly to produce magnetic fields to direct charged...
|
|
|
8138484 |
Magnetic scanning system with improved efficiency
Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner that includes first and second magnetic elements having a beam path region therebetween. One or...
|
|
|
8089051 |
Electron reflector with multiple reflective modes
One embodiment relates to a method of controllably reflecting electrons from an array of electron reflectors. An incident electron beam is formed from an electron source, and the incident beam is...
|
|
|
8089050 |
Method and apparatus for modifying a ribbon-shaped ion beam
A ribbon-shaped ion beam is modified using multiple coil structures on a pair of opposed ferromagnetic bars. The coil structures comprise continuous windings which have predetermined variations...
|
|
|
8076642 |
Electron beam apparatus and method of operating the same
An electron beam apparatus is offered which can well detect backscattered electrons or both backscattered electrons and secondary electrons if an electron detector is disposed above an objective...
|
|
|
8076657 |
Ion radiation therapy system having magnetic fan beam former
An improved beam forming system for ions used in radiation treatment employs a magnet system of successive quadrupole magnets to convert an ion pencil beam to a fan beam with reduced neutrons...
|
|
|
8071955 |
Magnetic deflector for an electron column
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or...
|
|
|
8067748 |
Charged particle beam acceleration and extraction method and apparatus used in conjunction with a charged particle cancer therapy system
The invention comprises a charged particle beam acceleration and optional extraction method and apparatus used in conjunction with charged particle beam radiation therapy of cancerous tumors. Novel...
|
|
|
8063364 |
Particle optical device with magnet assembly
A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one...
|
|
|
8063381 |
Achromatic and uncoupled medical gantry
A medical gantry that focus the beam from the beginning of the gantry to the exit of the gantry independent of the rotation angle of the gantry by keeping the beam achromatic and uncoupled, thus,...
|
|
|
8058626 |
Method and apparatus for modifying a ribbon-shaped ion beam
A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending...
|
|
|
8049182 |
Charged particle filter
A charged particle filter comprises a magnetic deflector and an outer shield. The magnetic deflector has a bore along an axis thereof passing through the deflector from a specimen end to a detector...
|
|
|
8049181 |
Method of suppressing beam position drift, method of suppressing beam dimension drift, and charged particle beam lithography system
A lithography method and system have means for determining a convergence value dc from a relation of beam current to beam position drift (or beam dimension drift) produced in the past; means for...
|
|
|
8049187 |
Charged particle beam irradiating apparatus
The present invention provides a charged particle beam irradiating apparatus capable of irradiating a charged particle beam using both a wobbler method and a scanning method. A charged particle...
|
|
|
8044369 |
Electrostatic deflection control circuit and method of electronic beam measuring apparatus
An electrostatic deflection circuit and method of an electronic beam measuring apparatus which can achieve the high precision of the electronic beam measuring and contribute to the simplification...
|
|
|
8044374 |
Ion implantation apparatus
A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis...
|
|
|
8044368 |
Lens coil cooling of a magnetic lens
A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic...
|
|
|
8044351 |
Micro-column with simple structure
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the...
|
|
|
8035082 |
Projection electron beam apparatus and defect inspection system using the apparatus
A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gun 1 are...
|
|
|
8035087 |
Open-ended electromagnetic corrector assembly and method for deflecting, focusing, and controlling the uniformity of a traveling ion beam
The present invention is an electromagnetic controller assembly for use in ion implantation apparatus, and provides a structural construct and methodology which can be employed for three...
|
|
|
8035086 |
Aberration correction apparatus that corrects spherical aberration of charged particle apparatus
To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a...
|
|
|
8017918 |
Charged-particle beam instrument
A charged-particle beam instrument (such as a transmission electron microscope) which facilitates modifying the diameters of aperture stops installed above and below (on the beam entrance and exit...
|
|
|
8013311 |
Dual beam system
A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic...
|
|
|
8008636 |
Ion implantation with diminished scanning field effects
Ion implantation systems and scanning systems are provided, in which a focus adjustment component is provided to adjust a focal property of an ion beam to diminish zero field effects of the scanner...
|
|
|
8008629 |
Charged particle beam device and method for inspecting specimen
A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a...
|
|
|
8003953 |
Multi-axis magnetic lens
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the...
|
|
|
8003952 |
Integrated deflectors for beam alignment and blanking in charged particle columns
A charged particle beam column package includes an assembly (e.g., comprising a plurality of layers, which can have a component coupled to one of the layers), and at least one deflector between an...
|
|
|
7989784 |
Ion implantation apparatus and a method
A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis...
|
|
|
7989777 |
Method for inspecting settling time of deflection amplifier, and method for judging failure of deflection amplifier
A method for inspecting a settling time of a deflection amplifier includes setting a settling time, performing shooting a plurality of times alternately to project two patterns of different types...
|
|
|
7989776 |
Corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial, chromatic aberration
A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other...
|
|
|
7982197 |
Ion implantation apparatus and a method for fluid cooling
A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis...
|
|
|
7973289 |
Method for producing image contrast by phase shifting in electron optics
According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least...
|
|
|
7960710 |
Particle radiation therapy equipment
Particle radiation therapy equipment arranged to apply a charged particle beam in a predetermined direction to a region of application within an imaging volume, comprising a charged particle beam...
|
|
|
7960703 |
Charged-particle beam lithography apparatus and device manufacturing method
A charged-particle beam lithography apparatus includes a projection system that projects a charged-particle beam, and images a pattern on a substrate with the projected charged-particle beam. The...
|
|
|
7960697 |
Electron beam apparatus
The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review. The present invent provides solution of...
|
|
|
7960709 |
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
An ion implantation device and a method of manufacturing a semiconductor device is described, wherein ionized boron hydride molecular clusters are implanted to form P-type transistor structures....
|
|
|
7947969 |
Stacked conformation radiotherapy system and particle beam therapy apparatus employing the same
A stacked conformation radiotherapy system capable of homogenizing a radiation dose distribution, including an irradiation head and irradiation control means. The irradiation head projects a...
|
|
|
7947964 |
Charged particle beam orbit corrector and charged particle beam apparatus
The present invention relates to an orbit correction method for a charged particle beam, and aims to solve problems inherent in conventional aberration correction systems and to provide a low-cost,...
|
|
|
7939801 |
Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method
An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is...
|
|
|
7939812 |
Ion source assembly for ion implantation apparatus and a method of generating ions therein
A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis...
|