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7630068 |
Method and system of defect inspection for mask blank and method of manufacturing semiconductor device using the same
Defect detection is performed with two settings, that is, setting of a focus position where a signal intensity obtained from a dot pattern is maximum and setting of a focus position where a signal...
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7622720 |
Exposure device
The present invention relates to an exposure device for forming predetermined patterns onto an object. The exposure device includes an optical source for emitting a ray, an aperture member...
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7605386 |
Optical device with raster elements, and illumination system with the optical device
The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical...
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7601964 |
Method and apparatus for pulsed UV measurement
A detector receives energy pulses and a lossy integration circuit generates a lossy integration that, for each pulse, increases over the pulse duration to a maximum value and then decays. The lossy...
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7601960 |
Control for UV water disinfection
A UV light source water disinfection system includes a UV light source that is driven or controlled by a ballast. Improved start-up scenarios are provided by use of a separate heating wire around...
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7592598 |
Illumination system particularly for microlithography
There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength ≦193 nm....
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7589330 |
Ultraviolet microscope apparatus
A camera obtains an observation image of a sample by capturing the image of the sample on which an ultraviolet light generated by a light source device is irradiated. An image processing unit of a...
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7585546 |
Surface passivation and sealing of micro-optics devices for improved performance in harsh environments
Methods and structures for reducing and/or eliminating moisture penetration in an optical package. The optical package may include (1) a layer of inorganic material placed over the points of the...
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7586108 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
The invention relates to a radiation detector, a method of manufacturing a radiation detector and a lithographic apparatus comprising a radiation detector. The radiation detector has a...
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7586113 |
EUV illumination system
An illumination system is used to illuminate a specified illumination field of an object surface with EUV radiation. The illumination system has an EUV source and a collector to concentrate the EUV...
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7579601 |
Spectrometer with moveable detector element
An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one...
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7573052 |
Exposure apparatus, exposure method, and device manufacturing method
A pattern image generation device generates a pattern image, and at least a part of the pattern image which has been generated or the pattern image which is generated and is formed on an object is...
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7564030 |
Method and system for forming temporary images
The presently described embodiments comprise a system that includes a color changing medium, an erasing device using heat or long wavelength infrared light as the erasing source, a writing device...
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7554093 |
Uniformly responsive ultraviolet sensors
The fluorescent response of a UV radiometer to a UV beam is normalized over an entrance aperture area by using a plurality, preferably two, converting plates. The fluorescent response of at least...
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7550736 |
Methods and apparatuses for checking the authenticity of sheet material
Ultraviolet light is used for checking the authenticity of sheet material, in particular bank notes, whereby the ultraviolet light transmitted, i.e., pervading the sheet material to be checked, is...
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7545969 |
Method and system for wide-area ultraviolet detection of forensic evidence
The present invention comprises a method for detecting and analyzing forensic evidence. A digital image is taken of background radiation from a suspected-evidence area suspected to contain...
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7544949 |
Method for controlling ultraviolet light information in wireless terminal and wireless terminal implementing the same
A method for controlling ultraviolet light information in a wireless terminal, and a wireless terminals are provided where, when an ultraviolet light measurement is selected in an ultraviolet light...
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7544948 |
Control of the UV radiation sources for a weathering apparatus on the basis of the averaged radiation intensity
The radiation power emitted from the UV radiation sources ( 2 ) in a weathering apparatus is controlled such that the radiation power of each of the radiation sources ( 2 ) is measured in a...
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7544950 |
Microscope with vacuum objective
A microscope for inspecting a surface in an evacuated volume, including an optical objective assembly which is located in the evacuated volume in proximity to the surface. The assembly is arranged...
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7528967 |
Optical characteristic measuring apparatus and measuring method using light reflected from object to be measured
A measurement-purpose light source generates a measurement light used for measuring an optical characteristic of an object to be measured, and the measurement light includes a component in a...
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7525099 |
Nuclear radiation detection system
A nuclear radiation detection system using narrowband UV crystal filters is disclosed. Since the photons produced during the decay of β- and γ-radiation can be detected in the spectral range of...
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7525106 |
Exposure apparatus, pressure control method for the same, and device manufacturing method
An exposure apparatus exposes a substrate in a vacuum atmosphere through an optical system. The apparatus includes a partition which separates a first space including at least part of the optical...
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7514693 |
Multidirectional ultraviolet sensor
A multidirectional ultraviolet sensor includes a substrate and a UV-sensitive layer. The UV-sensitive layer contains nano-sized or micro-sized particles of a UV-sensitive material, which is...
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7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
A cleaning arrangement for a lithographic apparatus module may be provided in a collector. The cleaning arrangement includes a hydrogen radical source configured to provide a hydrogen radical...
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7491943 |
Method and apparatus for UV imaging
A method and apparatus for illuminating a subject with deep UV light and detecting 2-dimensional image information, e.g., a transmission image, fluorescence image, reflected light image, etc. The...
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7492454 |
Achromatic and absorption reducing light collecting system, particularly adapted to optical spectrometric analysis
This system collects light emitted by at least one light source ( 52 ) and focuses it onto at least one light detection device ( 54 ). Preferably, it comprises a first mirror ( 58 ) that collects...
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7491955 |
EUV light source, EUV exposure system, and production method for semiconductor device
An Sn—Ga type alloy having a composition in which the atomic % of Sn is 15% or less is accommodated inside a heated tank 4. The Sn alloy pressurized by the pressurizing pump is conducted to a...
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7485869 |
Prism spectrometer
An optical spectroscopy tool is provided. In one embodiment a highly efficient means by which moderate resolution spectroscopy may be performed in the vacuum ultraviolet (VUV) is described. In one...
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7482596 |
Vacuum UV based optical measuring method and system
A method and system are presented for use in optical processing of an article by VUV radiation. The method comprises: localizing incident VUV radiation propagation from an optical head assembly...
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7479641 |
Ultra violet detector/indicator
An ultraviolet detector/indicator comprises of a column, hemisphere, cake, or wire where a light receiving front and a light emitting front are respectively installed on the two ends with...
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7476866 |
Apparatus and method for detection of vacuum ultraviolet radiation
Vacuum ultraviolet radiation detection apparatus ( 10 ) comprises a radiation detector ( 30 ) in a chamber ( 12 ). The detector ( 30 ) receives ultraviolet radiation from a radiation source ( 36 )....
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7473906 |
Reversible, low cost, distributed optical fiber sensor with high spatial resolution
A spectroscopic based optical fiber sensor includes a sensitive optical fiber, a probing light source, a power supply, a detector means, a signal processing means, and a display means. The...
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7473907 |
Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination
There is provided an illumination system that includes (a) a light source that emits light having a wavelength ≦193 nm, where the light provides a predetermined illumination in a plane distant...
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7468515 |
Ultra violet light sensor
A light detector having spaced electrodes preset by pins or a spacer within a sealed enclosure. The detector may have a MEMS structure that is separate from the sealing of the enclosure. Further,...
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7465935 |
Method for inspecting pattern defect and device for realizing the same
When using a CCD sensor as a photo-detector in a device for inspecting foreign matters and defects, it has a problem of causing electric noise while converting the signal charge, produced inside by...
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7456948 |
Method for detecting particles and defects and inspection equipment thereof
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate...
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7456408 |
Illumination system particularly for microlithography
There is provided an illumination system for microlithography. The illumination system includes an optical element having a plurality of field raster elements, a plane in which a field is...
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7420679 |
Method and apparatus for extended hyperspectral imaging
The disclosure relates to method and apparatus for obtaining a multimodal hyperspectral image of a sample for widefield spectral analysis. An apparatus according to one embodiment may include a...
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7408170 |
Ultraviolet detector
An ultraviolet detector (UV-detector) including a substrate, a first electrode, and a second electrode is provided. The UV-detector substrate comprises an active region for absorbing ultraviolet...
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7405417 |
Lithographic apparatus having a monitoring device for detecting contamination
A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a first radiation beam onto a target portion of a substrate, and at least one monitoring...
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7399975 |
Method and apparatus for performing highly accurate thin film measurements
A reflectometer data reduction technique is provided that utilizes a ratio of an expected reflectance spectrum of the sample being measured to the actual reflectance spectrum of the sample being...
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7391030 |
Broad band referencing reflectometer
A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module...
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7381966 |
Single-chip monolithic dual-band visible- or solar-blind photodetector
A photodetector having sensitivity in both an infrared and an ultraviolet band is provided. The photodetector is formed on a single chip and is designed to be blind to solar or visible radiation....
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7378666 |
Irradiation device for testing objects coated with light-sensitive paint
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV...
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7378665 |
Methods and devices for verifying the authenticity of sheet-type products
Ultraviolet light is used for checking the authenticity of sheet material, in particular bank notes, whereby the ultraviolet light transmitted, i.e. pervading the sheet material to be checked, is...
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7372038 |
Analysis of temperature-dependent molecular configurations
An apparatus and method for analysing temperature-dependent molecular configurations such as folding comprises a multi-channel flow-through chip ( 12 ) along which molecules to be analysed pass. A...
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7372039 |
Near UV absorption spectrometer and method for using the same
A UV absorption spectrometer includes a housing, a controller, and a sensor unit including an ultraviolet light source, an analytical area in an analytical cell or in running water or gaseous...
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7368730 |
Weathering apparatus with UV radiation sources and radiation sensors containing a double-calibrated UV sensor
Weathering apparatus with UV radiation sources and radiation sensors containing a double-calibrated UV sensor A weathering apparatus has one or more UV radiation sources ( 2 ) and one or more first...
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7368292 |
Differential reflection spectroscopy system and method for detecting explosives and other target materials
A system and method for identifying explosive or other target materials includes the steps of irradiating a first location and a second location spaced apart from the first location from a sample...
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7368725 |
Optical radiation sensor system having a radiation window with a non-circular opening
There is described an optical radiation sensor device for detecting radiation in a radiation field. The device comprises a sensor element capable of detecting and responding to incident radiation...
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