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7605386 |
Optical device with raster elements, and illumination system with the optical device
The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical...
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7601964 |
Method and apparatus for pulsed UV measurement
A detector receives energy pulses and a lossy integration circuit generates a lossy integration that, for each pulse, increases over the pulse duration to a maximum value and then decays. The lossy...
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7601960 |
Control for UV water disinfection
A UV light source water disinfection system includes a UV light source that is driven or controlled by a ballast. Improved start-up scenarios are provided by use of a separate heating wire around...
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7592598 |
Illumination system particularly for microlithography
There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength ≦193 nm....
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7586113 |
EUV illumination system
An illumination system is used to illuminate a specified illumination field of an object surface with EUV radiation. The illumination system has an EUV source and a collector to concentrate the EUV...
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7580110 |
Exposure apparatus and exposure method
An exposure apparatus and exposure method that produces plasma from a target material, generates pulsed light, and carries out exposure with the pulsed light. In particular, a light emitting...
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7566891 |
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV...
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7560706 |
UV germicide device for cosmetics and cosmetic implements
A cosmetics and cosmetic implement germicidal device is provided, having a main housing and an implement support for receiving cosmetics/implements. The support may be a tray or one or more shelves...
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7545969 |
Method and system for wide-area ultraviolet detection of forensic evidence
The present invention comprises a method for detecting and analyzing forensic evidence. A digital image is taken of background radiation from a suspected-evidence area suspected to contain...
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7541604 |
Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings
The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying...
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7525106 |
Exposure apparatus, pressure control method for the same, and device manufacturing method
An exposure apparatus exposes a substrate in a vacuum atmosphere through an optical system. The apparatus includes a partition which separates a first space including at least part of the optical...
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7491955 |
EUV light source, EUV exposure system, and production method for semiconductor device
An Sn—Ga type alloy having a composition in which the atomic % of Sn is 15% or less is accommodated inside a heated tank 4. The Sn alloy pressurized by the pressurizing pump is conducted to a...
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7489395 |
Method and apparatus for inspecting pattern defects
A method and apparatus for inspecting pattern defects emitting a laser beam, adjusting a light-amount of the laser beam, converting the light-amount adjusted laser beam into a slit-like laser light...
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7485881 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system
A lithographic apparatus includes an illumination system configured to condition a radiation beam, a projection system configured to project the radiation beam onto a substrate, and a filter system...
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7479645 |
Device for producing extreme UV radiation
An extreme UV radiation producing device in which adhesion of solid tin in the vacuum pump of an evacuation device is restricted, so that the maintenance period and the replacement period of the...
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7456416 |
Plug-in radiation source module for a weathering apparatus
A plug-in radiation source module ( 10 ) for mounting and locating a radiation source ( 3 ) for a weathering apparatus ( 20 ), the plug-in module ( 10 ) being configured to be insertable from...
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7456408 |
Illumination system particularly for microlithography
There is provided an illumination system for microlithography. The illumination system includes an optical element having a plurality of field raster elements, a plane in which a field is...
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7425718 |
Lighting system, point source lights therefor and methods of making the same
A lighting system comprising at least one lighting assembly, the lighting assembly comprising at least one ultraviolet light source, means for separately controlling ultraviolet light source and a...
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7405417 |
Lithographic apparatus having a monitoring device for detecting contamination
A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a first radiation beam onto a target portion of a substrate, and at least one monitoring...
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7405414 |
Method and apparatus for patterning a workpiece
The present invention relates to a method for creating a pattern on a workpiece sensitive to electromagnetic radiation. Electromagnetic radiation is emitted onto a computer controlled reticle...
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7372044 |
UV sterilization of user interface fomites
Techniques for sterilizing a fomite are disclosed. A UV sterilization apparatus includes a housing for enveloping a fomite inside the housing. The housing is composed of a material that prevents...
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7368744 |
Photon sieve for optical systems in micro-lithography
The use of photon sieves may be as a pupil defining element in an illumination system; a field of defining elements in an illumination system; a pupil lens element in a projection lens; a color...
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7354553 |
Method and apparatus for detecting the presence of elemental mercury in a gas sample
An improved elemental mercury analyzer utilizes a fluorescence assembly in combination with a fluorescence quenching reduction mechanism to detect the concentration of elemental mercury within an...
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7348583 |
Wavelength stabilized light source
An apparatus for producing wavelength stabilized electromagnetic radiation is provided, the apparatus comprising a broadband semiconductor radiation source configured to produce broadband...
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7291852 |
Lighting system, point source lights therefor and methods of making the same
A lighting system comprising at least one lighting assembly, the lighting assembly comprising at least one ultraviolet light source, means for separately controlling ultraviolet light source and a...
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7265358 |
Device to prevent the risk of overexposure to harmful solar radiation
A device intended to reduce the risks of overexposure to harmful solar radiation. The device includes a detection arrangement, including at least one sensor sensitive to solar radiation, in...
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7259382 |
Tanning lamp having grooved periphery
The present disclosure provides a device and method for exposing a person to ultraviolet radiation in tanning wavelengths which is emitted from a discharge lamp having a plurality of grooves formed...
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7250611 |
LED curing apparatus and method
A radiation curing apparatus comprises a plurality of solid state radiation sources to generate radiation that cures a first material. The solid state radiation sources can be disposed in an array...
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7227162 |
Method and apparatus for providing tuning of spectral output for countermeasure devices
A countermeasure device includes an emitter having a surface. A band gap material is integral with the surface of the emitter. A series of apertures are formed in the band gap material. A heat...
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7214950 |
Transition radiation apparatus
In one embodiment of the present invention, thermal deformation or bending of membranes in a transition radiation emitting structure can be reduced by providing flex regions in the membranes or the...
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7202490 |
LED modifying apparatus and method
A radiation modifying apparatus comprises a plurality of solid state radiation sources to generate radiation that modifies a first material such as by curing or creating alignment through...
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7173266 |
Ultraviolet irradiating device
In an ultraviolet irradiating device in which a controller section and plural head portions used to cure ultraviolet curable resin used in the adhesion of a part are connected by an electric cable,...
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7141798 |
Spectrum measuring apparatus and method
A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band...
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7091499 |
Ultraviolet irradiating method and an apparatus using the same
An ultraviolet irradiating apparatus for emitting ultraviolet light toward a work piece. The work piece, e.g. a semiconductor wafer, is held by a ring-shaped frame through an ultraviolet sensitive...
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7064342 |
Adjustable ultraviolet lamp mounting device
A device for mounting a UV bulb includes a housing having a hole therein, a fixed bracket and an adjustable bracket, the fixed bracket is connected to the housing and the adjustable bracket is...
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7034308 |
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby
A radiation system includes a contamination barrier, e.g., a foil trap, between a collector, for example a normal incidence collector, and a radiation source, such that radiation coming from the...
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7034295 |
Photoemission electron microscopy and measuring method using the microscopy
A photoemission electron microscopy having a light source system for carrying out a high-resolution measurement such as work function distribution measurement or magnetic domain distribution with...
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7002140 |
Ultraviolet water treatment system
An ultraviolet water treatment system comprising a water chamber having a water intake for untreated water to enter the chamber, and a water outlet for water to leave the chamber; an ultraviolet...
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6982421 |
Extreme ultraviolet source
To both increase the efficiency of conversion into EUV radiation energy and also increase the amount of emerging EUV radiation in an EUV source a discharge tube is connected to a gas supply space...
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6972413 |
UV curing system
The present invention relates generally to systems for directing light-based radiation onto a light curable material. More particularly, the present invention is directed to a device for uniformly...
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6911657 |
Transilluminator
An apparatus for expeditiously irradiating an object with ultraviolet radiation at a selected UV wavelength. The apparatus includes a plurality of ultraviolet sources, each emitting radiation at a...
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6897456 |
Differential pumping system and exposure apparatus
A differential pumping system includes a first chamber for storing a light source that emits light, a second chamber that receives light from the first chamber, and a vacuum pump, provided between...
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6891172 |
Differential pumping system and exposure apparatus
A differential pumping system includes a first chamber for storing a light source that emits pulsed light, a first exhaust unit for exhausting said first chamber, a second chamber being connectible...
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6881971 |
Arrangement for the suppression of particle emission in the generation of radiation based on hot plasma
The invention is directed to an arrangement for the suppression of particle emission in the generation of radiation based on hot plasma in x-ray radiation sources, particularly EUV radiation...
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6870147 |
Light stability testing device
A light stability testing device for conducting an accurate light stability test that permits an accurate ultraviolet irradiation and an accurate visible light irradiation, the device comprising an...
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6861658 |
Skin tanning and light therapy incorporating light emitting diodes
The invention relates to a skin tanning chamber, the improvement comprising at least one light emitting diode emitting a UVA light, such as a UVA LED that emits essentially only UVA. Additionally,...
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6833854 |
Method for high precision printing of patterns
An aspect of the present invention includes a method to print pattern with improved edge acuity. In one embodiment a method for printing fine patterns comprising the actions of: providing an SLM...
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6828576 |
UV LED light projection method and apparatus
A light emitting diode projection apparatus and method is provided for irradiating a subject with ultraviolet radiation, comprising a plurality of light emitting diodes configured to emit...
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6822251 |
Monolithic silicon EUV collector
A collector optic assembly for a EUV radiation source. The collector optic assembly includes an elliptical meniscus having a reflective Si/Mo coating for collecting and reflecting EUV radiation...
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6815900 |
Radiation source with high average EUV radiation output
The invention is directed to a radiation source for generating extreme ultraviolet (EUV) radiation based on a hot, dense plasma generated by gas discharge. The object of the invention, to find a...
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