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9040908 Plan view sample preparation  
A method and apparatus for altering the orientation of a charged particle beam sample is presented. Embodiments of the method includes providing a first work piece on a sample stage having a...
9040911 Scanning electron microscope  
Conventionally, in a general-purpose scanning electron microscope, the maximum accelerating voltage which can be set is low, and hence thin crystal samples which can be observed under normal...
9035249 Multi-beam system for high throughput EBI  
A scanning charged particle beam device configured to image a specimen is described. The scanning charged particle beam device includes a source of charged particles, a condenser lens for...
9035248 Drawing apparatus, and method of manufacturing article  
The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, the apparatus comprising an optical system configured to irradiate the...
9030675 Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus  
The invention relates to a method for determining a distance between charged particle beamlets in a multi-beamlet exposure apparatus. The apparatus is provided with a sensor comprising a converter...
9029768 Detector and charged particle beam instrument  
A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission...
9029767 Method for adjusting a stem equipped with an aberration corrector  
The invention relates to a method for adjusting a Cs corrector in a STEM using a crystalline sample. The method comprises recording a through-focus series, converting the obtained images to...
9024256 Electron microscope  
An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect...
9018581 Transmission electron microscope  
A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40)...
9012842 Charged particle beam device and inclined observation image display method  
A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time...
9013572 Method for observing sample and electronic microscope  
A sample observation method of the present invention comprises a step of defining, with respect to an electron microscope image, an outline of an observation object with respect to a sample (3),...
9013571 Image processing device, measuring/testing system, and program  
The present invention provides a contour extraction technique capable of resolving not only spuriousness, duplication, or branches in the contours of a sample pattern, but also discontinuities in...
9006652 Phase shift method for a TEM  
A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the...
9009861 Substrate measurement apparatus with electron distortion unit  
Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of...
9006654 Charged particle beam apparatus  
An embodiment is to provide a technique that continuously applies a certain amount of an electron beam to a sample by selecting a beam applied to the sample from an electron beam emitted from an...
9006681 Method of depositing protective structures  
A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein...
9006651 Method for creating S/TEM sample and sample structure  
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small...
9000365 Pattern measuring apparatus and computer program  
Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile...
8993963 Mounting structures for multi-detector electron microscopes  
A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and...
8987665 Electron microscope with integrated detector(s)  
An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons...
8987682 Specimen positioning device, charged particle beam system, and specimen holder  
A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication...
8981294 Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment  
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum...
8981291 Method for measuring film thickness of SOI layer of SOI wafer  
A method for measuring a film thickness of an SOI layer of an SOI wafer including at least an insulator layer and the SOI layer which is formed on the insulator layer and is formed of a silicon...
8981293 System for inspecting flat panel display using scanning electron microscope  
An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect...
8969801 Scanning electron microscope  
To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample...
8963084 Contamination reduction electrode for particle detector  
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the...
8963085 Photon induced near field electron microscope and biological imaging system  
A method of obtaining PINEM images includes providing femtosecond optical pulse, generating electron pulses, and directing the electron pulses towards a sample. The method also includes...
8957372 Scanning electron microscope  
A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing...
8957959 Charged particle microscope and measurement image correction method thereof  
A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation...
8952330 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope  
System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a...
8946628 Electron beam interference device and electron beam interferometry  
There is a limit in range and distance in which an electron beam can interfere and electron interference is implemented within a range of a coherence length. Therefore, interference images are...
8946630 Automatic filtering of SEM images  
A method, system, and computer program product to automatically evaluate a scanning electron microscope (SEM) image are described. The method includes obtaining a source image and the SEM image...
8946631 Testing apparatus using charged particles and device manufacturing method using the testing apparatus  
A substrate is irradiated by primary electrons and secondary electrons generated from the substrate are detected by a detector. A reference die is placed on the stage to obtain a pattern matching...
8946649 Charged particle beam device having an energy filter  
Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles...
8937281 Method for examining a sample by using a charged particle beam  
A method for examining a sample with a scanning charged particle beam imaging apparatus. First, an image area and a scan area are specified on a surface of the sample. Herein, the image area is...
8933402 Sample analysis apparatus and sample analysis program  
A sample is analyzed efficiently with combining a structural defect detection and a physical information measurement so as to determine whether a structural defect is the defect that degrades the...
8933400 Inspection or observation apparatus and sample inspection or observation method  
Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical...
8928485 Charged corpuscular ray apparatus  
The present invention relates to the acquisition of tilted series images of a minute sample in a short time. The present invention relates to: measuring in advance the relation between an amount...
8927931 Scanning electron microscope  
In conventional electron microscopes, orthogonality has been defined for each electron microscope individually in such a manner that a lattice sample is observed, and correction is applied to a...
8927932 Scanning transmission electron microscopy for imaging extended areas  
A scanning transmission electron microscope for imaging a specimen includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A stage is...
8921786 Charged particle beam apparatus  
Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant...
8921784 Scanning electron microscope  
There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining...
8921782 Tilt-imaging scanning electron microscope  
One embodiment relates to a tilt-imaging scanning electron microscope apparatus. The apparatus includes an electron gun, first and second deflectors, an objective electron lens, and a secondary...
8921787 Incoherent transmission electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a...
8921785 Cooperating capillary and cap for use in a high-pressure freezer  
The invention relates to an assembly of a cooperating capillary and cap for containing an aqueous solution in an inner volume of the capillary. The assembly is used in a high pressure freezer in...
8912488 Automated sample orientation  
A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample...
8912491 Method of performing tomographic imaging of a sample in a charged-particle microscope  
The invention relates to a method of performing tomographic imaging of a sample comprising providing a beam of charged particles; providing the sample on a sample holder that can be tilted; in an...
8912490 Method for preparing samples for imaging  
A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample...
8907278 Charged particle beam applied apparatus, and irradiation method  
Provided is a charged particle beam applied apparatus for observing a sample, provided with: a beam-forming section that forms a plurality of charged particle beams on a sample; an energy control...
8907298 Method for axial alignment of charged particle beam and charged particle beam system  
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts...