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8178837 |
Logical CAD navigation for device characteristics evaluation system
A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created...
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8178851 |
In situ holder assembly
An in situ optical specimen holder is disclosed which may be utilized for imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics...
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8178849 |
Objective lens
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of...
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8178836 |
Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope
A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the...
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8178840 |
Specimen inspection equipment and how to make the electron beam absorbed current images
An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a...
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8173978 |
Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same
Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage ...
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8173963 |
Phase-shifting element and particle beam device having a phase-shifting element
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the...
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8168956 |
Scanning transmission electron microscope and method of aberration correction therefor
A scanning transmission electron microscope (STEM) and method of aberration correction have autocorrelation function calculation means, aberration coefficient calculation means, and feedback...
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8168951 |
Charged particle beam apparatus
A charged particle beam apparatus having an aberration correction capability at high acceleration voltages. The charged particle beam apparatus comprises a charged particle beam source; an...
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8164058 |
Specimen observation method
It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an...
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8164069 |
Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the...
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8164057 |
Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is...
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8164072 |
Device and method for preparing specimens
A method and a device for preparing specimens for a cryo-electron microscope are described. A carrier is fixed to a holder, sample liquid is applied to the carrier, and a blotting device for...
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8158940 |
Magnetic domain imaging system
A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective...
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8158937 |
Particle beam system
A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam...
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8158938 |
Scanning electron microscope and a method for imaging a specimen using the same
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated...
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8153970 |
Scanning electron microscope
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed....
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8153969 |
Inspection method and inspection system using charged particle beam
In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary...
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8148685 |
Transmission electron microscope micro-grid
A transmission electron microscope (TEM) micro-grid includes a base and a plurality of electron transmission portions. The base includes a plurality of first carbon nanotubes and the first carbon...
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8143601 |
Nanoscale imaging via absorption modulation
An imaging system is provided. The imaging system includes a sample to be scanned by the imaging system. An absorbance modulation layer (AML) is positioned in close proximity to the sample and is...
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8143594 |
Method of depositing protective structures
A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein...
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8144338 |
Pattern measurement apparatus and pattern measurement method
A pattern measurement method includes: acquiring sectional shapes of a first pattern corresponding to process parameters, respectively; using the acquired sectional shapes to calculate predicted...
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8134124 |
Method for creating S/tem sample and sample structure
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small...
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8134131 |
Method and apparatus for observing inside structures, and specimen holder
An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in...
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8129679 |
Method for discrimination of backscattered from incoming electrons in imaging electron detectors with a thin electron-sensitive layer
Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and...
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8129693 |
Charged particle beam column and method of operating same
A charged particle beam column includes a charged particle beam source to generate a charged particle beam; an objective lens to focus the charged particle beam in an object plane; a first...
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8129687 |
Lighting system, method of lighting, optical detector, and method of optical detection
There is provided a lighting system having a high spatial resolution appropriate to a high-frequency component by evanescent waves in a negative refraction lens. The lighting system includes a...
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8124934 |
Scanning electron microscope
It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation...
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8119985 |
Methods and apparatus for statistical characterization of nano-particles
A method and apparatus for determining statistical characteristics of nano-particles includes distributing the nano-particles over a surface and then determining properties of the nano-particles by...
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8115169 |
Method and apparatus of pattern inspection and semiconductor inspection system using the same
A pattern inspection apparatus can be provided, for example, in a scanning electron microscope system. When patterns of a plurality of layers are included in a SEM image, the apparatus separates...
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8115168 |
Layered scanning charged particle apparatus package having an embedded heater
A scanning charge particle apparatus includes a layered charged particle beam column package; a sample holder; and a heater, such as a resistive heater, in one of the layers of the package that...
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8110801 |
Layered scanning charged particle microscope package for a charged particle and radiation detector
A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column...
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8110800 |
Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system
The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to generate...
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8106355 |
Automated inspection using cell-cell subtraction perpendicular to stage motion direction
One embodiment relates to an apparatus for automated inspection of a semiconductor substrate. Processor-executable code is configured to control the stage electronics to move the substrate using a...
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8106357 |
Scanning electron microscope and method for processing an image obtained by the scanning electron microscope
In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of...
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8106358 |
Layered scanning charged particle microscope with differential pumping aperture
A scanning charged particle apparatus includes a layered charged particle beam column package; a sample holder; and a layered differential pumping aperture that assists in maintaining two different...
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RE43117 |
Method of and apparatus for studying fast dynamical mechanical response of soft materials
The invention is an apparatus and method including hardware and software, which allows collecting and analyzing data to obtain information about mechanical properties of soft materials in a much...
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8097846 |
Metrology and 3D reconstruction of devices in a wafer
A method for measuring three-dimensional devices in a wafer comprises the step of obtaining a plurality of cross-sectional images of a corresponding plurality of three-dimensional devices in the...
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8093558 |
Environmental cell for a particle-optical apparatus
The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a...
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8086022 |
Electron beam inspection system and an image generation method for an electron beam inspection system
An inspection system uses a scanning electron microscope that detects a high-precision electron beam image, and at the same time removes restrictions for a low sampling rate. A sampled signal is...
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8080790 |
Scanning electron microscope
An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up,...
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8080791 |
X-ray detector for electron microscope
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on...
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8076640 |
Method and device for measuring electron diffraction of a sample
The invention relates to a method and a device for measuring electron diffraction of a sample, including the steps of illuminating the sample with an incident electron beam which is deflected from...
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8073242 |
SEM system and a method for producing a recipe
This invention relates to a SEM system constructed to create imaging recipes or/and measuring recipes automatically and at high speed, and improve inspection efficiency and an automation ratio, and...
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8071944 |
Portable electron microscope using micro-column
Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a...
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8071960 |
Method and apparatus for producing samples for transmission electron microscopy
In the case of a method for producing samples for transmission electron microscopy, a sample is prepared from a substrate of a sample material. To this end, the sample material is irradiated by...
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8074292 |
High resolution wide angle tomographic probe
The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a...
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8067732 |
Electron beam apparatus
An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and...
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8067733 |
Scanning electron microscope having a monochromator
A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron...
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8063364 |
Particle optical device with magnet assembly
A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one...
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