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9040911 Scanning electron microscope  
Conventionally, in a general-purpose scanning electron microscope, the maximum accelerating voltage which can be set is low, and hence thin crystal samples which can be observed under normal...
9040910 Multi-column electron beam inspection that uses custom printing methods  
A method of testing for photomask print errors includes dividing a photomask print into sub-regions and inspecting each sub-region with a different (e.g., electron) beam column, each sub-region...
9035249 Multi-beam system for high throughput EBI  
A scanning charged particle beam device configured to image a specimen is described. The scanning charged particle beam device includes a source of charged particles, a condenser lens for...
9035247 Method for operating a particle beam device and/or for analyzing an object in a particle beam device  
A method for operating a particle beam device and/or for analyzing an object in a particle beam device are provided. For example, the particle beam device is an electron beam device, an ion beam...
9029768 Detector and charged particle beam instrument  
A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission...
9029766 Scanning electron microscope  
To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron...
9024280 Composite charged particle beam apparatus  
A composite charged particle beam apparatus comprises an FIB column and an SEM column arranged so that the ion and the electron beam irradition axes intersect with each other substantially at a...
9024256 Electron microscope  
An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect...
9019362 Charged particle beam device and a method of improving image quality of the same  
The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate...
9012842 Charged particle beam device and inclined observation image display method  
A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time...
9013572 Method for observing sample and electronic microscope  
A sample observation method of the present invention comprises a step of defining, with respect to an electron microscope image, an outline of an observation object with respect to a sample (3),...
9006653 Electron microscope  
Provided is an electron microscope capable of enhancing a magnetic shield function even though the structure thereof has an objective tens that projects into a sample chamber space. The electron...
9006652 Phase shift method for a TEM  
A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the...
9009861 Substrate measurement apparatus with electron distortion unit  
Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of...
9006654 Charged particle beam apparatus  
An embodiment is to provide a technique that continuously applies a certain amount of an electron beam to a sample by selecting a beam applied to the sample from an electron beam emitted from an...
9000397 Specimen holder for observing top section of specimen and method for controlling the same  
A specimen holder and method for controlling the same, which can mount and fasten a specimen to allow observation thereof by joining a body and a stand of the specimen holder together. The...
9000369 System and method for controlling charge-up in an electron beam apparatus  
The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the...
9000370 System and method for controlling charge-up in an electron beam apparatus  
The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the...
9000366 Method and apparatus for measuring displacement between patterns and scanning electron microscope installing unit for measuring displacement between patterns  
In order that a displacement between patterns of different heights, formed on a sample in a plurality of different pattern-forming steps, can be measured at fixed throughput and with high...
9000395 Energy filter for charged particle beam apparatus  
This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential...
9000365 Pattern measuring apparatus and computer program  
Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile...
8993961 Electric charged particle beam microscope and electric charged particle beam microscopy  
The electric charged particle beam microscope includes an electric charged particle source; a condenser lens converging electric charged particles emitted from the electric charged particle source...
8993963 Mounting structures for multi-detector electron microscopes  
A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and...
8987692 High brightness electron gun, system using the same, and method of operating thereof  
A charged particle beam source device adapted for generating a charged particle beam is provided. The charged particle beam source device includes an emitter tip adapted for providing charged...
8987682 Specimen positioning device, charged particle beam system, and specimen holder  
A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication...
8981294 Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment  
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum...
8981292 Parallel radial mirror analyser with an angled zero-volt equipotential exit grid for scanning electron microscopes  
A parallel radial mirror analyzer (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA...
8981291 Method for measuring film thickness of SOI layer of SOI wafer  
A method for measuring a film thickness of an SOI layer of an SOI wafer including at least an insulator layer and the SOI layer which is formed on the insulator layer and is formed of a silicon...
8981293 System for inspecting flat panel display using scanning electron microscope  
An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect...
8975582 Method and apparatus for reviewing defects  
A method of inspecting defects of a sample on a movable table includes a first step for, on a basis of position information of the defects which is previously detected by an other inspection...
8969801 Scanning electron microscope  
To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample...
8963083 Switchable multi perspective detector, optics therefore and method of operating thereof  
A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection...
8963084 Contamination reduction electrode for particle detector  
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the...
8963085 Photon induced near field electron microscope and biological imaging system  
A method of obtaining PINEM images includes providing femtosecond optical pulse, generating electron pulses, and directing the electron pulses towards a sample. The method also includes...
8957372 Scanning electron microscope  
A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing...
8957390 Electron gun arrangement  
A gun arrangement configured for generating a primary electron beam for a wafer imaging system is described. The arrangement includes a controller configured for switching between a normal...
8952329 3D image profiling techniques for lithography  
A method for characterizing a three-dimensional surface profile of a semiconductor workpiece is provided. In this method, the three-dimensional surface profile is imaged from a normal angle to...
8952330 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope  
System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a...
8952328 Charged particle detector system comprising a conversion electrode  
The invention relates to a charged particle detector system comprising a conversion plate (110) to convert incoming radiation to secondary electrons. These secondary electrons are then detected by...
8946628 Electron beam interference device and electron beam interferometry  
There is a limit in range and distance in which an electron beam can interfere and electron interference is implemented within a range of a coherence length. Therefore, interference images are...
8946627 Three-dimensional mapping using scanning electron microscope images  
A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are...
8946629 Inspection apparatus  
An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an...
8946631 Testing apparatus using charged particles and device manufacturing method using the testing apparatus  
A substrate is irradiated by primary electrons and secondary electrons generated from the substrate are detected by a detector. A reference die is placed on the stage to obtain a pattern matching...
8946649 Charged particle beam device having an energy filter  
Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles...
8937281 Method for examining a sample by using a charged particle beam  
A method for examining a sample with a scanning charged particle beam imaging apparatus. First, an image area and a scan area are specified on a surface of the sample. Herein, the image area is...
8937283 Specimen observation method and device using secondary emission electron and mirror electron detection  
A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention is provided. This specimen...
8933402 Sample analysis apparatus and sample analysis program  
A sample is analyzed efficiently with combining a structural defect detection and a physical information measurement so as to determine whether a structural defect is the defect that degrades the...
8933400 Inspection or observation apparatus and sample inspection or observation method  
Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical...
8927949 Measuring apparatus, drawing apparatus, and article manufacturing method  
The beam measuring apparatus of the present invention includes a detection device including a shield member that has an edge, and a detector configured to detect the beam of which at least a part...
8928485 Charged corpuscular ray apparatus  
The present invention relates to the acquisition of tilted series images of a minute sample in a short time. The present invention relates to: measuring in advance the relation between an amount...