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7619219 |
Scanning electron microscope
The present invention was made in view of a problem of an electron microscope in which a reduction in detection efficiency of electrons detected by a detector should be prevented by eliminating any...
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7619218 |
Charged particle optical apparatus with aberration corrector
When an accelerating voltage and operating distance are changed, an excitation current and a pole voltage of an aberration corrector must also be changed. Moreover, different multipole voltages or...
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7618465 |
Near-field antenna
The invention relates to a near-field antenna comprising a dielectric shaped body having a tip. The shaped body is characterized in that at least the surface of the tip is metallized, thereby...
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7615747 |
Sampling feedback system
An electron microscope includes an electron beam source, which produces an electron beam. Scan deflectors direct the electron beam in a pattern across a sample, which thereby emits electrons. The...
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7615746 |
Method and apparatus for evaluating pattern shape of a semiconductor device
The present invention provides a semiconductor pattern shape evaluating apparatus using a critical dimension SEM, which eliminates the necessity of data conversion corresponding to each process of...
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7612337 |
Focused ion beam system and a method of sample preparation and observation
A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field...
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7612336 |
Scanning electron microscope having a monochromator
A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron...
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7612334 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same
The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a...
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7608844 |
Charged particle beam drawing apparatus
In the present invention, vector data developing unit, ends separating unit, overlap removing unit and bitmapped data generating unit are sequentially connected in order to make pipeline...
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7608821 |
Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method
A substrate inspection apparatus includes: an electron gun which generates an electron beam to irradiate the electron beam to a substrate; an electron detection unit which detects at least one of a...
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7605381 |
Charged particle beam alignment method and charged particle beam apparatus
An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of...
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7605378 |
Charged-particle beam system
There is disclosed a charged-particle beam system equipped with a higher-order aberration corrector capable of correcting fifth-order spherical aberration and third-order chromatic aberration such...
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7605368 |
Vibration-type cantilever holder and scanning probe microscope
A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the...
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7605364 |
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
In the case of monitoring a resolution of a scanning electron microscope, it is required to prepare a sample and to use a measuring algorithm so as to reduce the pattern dependency of an index...
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7601957 |
Electron microscope and combined illumination lens
An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to...
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7601956 |
Method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor
A device and method which enable a transmission electron microscope to measure electron diffraction patterns of a sample very precisely are disclosed. The patterns are suitable for structure...
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7601955 |
Scanning electron microscope
A scanning electron microscope is provided. The scanning electron microscope includes an electron beam source generating a primary electron beam, a condenser lens converging the primary electron...
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7601954 |
Method and apparatus for reviewing defects
A method and an apparatus for reviewing defects detected by an optical particle inspection system or an optical profile inspection system in detail by an electron microscope are provided. In order...
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7599075 |
Automatic optical inspection using multiple objectives
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical...
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7598497 |
Charged particle beam scanning method and charged particle beam apparatus
A method and an apparatus for calculating a scan signal so that the scan region becomes a scan region which is based on magnification ratio between desired magnification in a scan-line interval...
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7598492 |
Charged particle microscopy using super resolution
A method for improving throughput in review of images from a charged particle beam microscopy tool and a charged particle beam microscopy tool are disclosed.
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7598491 |
Observing method and its apparatus using electron microscope
The present invention relates to high-speed acquisition of both a perpendicular observation image and a tilt observation image, in observation using a scanning electron microscope. An electron-beam...
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7598490 |
SEM-type reviewing apparatus and a method for reviewing defects using the same
In order to achieve high throughput in a SEM-type defect-reviewing apparatus and method for automatically acquiring images of review defects present on samples, including: a cell comparison step...
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7595490 |
Charged particle beam emitting device and method for operating a charged particle beam emitting device
A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of...
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7595489 |
Method and apparatus for material identification
A method of identifying a material using an x-ray emission characteristic is provided. X-ray data representing a monitored x-ray emission characteristic is obtained from a specimen in response to...
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7595482 |
Standard component for length measurement, method for producing the same, and electron beam metrology system using the same
A standard component for length measurement includes a first diffraction grating and a second diffraction grating. Each of components of the second diffraction grating is disposed between...
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7592604 |
Charged particle beam apparatus
The present invention provides a charged particle beam apparatus capable of preventing the charging-up of the specimen without using a large-scale facility. A scanning electron microscope 100 ...
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7592591 |
X-ray analyzer using electron beam
An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted for...
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7592590 |
Charged particle beam device with detection unit switch and method of operation thereof
The invention provides a charged particle beam device and a method of operation thereof. An emitter ( 2 ) emits a primary charged particle beam ( 12 ). Depending on the action of a deflection...
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7592586 |
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample
An apparatus capable of detecting defects of a pattern on a sample with high accuracy and reliability and at a high throughput, and a semiconductor manufacturing method using the same are provided....
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7589323 |
Superconducting X-ray detector and X-ray analysis apparatus using the same
To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field. A superconducting...
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7589322 |
Sample measuring device
An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of...
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7586093 |
Apparatus and method for inspecting a sample of a specimen by means of an electron beam
The invention refers to an apparatus ( 10 ) for inspecting a sample ( 12 ) of a specimen ( 14 ) by means of an electron beam ( 34 ) comprising a vacuum chamber ( 18 ); an ion beam device ( 20 ) for...
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7579591 |
Method and apparatus for analyzing sample
Method and apparatus for performing sample analysis using both the WDS and an energy-dispersive X-ray spectrometer (EDS). The analysis starts with irradiating the sample with an electron beam....
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7576340 |
Focused ion beam processing method
There is provided a focused ion beam processing method in which damage to a workpiece is minimized when the surface of the workpiece is irradiated and processed with an ion beam. The method...
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7576325 |
Electron microscopic method and electron microscope using same
There is provided an electron microscopic method capable of realizing a high resolution based on the principle of the phase retrieval method. An electron microscope ( 10 ) using the method is a...
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7573053 |
Polarized pulsed front-end beam source for electron microscope
A method and an electron source are provided for generating polarized electrons for an electron microscope. The electron source includes a photoemissive cathode and a low-power drive laser. The...
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7573047 |
Wafer holder and sample producing apparatus using it
A wafer holder includes: a frame-shaped holder main body which has an opening at its center and carries a wafer on its upper surface; guide members which contact the outer periphery of the wafer...
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7573031 |
Methods for SEM inspection of fluid containing samples
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning...
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7573030 |
Specimen observation method
It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an...
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7569838 |
Electron beam inspection system and inspection method and method of manufacturing devices using the system
An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration...
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7569833 |
Apparatus for generating a plurality of beamlets
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging...
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7569819 |
Electron beam system and method of operating the same
An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same...
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7569818 |
Method to reduce cross talk in a multi column e-beam test system
A method and apparatus for reducing or eliminating crosstalk between a plurality of electron beams is described. The plurality of electron beams may produce test areas on a large area substrate...
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7566892 |
Electron beam apparatus and method for production of its specimen chamber
A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for...
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7566888 |
Method and system for treating an interior surface of a workpiece using a charged particle beam
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal...
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7566884 |
Specimen holder for electron microscope
A specimen holder has two levers on which probes for current measurement are carried. The levers are in contact with a spherical body, the spherical body acting as a pivotal point. When the levers...
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7566873 |
High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus
One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a...
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7566872 |
Scanning electron microscope
A scanning electron microscope is disclosed. The primary electron beam is radiated on a reticle (specimen), and an observation image of the reticle is obtained using the electrons secondarily...
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7566871 |
Method and apparatus for pattern inspection
Because a mirror electron imaging type inspection apparatus for obtaining an inspection object image with mirror electrons has been difficult to optimize inspection conditions, since the image...
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