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8357894 Microcalorimetry for X-ray spectroscopy  
An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low...
8354638 Electron detection device and scanning electron microscope  
An electron detection device including: one scintillator 31 having an opening through which an electron beam emitted from an electron gun passes; a plurality of photoguides 22 of the same shape,...
8350213 Charged particle beam detection unit with multi type detection subunits  
A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B...
8350905 Microscope system, image generating method, and program for practicing the same  
A microscope system has a VS image generation means for generating a virtual slide image of a specimen which is constructed by mutually connecting a plurality of microscope images with a first...
8350214 Charged particle beam applied apparatus  
Provided is a multi-beam type charged particle beam applied apparatus in an implementable configuration, capable of achieving both high detection accuracy of secondary charged particles and high...
8344320 Electron microscope with electron spectrometer  
A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions...
8338804 Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus  
One of principal objects of the present invention is to provide a sample dimension measuring method for detecting the position of an edge of a two-dimensional pattern constantly with the same...
8338782 Detector system for transmission electron microscope  
In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending...
8338781 Charged particle beam scanning method and charged particle beam apparatus  
In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan...
8338798 Sample holder for electron microscope  
A sample holder capable of holding samples is provided which comprises a plurality of probes in contact with a sample, fine movement mechanisms for moving the plural probes, and a driver connected...
8334520 Charged particle beam apparatus  
An exemplary a charged particle beam apparatus converts an inspection position on a test sample (wafer coordinate system) to a setting position of an inspection mechanism (stage coordinate system...
8335397 Charged particle beam apparatus  
In a method and apparatus for removing artifacts from an image generated a charged partial beam scanning device, a scanning method is determined, and the frequency of an artifact appearing on an...
8334511 Electron microscope with integrated detector(s)  
An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons...
8334510 Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment  
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum...
8330103 Charged particle beam apparatus and specimen inspection method  
In a multi-charged-particle-beam apparatus, when an electric field and voltage on a surface of a specimen are varied according to characteristics of the specimen, a layout of plural primary beams...
8330104 Pattern measurement apparatus and pattern measurement method  
A pattern measurement apparatus includes a beam intensity distribution creation unit to scan a charged particle beam over a reference pattern having edge portions formed at a right angle to create...
8324573 Detector for electron column and method for detecting electrons for electron column  
In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such...
8324571 Apparatus and method for measuring semiconductor device  
An apparatus for measuring a semiconductor device is provided. The apparatus includes a beam emitter configured to irradiate an electron beam onto a sample having the entire region composed of a...
8324574 Aberration-correcting dark-field electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the...
8324594 Charged particle beam apparatus  
A charged particle beam apparatus can be constructed with a smaller size (resulting in a small installation space) and a lower cost, suppress vibration, operate at higher speed, and be reliable in...
8319192 Charged particle apparatus  
An electromagnetic compound objective lens is provided for charged particle device, especially as an objective lens of low-voltage scanning electron microscope (LVSEM), which comprises a magnetic...
8319193 Charged particle beam apparatus, and method of controlling the same  
Provided is a charged particle beam apparatus, which can emit a stable electron beam, having high brightness and a narrow energy width. The charged particle beam apparatus comprises a field...
8314386 High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes  
An X-ray spectrometer systems and methods are provided for implementing signal detection for use on electron-optical beam lines and microscopes. The X-ray Spectrometer System (XSS) includes an...
8314387 Scanning electron microscope  
Example embodiments are directed to a scanning electron microscope. The scanning electron microscope includes an electron gun to configured irradiate an electron beam on a sample, and a disc of a...
8309923 Sample observing method and scanning electron microscope  
Provided is a sample observing method wherein the effect on throughput is minimized, and a pattern profile can be obtained at high accuracy even in a complicated LSI pattern, regardless of the...
8310667 Wafer surface inspection apparatus and wafer surface inspection method  
A wafer surface inspection method and apparatus of high sensitivity, and free from performance degradation in terms of cleanliness, coordinate repeatability of foreign particles and the like. Gas...
8309922 Semiconductor inspection method and device that consider the effects of electron beams  
Disclosed is a device capable of probing with minimal effect from electron beams. Rough probing is made possible using a lower magnification than the magnification usually viewed. When target...
8309921 Compact scanning electron microscope  
A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the...
8309920 Sample milling/observing apparatus and method of observing sample  
When a sample is cut to update an observed section, an electron beam is focused on the observed section. An apparatus of the invention includes an ion gun 102 which irradiates an ion beam onto a...
8304725 Charged particle beam system  
A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not...
8304721 Micro cross-section processing method  
A micro cross-section processing method includes the steps of determining a linear cross-section estimated position including an observation object on a surface of the sample, irradiating the...
8304722 Charged particle beam equipment and charged particle microscopy  
On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view...
8304723 Defect inspection and charged particle beam apparatus  
In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus,...
8304724 Microstructured pattern inspection method  
The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the...
8304726 Test apparatus  
A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units...
8299431 Method for examining a sample by using a charged particle beam  
A method for examining a sample with a scanning charged particle beam imaging apparatus. First, an image area and a scan area are specified on a surface of the sample. Herein, the image area is...
8299442 Particle beam apparatus having an annularly-shaped illumination aperture  
A particle beam apparatus has an optical axis (OA), an illuminating system (1, 2, 3, 4) for illuminating an object, which is positioned in an object plane (7), with a beam of charged particles and...
8294118 Method for adjusting optical axis of charged particle radiation and charged particle radiation device  
Provided are a method for adjusting the optical axis of a charged particle beam and a device therefor, wherein an artificial criterion is quantified, and whether or not the adjustment of the axis...
8296860 Atomic force microscopy true shape measurement method  
An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the...
8294095 Apparatus of plural charged particle beams with multi-axis magnetic lens  
An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the...
8294127 Charged-particle beam irradiation device, charged-particle beam irradiation method, and computer readable medium  
A charged-particle beam irradiation device, which irradiates an object to be irradiated with a charged-particle beam, includes a scanning member that scans the object to be irradiated with the...
8294096 Charged particle beam device and a method of operating a charged particle beam device  
A charged particle beam device is provided, including: a charged particle beam source adapted to generate a charged particle beam on an axis; an optical aberration correction device and an...
RE43757 Rotational stage for high speed, large area scanning in focused beam systems  
A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear...
8294098 Transmission electron microscope micro-grid  
A transmission electron microscope (TEM) micro-grid includes a grid, a carbon nanotube film structure and two electrodes electrically connected to the carbon nanotube film structure.
8294097 Charged particle radiation device  
The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the...
8288722 Electron beam inspection method and electron beam inspection apparatus  
An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of...
8291510 Tandem piezoelectric actuator and single drive circuit for atomic force microscopy  
An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an...
8288725 Charged particle beam device  
There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, in which each...
8288723 Transmission electron microscope micro-grid and method for making the same  
A transmission electron microscope (TEM) micro-grid includes a metallic grid and a carbon nanotube film structure covered thereon. A method for making a TEM micro-grid includes the steps of: (a)...
8289384 Electron beam displacement measuring method, electron beam displacement measuring device, and electron beam recording apparatus  
It is an object of the present invention to make it possible to stably and correctly measure a changing amount of a beam position when a beam displacement is measured prior to a recording...