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8442300 Specified position identifying method and specified position measuring apparatus  
A specified position in an array structure in which a reference pattern is displayed repetitively through reference pattern counting is identified. In an array structure image, the pattern...
8436301 Transmission electron microscope having electron spectrometer  
In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron...
8436303 Transmission electron microscope micro-grid  
A transmission electron microscope (TEM) micro-grid includes a grid and a heater including at least one carbon nanotube film structure located on the grid. The micro-grid with the at least one...
8436302 Phase-shifting element and particle beam device having a phase-shifting element  
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the...
8431892 Detector and inspecting apparatus  
An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam...
8431894 Electron beam device  
An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted...
8431896 Method for obtaining images from slices of specimen  
The invention relates to a method for obtaining images from slices of a specimen, the method comprising: repeatedly obtaining an image of the surface layer of the specimen (1) and removing the...
8431891 Dual beam apparatus with tilting sample stage  
An ion beam processing apparatus includes an ion beam irradiation optical system that irradiate a rectangular ion beam to a sample held on a first sample stage, an electron beam irradiation...
8431895 Pattern measuring apparatus and pattern measuring method  
A pattern measuring apparatus includes: an electron irradiating unit for radiating an electron beam onto a sample while scanning; an image data acquiring unit for acquiring an image of a pattern...
8431915 Charged particle beam apparatus permitting high resolution and high-contrast observation  
A lower pole piece of an electromagnetic superposition type objective lens is divided into an upper magnetic path and a lower magnetic path. A voltage nearly equal to a retarding voltage is...
8431893 Electron beam apparatus and electron beam inspection method  
An electron beam apparatus which includes a sample stage on which a sample is placed, and an electron optical system. The electron optical system includes an electron gun that generates a primary...
8426812 Microscope system, method for operating a charged-particle microscope  
A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object in a first setting; recording a second image of a second region...
8426811 Electron microscope  
An electron microscope according to the present invention includes a phase plate (510) having a thickness which changes in a radial direction, and adjusts a phase difference caused by a difference...
8426810 Method of planar imaging on semiconductor chips using focused ion beam  
A method of planar imaging on semiconductor chips using focused ion beam includes the initial step of disposing at least a positioning symbol to designate a testing area. A metal membrane is...
8421008 Pattern check device and pattern check method  
Provided is a pattern inspection apparatus including: a charge formation means which forms charge on a surface of a substrate (7) by generating an electron beam from a second electron source (20)...
8421007 X-ray detection system  
An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging...
8421010 Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample  
There is provided a substrate inspection device which uses a charged particle beam and is capable of more quickly extracting a defect candidate than ever before. The configuration of the substrate...
8416026 Nanoscale electromagnetic radiation device using serpentine conductor  
A nanoscale serpentine ribbon is used to produce electromagnetic radiation by accelerating charge carriers as constrained along a serpentine path defined by the ribbon so that curve portions of...
8415613 Method and apparatus for characterizing a sample with two or more optical traps  
The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The...
8415621 Method for line width measurement  
A method for line width measurement, comprising: providing a substrate, wherein a raised line pattern is formed on a surface of the substrate, and the line pattern has a width; forming a first...
8410438 Charged particle beam device  
A charged particle beam device has a tilt detection unit that detects a tilt of a sample surface and an E×B deflector in which an electric field and a magnetic field are overlapped with each other...
8410440 Specimen observation method  
It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an...
8405053 Method and apparatus for specimen fabrication  
A focused ion beam apparatus, including: a specimen transferring unit having a probe to which a micro-specimen extracted from a specimen, can be joined through a joining deposition film, for...
8405027 Contrast for scanning confocal electron microscope  
A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the...
8405043 Charged particle extraction device and method of design there for  
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied...
8405047 Specimen box for electron microscope  
The present invention relates to a specimen box for an electron microscope, comprising a first substrate, a second substrate, one or more photoelectric elements, and a metal adhesion layer. The...
8405025 Scanning electron microscope and method for detecting an image using the same  
A scanning electron microscope includes an electron beam source which emits an electron beam, a beam current controller which controls a beam current of the electron beam, an electron beam...
8399831 Forming an image while milling a work piece  
Dual beam instruments, comprising a Scanning Electron Microscope (SEM) column for imaging and a Focused Ion Beam (FIB) column for milling, are routinely used to extract samples (lamellae) from...
8399832 Scanning electron microscope and CD measurement calibration standard specimen  
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the...
8395130 Holder for an electron microscopy sample carrier  
A mount (100, 200) for holding an electron microscopy sample carrier (310) comprises a base plate (101) having an opening (103) through a middle region thereof and a support surface (107) for the...
RE44035 Apparatus for correlating an optical image and a SEM image and method of use thereof  
An instrument system is controlled to acquire an optical image of an object, with the optical image defining a first coordinate system. The object is positioned in a second coordinate system and a...
8389935 Charged particle beam apparatus permitting high-resolution and high-contrast observation  
A lower pole piece of an electromagnetic superposition type objective lens is divided into an upper magnetic path and a lower magnetic path. A voltage nearly equal to a retarding voltage is...
8389937 Incoherent transmission electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the...
8384029 Cross-section systems and methods  
A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second...
8384030 Method and apparatus for setting sample observation condition, and method and apparatus for sample observation  
A method and apparatus for setting a sample observation condition and a method and apparatus for sample observation which allow sample observation by speedily and simply finding an optimum...
8373113 Calibration standard member, method for manufacturing the member and scanning electronic microscope using the member  
This invention provides a standard member allowing magnification calibration for use in an electron microscope to be performed with high precision. A (110) or (100) oriented silicon substrate...
8368015 Particle-optical system  
The present invention relates to a multi-beamlet multi-column particle-optical system comprising a plurality of columns which are disposed in an array for simultaneously exposing a substrate, each...
8368020 Particle beam system  
A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a...
8368019 Particle beam system  
A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a...
8368037 Systems and methods providing electron beam writing to a medium  
A method for electron-beam writing to a medium includes positioning the medium within an e-beam writing machine so that the medium is supported by a stage and is exposed to an e-beam source. The...
8368018 Method and apparatus for charged particle beam inspection  
A charged particle beam inspection apparatus comprises: an electron gun for irradiating an electron beam onto a sample; a detector for detecting a signal obtained from the sample; an image...
8368031 Inspection system by charged particle beam and method of manufacturing devices using the system  
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam...
8362426 Scanning electron microscope and image signal processing method  
The SEM has a dynamic range reference value setting unit for setting dynamic range reference values, a dynamic range adjustment unit for receiving an observation image signal delivered out of a...
8362425 Multiple-beam system for high-speed electron-beam inspection  
One embodiment disclosed relates to a multiple-beamlet electron beam imaging apparatus for imaging a surface of a target substrate. A beam splitter lens array is configured to split the...
8362443 Objective lens  
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of...
8362427 Electron beam irradiation apparatus and electron beam drawing apparatus  
According to one embodiment, an electron beam irradiation apparatus comprises an objective lens configured to irradiate a specimen surface with an electron beam, an electron detector which is...
8362428 Transmission electron microscope  
A transmission electron microscope has a target body position on the electron optical axis of the microscope, and an electrically conductive body off the axis of the microscope. The microscope...
8357896 Method of analyzing a substance  
An embodiment of the invention relates to a method of analyzing a substance comprising the steps of: fabricating a structure comprising said substance and at least one graphene layer; carrying out...
8357895 Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method  
A defect inspection method includes generating and applies a charged beam to a sample with patterns; controlling a shape of the charged beam so that a beam width in a first direction perpendicular...
8357897 Charged particle beam device  
A charged particle beam device enabling prevention of degradation of reproducibility of measurement caused by an increase of the beam diameter attributed to an image shift and having a function of...