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8536773 Electron beam source and method of manufacturing the same  
An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a...
8536540 Charged particle beam apparatus and method for stably obtaining charged particle beam image  
Since charging characteristics differ between the outer circumferential portion and the center portion of a sample to be inspected, equivalent inspection sensitivities cannot be obtained in the...
8536526 Methods of operating a nanoprober to electrically probe a device structure of an integrated circuit  
Methods for nanoprobing a device structure of an integrated circuit. The method may include scanning a primary charged particle beam across a first region of the device structure with at least one...
8530856 Beam device system comprising a particle beam device and an optical microscope  
A beam device, in particular a particle beam device, for analyzing an object is provided, as well as a system comprising a particle beam device and an optical microscope for optically analyzing an...
8530836 Electron-beam dimension measuring apparatus and electron-beam dimension measuring method  
An electron-beam dimension measuring apparatus includes: electron-beam irradiating means for irradiating a surface of a sample with an electron beam; a stage on which the sample is placed; a...
8530858 Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image  
A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a...
8530837 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen  
A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the...
8525127 Method and apparatus for inspecting sample surface  
Provided is a method and an apparatus for inspecting a sample surface with high accuracy. Provided is a method for inspecting a sample surface by using an electron beam method sample surface...
8525537 Method and apparatus for probe contacting  
There is provided a method and a device for accurately detecting the contact of a mechanical probe with a contact object. The contact detecting device comprises a mechanical probe movable for...
8519333 Charged particle system for reticle/wafer defects inspection and review  
The present invention relates to a charged particle system for reticle or semiconductor wafer defects inspection and review, and more particularly, relates to an E-beam inspection tool for reticle...
8519334 Scanning electron microscope and sample observation method  
The present invention provides a contact hole observation technology for avoiding a situation in which it is difficult to observe a contact hole as a nonuniform charge is formed in the contact...
8513603 In-situ determination of thin film and multilayer structure and chemical composition using x-ray fluorescence induced by grazing incidence electron beams during thin film growth  
A method utilizing characteristic x-ray emission from a single thin film or multilayer thin film when an electron beam impinges at a grazing angle with respect to the surface of the sample to...
8513619 Non-planar extractor structure for electron source  
One embodiment disclosed relates to an electron source for generating an electron beam. The electron source includes an electron emitter having a tip from which an electron beam is extracted. The...
8513627 Charged particle beam apparatus  
An assist gas having a very small amount and a uniform concentration is fed by a charged particle beam apparatus, in which a supply amount of gas is intermittently fed by a massflow controller,...
8513620 Auxiliary stage and method of utilizing auxiliary stage  
An auxiliary stage for holding an electron microscope specimen includes a bottom part and a supporting part. The bottom part includes a first top surface, and the supporting part includes a second...
8507858 Pattern measurement apparatus and pattern measurement method  
Referring to design data for a sample, a measurement region is defined at a portion in the design data which has no step in an edge of a pattern. In addition, an edge as a characteristic portion...
8507857 Charged particle beam inspection apparatus and inspection method using charged particle beam  
A charged particle beam inspection apparatus includes: an electron gun emitting an electron beam; first and second condenser lenses used to focus the electron beam; a beam control panel disposed...
8502174 Method of and system for exposing a target  
The invention relates to a method of exposing a target by means of a plurality of beamlets. First, a plurality of beamlets is provided. The beamlets are arranged in an array. Furthermore, a target...
8502145 Electron microscope system and method for evaluating film thickness reduction of resist patterns  
The invention provides a system for achieving detection and measurement of film thickness reduction of a resist pattern with high throughput which can be applied to part of in-line process...
8502144 Tool-to-tool matching control method and its system for scanning electron microscope  
A system for controlling a tool-to-tool disparity between a plurality of scanning electron microscopes includes a measuring unit for measuring a tool-to-tool disparity between plural scanning...
8502141 Graphical user interface for use with electron beam wafer inspection  
Because a mirror electron imaging type inspection apparatus for obtaining an inspection object image with mirror electrons has been difficult to optimize inspection conditions, since the image...
8502451 Collector and electron tube  
A collector included in an electron tube is covered with a carbon nanotube layer over a required area on the surface thereof.
8497476 Inspection device  
An inspection device for inspecting a surface of an inspection object using a beam includes a beam generator capable of generating one of either charge particles or an electromagnetic wave as a...
8497475 Method and apparatus for charged particle beam inspection  
A method, apparatus and computer readable medium for charged particle beam inspection of a sample comprising at least one sampling region and at least one skip region is disclosed. The method,...
8492716 Vacuumed device and a scanning electron microscope  
A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing....
8492715 Method of protecting a radiation detector in a charged particle instrument  
The invention relates to a Method of protecting a direct electron detector (151) in a TEM. The invention involves predicting the current density on the detector before setting new beam parameters,...
8493057 Electromagnetic wave measuring apparatus, measuring method, program, and recording medium  
A detector detects an electromagnetic wave having a frequency of 0.01 THz≦f≦100 THz and transmitted through a device under test (DUT). A changer changes a relative position of an intersection of...
8487253 Scanning electron microscope  
An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up,...
8487251 Method for controlling charging of sample and scanning electron microscope  
An object of the present invention is to provide a scanning electron microscope aiming at making it possible to control the quantity of electrons generated by collision of electrons emitted from a...
8487252 Particle beam microscope and method for operating the particle beam microscope  
A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion...
8487270 Particle beam device and method for use in a particle beam device  
A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In...
8481968 Electron microscope specimen and method for preparing the same  
A method for preparing an electron microscope specimen is provided. The method includes providing a wafer sample with an analysis region disposed thereon. A dicing process is performed to cut a...
8481933 Method and device for examining a surface of an object  
A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to...
8481935 Scanning electron microscope  
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not...
8481934 Method for inspecting and measuring sample and scanning electron microscope  
As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first...
8481936 Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system  
The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to...
8476585 Microtome utilizing a movable knife in a retardation field scanning electron microscope and a retardation field scanning electron microscope including the same  
A microtome for in situ residence within a chamber of a scanning electron microscope (SEM) and a SEM including the microtome is disclosed. The microtome includes a specimen holder for holding a...
8476588 Method of electron diffraction tomography  
The invention relates to a method for electron diffraction tomography in a Transmission Electron Microscope. Known methods involve using Scanning Transmission Electron Microscope, and use the...
8476589 Particle beam microscope  
A particle beam microscope comprises a magnetic lens 3 having an optical axis 53 and a pole piece 21. An object 5 to be examined is mounted at a point of intersection 51 between an optical axis 53...
8466415 Methods for performing circuit edit operations with low landing energy electron beams  
Methods for using sub-100V electron beam landing energies for performing circuit edit operations. Circuit edit operations can include imaging for navigation and etching in the presence of a...
8466416 Electron detecting mechanism and charged particle beam system equipped therewith  
An electron detecting mechanism having a plate provided with an opening permitting passage of the primary beam, an energy filter, a first light detector, and a second light detector. The plate has...
8461527 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope  
In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of...
8461555 Charged particle beam writing method and charged particle beam writing apparatus  
Based on the pattern writing data input to an input unit 20, a control computer 19 divides a predetermined region on which writing is effected by an electron beam 54 into smaller regions each...
8455824 Charged particle beam apparatus, and sample processing and observation method  
An object of the present invention relates to realizing the processing of a sample by charged particle beams and the monitoring of the processed cross-section with a high throughput. It is...
8455823 Charged particle beam device  
The present invention provides a charged particle beam device in which signal electrons (14) are generated from a sample when the sample (11) is irradiated with a primary charged particle beam...
8455820 Composite charged particle beams apparatus  
A composite charged particle beams apparatus of the present invention allows a sample (5)'s cross-section or edge plane to be observed by using an electron beam (2b), the sample (5)'s...
8455838 Multiple-column electron beam apparatus and methods  
One embodiment disclosed relates an apparatus which includes an electromagnet arranged to provide a large-scale magnetic field in a region. The apparatus further includes an array of multiple...
8450699 Electron beam device and electron beam application device using the same  
To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion...
8445871 Pattern measurement apparatus  
Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide region. A pattern measurement apparatus is proposed which adds identification...
8440970 Characterization of nanoscale structures using an ultrafast electron microscope  
The present invention relates to methods and systems for 4D ultrafast electron microscopy (UEM)—in situ imaging with ultrafast time resolution in TEM. Single electron imaging is used as a...