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8698080 Scanning electron microscope  
An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a...
8692195 Charged particle radiation device  
The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the...
8692193 Method for inspecting EUV reticle and apparatus thereof  
A method of inspecting an EUV reticle is proposed, which uses an original design layout information to align the plurality of patterns on an image, which is got by scanning the surface of an EUV...
8692197 Scanning electron microscope optical condition setting method and scanning electron microscope  
A scanning electron microscope and an optical-condition setting method are provided. The optical condition allows the suppression of a lowering in the measurement and inspection accuracy caused by...
8692878 Methods and apparatus for simultaneously inspecting multiple array regions having different pitches  
One embodiment relates to a method of automatically inspecting multiple array regions (102) simultaneously using an imaging apparatus (302). The method includes selecting (211 or 212) an optimal...
8692194 Electron microscope device  
The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means...
8686360 Micro-sample processing method, observation method and apparatus  
As sample sizes have decreased to microscopic levels, it has become desirable to establish a method for thin film processing and observation with a high level of positional accuracy, especially...
8686359 Characterization of nanoscale structures using an ultrafast electron microscope  
The present invention relates to methods and systems for 4D ultrafast electron microscopy (UEM)—in situ imaging with ultrafast time resolution in TEM. Single electron imaging is used as a...
8680466 Electron microscope, and specimen holding method  
It is an object of the present invention to provide an electron microscope for properly applying a retarding voltage to a sample which is brought into electrical conduction. In order to accomplish...
8674300 Feedback loop for emitter flashing  
A method and a device for stabilizing the emission current of an emitter of a charged particle beam device are provided. In the method, the emitter is operated under predetermined operation...
8674301 Magnifying observation apparatus  
Work to obtain an optical and an electron microscope images at an identical display size is facilitated. A magnifying observation apparatus includes: an electron beam imaging device that obtains...
8674323 Forming an electron microscope sample from high-pressure frozen material  
A method of forming a sample from a capillary with high-pressure frozen sample material comprises providing a high-pressure capillary with vitrified sample material at a temperature T1 below the...
8669523 Contour-based defect detection using an inspection apparatus  
One embodiment relates to a method of inspecting a site location on a target substrate. Contours are obtained, the contours having been generated from a reference image using a design clip. A...
8669522 Mask inspection apparatus and mask inspection method  
According to one embodiment, a mask inspection apparatus includes a decompression chamber, a holder, a light irradiation unit, a detection unit, an electrode, and a control unit. The holder is...
8669524 Scanning incremental focus microscopy  
Method and apparatus are provided for generating an enhanced image of an object. The method includes obtaining images of an area of an object generated using a probe of having a probe size greater...
8669535 Electron gun  
The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large...
8664594 Electron-optical system for high-speed and high-sensitivity inspections  
The present disclosure provides an electron beam column with substantially improved resolution and/or throughput for inspecting manufactured substrates. The electron beam column comprises an...
8664598 Electron microscope and specimen analyzing method  
An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A...
8664599 Electron microscope  
An electron microscope is offered which facilitates aberration correction even during high-magnification imaging. The microscope has a spherical aberration corrector, a transfer lens system...
8658974 Environmental cell for a particle-optical apparatus  
The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a...
8658987 Circuit-pattern inspection device  
Provided is a circuit-pattern inspection device which enables efficient inspection of a semiconductor wafer by selectively inspecting areas on the semiconductor wafer, such as boundaries between...
8653456 Pattern inspection method, pattern inspection program, and electronic device inspection system  
It is an object of the present invention to provide a technique capable of accurately inspecting a circuit pattern in which the contrast of an observation image is not clear, like a circuit...
8653474 Charged particle extraction device and method of design there for  
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied...
8653455 Charged particle beam device and evaluation method using the charged particle beam device  
The charged particle beam device has a problem that a symmetry of equipotential distribution is disturbed near the outer edge of a specimen, an object being evaluated, causing a charged particle...
8653458 Charged particle beam device  
An inspection device carries out beam scanning on a stable scanning cycle by enabling flexible change of various scanning sequences according to inspection conditions thereof, and at the same...
8653459 Scanning electron microscope  
There is provided a technique that is capable of attracting a sample without making the voltage applied to an electrostatic chuck unnecessarily large. Attraction experiments with respect to the...
8653457 Spectroscopy technique using merged spectral data  
A method of examining a sample using a spectroscopic apparatus, comprising the following steps: Mounting the sample on a sample holder;Directing a focused input beam of radiation onto a location...
8648300 Charged particle beam apparatus  
The charged particle beam apparatus having an opening formation member formed with an opening for passage of a charged particle beam emitted from a charged particle source, and either a detector...
8648318 Multiple beam charged particle optical system  
The invention relates to a multiple beam charged particle optical system, comprising an electrostatic lens structure with at least one electrode, provided with apertures, wherein the effective...
8648301 Particle beam system having a hollow light guide  
A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam...
8642959 Method and system of performing three-dimensional imaging using an electron microscope  
A method and electron microscope system of performing three-dimensional imaging using an electron microscope. At least some of the illustrative embodiments are methods comprising generating an...
8642957 Scanning electron microscope and a method for imaging a specimen using the same  
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated...
8642981 Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool  
An electron microscope assembly suitable for enhancing an image of a lithography tool includes an electron microscope configured for positioning below a lithography stage of an e-beam lithography...
8642958 Composite charged particle beam apparatus and sample processing and observing method  
There is provided a composite charged particle beam apparatus, in which a first rotation axis of a rotatable stage intersects a beam irradiation axis of a FIB column and a beam irradiation axis of...
8637836 High aspect ratio sample holder  
An elongated member is formed which has a frontal and a distal end, and a length axis. The frontal end satisfies vacuum sealing and maneuverability specifications of a sample holder for a particle...
8637820 Scanning electron microscope and inspection method using same  
Provided is a high-resolution scanning electron microscope with minimal aberration, and equipped with an electro-optical configuration that can form a tilted beam having wide-angle polarization...
8637819 Cross-section processing and observation apparatus  
Provided is a cross-section processing and observation apparatus, including a control portion for repeatedly executing a process including slice processing by an ion beam and acquisition of a SIM...
8633457 Background reduction system including louver  
A background reduction system may include, but is not limited to: a charged particle source configured to generate a charged-particle beam; a louvered structure including one or more apertures...
8633439 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope  
System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a...
8629394 Charged particle beam device and method for correcting position with respect to charged particle beam  
An object of the present invention is to eliminate a distortion in an image even if there is an angular difference between the deflection direction of the charged particle beam and the tilt axis...
8629395 Charged particle beam apparatus  
In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each...
8624182 Electro-optical inspection apparatus and method with dust or particle collection function  
An electro-optical inspection apparatus prevents adhesion of dust or particles to a sample surface, wherein a stage on which a sample is placed is disposed inside a vacuum chamber that can be...
8624186 Movable detector for charged particle beam inspection or review  
The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as...
8624184 Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes  
Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes (STEMs) are provided. One such method includes performing a first scan of...
8618499 Electron beam irradiation apparatus  
The present invention has for its object to provide an electron beam irradiation apparatus which can suppress influences the electric fields generated by a plurality of backscattered electron...
8618480 Charged particle beam apparatus  
The present invention provides a charged particle beam apparatus which employs LVSEM to inspect sample surface with a throughput much higher than the prior art. The high throughput is realized by...
8618517 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Pattern measuring apparatus
 
An object of the present invention is to provide a pattern measuring apparatus which performs high-accuracy concavity/convexity determination (e.g., distinguishing between a line segment and...
8618934 Autonomous sensing module, a system and a method of long-term condition monitoring of structures  
A system and a method of long-term condition monitoring of structures are based on use of autonomous sensing modules, centers for storing and processing data and software for data analysis. An...
8618478 Drift control in a charged particle beam system  
A method and apparatus for reducing drift in a charged particle beam system. The method includes providing a charged particle beam column including a charged particle beam, a lens system, and a...
8618479 Magnifying observation apparatus  
Observation fields of an electron microscope image and an optical magnifying observation image are smoothly switched. A magnifying observation apparatus includes: a pair of end-face plates closes...