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8759763 Method and apparatus to measure step height of device using scanning electron microscope  
A method of measuring a step height of a device using a scanning electron microscope (SEM), the method may include providing a device which comprises a first region and a second region, wherein a...
8759765 Method for processing samples held by a nanomanipulator  
A method for processing a sample in a charged-particle beam microscope. A sample is collected from a substrate and the sample is attached to the tip of a nanomanipulator. The sample is optionally...
8759760 Inspection system  
A combined inspection system for inspecting an object disposable in an object plane 19, comprises a particle-optical system, which provides a particle-optical beam path 3, and a light-optical...
8759761 Charged corpuscular particle beam irradiating method, and charged corpuscular particle beam apparatus  
According to a charged corpuscular particle beam irradiating method of this invention, a focusing element (19) which focuses the trajectories of charged corpuscular particles (12) emitted from a...
8759764 On-axis detector for charged particle beam system  
A split grid multi-channel secondary particle detector for a charged particle beam system includes a first grid segment and a second grid segment, each having independent bias voltages creating an...
8759762 Method and apparatus for identifying plug-to-plug short from a charged particle microscopic image  
A method of inspecting for plug-to-plug short (short circuit) defects on a sample is disclosed. A charged particle beam for imaging the sample is repeatedly line-scanned over the sample with a...
8754935 Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program  
A microstructure inspection method which inspects an angle of a sidewall of a sample microstructure pattern, the method including: taking SEM photographs of the sample microstructure pattern under...
8754372 Structure and method for determining a defect in integrated circuit manufacturing process  
The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays...
8754664 Inspection method and device  
The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the...
8748814 Structure for inspecting defects in word line array fabricated by SADP process and method thereof  
This invention provides a test structure for inspecting word line array fabricated by SADP process, wherein the test structure comprises a contour circuit to cover one end of the WL array, and is...
8748844 Sample analyzing apparatus and sample analyzing method  
In accordance with an embodiment, a sample analyzing apparatus includes a charged beam generating unit, a detecting unit, and an analyzing unit. The charged beam generating unit is configured to...
8748845 Ion sources, systems and methods  
Ion sources, systems and methods are disclosed.
8748816 Clustering of multi-modal data  
Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined...
8748815 Method and system for detecting or reviewing open contacts on a semiconductor device  
A method and system for detecting or reviewing defective contacts on a semiconductor device are disclosed. In a first embodiment, the method and system comprise providing a positive charge...
8748819 Transmission electron microscopy system and method of operating a transmission electron microscopy system  
A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first...
8748843 Charged particle beam drawing apparatus and charged particle beam drawing method  
A charged particle beam drawing apparatus of an embodiment includes: a drawing unit to perform drawing on a workpiece on a stage by using a charged particle beam; multiple marks located on the...
8748818 Incoherent transmission electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the...
8742375 Scanning electron microscope device, evaluation point generating method, and program  
An image acquisition condition necessary to so arrange FOV's as not to overlap along a device shape so that all constituent arreas necessary for electric characteristic measurement may be confined...
8742345 Method for detecting electron beam of scanning electron microscope and for detecting fine patterns  
Methods for detecting an electron beam of a SEM and for detecting fine patterns are provided. Line patterns having a length in a first direction can be formed on a detection sample. A power...
8742342 Electron microscope  
A scanning electron microscope suppresses a beam drift by reducing charging on a sample surface while suppressing resolution degradation upon observation of an insulator sample. An electron...
8742341 Testing apparatus using charged particles and device manufacturing method using the testing apparatus  
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover...
8742343 Charged particle beam system and method of axial alignment of charged particle beam  
A method of axially aligning a charged particle beam involves an image data acquisition step and a calculation step. The image data acquisition step consists of obtaining first to third sets of...
8742344 Inspection apparatus  
An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an...
8742376 Method and apparatus of mask drawing using a grounding body at lowest resistance value position of the mask  
A mask drawing method includes: disposing a grounding body provided with a grounding pin at a plurality of different places on a mask substrate to measure resistance values; disposing the...
8735847 High resolution gas field ion column with reduced sample load  
A method of operating a focused ion beam device having a gas field ion source is described. According to some embodiments, the method includes emitting an ion beam from a gas field ion source,...
8735816 Standard member for calibration and method of manufacturing the same and scanning electron microscope using the same  
A standard member for automatically, stably, and highly accurately performing magnification calibration used in an electron microscope, the standard member including, on the same plane, a...
8735814 Electron beam device  
The electron beam device includes a source of electrons and an objective deflector. The electron beam device obtains an image on the basis of signals of secondary electrons, etc. which are emitted...
RE44908 Electron beam exposure system  
The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron...
8729471 Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same  
A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system...
8729491 Charged particle beam apparatus  
The present invention provides a charged particle beam apparatus which is provided with a tilting deflector which is disposed between a charged particle source and an objective lens and tilts a...
8729470 Electron microscope with an emitter operating in medium vacuum  
An electron microscope is described. This electron microscope includes an electron emitter that has an evaporation or sublimation rate that is significantly less than that of tungsten at the...
8723117 Switchable multi perspective detector, optics therefor and method of operating thereof  
A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection...
8723116 Method of determining an applicable threshold for determining the critical dimension of at least one category of patterns imaged by atomic force scanning electron microscopy  
A method of determining an applicable threshold for determining the critical dimension of a category of patterns imaged by atomic force scanning electron microscopy is presented. The method...
8723144 Apparatus for sample formation and microanalysis in a vacuum chamber  
An apparatus is disclosed for forming a sample of an object, extracting the sample from the object, and subjecting this sample to microanalysis including surface analysis and electron transparency...
8723115 Method and apparatus for detecting buried defects  
One embodiment relates to a method of detecting a buried defect in a target microscopic metal feature. An imaging apparatus is configured to impinge charged particles with a landing energy such...
8716662 Methods and apparatus to review defects using scanning electron microscope with multiple electron beam configurations  
One embodiment relates to a method of reviewing defects using a scanning electron microscope (SEM). A defect location having a defect for review is selected, and the SEM is configured to be in a...
8716681 Sample processing method  
In one embodiment, a sample processing method includes placing a sample on a sample placing module, and setting first processing boxes on one side of slice formation scheduled regions of the...
8716661 Method for measuring size of specimen  
A method for measuring a size of a specimen is provided. A first projected width of the specimen is obtained at a first angle with the help of an energy source then a second projected width of the...
8710439 Charged particle beam apparatus  
Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant...
8710464 Specimen preparation device, and control method in specimen preparation device  
Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen...
8704177 Electron microscope, electron-microscope image-reconstruction system and electron-microscope image-reconstruction method  
There is provided an image-reconstruction system capable of implementing a multi-axes reconstruction technique for lessening a burden on the part of a user, and precluding artifacts high in...
8704176 Charged particle microscope providing depth-resolved imagery  
A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate...
8704528 Method and apparatus for inspecting electronic component  
In one embodiment, a method for inspecting an electronic component includes preparing a current detector which is electrically connected to a current detection terminal via a gating device, and...
8704175 Scanning electron microscope  
Provided is a scanning electron microscope equipped with a high-speed and high-precision astigmatism measuring means to be used when both astigmatism generated by an electron-beam column and...
8705692 Laser-based accelerator for interrogation of remote containers  
A method and apparatus for generating high-energy beams of electrons or x-rays through laser wakefield acceleration to remotely examine containers is disclosed. By scanning the beam of electrons...
8698077 Method for determining number of layers of two-dimensional thin film atomic structure and device for determining number of layers of two-dimensional thin film atomic structure  
Provided is a versatile method of determining the number of layers of a two-dimensional atomic layer thin film as compared with conventional methods. An electron beam is radiated to a...
8698079 Method for scanning electron microscope observation of sample floating on liquid surface  
A micro sample floating on the surface of an ionic liquid is observed by scanning electron microscopy without the sample being covered with the ionic liquid. A floating or hydrophobic sample is...
8698105 Charged particle beam apparatus and method of adjusting charged particle optics  
A charged particle beam apparatus which is able to adjust charged particle optics easily in a short time with a high degree of accuracy and a method of adjusting charged particle optics are...
8698078 Charged-particle microscopy with occlusion detection  
This invention relates to a method of examining a sample using a charged-particle microscope. This invention solves the problem of occlusion effects, whereby a given line-of-sight behind a...
8698081 Pattern inspection apparatus and pattern inspection method  
The pattern inspection apparatus includes: an irradiator irradiating a sample with an electron beam; an electron detector detecting an amount of electrons generated on the sample having a pattern...