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7244933 Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method  
Provided is an electron beam apparatus in which an electron beam emitted from an electron gun is separated by a plurality of apertures, images of said apertures are reduced in more than two stages...
7244932 Electron beam apparatus and device fabrication method using the electron beam apparatus  
The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc. One of the characterizing features of the electron beam apparatus of...
7241991 Region-of-interest based electron beam metrology  
One embodiment relates to a method for metrology using an electron beam apparatus. At least one region of interest is selected in a field of view at a magnification level. Scanning parameters are...
7241995 Electron microscope equipped with magnetic microprobe  
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The...
7241994 Scanning probe microscope and specimen surface structure measuring method  
A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a...
7238956 Device for controlling an apparatus generating a charged particle beam  
A device for adjusting a beam of charged particles. The device includes an adjustment mechanism for storing desired characteristics for the beam, determining values of adjustment parameters of the...
7238939 Small electron gun  
To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative...
7235800 Electrical probing of SOI circuits  
Analysis of a semiconductor die having silicon-on-insulator (SOI) structure is enhanced by accessing the circuitry within the die from the back side without necessarily breaching or needing to...
7235799 System and method for evaluation using electron beam and manufacture of devices  
An electron beam apparatus having a longer life time of cathode, and allowing a plurality of electron beams to be arranged adequately around an optical axis and five or more electron beams to be...
7235782 Semiconductor inspection system  
An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information...
7235794 System and method for inspecting charged particle responsive resist  
An apparatus and method for scanning a pattern. The method includes: (i) directing a charged particle beam such as to interact with the pattern along a first scan path, and (ii) directing a beam...
7235783 Gas blowing nozzle of charged particle beam apparatus and charged particle beam apparatus as well as working method  
There are provided a gas blowing nozzle adapted such that, by the fact that a groove-like notch structure has been provided in a side to which a beam IB comes flying in a nozzle tip part of a gas...
7235784 Transmission electron microscope and image observation method using it  
Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is...
7233438 Specimen temperature adjusting apparatus  
A specimen temperature adjusting apparatus includes a specimen stage that the observation specimen is to be placed on and a temperature adjustment element that is attached to the specimen stage....
7232997 Apparatus and method for investigating or modifying a surface with a beam of charged particles  
An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged...
7232994 Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer  
The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base...
7230243 Method and apparatus for measuring three-dimensional shape of specimen by using SEM  
The present invention relates to a method and apparatus for measuring a three-dimensional profile using a SEM, capable of accurately measuring the three-dimensional profile of even a flat surface...
7230239 Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same  
A system for inspecting a pattern shape operates to detect secondary electrons from a specimen by irradiation of a focused electron beam and perform arithmetic processing on this detected signal....
7230240 Enhanced scanning control of charged particle beam systems  
A charged particle beam system and scanning control method capable of imaging, and possibly editing, a device under test (DUT). The charged particle beam system contains a charged particle beam...
7230241 Method for matching two measurement methods for measuring structure widths on a substrate  
The invention relates to a method for matching a first measurement method for measuring structure widths of trapezoidally tapering structures on a substrate wafer to a second measurement method...
7227141 Electron beam apparatus  
An electron beam apparatus is provided in which a sample is scanned with a plurality of primary electron beams respectively emitted from a plurality of electron guns. Each of the electron guns...
7227143 X-ray detecting devices and apparatus for analyzing a sample using the same  
X-ray detecting devices and apparatus for analyzing a sample using the same are disclosed. A disclosed X-ray detecting device has an X-ray detector to detect X-rays emitted from a sample. The...
7227142 Dual detector optics for simultaneous collection of secondary and backscattered electrons  
A detector optics system for an electron probe system is disclosed. Aspects of the detector optics system include: the ability to simultaneously detect two electron populations, secondary...
7227144 Scanning transmission electron microscope and scanning transmission electron microscopy  
A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this...
7223974 Charged particle beam column and method for directing a charged particle beam  
A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam...
7223438 Patterning magnetic nanostructures  
A direct-write method for fabricating magnetic nanostructures, including hard magnetic nanostructures of barium hexaferrite, BaFe, based on nanolithographic printing and a sol-gel process. This...
7223975 Inspection apparatus for circuit pattern  
In a circuit pattern inspection apparatus, while an electron beam is irradiated onto a surface of a substrate having a plurality of chips where circuit patterns have been formed, a signal produced...
7220970 Process and device for measuring ions  
The invention relates to a method and a device for the measurement of ions by coupling different measurement methods/techniques, a first detector being a collector (17) and a second detector being...
7220962 Cantilever array and scanning probe microscope including a sliding, guiding, and rotating mechanism  
There are provided a cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding...
7220973 Modular manipulation system for manipulating a sample under study with a microscope  
A modular manipulation system and method for using such modular manipulation system for manipulating a sample under study with a microscope are provided. According to at least one embodiment, a...
7220963 Light weight portable scanning electron microscope  
We have developed a particular combination of elements and devices which enables the portability of a scanning electron microscope (SEM). In particular the combination enables a small size,...
7218126 Inspection method and apparatus for circuit pattern  
An apparatus for measuring a sample with a circuit pattern including at least a porous low-permittivity hydrogensilsesquioxane material or a material structurally or compositionally similar to the...
7217924 Holey mirror arrangement for dual-energy e-beam inspector  
One embodiment relates to an apparatus for generating a dual-energy electron beam. A first electron beam source is configured to generate a lower-energy electron beam, and a second electron beam...
7214937 Electron microscope  
In order to provide an electron microscope which enables the operator to position the field-of-view easily and accurately on a target fault, the electron microscope for observing a surface or...
7214936 Charged particle beam apparatus and dimension measuring method  
There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a...
7211804 Chromatic aberration corrector for charged particles and charged-particle optical apparatus using the corrector  
The present invention provides an aberration corrector functioning under a condition outside the setting optical condition of an incorporated charged particle beam apparatus. An intermediate...
7209596 Method of precision calibration of a microscope and the like  
A method of precision calibration of a microscope magnification with calculating a magnification scale as a quotient obtained when an image size of a test object viewed or collected with the...
7205539 Sample charging control in charged-particle systems  
One embodiment disclosed relates to a charged-particle beam apparatus configured with sample charging control. A stage is configured to hold a sample, and a column for generating a...
7205555 Defect inspection apparatus and defect inspection method  
An apparatus and a method for automatically inspecting a defect by an electron beam using an X-ray detector. The composition of a defective portion is analyzed with higher rapidity and the cause...
7205542 Scanning electron microscope with curved axes  
One embodiment relates to a scanning electron beam apparatus having curved electron-optical axes. An electron gun and illumination electron optics are configured to generate a primary electron...
7205540 Electron beam apparatus and device manufacturing method using same  
An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample,...
7202475 Rapid defect composition mapping using multiple X-ray emission perspective detection scheme  
Disclosed are methods and apparatus for characterizing defects by using X-ray emission analysis techniques. The X-rays are emitted in response to an impinging beam, such as an electron beam,...
7202476 Charged-particle beam instrument  
A charged-particle beam instrument is offered which can inspect side and rear surfaces of a sample. Two electron optical microscope columns are mounted in a vacuum chamber. Each of the microscope...
7193222 Secondary electron detector, especially in a scanning electron microscope  
The present invention deals with a secondary electron detector (1), especially in a scanning electron microscope. The subject matter of the invention provides a secondary electrons detector (1)...
7189968 Sample measurement method and measurement sample base material  
A sample measurement method is a sample measurement method by an electron microscope and includes the film formation step of forming a sample on a projection on the major surface of a substrate,...
7190175 Orthogonal microwave imaging probe  
A microwave imaging microscope and associated probe, or a read head. The probe or the read head includes a sensor unit with three fixed electrodes, preferably a stimulating electrode surrounding a...
7189981 Electromagnetic focusing method for electron-beam lithography system  
A method for projecting a predetermined pattern of an electron beam from an emitter to a wafer in a vacuum chamber of an electron-beam lithography system is provided. An initial condition for...
7186975 Scanning charged-particle microscope  
In orer to supply a scanning charged-particle microscope that can achieve both the improvement of resolution and that of focal depth at the same time, a scanning charged-particle microscope is...
7186977 Method for non-destructive trench depth measurement using electron beam source and X-ray detection  
A method (and system) for non-destructive measurement of a depth of a feature in a structure, includes using a scanning electron microscope (SEM) image to navigate to find the feature in an X-ray...
7186976 Scanning electron microscope  
There is provided a reconfigurable scanning electron microscope (RSEM) (100) comprising: (a) a gun assembly (110) and an associated electron optical column (120) for generating an electron beam...