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8927931 Scanning electron microscope  
In conventional electron microscopes, orthogonality has been defined for each electron microscope individually in such a manner that a lattice sample is observed, and correction is applied to a...
8927932 Scanning transmission electron microscopy for imaging extended areas  
A scanning transmission electron microscope for imaging a specimen includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A stage is...
8921783 Method of collecting and processing electron diffraction data  
A method of using electron diffraction to obtain PDFs from crystalline, nanocrystalline, and amorphous inorganic, organic, and organometallic compound.
8921786 Charged particle beam apparatus  
Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant...
8921804 High brightness electron gun with moving condenser lens  
A condenser lens arrangement for an electron beam system is described. The condenser lens arrangement includes a magnetic condenser lens adapted for generating a magnetic condenser lens field, the...
8921784 Scanning electron microscope  
There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining...
8921787 Incoherent transmission electron microscopy  
A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a...
8916839 Sample preparation method and apparatus  
A sample preparation method is carried out using a focused ion beam and an electron beam. While displaying a SEM image of a first cross-section of a sample on a display screen, the first...
8912488 Automated sample orientation  
A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample...
8912491 Method of performing tomographic imaging of a sample in a charged-particle microscope  
The invention relates to a method of performing tomographic imaging of a sample comprising providing a beam of charged particles; providing the sample on a sample holder that can be tilted; in an...
8912490 Method for preparing samples for imaging  
A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample...
8912487 Charged particle beam device, position specification method used for charged particle beam device, and program  
Observation using an FIB image is enabled without causing any damage to a designated region. To this end, an ion beam scanning-prohibited region is set in a sample by using an image acquired by a...
8907278 Charged particle beam applied apparatus, and irradiation method  
Provided is a charged particle beam applied apparatus for observing a sample, provided with: a beam-forming section that forms a plurality of charged particle beams on a sample; an energy control...
8907281 System and method for controlling charge-up in an electron beam apparatus  
The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the...
8907298 Method for axial alignment of charged particle beam and charged particle beam system  
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts...
8907280 Fast electron microscopy via compressive sensing  
Various technologies described herein pertain to compressive sensing electron microscopy. A compressive sensing electron microscope includes a multi-beam generator and a detector. The multi-beam...
8907279 Electron microscope and image capturing method using electron beam  
The present invention is characterized by an electron microscope which intermittently applies an electron beam to a sample and detects a secondary electron signal, wherein an arbitrarily defined...
8901493 Electron microscope  
An object of the present invention relates to measurement of a quantitative element image with a high S/N ratio and measurement of an electron energy loss spectrum with high energy precision and...
8901494 Sample analyzer  
A sample analyzer is offered which creates a ternary scatter diagram representing a concentration ratio distribution of three elements out of several elements to be analyzed. This...
8901936 Array test device, method for testing an organic light emitting display device, and method for manufacturing the organic light emitting display device  
A method for testing an array for a pixel circuit of an organic light emitting diode display, which includes a first transistor that transmits a driving current corresponding to a data signal to...
8895921 Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus  
An inspection apparatus is provided comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary...
8890068 Charged particle ray apparatus and pattern measurement method  
Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured...
8890096 Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam  
Technique capable of achieving shortening of settling time, which is caused by ringing, etc. of a blanking control signal is provided. A measuring/inspecting apparatus is configured to have a main...
8890066 Sharp scattering angle trap for electron beam apparatus  
One embodiment relates to an electron beam apparatus. The apparatus includes a source for generating an incident electron beam, an electron lens for focusing the incident electron beam so that the...
8890067 Inspection system using scanning electron microscope  
An inspection system using a scanning electron microscope includes a scanning electron microscope chamber inspecting an object to be inspected by using an electron beam and maintaining a vacuum...
8890069 Method for detecting defect of substrate  
A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically...
8890093 Charged particle beam apparatus and method for forming observation image  
A focused ion beam apparatus includes a lens interferometer configured to detect a relative position of an ion beam column and a sample. An image forming section includes an irradiation position...
8884181 Method of generating low-energy secondary electrons for applications in biological sciences, radiochemistry, and chemistry of polymers and physics of radiotherapy  
The present disclosure relates to a method and a system for generating low-energy electrons in a biological material. The biological material is held in position by a support. Laser beam pulses...
8884247 System and method for ex situ analysis of a substrate  
A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region...
8884223 Methods and apparatus for measurement of relative critical dimensions  
One embodiment relates to a method of measuring a relative critical dimension (RCD) during electron beam inspection of a target substrate. A reference image is obtained. A region of interest is...
8884225 Sample observing device and sample observing method  
An electron beam inspection device observes a sample by irradiating the sample set on a stage with electron beams and detecting the electron beams from the sample. The electron beam inspection...
8884224 Charged particle beam imaging assembly and imaging method thereof  
A method for enhancing the quality of a charged particle microscopic image of a sample is disclosed. The image is formed by a charged particle beam imaging system. The method comprising: scanning,...
8878148 Method and apparatus of pretreatment of an electron gun chamber  
A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and...
8880356 Method and system for spectrum data analysis  
A method and system for spectrum data analysis. The method comprises the steps of collecting a spectrum of an unknown material; providing a set of data templates; calculating weighting factors for...
8878129 Pattern measurement apparatus and pattern measurement method  
According to one embodiment, a pattern measurement apparatus includes a scan controller, a focus controller, a stage, a sensor, a signal processor, and a measurement unit. The scan controller is...
8878130 Scanning electron microscope and scanning transmission electron microscope  
A scanning transmission electron microscope according to the present invention includes an electron lens system having a small spherical aberration coefficient for enabling three-dimensional...
8872106 Pattern measuring apparatus  
An object of the present invention is to provide a pattern measuring apparatus which performs high-accuracy concavity/convexity determination (e.g., distinguishing between a line segment and...
8872105 In situ reactivation of fluorescence marker  
Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest,...
8866078 Scanning transmission type electron microscope  
Disclosed is a scanning transmission type electron microscope provided with a scanning transmission electron microscope provided with an aberration corrector 805 for correcting the aberration of...
8859962 Charged-particle microscope  
A charged-particle-beam device is characterized in having a control value for an aligner coil (29) being determined by: a coil current and an electrode applied-voltage at a control value for...
8859992 Charged particle beam devices  
In a charged particle beam device, such as an electron microscope, a beam generating apparatus generates a focussed charged particle beam e− that is incident on a specimen in a specimen chamber...
8859966 Simultaneous electron detection  
The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism...
8859984 Method and apparatus for inspecting sample surface  
Provided is a method and an apparatus for inspecting a sample surface with high accuracy. Provided is a method for inspecting a sample surface by using an electron beam method sample surface...
8859963 Methods for preparing thin samples for TEM imaging  
A method and apparatus for preparing thin TEM samples in a manner that reduces or prevents bending and curtaining is realized. Embodiments of the present invention deposit material onto the face...
8853647 Electron microscope  
Provided is an electron microscope on which a specimen holder to have high voltage applied is mountable. The specimen holder has safety (electric shock prevention) features, and attention is paid...
8853630 Scanning electron microscope and a method for imaging a specimen using the same  
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated...
8853628 Defect inspection method, and device thereof  
A conventional pattern inspection, which compares an image to be inspected with a reference image and subjects the resulting difference value to the defect detection using the threshold of defect...
8847158 Device and method for measuring surface charge distribution  
A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged...
8847172 Method for axial alignment of charged particle beam and charged particle beam system  
A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts...
8841613 Method and system for 4D tomography and ultrafast scanning electron microscopy  
A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported...