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7598490 SEM-type reviewing apparatus and a method for reviewing defects using the same  
In order to achieve high throughput in a SEM-type defect-reviewing apparatus and method for automatically acquiring images of review defects present on samples, including: a cell comparison step...
7595489 Method and apparatus for material identification  
A method of identifying a material using an x-ray emission characteristic is provided. X-ray data representing a monitored x-ray emission characteristic is obtained from a specimen in response to...
7595482 Standard component for length measurement, method for producing the same, and electron beam metrology system using the same  
A standard component for length measurement includes a first diffraction grating and a second diffraction grating. Each of components of the second diffraction grating is disposed between...
7595490 Charged particle beam emitting device and method for operating a charged particle beam emitting device  
A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of...
7592586 Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample  
An apparatus capable of detecting defects of a pattern on a sample with high accuracy and reliability and at a high throughput, and a semiconductor manufacturing method using the same are...
7592591 X-ray analyzer using electron beam  
An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted...
7592604 Charged particle beam apparatus  
The present invention provides a charged particle beam apparatus capable of preventing the charging-up of the specimen without using a large-scale facility. A scanning electron microscope 100...
7592590 Charged particle beam device with detection unit switch and method of operation thereof  
The invention provides a charged particle beam device and a method of operation thereof. An emitter (2) emits a primary charged particle beam (12). Depending on the action of a deflection system,...
7589322 Sample measuring device  
An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement...
7589323 Superconducting X-ray detector and X-ray analysis apparatus using the same  
To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field. A...
7586093 Apparatus and method for inspecting a sample of a specimen by means of an electron beam  
The invention refers to an apparatus (10) for inspecting a sample (12) of a specimen (14) by means of an electron beam (34) comprising a vacuum chamber (18); an ion beam device (20) for generating...
7579591 Method and apparatus for analyzing sample  
Method and apparatus for performing sample analysis using both the WDS and an energy-dispersive X-ray spectrometer (EDS). The analysis starts with irradiating the sample with an electron beam....
7576325 Electron microscopic method and electron microscope using same  
There is provided an electron microscopic method capable of realizing a high resolution based on the principle of the phase retrieval method. An electron microscope (10) using the method is a...
7576340 Focused ion beam processing method  
There is provided a focused ion beam processing method in which damage to a workpiece is minimized when the surface of the workpiece is irradiated and processed with an ion beam. The method...
7573047 Wafer holder and sample producing apparatus using it  
A wafer holder includes: a frame-shaped holder main body which has an opening at its center and carries a wafer on its upper surface; guide members which contact the outer periphery of the wafer...
7573031 Methods for SEM inspection of fluid containing samples  
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning...
7573053 Polarized pulsed front-end beam source for electron microscope  
A method and an electron source are provided for generating polarized electrons for an electron microscope. The electron source includes a photoemissive cathode and a low-power drive laser. The...
7573030 Specimen observation method  
It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an...
7569833 Apparatus for generating a plurality of beamlets  
The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging...
7569818 Method to reduce cross talk in a multi column e-beam test system  
A method and apparatus for reducing or eliminating crosstalk between a plurality of electron beams is described. The plurality of electron beams may produce test areas on a large area substrate...
7569819 Electron beam system and method of operating the same  
An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same...
7569838 Electron beam inspection system and inspection method and method of manufacturing devices using the system  
An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular...
7566892 Electron beam apparatus and method for production of its specimen chamber  
A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for...
7566872 Scanning electron microscope  
A scanning electron microscope is disclosed. The primary electron beam is radiated on a reticle (specimen), and an observation image of the reticle is obtained using the electrons secondarily...
7566873 High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus  
One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a...
7566871 Method and apparatus for pattern inspection  
Because a mirror electron imaging type inspection apparatus for obtaining an inspection object image with mirror electrons has been difficult to optimize inspection conditions, since the image...
7566888 Method and system for treating an interior surface of a workpiece using a charged particle beam  
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal...
7566884 Specimen holder for electron microscope  
A specimen holder has two levers on which probes for current measurement are carried. The levers are in contact with a spherical body, the spherical body acting as a pivotal point. When the levers...
7560693 Electron-beam size measuring apparatus and size measuring method with electron beams  
An electron-beam size measuring apparatus includes: electron beam irradiating means that irradiates an electron beam on a surface of a sample; detection means that detects electrons emitted from...
7560691 High-resolution auger electron spectrometer  
One embodiment relates to a high-resolution Auger electron spectrometer in a scanning electron beam apparatus. An electron source generates a primary electron beam, and an immersion objective lens...
7560703 Integrated segmented scintillation detector  
A signal conduction channel having a first element that receives electrons at a first end from a vacuum environment, produces photons as the electrons are received, and propagates the photons...
7560940 Method and installation for analyzing an integrated circuit  
A method and installation for analyzing an integrated circuit. The method includes, for a plurality of surface points of the integrated circuit, the following steps: applying a laser radiation, in...
7560692 Method of TEM sample preparation for electron holography for semiconductor devices  
A high quality electron microscopy sample suitable for electron holography is prepared by forming markers filled with TEOS oxide and by repeatedly applying multiple coats of an adhesive followed...
7556749 Electron source  
To provide an electron source to be used for a surface analyzer such as a scanning or transmission electron microscope or an Auger electron spectroscope, or an electron beam lithography machine,...
7557347 Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same  
A charged particle beam apparatus for acquiring high-definition and highly contrasted observation images by detecting efficiently secondary signals without increasing aberration of the primary...
7553334 Defective product inspection apparatus, probe positioning method and probe moving method  
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table...
7554099 Ultra-thin liquid control plate and combination of box-like member and the control plate  
An ultra-thin liquid control plate and a combination of a box-like member and the control plate include a plate-like member having at least one view hole. The joint surface combined with a...
7554094 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements  
An electron-optical arrangement provides a primary beam path for a beam of primary electrons and a secondary beam path for secondary electrons. The electron-optical arrangement includes a magnet...
7554082 Pattern observation apparatus, pattern observation method, method of manufacturing semiconductor device, and program  
A pattern observation apparatus includes: a defect position information input unit which downloads defect position information for a pattern, the defect position information having been detected...
7550744 Chamberless substrate handling  
without substantially touching the surface, having annular rings forming annular orifices, one of the rings forming an air bearing portion and having passages through which a flow of a gas can be...
7550724 Electron beam device and its control method  
An electron beam device includes an electron gun section having an internal space kept at an ultrahigh vacuum level for generating a primary electron beam, a mirror section having an internal...
7550750 Method and apparatus for processing a micro sample  
An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with...
7547884 Pattern defect inspection method and apparatus thereof  
In the present invention, the structure of an electrification control electrode is changed from a grid type to a slit type and thereby shadows are not formed when a wafer is irradiated with a...
7544938 Methods and apparatus for statistical characterization of nano-particles  
A method and apparatus for determining statistical characteristics of nano-particles includes distributing the nano-particles over a surface and then determining properties of the nano-particles...
7544937 Charged particle beam device for high spatial resolution and multiple perspective imaging  
The present invention relates to a charged particle device with improved detection scheme. The device has a charged particle source providing a beam of primary charged particles; a first unit for...
7544936 Method and device for observing a specimen in a field of view of an electron microscope  
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first...
7544939 Method for determining the aberration coefficients of the aberration function of a particle-optical lens  
A lens of particle-optical apparatus, such as the objective lens, suffers from aberrations. As is already known since decades Ronchigrams can be used to determine these aberrations of...
7544951 Electron gun assembly  
A device which employs an electron beam, for performing a desired function, includes an electron gun for generating the electron beam. The electron gun includes a barrel shaped rotatable structure...
7544935 Method and apparatus for evaluating thin films  
A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a...
7541580 Detector for charged particle beam instrument  
A detector for use with a high pressure SEM, such as an ESEMĀ® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal...