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7872230 Micro-sample processing method, observation method and apparatus  
As sample sizes have decreased to microscopic levels, it has become desirable to establish a method for thin film processing and observation with a high level of positional accuracy, especially...
7872232 Electronic microscope apparatus  
To enable measurement of an elastically scattered electron image, a characteristic-X-ray-based element image and an electron-beam-energy-spectroscopy-based element image with a high S/N and high...
7872231 Sample relocation method in charged particle beam apparatus and charged particle beam apparatus as well as sample for transmission electron microscope  
In a chamber of a charged particle beam apparatus, the sample on the sample substrate is gripped and carried to the sample holder, and there is controlled the attitude of the sample when the...
7868290 Material processing system and method  
A material processing system for processing a work piece is provided. The material processing is effected by supplying a reactive gas and energetic radiation for activation of the reactive gas to...
7868303 Method and handling apparatus for placing patterning device on support member for charged particle beam imaging  
A patterning device handling apparatus for use in charged particle beam imaging is disclosed. The disclosed patterning device handling apparatus comprises a first gripping member and a second...
7863564 Electric charged particle beam microscope and microscopy  
An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of...
7863565 Electron beam inspection method and electron beam inspection apparatus  
An electron beam inspection apparatus images reflected electrons and cancels negative charging derived from electron-beam irradiation. Ultraviolet rays are irradiated and an irradiated area of...
7863580 Electron beam apparatus and an aberration correction optical apparatus  
An electron beam apparatus for providing an evaluation of a sample, such as a semiconductor wafer, that includes a micro-pattern with a minimum line width not greater than 0.1 μm with high...
7863563 Carbon tube for electron beam application  
Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an...
7858936 Slice and view with decoration  
Imprecisely located defects are imaged by milling a series of slices and performing a light, preferential etch to provide a topographical interface between materials having similar secondary...
7859274 System for testing a flat panel display device and method thereof  
A system for testing a flat panel display having a flat display panel assembly includes a testing stage for arranging the flat display panel assembly, a measuring apparatus being disposed on the...
7858935 Method and system for conducting event-streamed spectrum imaging  
A method and system for conducting event-streamed spectrum imaging concurrently collects electron and spectral signals resulting from a raster scan of a sample. The signals are formatted and...
7855363 Inspection method and apparatus using an electron beam  
An inspection method and apparatus irradiates a sample on which a pattern is formed with an electron beam, so that an inspection image and a reference image can be generated on the basis of a...
7855364 Projection electronic microscope for reducing geometric aberration and space charge effect  
A projection electronic microscope is provided for improving geometric aberration and a space charge effect within a zooming range using a zoom type transfer lens system in a projection/image...
7855373 Charged particle gun  
An electron gun (1) includes an emitter (2), a tubular support (3) and an adaptor (4) for receiving the emitter. The adaptor includes a tapered plugging surface (7) and the tubular support...
7851755 Apparatus for detecting backscattered electrons in a beam apparatus  
A beam apparatus has a beam source producing a primary electron beam, an objective lens focusing the beam onto an observed sample, and at least one condenser lens mounted between the beam source...
7851756 Charged particle beam irradiation system  
It is to prevent an image drift from occurring caused by a specimen being charged when observing the specimen including an insulating material. A first scan is performed in a predetermined...
7851753 Method and apparatus for reviewing defects  
The invention provides an apparatus and a method each capable of highly accurately reviewing at a high speed very small foreign matters and pattern defects occurring during a device production...
7851754 Charged particle beam system  
A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not...
7851769 Motorized manipulator for positioning a TEM specimen  
The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the...
7847250 Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device  
A substrate inspection apparatus includes: an electron beam irradiation device which emits an electron beam and causes the electron beam to irradiate a substrate to be inspected as a primary beam;...
7847266 Device and method for selecting an emission area of an emission pattern  
A charged particle beam apparatus and a method for measuring an emission pattern of such an apparatus are provided. The apparatus comprises an emitter with an emission pattern including at least...
7847267 Scanning electron microscope having multiple detectors and a method for multiple detector based imaging  
A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object,...
7847268 Three modes particle detector  
The invention discloses a charged particle detecting apparatus for detecting positive ions, negative ions and electrons emitted from a sample, the apparatus comprising a housing, defining a...
7847249 Charged particle beam apparatus  
A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence...
7842920 Methods and systems of performing device failure analysis, electrical characterization and physical characterization  
An analysis system has a charged particle beam instrument and a scanning probe microscope operably coupled with the charged particle beam instrument. A stage defines an aperture, the stage is...
7842930 Charged particle detector assembly, charged particle beam apparatus and method for generating an image  
A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged...
7838834 Image forming method and electron microscope  
As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming...
7838827 Monochromator and scanning electron microscope using the same  
An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly...
7838829 Charged particle beam device  
There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a...
7838832 Electron beam apparatus and inspection method using dual illumination beams with dynamically controllable offsets  
An apparatus for generating a dual-energy electron beam. The apparatus includes a first electron beam source configured to generate a lower-energy electron beam, and a second electron beam source...
7838828 Semiconductor device inspection apparatus  
A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the...
7838840 Charged particle beam apparatus  
A charged particle beam apparatus for measuring and inspecting a sample having some parts in focus and other parts out of focus in an image due to the effect of the roughness of the sample surface...
7838833 Apparatus and method for e-beam dark imaging with perspective control  
A method of imaging using an electron beam. An incident electron beam is focused onto the specimen surface, a scattered electron beam is extracted from the specimen surface, and a plurality of...
7838831 Substrate inspection apparatus, substrate inspection method and semiconductor device manufacturing method  
A substrate inspection method includes forming a conductive thin film on a surface of an inspection target substrate with a pattern formed thereon, generating an electron beam and irradiating the...
7838852 Medical radiation apparatus  
A medical radiation apparatus has a beam source and a deflection apparatus, which can be activated by means of a data processing device according to a radiation schedule generated using a...
7838848 Patterning device holding apparatus and application thereof  
A patterning device holding apparatus includes a support platform unit with a plurality of first positioning projections and a gripper unit. The gripper unit includes a head portion and a...
7838830 Charged particle beam apparatus and method for operating a charged particle beam apparatus  
A charged particle beam apparatus is provided, which comprises a charged particle beam column for generating a primary charged particle beam; a focusing assembly, such as a charged particle lens,...
7835564 Non-destructive, below-surface defect rendering using image intensity analysis  
Non-destructive, below-surface defect rendering of an IC chip using image intensity analysis is disclosed. One method includes providing an IC chip delayered to a selected layer; determining a...
7834326 Aberration corrector and charged particle beam apparatus using the same  
The present invention provides an aberration corrector giving excellent assembly accuracy but having fewer parts and fewer adjustment locations in number. In order to achieve it, a multistage...
7834317 Scanning electron microscope and system for inspecting semiconductor device  
A scanning electron microscope has an electron source for illuminating a primary electron beam on a specimen wafer, an accelerating electrode, a condenser lens, a deflector, an objective lens, a...
7829853 Sample surface observation method  
A surface of a sample is observed by acquiring an image of the surface of the sample. An electron beam I irradiated onto the surface of the sample in which wiring including an insulation material...
7825377 Electron beam apparatus with aberration corrector  
An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a...
7825378 Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus  
A method for improving the resolution of STEM images of thick samples. In STEM, the diameter of the cross-over depends on the opening half-angle α of the beam and can be as low as 0.1 nm. For...
7825376 Scintillator aspects for X-ray fluorescence visualizer, imager, or information provider  
One aspect relates to optically detecting an at least one scintillated viewable and/or visible photon that has been converted from the at least one induced X-ray fluorescing photon. The aspect can...
7821187 Immersion gun equipped electron beam column  
An electron gun of the type having an electron emitter for emitting electrons, including an electrostatic lens and a magnetic lens formed by pole pieces with a winding coil disposed between the...
7818816 Substrate patterning by electron emission-induced displacement  
Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be...
7816648 Electron interferometer or electron microscope  
In an electron beam interference system using an electron biprism, which is capable of independently controlling each of the interference fringe spacing s and the interference width W, both of...
7817105 Image forming method and charged particle beam apparatus  
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third...
7807966 Scanning electron microscope  
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed....