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8022364 Electron spin detector, and spin polarized scanning electron microscope and spin-resolved x-ray photoelectron spectroscope using the electron spin detector  
An electron spin detector includes plural magnetoresistive sensors and a deceleration lens of an electron beam, and each magnetoresistive sensor is inclined so that the electron beam spread by the...
8024816 Approach method for probe and sample in scanning probe microscope  
In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement...
8017918 Charged-particle beam instrument  
A charged-particle beam instrument (such as a transmission electron microscope) which facilitates modifying the diameters of aperture stops installed above and below (on the beam entrance and exit...
8013301 Measurement system and a method  
The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area image area by...
8008639 System for processing an object  
A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at...
8008622 Electron beam apparatus and method of generating an electron beam irradiation pattern  
High-contrast exposure is performed by use of a small dose of electron beams, a pattern is formed on a wafer with high accuracy, and high-precision inspection is performed. In pattern formation,...
8008629 Charged particle beam device and method for inspecting specimen  
A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a...
8003940 Tool-to-tool matching control method and its system for scanning electron microscope  
A system for controlling a tool-to-tool disparity between a plurality of scanning electron microscopes includes a measuring unit for measuring a tool-to-tool disparity between plural scanning...
8000939 Charged particle beam apparatus  
An object of the present invention is to provide a synthesized signal forming method and an apparatus thereof for realizing both noise reduction and dosage reduction when synthesizing signals...
7989766 Sample inspection apparatus  
A sample inspection apparatus in which a fault in a semiconductor sample can be measured and analyzed efficiently. A plurality of probes are brought into contact with the sample. The sample is...
7989768 Scanning electron microscope  
A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not...
7989782 Apparatus and method for specimen fabrication  
A specimen fabricating apparatus comprises: a specimen stage, on which a specimen is placed; a charged particle beam optical system to irradiate a charged particle beam on the specimen; an etchant...
7985952 Charged particle spin polarimeter, microscope, and photoelectron spectroscope  
A charged particle spin polarimeter that is capable of resolving with high efficiency the magnetic moment of a charged particle. The charged particle spin polarimeter has a pair of convex and...
7987072 Defect analyzer  
The present invention provides methods, devices, and systems for analyzing defects in an object such as a semiconductor wafer. In one embodiment, it provides a method of characterizing defects in...
7982188 Apparatus and method for wafer pattern inspection  
An electric field for decelerating an electron beam is formed on a surface of a sample semiconductor to be inspected, an electron beam having a specific area (a sheet electron beam) and containing...
7982186 Method and apparatus for obtaining images by raster scanning charged particle beam over patterned substrate on a continuous mode stage  
A method of raster scanning a sample on a continuously moving stage for charged-particle beam imaging said sample is disclosed. The method includes line scanning a charged-particle beam across a...
7977630 Electron microscope  
There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An...
7979217 Method and system for spectroscopic data analysis  
A method of analyzing spectroscopic data, the method comprising collecting spatially resolved measurement spectroscopic data of a sample for a series of measurements spots, assigning the...
7977632 Scanning electron microscope  
To make it possible to observe the bottom of a contact hole and internal wires, in observation of the contact hole 102, by scanning it at a predetermined acceleration voltage, the positive charge...
7973282 Charged particle beam apparatus and dimension measuring method  
There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a...
7973283 Method for regulating scanning sample surface charge in continuous and leap-and-scan scanning mode imaging process  
A method for regulating sample surface charge has been proposed in this invention. The processes of applying a charged particle beam to a first area and applying a flood energized beam gun with...
7973289 Method for producing image contrast by phase shifting in electron optics  
According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least...
7973281 Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus  
A semiconductor substrate inspection method includes: generating a charged particle beam, and irradiating the charged particle beam to a semiconductor substrate in which contact wiring lines are...
7968844 Hole inspection apparatus and hole inspection method using the same  
Disclosed herein is an apparatus and method for inspecting the via holes of a semiconductor device using electron beams. The apparatus includes electron beam irradiation means, a current measuring...
7964844 Sample inspection apparatus  
The invention avoids charge up when creating a focus map for an electron beam apparatus for inspecting a sample. An auto-focus (AF) control apparatus controls to drive an actuator for moving a...
7964845 Charged particle beam device  
The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted...
7964846 Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber  
A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in...
7960696 Method for inspecting and measuring sample and scanning electron microscope  
As an aspect for realizing accurate observation, inspection, or measurement of the contact hole with large aspect ratio, a method and a device to scan a second electron beam after scanning a first...
7961379 Pump probe measuring device and scanning probe microscope apparatus using the device  
A pump probe measuring device (1) includes an ultrashort optical pulse laser generator (11) for generating a first ultrashort optical pulse train, which becomes a pump light, and a second...
7960697 Electron beam apparatus  
The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review. The present invent provides solution of...
7952073 Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy  
An apparatus for use with an electron beam for imaging a sample. The apparatus has a down-conversion detector configured to detect an electron microscopy signal generated by the electron beam...
7952083 Ion beam system and machining method  
An ion beam system includes a sample stage which holds a sample, an ion source which generates an ion beam so that the ion beam is extracted from the ion source along an extraction axis, an...
7952071 Apparatus and method for inspecting sample surface  
Provided is a defect inspection apparatus and an inspection (or evaluation) method with highly improved accuracy, which would not be provided by the prior art, in the defect inspection apparatus...
7952072 Test apparatus  
A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units...
7952074 Method and apparatus for inspecting integrated circuit pattern  
A circuit pattern inspection method and an apparatus therefore, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined changed state, the...
7947951 Multi-beam ion/electron spectra-microscope  
This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the...
7947964 Charged particle beam orbit corrector and charged particle beam apparatus  
The present invention relates to an orbit correction method for a charged particle beam, and aims to solve problems inherent in conventional aberration correction systems and to provide a...
7943903 Defect inspection method and its system  
A method for enabling management of fatal defects of semiconductor integrated patterns easily, the method enables storing of design data of each pattern designed by a semiconductor integrated...
7939800 Arrangement and method for compensating emitter tip vibrations  
The present invention provides a charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip; and supporting member for supporting the emitter....
7939801 Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method  
An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is...
7935925 Charged particle beam scanning method and charged particle beam apparatus  
In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan...
7935926 Inspection equipment for fine pattern and morphology using microcolumn  
Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional...
7935927 Method and apparatus for observing a specimen  
A method and device for observing a specimen, in which a convergent electron beam is irradiated and scanned from a desired direction, on a surface of a calibration substrate on which a pattern...
7932494 Method for characterizing vibrational performance of charged particle beam microscope system and application thereof  
A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for...
7932495 Fast wafer inspection system  
A charged particle beam device is provided including a particle source emitting a primary particle beam, a secondary particle beam generated by the impingement of the primary particle beam on the...
7932493 Method and system for observing a specimen using a scanning electron microscope  
It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a...
7928377 Charged particle beam apparatus and sample manufacturing method  
It is possible to carry out a highly accurate thin film machining by irradiation of an ion beam to a sample and a high-resolution STEM observation of the sample by irradiating an electron beam...
7928403 Multiple lens assembly and charged particle beam device comprising the same  
The invention provides a multiple-lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of...
7928382 Detector and inspecting apparatus  
An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors 11, 12 for receiving an electron beam...
7928384 Localized static charge distribution precision measurement method and device  
A charged particle beam device including a function for measuring localized static charges on a sample. A primary charged particle beam scans a sample positioned in a mirror state to acquire an...