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8119985 Methods and apparatus for statistical characterization of nano-particles  
A method and apparatus for determining statistical characteristics of nano-particles includes distributing the nano-particles over a surface and then determining properties of the nano-particles...
8115169 Method and apparatus of pattern inspection and semiconductor inspection system using the same  
A pattern inspection apparatus can be provided, for example, in a scanning electron microscope system. When patterns of a plurality of layers are included in a SEM image, the apparatus separates...
8115168 Layered scanning charged particle apparatus package having an embedded heater  
A scanning charge particle apparatus includes a layered charged particle beam column package; a sample holder; and a heater, such as a resistive heater, in one of the layers of the package that...
8110799 Confocal secondary electron imaging  
One embodiment relates to an apparatus using electrons for inspection or metrology of a semiconductor substrate. The apparatus includes an electron source, electron lenses, scan deflectors, an...
8110801 Layered scanning charged particle microscope package for a charged particle and radiation detector  
A scanning charged particle microscope includes a layered charged particle beam column package; a sample holder; and a layered micro-channel plate detector package located between the column...
8110800 Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system  
The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to...
8106355 Automated inspection using cell-cell subtraction perpendicular to stage motion direction  
One embodiment relates to an apparatus for automated inspection of a semiconductor substrate. Processor-executable code is configured to control the stage electronics to move the substrate using a...
8106358 Layered scanning charged particle microscope with differential pumping aperture  
A scanning charged particle apparatus includes a layered charged particle beam column package; a sample holder; and a layered differential pumping aperture that assists in maintaining two...
8106357 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope  
In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of...
8101911 Method and device for improved alignment of a high brightness charged particle gun  
A charged particle gun alignment assembly for emitting a charged particle beam along an optical axis of a charged particle beam device is described. The charged particle gun alignment assembly is...
8097849 Electron microscope device  
The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means...
8097848 Scanning electron microscope  
In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM...
8097847 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements  
A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles,...
8093557 Method and apparatus for reviewing defects  
A method of inspecting defects of a sample includes a first step for, on a basis of position information of defects on a sample placed on a movable table which is previously detected and obtained...
8093558 Environmental cell for a particle-optical apparatus  
The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a...
8089044 Method for correcting astigmatism in electron emission spectromicroscopy imaging  
A method for correcting astigmatism of an electronic optical column of an electron emission spectromicroscope, comprising the steps of: forming a reference structure on a surface of a sample...
8080791 X-ray detector for electron microscope  
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on...
8080789 Sample dimension measuring method and scanning electron microscope  
The present invention suppresses decreases in the volumes of the patterns which have been formed on the surfaces of semiconductor samples or of the like, or performs accurate length measurements,...
8076640 Method and device for measuring electron diffraction of a sample  
The invention relates to a method and a device for measuring electron diffraction of a sample, including the steps of illuminating the sample with an incident electron beam which is deflected from...
8076641 Method and device for producing an image  
The invention relates to a method and to a device (1) for producing an image of an object (5) by means of a particle beam. According to the method and in the device (1), the particle beam is...
8076642 Electron beam apparatus and method of operating the same  
An electron beam apparatus is offered which can well detect backscattered electrons or both backscattered electrons and secondary electrons if an electron detector is disposed above an objective...
8071943 Mask inspection apparatus and image creation method  
Provided is a mask inspection apparatus including: emitting unit for emitting electron beams onto a sample; electron detecting unit for detecting the quantity of electrons produced, by the...
8071954 Hybrid phase plate  
The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result...
8071961 Charged particle beam apparatus  
A sample measuring method and a charged particle beam apparatus are provided which remove contaminants, that have adhered to a sample in a sample chamber of an electron microscope, to eliminate...
8074292 High resolution wide angle tomographic probe  
The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a...
8071942 Sample holder apparatus to reduce energy of electrons in an analyzer system and method  
A sample holder apparatus and method for reducing the energy of charged particles entering an annular-acceptance analyzer includes use of an electrically isolated sample support member having a...
8071944 Portable electron microscope using micro-column  
Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a...
8073242 SEM system and a method for producing a recipe  
This invention relates to a SEM system constructed to create imaging recipes or/and measuring recipes automatically and at high speed, and improve inspection efficiency and an automation ratio,...
8068662 Method and system for determining a defect during charged particle beam inspection of a sample  
A method for determining a defect during charged particle beam inspection of a sample locates at least one examination region within a charged particle microscopic image of the sample by making...
8067732 Electron beam apparatus  
An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1),...
8067733 Scanning electron microscope having a monochromator  
A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron...
8063364 Particle optical device with magnet assembly  
A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one...
8065094 Method of calculating the structure of an inhomogeneous sample  
A method is provided of calculating the structure of an inhomogeneous sample in which an electron beam is used to cause excitation of x-rays from the sample under known conditions of beam energy...
8063365 Non-shot-noise-limited source for electron beam lithography or inspection  
One embodiment relates to an electron source apparatus for an electron beam lithography tool or an electron beam inspection tool. A cathode is configured to emit electrons, and an anode is...
8058612 Microirradiators and methods of making and using same  
Improved radiation devices and their associated fabrication and applications are described herein. The microirradiators generally include a non-radioactive conducting electrode, an insulating...
8058614 Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof  
The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an...
8058613 Micromechanical devices for materials characterization  
The present disclosure describes micromechanical devices and methods for using such devices for characterizing a material's strength. The micromechanical devices include an anchor pad, a top...
8053726 Inspection system by charged particle beam and method of manufacturing devices using the system  
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam...
8053724 Real-time S-parameter imager  
An instrumentation setup is provided to process electronic signals in a positron imager functioning in two different modes of operations for scanning both bulk and thin film materials. According...
8044351 Micro-column with simple structure  
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the...
8044352 Electron microscopy  
Using, as a detector, a CCD detector having a CCD element to which a scintillator is closely fixed, a backscattered or scanning transmission image is obtained by the following method. The detector...
8044369 Electrostatic deflection control circuit and method of electronic beam measuring apparatus  
An electrostatic deflection circuit and method of an electronic beam measuring apparatus which can achieve the high precision of the electronic beam measuring and contribute to the simplification...
8040504 Defect inspecting method and defect inspecting apparatus  
Provided is a method and apparatus for inspecting a defect of a shape formed on a substrate. Primary inspection is sequentially performed on specific patterns in a plurality of divided regions of...
8035082 Projection electron beam apparatus and defect inspection system using the apparatus  
A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gun 1 are...
8030622 Specimen holder, specimen inspection apparatus, and specimen inspection method  
A specimen holder is offered which can reduce the amount of chemical sprayed over a specimen consisting of cultured cells. The specimen holder has an open specimen-holding surface. At least a part...
8030614 Charged particle beam apparatus and dimension measuring method  
There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a...
8026482 Charged particle beam apparatus and control method therefor  
Potentials at a plurality of points on a diameter of a semiconductor wafer 13 are measured actually. Then, a potential distribution on the diameter is obtained by spline interpolation of...
8026481 Charged particle apparatus, scanning electron microscope, and sample inspection method  
An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a...
8022356 Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope  
A method of evaluating a resolution of a scanning electron microscope includes picking up a first image of a concave and convex pattern formed on a surface of a sample utilizing a first scanning...
8022365 Charged particle beam equipments, and charged particle beam microscope  
In an electron microscope to which a phase retrieval method is applied, an image size determined by a pixel size p of a diffraction pattern, a camera length L, and a wavelength λ of an...