Match Document Document Title
8203504 Image forming method and charged particle beam apparatus  
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third...
8203120 4D imaging in an ultrafast electron microscope  
The present invention relates to methods and systems for 4D ultrafast electron microscopy (UEM)—in situ imaging with ultrafast time resolution in TEM. Single electron imaging is used as a...
8203119 Charged particle beam device with retarding field analyzer  
The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube...
8198587 Compact, interleaved radiation sources  
Compact, dual energy radiation scanning systems are described comprising two particle beam accelerators, each configured to accelerate charged particles to different energies, positioned parallel...
8193494 Transmission electron microscope and method for observing specimen image with the same  
A first electron biprism is disposed in a condenser optical system and an observation region of a specimen is irradiated simultaneously with two electron beams of different angles. The two...
8193491 Structure and method for determining a defect in integrated circuit manufacturing process  
The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays...
8193493 Charged particle beam apparatus  
A charged particle beam apparatus that can achieve both high defect-detection sensitivity and high inspection speed for a sample with various properties in a multi-beam type semiconductor...
8188428 Scanning electron microscope  
A technique executes autofocus adjustment stably even when a plurality of patterns or foreign matter capable of being imaged only by a specific detector are included independently. Such an image...
8188427 Scanning electron microscope alignment method and scanning electron microscope  
A method and apparatus for alignment and astigmatism correction for a scanning electron microscope can prevent an alignment or correction error attributable to the conditions of a particular...
8188443 Focusing method of charged particle beam and astigmatism adjusting method of charged particle  
A focusing method of a charged particle beam includes measuring a first set value to focus a beam on a position of a reference plane by using a lens coil, acquiring a first factor to change a set...
8191168 Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope  
Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface...
8178838 High-density FIB-SEM tomography via real-time imaging  
A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the...
8178837 Logical CAD navigation for device characteristics evaluation system  
A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created...
8178836 Electrostatic charge measurement method, focus adjustment method, and scanning electron microscope  
A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the...
8178840 Specimen inspection equipment and how to make the electron beam absorbed current images  
An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a...
8178849 Objective lens  
An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of...
8173963 Phase-shifting element and particle beam device having a phase-shifting element  
A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the...
8173978 Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same  
Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage...
8168950 Charged particle beam apparatus, and image generation method with charged particle beam apparatus  
The present invention has a subject to provide an apparatus that optimizes scanning in accordance with circumstances or purposes, reduces distortion of images, and improves throughput, image...
8168949 Method for stem sample inspection in a charged particle beam instrument  
A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage....
8168951 Charged particle beam apparatus  
A charged particle beam apparatus having an aberration correction capability at high acceleration voltages. The charged particle beam apparatus comprises a charged particle beam source; an...
8168956 Scanning transmission electron microscope and method of aberration correction therefor  
A scanning transmission electron microscope (STEM) and method of aberration correction have autocorrelation function calculation means, aberration coefficient calculation means, and feedback...
8164057 Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope  
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is...
8164059 In-chamber electron detector  
A secondary particle detector 302 for a charged particle beam system 300 includes a scintillator 304 and a transducer 312, such as a photomultiplier tube, positioned within a vacuum chamber 107....
8164058 Specimen observation method  
It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an...
8164069 Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device  
A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In...
8164066 Magnetic lens, method for focusing charged particles and charged particle energy analyzer  
The invention provides a magnetic lens for generating a magnetic imaging field to focus charged particles emitted from a sample, the lens comprising a central pole piece and an outer pole piece...
8164060 System and method for a charged particle beam  
System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for...
8158937 Particle beam system  
A particle beam system is offered which can prevent contamination of the inside of the objective lens, the objective lens being located at the front end of the optical column. The particle beam...
8158940 Magnetic domain imaging system  
A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective...
8158954 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens  
The invention provides a lens system for a plurality of charged particle beams. The lens system comprises an excitation coil providing a magnetic flux to a pole piece unit having a first pole...
8158938 Scanning electron microscope and a method for imaging a specimen using the same  
(1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated...
8153966 Electrode unit and charged particle beam device  
A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local...
8153970 Scanning electron microscope  
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed....
8153969 Inspection method and inspection system using charged particle beam  
In an electric immersion lens having high resolution capability, secondary electrons generated from a specimen are accelerated to suppress the dependency of rotational action of the secondary...
8148702 Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns  
The invention is directed to an arrangement for the illumination of a substrate with a plurality of individually shaped, controllable particle beams, particularly for electron beam lithography in...
8148684 Electron beam apparatus  
An electron beam apparatus has the electron optical column for releasing an electron beam from the front-end portion after the beam is emitted from an electron beam source located on a rear-end...
8143573 Charged particle beam apparatus  
A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen...
8143601 Nanoscale imaging via absorption modulation  
An imaging system is provided. The imaging system includes a sample to be scanned by the imaging system. An absorbance modulation layer (AML) is positioned in close proximity to the sample and is...
8134125 Method and apparatus of an inspection system using an electron beam  
Problems encountered in the conventional inspection method and the conventional apparatus adopting the method are solved by the present invention using an electron beam by providing a novel...
8135204 Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe  
Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe are provided. One method includes...
8134131 Method and apparatus for observing inside structures, and specimen holder  
An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in...
8129679 Method for discrimination of backscattered from incoming electrons in imaging electron detectors with a thin electron-sensitive layer  
Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and...
8129687 Lighting system, method of lighting, optical detector, and method of optical detection  
There is provided a lighting system having a high spatial resolution appropriate to a high-frequency component by evanescent waves in a negative refraction lens. The lighting system includes a...
8129680 Charged particle beam apparatus including aberration corrector  
A focused charged particle beam apparatus including an aberration corrector, capable of finding the absolute value of the aberration coefficient at high speed, and capable of making high-accuracy...
8129693 Charged particle beam column and method of operating same  
A charged particle beam column includes a charged particle beam source to generate a charged particle beam; an objective lens to focus the charged particle beam in an object plane; a first...
8124933 Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample  
An apparatus capable of detecting defects of a pattern on a sample with high accuracy and reliability and at a high throughput, and a semiconductor manufacturing method using the same are...
8124932 Charged particle beam apparatus and method adjusting axis of aperture  
A charged particle beam apparatus includes a charged particle source, an aperture, an object lens, an observing unit, an aperture driving portion, and a control portion. The control portion...
8124940 Charged particle beam apparatus  
Disclosed herein is a scanning electron microscope having a function for positioning an object point of an objective lens at a defined position even under an electronic optical condition in which...
8119994 Apparatus and method for inspecting sample  
Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film,...