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8288724 Dark field detector for use in an electron microscope  
The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer...
8288737 Ion sputter removal from thin microscopy samples with ions extracted from an RF generated plasma  
A plasma system for changing a microscopy material sample comprises a microscopy material sample holder for holding a microscopy material sample in place in a desired orientation, and a receptacle...
8283629 Aberration-corrected wien ExB mass filter with removal of neutrals from the Beam  
A mass filter for an ion beam system includes at least two stages and reduces chromatic aberration. One embodiment includes two symmetrical mass filter stages, the combination of which reduces or...
8283630 Method and apparatus for measuring dimension of circuit pattern formed on substrate by using scanning electron microscope  
In the dimension measurement of a circuit pattern using a scanning electron microscope (SEM), in order to make it possible to automatically image desired evaluation points (EPs) on a sample, and...
8283631 In-situ differential spectroscopy  
A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample,...
8286261 Scanning probe in pulsed-force mode, digital and in real time  
A microscope, in particular a scanning probe microscope, comprising a programmable logic device.
8283641 Positioning device for a particle beam apparatus  
A positioning device and a particle beam apparatus including a positioning device ensure reliable positioning of a holder for holding an object at any working distance. The positioning device...
8278623 High-vacuum variable aperture mechanism and method of using same  
A novel technique is disclosed for varying a size of an aperture within a vacuum chamber. A drive mechanism within the vacuum chamber is used to adjust a partial horizontal overlap between at...
8276210 Tomographic atom probe comprising an electro-optical generator of high-voltage electrical pulses  
A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic...
8274049 Sample processing and observing method  
There is provided a sample processing and observing method including irradiating a focused ion beam to a sample to form an observed surface, irradiating an electron beam to the observed surface to...
8274047 Substrate surface inspection method and inspection apparatus  
A substrate surface inspection method inspects for a defect on a substrate including a plurality of materials on a surface thereof. The inspection method comprises: irradiating the surface of the...
8274048 Scanning electron microscope having time constant measurement capability  
In a scanning electron microscope, an optimum scanning method for reducing the amount of deflection of a primary electron beam and secondary electrons is determined to acquire stable images. An...
8269188 Charged particle beam apparatus and sample processing method  
A charged particle beam apparatus includes an ion beam column having an ion source for generating an ion beam, a first objective lens electrode which forms a first objective lens for focusing the...
8263934 Method for detecting information of an electric potential on a sample and charged particle beam apparatus  
In a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle...
8263935 Charged particle beam apparatus  
A charged particle beam apparatus for obtaining information of an uneven surface or a depression/protrusion of a sample by irradiating a charged particle beam to a sample having an uneven surface...
8263936 Transmission electron microscope having electron spectroscope  
A transmission electron microscope is capable of correcting, with high efficiency and high accuracy, an electron energy loss spectrum extracted from each of measured portions included in an...
8258475 Charged particle radiation device provided with aberration corrector  
There is provided a charged particle radiation device provided with an aberration corrector capable of correcting aberration with high precision in a short time by automatically setting an...
8258472 Charged particle radiation device and image capturing condition determining method using charged particle radiation device  
A charged particle radiation device wherein the position or the size of a FOV can be easily determined even if a number of measuring points are provided on a sample, and an image capturing...
8258474 Compact arrangement for dual-beam low energy electron microscope  
One embodiment relates to an apparatus for generating two spatially overlapping electron beams on a specimen. A first electron beam source is configured to generate a low-energy electron beam, and...
8258471 Pattern measuring apparatus and pattern measuring method  
A pattern measurement apparatus and a pattern measurement method are capable of easily distinguishing a line pattern and a space pattern from one another, without being affected by the luminance...
8253101 Method and system for acquisition of confocal STEM images  
Method and system to obtain confocal STEM images. Arithmetic and control device extracts diffraction images respectively corresponding to successive pixel positions from the images stored in the...
8253100 Electron microscope  
An electron microscope has an electron beam source generating an accelerated electron beam, electromagnetic lenses for converging the electron beam, alignment coils for adjusting the optical axis...
8247785 Particle beam device and method for use in a particle beam device  
A particle beam device includes a movable carrier element with at least one receiving element for receiving a specimen and in which the receiving element is situated on the carrier element. In...
8247769 Characterization of nanoscale structures using an ultrafast electron microscope  
The present invention relates to methods and systems for 4D ultrafast electron microscopy (UEM)—in situ imaging with ultrafast time resolution in TEM. Single electron imaging is used as a...
8247782 Apparatus and method for investigating and/or modifying a sample  
An apparatus and a method for investigating and/or modifying a sample is disclosed. The apparatus comprises a charged particle source, at least one particle optical element forming a charged...
8249828 Defect analyzer  
The present invention provides methods, devices, and systems for analyzing defects in an object such as a semiconductor wafer. In one embodiment, it provides a method of characterizing defects in...
8242443 Semiconductor device inspection apparatus  
A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the...
8242457 Charged particle optics with azimuthally-varying third-order aberrations for generation of shaped beams  
A charged particle shaped beam column includes: a charged particle source; a gun lens configured to provide a charged particle beam approximately parallel to the optic axis of the column; an...
8244066 Adaptive membrane shape deformation system  
A system and method determines the shape of a surface that preferably is a deployed space-based adaptive flexible membrane antenna, using patterned projections, image capturing, and membrane shape...
8237120 Transverse focusing action in hyperbolic field detectors  
A defect may be characterized using primary radiation directed from a primary electron source to a measurement location on the sample. An electron energy analyzer may capture secondary electrons...
8237119 Scanning type charged particle beam microscope and an image processing method using the same  
Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements...
8232523 SEM imaging method  
A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality...
8232712 Small electron gun  
To provide a small electron gun capable of keeping a high vacuum pressure used for an electron microscope and an electron-beam drawing apparatus. An electron gun constituted by a nonevaporative...
8227752 Method of operating a scanning electron microscope  
A method of inspecting an object using a scanning particle beam microscope, the method comprising: operating the microscope in a high-resolution mode by laterally scanning a particle beam of the...
8222601 Scanning electron microscope and method of imaging an object by using the scanning electron microscope  
A scanning electron microscope capable of modifying the focal position of a condenser lens with high speed and high reproducibility in order that low-magnification images are obtained at large...
8222598 Method for quantitative analysis of a material  
A method and apparatus for quantitative analysis of a material in which an electron beam is caused to impinge upon the material are described. The method comprises detecting low loss electrons...
8222600 Charged particle detection system and method  
A system for selectively detecting charged particles produced due to operation of a charged particle beam column irradiating a specimen, including a proximal grid being selectively electrically...
8217352 Ponderomotive phase plate for transmission electron microscopes  
A ponderomotive phase plate system and method for controllably producing highly tunable phase contrast transfer functions in a transmission electron microscope (TEM) for high resolution and...
8217350 Particle optical arrangement  
A particle optical arrangement providing an electron microscopy system 3 and an ion beam processing system 7 comprises an objective lens 43 of the electron microscopy system having an annular...
8217351 Pattern inspection method and pattern inspection system  
A pattern data examination method and system capable of accurately and speedily examining a circuit pattern without failing to extract pattern contour data are provided. While pattern comparison...
8217363 Scanning electron microscope  
A scanning electron microscope can discriminate secondary particles in a desired energy region by band-pass and detect the secondary particles with a high yield point. Even when a lens 23 is...
8217349 Method for inspecting EUV reticle and apparatus thereof  
A method of inspecting an EUV reticle is proposed, which uses an electron beam (EB) with low density and high energy to scan the surface of an EUV reticle for inspecting the EUV reticle. A step of...
8217348 Electron microscope system and method for evaluating film thickness reduction of resist patterns  
The invention provides a system for achieving detection and measurement of film thickness reduction of a resist pattern with high throughput which can be applied to part of in-line process...
8214917 Molded microfluidic fluid cell for atomic force microscopy  
A microfluidic cell includes a compressible block and a cantilever. The compressible block includes a first horizontal surface, an opposite second horizontal surface and a plurality of vertical...
8212227 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus  
An electron beam apparatus equipped with a height detection system includes an electron beam unit emitting an electron beam to the specimen, and a height detection system for detecting height of...
8207498 Electron beam apparatus and electron beam inspection method  
An electron beam apparatus which includes a sample stage on which a sample is placed, and an electron optical system. The electron optical system includes an electron gun that generates a primary...
8209135 Wafer inspection data handling and defect review tool  
A defect detected by a wafer inspection tool is reliably captured by a defect review tool. A defect review condition in the defect review tool is varied depending on defect attributes provided by...
8209766 Scanning probe microscope capable of measuring samples having overhang structure  
A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the...
8209768 Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip  
A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever...
8207499 Variable rate scanning in an electron microscope  
A method for imaging a surface, including scanning a first region of the surface with a primary charged particle beam at a first scan rate so as to generate a first secondary charged particle beam...