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7402736 Method of fabricating a probe having a field effect transistor channel structure  
A probe of a scanning probe microscope having a sharp tip and an increased electric characteristic by fabricating a planar type of field effect transistor and manufacturing a conductive carbon...
7397252 Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced current  
A method for accurately measuring feature sizes and quantifying the beam spot size in a CDSEM at real time is provided. The inventive method is based on a scanning microscope and it works on both...
7397030 Integrated local and global optical metrology for samples having miniature features  
This invention relates to an apparatus and method for integrated measurement of a sample that has miniature features. The apparatus has an optical measuring unit for illuminating the sample with a...
7394070 Method and apparatus for inspecting patterns  
When the electrode potential of a charge control electrode above a wafer is reduced, image brightness is reduced. A point of change in the image brightness is a switching point between a positively...
7394069 Large-field scanning of charged particles  
One embodiment relates to a charged-particle beam apparatus. The apparatus includes at least a source for generating the charged-particle beam, a first deflector, and a second deflector. The first...
7394068 Mask inspection apparatus, mask inspection method, and electron beam exposure system  
A mask inspection apparatus includes: an electron gun for generating an electron beam; an exposure mask for shaping the electron beam into a predetermined cross-sectional shape; means for scanning...
7394067 Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems  
Systems and methods for reducing alteration of a specimen during by charged particle based and other measurements systems are provided. One system configured to reduce alteration of a specimen...
7394066 Electron microscope and electron beam inspection system  
An electron microscope includes an illuminating lens system that illuminates an electron beam that is emitted from an electron source onto a specimen as a planar illuminating electron beam having a...
7391707 Devices and methods of detecting movement between media and probe tip in a probe data storage system  
A memory apparatus comprises a media, a tip adapted to write information to and read information from said media, a media movement mechanism attached to said media and configured to move said media...
7391039 Semiconductor processing method and system  
A secondary electron image generated by an electron beam is detected by a secondary electron/secondary ion detector while a silicon substrate is etched by a focused ion beam from a back surface of...
7391034 Electron imaging beam with reduced space charge defocusing  
One embodiment pertains to an apparatus which impinges a focused electron beam onto a substrate. The apparatus includes an irradiation source and at least two non-axisymmetric lenses. The...
7391022 Scanning probe microscope  
A scanning probe microscope (SPM) is provided capable of a narrow to a wide range observation according to observed targets or purposes without replacing a scanner while maintaining a high...
7388200 Sensing method and nanosensing device for performing the same  
A sensing method includes exposing a nano-transducer having a controlled surface to a sample including at least one species. Adsorption of the species on the nano-transducer is transduced to a...
7388199 Probe manufacturing method, probe, and scanning probe microscope  
A probe is made by attaching a carbon nanotube 12 to a mounting base end 13 , which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the...
7388198 Electron microscope  
An electron microscope capable of producing EELS (electron energy-loss spectroscopy) has a spectral position correcting signal supply circuit for supplying a spectral position correcting signal H...
7385206 Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method  
A sample processing apparatus includes a probe, a probe mover for moving the probe such that the probe is brought into contact with a part of a sample, an adhering device for adhering the probe to...
7385197 Electron beam apparatus and a device manufacturing method using the same apparatus  
Disclosed is an electron beam apparatus, in which a plurality of electron beams is formed from electrons emitted from an electron gun 21 and used to irradiate a sample surface via an objective...
7385194 Charged particle beam application system  
An object of the present invention is to measure a landing angle even in a multi electron beam lithography system in which current amount of each beam is small. Another object thereof is to measure...
7381971 Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope  
We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and...
7381970 Specimen stage for charged-particle scanning microscopy  
A specimen stage for charged-particle scanning microscopy comprises a non-magnetic platform for supporting a specimen, at least one probe pin assembly including a probe pin for contacting a...
7381943 Neutral particle beam processing apparatus  
The present invention relates to a neutral particle beam processing apparatus. More specifically, the present invention relates to a neutral particle beam processing apparatus comprising a plasma...
7378668 Method and apparatus for applying charged particle beam  
In a charged particle beam applying apparatus such as an electron beams lithography system, there is a technology that facilitates positional adjustment of a crossover and improves throughput of...
7378654 Processing probe  
A processing probe for repairing a defective portion in a sample has a cantilever and a probe separate and independent from the cantilever and integrally connected to an end portion of the...
7375330 Charged particle beam equipment  
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned....
7375329 Scanning electron microscope  
In a scanning electron microscope, slimming is reduced by reducing a frame count. As the frame count is reduced, the amount of detected secondary electrons decreases, so that a probe current amount...
7375327 Method and device for measuring quantity of wear  
A method and device to accurately obtain very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. A quantity of wear on the surface of a...
7375326 Method and system for focusing a charged particle beam  
A method for focusing a charged particle beam, the method including: (a) altering a focal point of a charged particle beam according to a first focal pattern while scanning a first area of a sample...
7375325 Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor  
In a method for preparing a sample for electron microscopic examinations, in particular with a transmission electron microscope (TEM), a) a substrate containing the sample to be prepared on...
7375324 Stylus system for modifying small structures  
An improved method for rapidly and accurately modifying small structures, including structures on a micron or nanometer scale, suitable for the repair of defects in lithographic photo-masks and...
7375323 Electron beam apparatus with aberration corrector  
An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a...
7375322 Cantilever holder and scanning probe microscope  
To prevent an influence from effecting on an oscillating state of a cantilever by firmly fixing a main body portion, there is provided a cantilever holder for attachably and detachably fixing a...
7375321 Dynamics bionems sensors and arrays of bionems sensor immersed in fluids  
A bioNEMS device comprises a piezoresistive cantilever having flexing legs of which attach the cantilever to a support and a biofunctionalized portion at the tip. A bias current applied to the legs...
7372051 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system  
Magnification errors are reduced in the required range of magnification in electric charged particle beam application apparatuses and critical dimension measurement instruments. To achieve this, a...
7372047 Charged particle system and a method for measuring image magnification  
A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision...
7372029 Scanning transmission electron microscope and scanning transmission electron microscopy  
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted...
7372028 Sample electrification measurement method and charged particle beam apparatus  
The present invention has the object of providing a charged particle beam irradiation method ideal for reducing the focus offset, magnification fluctuation and measurement length error in charged...
7372026 System for repositioning a microfabricated cantilever  
A system for repositioning a microfabricated cantilever includes a microfabricated cantilever, a first device operable to detect a position of the microfabricated cantilever, and a second device....
7372025 Scanning probe microscope using a surface drive actuator to position the scanning tip  
A scanning probe microscope includes a scanning probe tip and an electrostatic surface actuator operatively coupled to the scanning probe tip. The electrostatic surface actuator includes a movable...
7368712 Y-shaped carbon nanotubes as AFM probe for analyzing substrates with angled topography  
A Y-shaped carbon nanotube atomic force microscope probe tip and methods comprise a shaft portion; a pair of angled arms extending from a same end of the shaft portion, wherein the shaft portion...
7365325 Method and apparatus for observing a specimen  
A method and device for observing a specimen in which an electron beam is irradiated and scanned from an oblique direction, onto a surface of a calibration substrate on which a pattern with a known...
7365321 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis  
Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis are provided. One method for measuring a characteristic of a substrate includes removing a...
7365320 Methods and systems for process monitoring using x-ray emission  
Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions include a system and method for process monitoring that analyze...
7365306 Standard member for length measurement, method for producing the same, and electron beam length measuring device using the same  
This invention provides an electron beam length measuring technology including a standard component for length measurement that has a finer standard dimension, and its producing method. The...
7362123 Inspection apparatus for thin film transistor substrate  
An inspection apparatus for a TFT substrate formed with a plurality of pixels, includes a reference substrate being opposite to and spaced from the TFT substrate and formed with a plurality of...
7361909 Method and apparatus for correcting drift during automated FIB processing  
A method and apparatus for correcting drift of the beam irradiation position during automated FIB (focused ion beam) processing with a reference image-setting unit, an image read-in unit for...
7361897 Imaging apparatus for high probe currents  
An imaging apparatus is provided, comprising a first lens, a Wien filter having a first opening and a second opening, and further comprising a 2*m-pole element, m≧2, and a second lens, wherein...
7361896 Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope  
In a scanning electron microscope, scanning region is set to be narrow, upon which focused electron beam is scanned, so that the focused electron beam can be irradiated at the almost same position...
7361894 Method of forming a sample image and charged particle beam apparatus  
An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with...
7361893 In situ scanning tunneling microscope tip treatment device for spin polarization imaging  
A tip treatment device for use in an ultrahigh vacuum in situ scanning tunneling microscope (STM). The device provides spin polarization functionality to new or existing variable temperature STM...
7358490 Methods and apparatus of spatially resolved electroluminescence of operating organic light-emitting diodes using conductive atomic force microscopy  
A conductive atomic force microscopy (cAFM) technique which can concurrently monitor topography, charge transport, and electroluminescence with nanometer spatial resolution. This cAFM approach is...
Matches 1 - 50 out of 1671 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >