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9040908 Plan view sample preparation  
A method and apparatus for altering the orientation of a charged particle beam sample is presented. Embodiments of the method includes providing a first work piece on a sample stage having a...
9040909 System and method for simultaneous detection of secondary electrons and light in a charged particle beam system  
A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics...
9035236 Detecting high atomic number materials with cosmic ray muon tomography  
A method is proposed herein to detect high atomic number materials, such as Special Nuclear Materials, within a container based on muon tomography. The container is modeled as a plurality of...
9035247 Method for operating a particle beam device and/or for analyzing an object in a particle beam device  
A method for operating a particle beam device and/or for analyzing an object in a particle beam device are provided. For example, the particle beam device is an electron beam device, an ion beam...
9029765 Ion sources, systems and methods  
Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired...
9024256 Electron microscope  
An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect...
9024272 Pattern measuring apparatus  
A pattern measuring apparatus which can identify a kind of gaps formed by a manufacturing process having a plurality of exposing steps such as SADP, particularly, which can suitably access a gap...
9012842 Charged particle beam device and inclined observation image display method  
A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time...
9006652 Phase shift method for a TEM  
A method of electron microcopy passes an electron beam through a phase plate, specifically a Zernike type phase plate, comprising a central hole, and a thin film causing a phase shift of the...
9009861 Substrate measurement apparatus with electron distortion unit  
Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of...
9000367 Method for evaluating polymer material  
Provided is a method for evaluating a polymer material, wherein the state of dispersion of a filler in a polymer material can be quickly and quantitatively evaluated. The method for evaluating a...
9000365 Pattern measuring apparatus and computer program  
Provided are a pattern measuring apparatus and a computer program which determine whether a gap formed in a sample (201) is a core gap (211) or a spacer gap (212). The secondary electron profile...
8993981 Charged particle source with light monitoring for tip temperature determination  
Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector...
8993961 Electric charged particle beam microscope and electric charged particle beam microscopy  
The electric charged particle beam microscope includes an electric charged particle source; a condenser lens converging electric charged particles emitted from the electric charged particle source...
8987665 Electron microscope with integrated detector(s)  
An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons...
8987692 High brightness electron gun, system using the same, and method of operating thereof  
A charged particle beam source device adapted for generating a charged particle beam is provided. The charged particle beam source device includes an emitter tip adapted for providing charged...
8987682 Specimen positioning device, charged particle beam system, and specimen holder  
A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication...
8988065 Microprobe and microprobe manufacturing method  
According to an embodiment, a microprobe includes a base and a lever. The base includes a first electrode provided on a surface thereof. The lever is supported by the base and includes a second...
8981294 Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment  
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum...
8981293 System for inspecting flat panel display using scanning electron microscope  
An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect...
8969801 Scanning electron microscope  
To provide a scanning electron microscope that can detect reflected electrons of any emission angle, the scanning electron microscope, which obtains an image by detecting electrons from a sample...
8963083 Switchable multi perspective detector, optics therefore and method of operating thereof  
A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection...
8963084 Contamination reduction electrode for particle detector  
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the...
8963103 Probe for laser microscope  
A device for sterilizing a sample chamber in an automated live cell microscope, having a sample holding frame contained in a housing of the microscope. The device includes a UVC sterilizing unit...
8963085 Photon induced near field electron microscope and biological imaging system  
A method of obtaining PINEM images includes providing femtosecond optical pulse, generating electron pulses, and directing the electron pulses towards a sample. The method also includes...
8963081 Mass selector, and ion gun, ion irradiation apparatus and mass microscope  
When a time-of-flight mass selector having a chopper using a deflector selects the masses of the ions, an ion beam is deflected. As a result, at least a part of the ion beams diagonally pass...
8957372 Scanning electron microscope  
A scanning electron microscope has a first condenser lens (121) having a lens gap (121a) facing toward an electron source (50) and a second condenser lens (122) having a lens gap (122a) facing...
8952340 High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision  
A high-frequency acceleration type ion acceleration and transportation apparatus is a beamline after an ion beam is accelerated by a high-frequency acceleration system having an energy spread with...
8952330 System and method for electromagnetic interference shielding for critical dimension-scanning electron microscope  
System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a...
8952328 Charged particle detector system comprising a conversion electrode  
The invention relates to a charged particle detector system comprising a conversion plate (110) to convert incoming radiation to secondary electrons. These secondary electrons are then detected by...
8946628 Electron beam interference device and electron beam interferometry  
There is a limit in range and distance in which an electron beam can interfere and electron interference is implemented within a range of a coherence length. Therefore, interference images are...
8946630 Automatic filtering of SEM images  
A method, system, and computer program product to automatically evaluate a scanning electron microscope (SEM) image are described. The method includes obtaining a source image and the SEM image...
8946627 Three-dimensional mapping using scanning electron microscope images  
A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are...
8946629 Inspection apparatus  
An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an...
8937281 Method for examining a sample by using a charged particle beam  
A method for examining a sample with a scanning charged particle beam imaging apparatus. First, an image area and a scan area are specified on a surface of the sample. Herein, the image area is...
8937282 Mineral identification using mineral definitions including variability  
An improved mineral analysis system includes mineral definitions that include not only characteristics of the minerals, but also variability in those characteristics. The variabilities allow the...
8937283 Specimen observation method and device using secondary emission electron and mirror electron detection  
A technique capable of improving the ability to observe a specimen using an electron beam in an energy region which has not been conventionally given attention is provided. This specimen...
8933401 System and method for compressive scanning electron microscopy  
A scanning transmission electron microscopy (STEM) system is disclosed. The system may make use of an electron beam scanning system configured to generate a plurality of electron beam scans over...
8933402 Sample analysis apparatus and sample analysis program  
A sample is analyzed efficiently with combining a structural defect detection and a physical information measurement so as to determine whether a structural defect is the defect that degrades the...
8933414 Focused ion beam low kV enhancement  
The invention provides a charged particle beam system wherein the middle section of the focused ion beam column is biased to a high negative voltage allowing the beam to move at higher potential...
8935811 Vertically mounted sample stage for microscopy and scanning probe microscope using the sample stage  
A sample stage for microscopy includes a sample holder including a body in which a sample-mounting part and a seating part are provided on a bottom of the body and a grip part for a mounting unit...
8933400 Inspection or observation apparatus and sample inspection or observation method  
Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical...
8927930 Charged particle device  
A charged particle device includes a cylindrical column (102), a charged particle beam optical system disposed in the column; a sample stage (103) disposed on the column, and a support device...
8927931 Scanning electron microscope  
In conventional electron microscopes, orthogonality has been defined for each electron microscope individually in such a manner that a lattice sample is observed, and correction is applied to a...
8927932 Scanning transmission electron microscopy for imaging extended areas  
A scanning transmission electron microscope for imaging a specimen includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A stage is...
8921783 Method of collecting and processing electron diffraction data  
A method of using electron diffraction to obtain PDFs from crystalline, nanocrystalline, and amorphous inorganic, organic, and organometallic compound.
8921786 Charged particle beam apparatus  
Provided is a charged particle beam apparatus or charged particle microscope capable of observing an observation target sample in an air atmosphere or a gas environment without making significant...
8921784 Scanning electron microscope  
There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining...
8921782 Tilt-imaging scanning electron microscope  
One embodiment relates to a tilt-imaging scanning electron microscope apparatus. The apparatus includes an electron gun, first and second deflectors, an objective electron lens, and a secondary...
8923601 Method for inspecting overlay shift defect during semiconductor manufacturing and apparatus thereof  
A method for inspecting overlay shift defect during semiconductor manufacturing is disclosed herein and includes a step for providing a charged particle microscopic image of a sample, a step for...