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7105817 |
Method of forming images in a scanning electron microscope
An imaging device having many detector elements is used to construct multiple images of the surface of a specimen in a scanning electron microscope (SEM) using signals from different elements of...
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7102145 |
System and method for improving spatial resolution of electron holography
A method for enhancing spatial resolution of a transmission electron microscopy TEM) system configured for electron holography. In an exemplary embodiment, the method includes configuring a first...
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7098453 |
Scanning probe microscopy system and method of measurement by the same
A scanning probe microscopy system has a cantilever having a probe at a distal end thereof and a heating unit for heating the sample. A moving unit effects relative movement between the cantilever...
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7098457 |
Electron beam apparatus and device manufacturing method using same
A defect inspecting apparatus is provided for generating a less distorted test image to reliably observe a surface of a sample for detecting defects thereon. The defect detecting apparatus...
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7098454 |
Method of sample preparation for atom probes and source of specimens
A specimen for atom probe analysis is prepared by providing a slab of material from which the specimen will be taken; defining a plurality of posts in the slab by in the slab; removing at least one...
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7095020 |
Sensing mode atomic force microscope
An atomic force microscope is described having a cantilever comprising a base and a probe tip on an end opposite the base; a cantilever drive device connected to the base; a magnetic material...
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7091504 |
Electron beam exposure system
The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising:
a beamlet generator for generating a plurality of electron...
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7091484 |
Method and apparatus for crystal analysis
The method of measuring crystallographic orientations, crystal systems or the like of the surface of a specimen has steps of: irradiating the specimen with an ion beam; measuring the secondary...
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7091486 |
Method and apparatus for beam current fluctuation correction
One embodiment disclosed relates to an electron beam imaging apparatus. An electron source is configured to generate an electron beam, and a beam-limiting aperture is configured to block a portion...
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7091485 |
Methods and systems for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection...
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7084384 |
Diffractive optical position detector in an atomic force microscope having a moveable cantilever
An apparatus and method for measuring optically the position or angle of a variety of objects or arrays of objects, including cantilevers in scanning probe microscopy, micromechanical biological...
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7082683 |
Method for attaching rod-shaped nano structure to probe holder
The present invention relates to a method for manufacturing a probe for detecting surface signals or chemical signals through a long and slender rod-shaped nano structure such as tungsten nanowire,...
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7081621 |
Laminated lens for focusing ions from atmospheric pressure
A thin laminated high transmission electro-optical lens populated with a plurality of apertures in communication with its laminates used to improve the collection, focusing, and selection of ions...
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7081625 |
Charged particle beam apparatus
The object of the present invention is to transmit the position information of a defect that has been specified by means of a circuit pattern inspection apparatus quickly and precisely so that the...
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7081624 |
Scanning probe microscopy probes and methods
A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A...
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7076871 |
Method of manufacturing a carbon nanotube device
A method of manufacturing a carbon nanotube device including an inner electrode, having connecting step, connecting a carbon nanotube to the inner electrode, wherein the connecting step comprises:...
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7078687 |
Thin film analyzing method
The present invention provides is a thin film analyzing method which can be applied to various fields, and which makes it possible to detect and analyze in a simple manner, with high precision, a...
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7078688 |
Shape measuring device and shape measuring method
This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using...
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7078689 |
Integrated electron beam and contaminant removal system
One embodiment disclosed relates to an integrated electron beam inspection and contaminant removal tool. An electron beam column is configured to image an area on a substrate being inspected. A...
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7075078 |
Scanning electron microscope
A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from...
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7074340 |
Method for producing a device for simultaneously carrying out an electrochemical and a topographical near-field microscopy
A method of producing a device for simultaneously carrying out an electrochemical and a topographical near field microscopy is disclosed, which is characterized in that a probe suitable for...
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7075077 |
Method of observing a specimen using a scanning electron microscope
A method of observing a specimen using a scanning electron microscope, makes it possible to shorten the time required to perform automatic focusing at the time of semiconductor defect automatic...
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7075071 |
Conductive transparent probe and probe control apparatus
A conductive transparent probe used in a probe control apparatus for adjusting a distance between the apex of the probe and a sample by vibrating the probe with an vibrator in a direction...
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7075073 |
Angle resolved x-ray detection
An apparatus for detecting properties of a sample. An electron beam generator produces an electron beam and directs the electron beam at a desired point on the sample. The sample thereby emits...
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7071468 |
Circuit pattern inspection method and its apparatus
A circuit pattern inspection method and apparatus capable of readily setting an optimum threshold value while it is confirmed that a defect detected when a defect is checked can be detected at what...
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7060977 |
Nanolithographic calibration methods
A system and method for calibration of nanolithography includes fabricating a nanoscale test pattern, measuring a parameter of the test pattern, and calculating a calibration coefficient from the...
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7060993 |
Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements
The invention relates to a method for preventing contamination on the surfaces of optical elements comprising a multi-layer system, during the exposure thereof to radiation at signal wave lengths...
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7057171 |
Patch-clamping and its use in analyzing subcellular features
The present invention pertains to a method for investigating a cell, comprising bringing a probe close to the surface of the cell or part thereof, at a controlled distance therefrom; and into...
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7053372 |
Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same
A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first...
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7053369 |
Scan data collection for better overall data accuracy
A scan data collection operation includes performing a scanning operation using a scan path that includes a directional component that is additional to a data collection directional component. The...
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7053370 |
Information acquisition apparatus, cross section evaluating apparatus, cross section evaluating method, and cross section working apparatus
The invention provides a cross section evaluating apparatus capable of analyzing the cross sectional structure in a state where the temperature of the specimen is regulated. There is disclosed an...
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7053351 |
Near-field scanning optical microscope for laser machining of micro- and nano- structures
A near-field scanning optical microscope (NSOM) laser micromachining system for laser machining features on surfaces using an ultrafast laser source and a method of laser machining such features....
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7051582 |
Actuating and sensing device for scanning probe microscopes
An actuating and sensing device for scanning probe microscopes includes a tuning fork ( 21 ) containing two prongs, a connection device ( 23 ) such as a spring, and a probing tip ( 22 ). The tip (...
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7054257 |
AFM-based data storage and microscopy
Read/write components for AFM-based data storage devices are provided. In particular embodiments, a read/write component comprises lever means and a support structure, the lever means being...
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7047796 |
Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
The invention is directed to a scanned probe microscope including one plate allowing for tip scanning and the other allowing for sample scanning, with the optical axis of the scanned probe...
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7045791 |
Column simultaneously focusing a partilce beam and an optical beam
The invention concerns a column for producing a focused particle beam comprising: a device ( 100 ) focusing particles including an output electrode ( 130 ) with an output hole ( 131 ) for allowing...
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7045781 |
Charged particle beam apparatus and method for operating the same
A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of...
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7045798 |
Characterizing an electron beam treatment apparatus
One embodiment of the present invention is a method for characterizing an electron beam treatment apparatus that includes: (a) e-beam treating one or more of a predetermined type of wafer or...
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7045782 |
Method of measurement accuracy improvement by control of pattern shrinkage
A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the...
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7041977 |
Electron microscope
An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling...
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7041974 |
Conductive transparent probe and probe control apparatus
A conductive transparent probe used in a probe control apparatus for adjusting a distance between the apex of the probe and a sample by vibrating the probe with an vibrator in a direction...
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7038222 |
System and method for using areas near photo global alignment marks or unpatterned areas of a semiconductor wafer to create structures for SIMS or E-Beam or XRD testing
A system and method is described for using areas in or near photo global alignment marks or in or near unpatterned areas of a semiconductor wafer to create structures for secondary ion mass...
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7034297 |
Method and system for use in the monitoring of samples with a charged particle beam
A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis...
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7034277 |
Near-field light-generating element for producing localized near-field light, near-field optical recording device, and near-field optical microscope
A near-field light-generating element has a support member and a minute aperture having a size smaller than the wavelength of incident light provided on the support member so as to produce...
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7034295 |
Photoemission electron microscopy and measuring method using the microscopy
A photoemission electron microscopy having a light source system for carrying out a high-resolution measurement such as work function distribution measurement or magnetic domain distribution with...
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7027636 |
Method of detecting measurement error in measurement system
A method of detecting measurement errors in a measurement system includes: a) imaging a pattern, the imaged pattern including a plurality of critical dimension measurement dots, and b)...
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7026607 |
Scanning probe microscope
A scanning probe microscope has a scanner and a mounting unit for supporting the scanner. An identifying mark is disposed on a part of the scanner for representing preselected information...
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7024925 |
3-axis straight-line motion stage and sample test device using the same
A 3-axis straight-line motion stage and a sample test device using the same for supporting a predetermined sample, and comprising X-axis, Y-axis and Z-axis stages for moving the sample...
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7027638 |
Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same
A method for correcting color variations on the surface of a wafer, a method for selectively detecting a defect from different patterns, and computer readable recording media for the same are...
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7019294 |
Inspection method and apparatus using charged particle beam
Inspection method and apparatus using a charged particle beam for the inspection of defects on an unfinished semiconductor wafer in the manufacturing process of a semiconductor device, a uniform...
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