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7176457 |
MEMS differential actuated nano probe and method for fabrication
A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate...
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7176459 |
Electron beam apparatus
An electron beam apparatus is provided for evaluating a sample at a high throughput and a high S/N ratio. As an electron beam emitted from an electron gun is irradiated to a sample placed on an...
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7176450 |
Long travel near-field scanning optical microscope
A near-field scanning optical microscope system exposes photoresist on a substrate. The system includes an NSOM probe, and translational stages capable of moving one of the probe and the substrate...
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7170048 |
Compound scanning probe microscope
An optical observation image obtained through an objective lens is displayed on a display unit, and a marker indicating a position of a tip portion of a cantilever is displayed on the optical...
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7170054 |
Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder
A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in...
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7170055 |
Nanotube arrangements and methods therefor
Nanotubes and nanotube-based devices are implemented in a variety of applications. According to an example embodiment of the present invention, nanotube tips are coated with metal. In some...
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7170842 |
Methods for conducting current between a scanned-probe and storage medium
Certain embodiments of the present invention are directed at data storage devices capable of storing, reading and writing data to storage areas of nanometer dimensions. Certain embodiments are...
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7166839 |
Apparatus for measuring a three-dimensional shape
Conventionally, there is no method for quantitatively evaluating the three-dimensional shape of an etched pattern in a non-destructive manner and it takes much time and costs to determine etching...
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7166840 |
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being...
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7164127 |
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
The present invention relates to a CDSEM (scanning electron microscope) capable of evaluating and presenting the measurement repeatability as a tool with a high degree of accuracy without being...
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7161149 |
Scanning electron microscope and method of controlling same
A scanning electron microscope has an electron gun producing the electron beam, an objective lens for sharply focusing the beam onto the specimen, a tilting mechanism for tilting the specimen...
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7161148 |
Tip structures, devices on their basis, and methods for their preparation
New designs of electron devices such as scanning probes and field emitters based on tip structures are proposed. The tips are prepared from whiskers that are grown from the vapor phase by the...
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7157702 |
High resolution atom probe
A three dimensional atom probe comprising a sharp specimen ( 10 ) coupled to a mounting means ( 12 ) where emission of charged particles is caused by application of a potential to the specimen tip...
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7154092 |
Method of three-dimensional image reconstruction and transmission electron microscope
Method of three-dimensional image reconstruction and transmission electron microscope capable of producing three-dimensional images. When a TEM image is taken at each tilt angle of a specimen, the...
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7152462 |
Topography and recognition imaging atomic force microscope and method of operation
A recognition force microscope for detecting interactions between a probe and a sensed agent on a scanned surface and methods for its operation are provided. The microscope includes a scanning...
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7151257 |
Tailoring domain engineered structures in ferroelectric materials
Scanning probe apparatus, comprising:
a) a tip-electrode which is coupled to be maintained at a first potential; b) a counter-electrode which is positioned in proximity with the tip...
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7150185 |
Optical microcantilever
An optical microcantilever for a scanning near field microscope has an optical waveguide for propagating light. The optical waveguide has a longitudinal axis, a light input/output end, a free end...
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7151256 |
Vertically aligned nanostructure scanning probe microscope tips
Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An...
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7148498 |
Externally controlled electromagnetic energy spot curing system
The present invention provides an electromagnetic energy spot curing system which utilizes an external signal from a processor to control the operation of the curing unit. The processor is external...
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7148017 |
High sensitivity mechanical resonant sensor
A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an...
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7148478 |
Electrical measurements in samples
A method and device are presented for measuring the electrical properties of a specimen. The specimen is excited with high energy radiation to cause emission of internal charged particles from the...
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7145330 |
Scanning magnetic microscope having improved magnetic sensor
A scanning magnetic microscope SMM ( 20 ) includes a sensor ( 10 ) for sensing a magnetic field generated by a specimen ( 78 ), the sensor including one of a MTJ, a GMR, or an EHE sensor;...
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7143005 |
Image reconstruction method
A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method employs algorithms based on the principle that no...
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7141808 |
Device and method for maskless AFM microlithography
The invention relates to a device and a method for maskless microlithography. Several microstructured cantilevers ( 2 ) are arranged in an array ( 26 ) and an actuator is integrated in each of the...
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7141800 |
Non-dispersive charged particle energy analyzer
An electron energy analyzer including a curved electrostatic low-pass reflector and a high-pass electrostatic transmissive filter. The reflector comprises a curved grid, preferably ellipsoidal, and...
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7138628 |
Method and apparatus for specimen fabrication
A specimen fabrication apparatus including: a specimen chamber, a sample stage in the specimen chamber, to mount a specimen substrate, a transfer unit to extract a micro-specimen from the specimen...
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7138627 |
Nanotube probe and method for manufacturing same
A nanotube probe assembled under real-time observation inside an electron microscope, the probe including a nanotube; a holder for holding the nanotube; and a fastening means for fastening the...
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7138641 |
Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle...
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7135675 |
Multi-pixel and multi-column electron emission inspector
One embodiment disclosed pertains to an inspection system for inspecting a specimen. The system includes a plurality of columns for directing a plurality of multi-pixel incident beams onto a...
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7136215 |
Piezoelectrically-activated cantilevered spatial light modulator
A piezoelectric spatial light modulator including a substrate having an array of cavities and piezoelectric cantilevers is arranged on the substrate. Each of the piezoelectric cantilevers includes...
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7135678 |
Charged particle guide
A charged particle guide adapted to be coupled with a charged particle detector, such as a secondary electron detector. The charged particle guide, in one example, comprising two wires extending...
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7132640 |
Wave interrogated near field array system and method for detection of subwavelength scale anomalies
An array of antenna elements ( 20 ) can be used to detect subwavelength sized anomalies on a surface below the array. An array ( 20 ) is illuminated at optical frequencies by a coherent optical...
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7132301 |
Method and apparatus for reviewing voltage contrast defects in semiconductor wafers
Techniques for identifying, locating, detecting, and reviewing voltage contrast defects are described. A system for implementing the present invention includes a charged particle beam defect review...
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7129483 |
Laser desorption and ionization mass spectrometer with quantitative reproducibility
Laser desorption/ionization time-of-flight mass spectrometer (“LDI-TOF-MS”) devices, and methods, that accurately measure the mass of analytes contained in a sample and which also measure the...
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7126137 |
Illumination system with field mirrors for producing uniform scanning energy
This invention relates to an Ilumination system for scanning lithography especially for wavelengths≦193 nm, particularly EUV lithography, for the illumination of a slit, comprising at least one...
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7119332 |
Method of fabricating probe for scanning probe microscope
A probe is provided for an SPM (Scanning Probe Microscope), and a method is provided for fabricating the probe in which a double side alignment process is not required to simplify the fabricating....
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7117063 |
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
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7116816 |
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen
In order to enable the most suitable image processing condition to be set as one in which a dispersion in brightness between comparing images caused by object to be inspected and an image detecting...
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7116628 |
Electroluminescent multilayer optical information storage medium with integrated readout and composition of matter for use therein
An optical information storage medium has multiple information layers. On each layer, information is stored in the form of an electroluminescent material. The pits are organized into regions called...
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7115866 |
Site stepping for electron beam micro analysis
A method of measuring properties of a sample using an electron beam. Coordinates of a measurement site on the sample, and a diameter of the electron beam are defined. Multiple measurement locations...
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7115863 |
Probe for scanning probe lithography and making method thereof
A probe of scanning probe lithography which provides a long time of useful life. The probe has a tip part comprising a conductor and an insulator, the insulator is formed to cover the conductor,...
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7115864 |
Method for purification of as-produced single-wall carbon nanotubes
This invention relates generally to a single-wall carbon nanotube (SWNT) purification process and more particularly to a purification process that comprises heating the SWNT-containing felt under...
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7112791 |
Method of inspecting pattern and inspecting instrument
A sample inspection system having a sample stage holding a sample to be inspected, electron beam optics so as to radiate an electron beam to the sample, a detector unit that detects a secondly...
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7109486 |
Layered electron beam column and method of use thereof
An electron beam column package comprises a plurality of layers having components, such as lenses, coupled thereto. The layers may be made of LTCC, HTCC or other layer technology.
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7109482 |
Object inspection and/or modification system and method
A scanning probe microscope system ( 100 ) includes an objective lens ( 147 ), a clamping circuit ( 404 ), a tip deflection measurement circuit ( 421 ), a cantilever ( 136 ), and a probe ( 137 )...
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7109493 |
Particle beam generator
The source of electrons is a nanotip in a vacuum as used in near field microscopy. The source of ions is a similar nanotip in vacuum supplied with liquid metal (gallium) as in a liquid-metal ion...
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7109501 |
Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device
A charged particle beam lithography system includes: a charged particle beam source which generates a charged particle beam and irradiates a substrate therewith; an aperture in which has been...
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7105813 |
Method and apparatus for analyzing the composition of an object
An ion analyzing apparatus for analyzing the composition of an object includes a chamber maintained under a vacuum, a support for supporting a plurality of objects disposed in the chamber, and a...
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7107117 |
Sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
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7105817 |
Method of forming images in a scanning electron microscope
An imaging device having many detector elements is used to construct multiple images of the surface of a specimen in a scanning electron microscope (SEM) using signals from different elements of...
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