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7262408 |
Process and apparatus for modifying a surface in a work region
An apparatus and process for manufacturing changes of a substrate in a work region which is 100×100×100 microns or smaller is described. The apparatus uses a plasma source adjacent to the work...
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7260178 |
Diffractometer and method for diffraction analysis
Diffractometer and method for diffraction analysis making use of two Euler cradles, a primary and a secondary Euler cradle. The primary Euler cradle supports a source of a radiation beam, having a...
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7260051 |
Molecular memory medium and molecular memory integrated circuit
A molecular memory media having a media surface and a platform with read/write heads. The platform and media are moved to allow one of addition, removal, and repositioning of atoms, electrons, and...
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7259372 |
Processing method using probe of scanning probe microscope
A processing method uses a probe of a scanning probe microscope. A fine marker is formed in a processing material by thrusting the probe, which is made of a material harder than the processing...
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7256405 |
Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method
An object of the present invention is to provide a sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method, which can reduce an edge roughness...
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7253407 |
Active cantilever for nanomachining and metrology
A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever having an attachment to a main body portion. A suitable tip disposed at the free end of the...
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7251988 |
Topography analyzing system
A topography analyzing system ( 10 ) for analyzing a topographic microstructure is provided. The topography analyzing system includes a three-dimensionally adjustable platform ( 12 ), a loading...
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7253408 |
Environmental cell for a scanning probe microscope
An environmental cell for use with a scanning probe microscope includes a cell chamber, a probe mounted to the cell chamber, a puck selectively connected to the cell chamber, a sample holder...
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7253417 |
Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens
The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are...
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7250599 |
Energy filter image generator for electrically charged particles and the use thereof
The invention relates to an energy filter image generator for filtering electrically charged particles. The inventive energy filter comprises at least two toroidal energy analysers ( 30, 40 )...
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7250602 |
Probe device
A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby...
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7244932 |
Electron beam apparatus and device fabrication method using the electron beam apparatus
The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc. One of the characterizing features of the electron beam apparatus of...
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7241995 |
Electron microscope equipped with magnetic microprobe
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The...
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7241994 |
Scanning probe microscope and specimen surface structure measuring method
A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a...
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7241991 |
Region-of-interest based electron beam metrology
One embodiment relates to a method for metrology using an electron beam apparatus. At least one region of interest is selected in a field of view at a magnification level. Scanning parameters are...
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7242015 |
Patterned wafer inspection method and apparatus therefor
An electron beam (area beam) having a fixed area is irradiated onto the surface of a semiconductor sample, and reflected electrons from the sample surface are imaged by the imaging lens, and images...
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7241992 |
Method of amplitude modulated electrostatic polymer nanolithography
A method of amplitude modulated electrostatic polymer nanolithography providing rapid creation of features in a polymer film is disclosed. The nanolithography method of the present invention...
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7238938 |
Energy selecting slit and energy selective sample analysis systems utilizing the same
A device comprising an energy selecting slit assembly is provided. The slit assembly comprising a slit assembly chassis, opposing slit mechanisms, and an actuator assembly. One of the terminal ends...
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7235784 |
Transmission electron microscope and image observation method using it
Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is...
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7234342 |
Fully digital controller for cantilever-based instruments
A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The...
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7236625 |
Systems and method for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure
Systems and methods for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure. The system includes at least one light source positioned to emit light...
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7235796 |
Method and apparatus for the generation of anionic and neutral particulate beams and a system using same
An apparatus for the generation of anionic and neutral particulate beams is described. The apparatus comprises a duct defined by walls having an inner surface capable of sustaining a temperature...
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7232997 |
Apparatus and method for investigating or modifying a surface with a beam of charged particles
An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam ( 1, 2 ) of charged...
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7232995 |
Method of removing particle of photomask using atomic force microscope
The kind of a particle is determined by pressing a hard atomic force microscope stylus having a spring constant equal to or larger than 300 N/m onto a particle to be removed and detecting bending...
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7232994 |
Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer
The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base...
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7230239 |
Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same
A system for inspecting a pattern shape operates to detect secondary electrons from a specimen by irradiation of a focused electron beam and perform arithmetic processing on this detected signal....
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7230241 |
Method for matching two measurement methods for measuring structure widths on a substrate
The invention relates to a method for matching a first measurement method for measuring structure widths of trapezoidally tapering structures on a substrate wafer to a second measurement method for...
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7230243 |
Method and apparatus for measuring three-dimensional shape of specimen by using SEM
The present invention relates to a method and apparatus for measuring a three-dimensional profile using a SEM, capable of accurately measuring the three-dimensional profile of even a flat surface...
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7230240 |
Enhanced scanning control of charged particle beam systems
A charged particle beam system and scanning control method capable of imaging, and possibly editing, a device under test (DUT). The charged particle beam system contains a charged particle beam...
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7227143 |
X-ray detecting devices and apparatus for analyzing a sample using the same
X-ray detecting devices and apparatus for analyzing a sample using the same are disclosed. A disclosed X-ray detecting device has an X-ray detector to detect X-rays emitted from a sample. The X-ray...
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7223438 |
Patterning magnetic nanostructures
A direct-write method for fabricating magnetic nanostructures, including hard magnetic nanostructures of barium hexaferrite, BaFe, based on nanolithographic printing and a sol-gel process. This...
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7220962 |
Cantilever array and scanning probe microscope including a sliding, guiding, and rotating mechanism
There are provided a cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding...
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7219538 |
Balanced momentum probe holder
A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or...
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RE39627 |
Device and method preventing ion source gases from entering reaction/collision cells in mass spectrometry
A mass spectrometer has an ion source for producing sample ions. The ions pass through an ion interface, to a reaction/collision cell section. An ion-neutral decoupling device is provided between...
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7218803 |
Microsphere probe for optical surface microscopy and method of using the same
An apparatus and method for performing surface microscopy of an optical device uses an optical fiber taper including a microsphere endpoint as a near field probe. A transmission fiber is disposed...
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7214937 |
Electron microscope
In order to provide an electron microscope which enables the operator to position the field-of-view easily and accurately on a target fault, the electron microscope for observing a surface or...
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7214938 |
Sample observation method and transmission electron microscope
Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is...
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7210339 |
Adhesive compositions and method for selection thereof
Adhesive compositions and a method for selecting adhesive compositions are disclosed herein. Preferred adhesives generally have small domains and/or a homogeneous domain distribution. The method of...
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7207119 |
Controller
The present invention relates to a controller comprising: at least two input terminals, each of which is configured to receive one of at least two input signals comprising information on a...
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7209596 |
Method of precision calibration of a microscope and the like
A method of precision calibration of a microscope magnification with calculating a magnification scale as a quotient obtained when an image size of a test object viewed or collected with the...
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7208730 |
Programmable molecular manipulating devices
A system manipulates molecules using a set of proximal probes such as those used in atomic force microscopes. An electrostatic pattern is placed on a set of proximal probes such that each proximal...
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7205558 |
Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object
Disclosed are an electron beam irradiation apparatus and an electron beam irradiation method that are capable of easily curing a material that is hard to be cured by irradiation of ultraviolet rays...
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7205555 |
Defect inspection apparatus and defect inspection method
An apparatus and a method for automatically inspecting a defect by an electron beam using an X-ray detector. The composition of a defective portion is analyzed with higher rapidity and the cause of...
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7205540 |
Electron beam apparatus and device manufacturing method using same
An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample,...
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7205542 |
Scanning electron microscope with curved axes
One embodiment relates to a scanning electron beam apparatus having curved electron-optical axes. An electron gun and illumination electron optics are configured to generate a primary electron beam...
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7196328 |
Nanomachining method and apparatus
Methods and apparatus are disclosed for nanomachining operations. Excitation energy settings are provided to minimize machine induced scan cutting. Cut operations can be operated in a feedback mode...
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7196321 |
Fine pattern forming apparatus and fine pattern inspecting apparatus
Disclosed is a fine pattern forming apparatus and a fine pattern inspecting apparatus. In one preferred form, the fine pattern forming apparatus includes a surface irregularity information reading...
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7191092 |
Methods and systems for controlling motion of and tracking a mechanically unattached probe
Methods and systems for controlling motion of and tracking a mechanically unattached magnetic probe are disclosed. One system for controlling motion of mechanically unattached magnetic probe may...
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7188049 |
System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device
A control system for a manufacturing process includes an inspection tool inspecting a dislocation image in semiconductor substrate processed by manufacturing processes; an inspection information...
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7186977 |
Method for non-destructive trench depth measurement using electron beam source and X-ray detection
A method (and system) for non-destructive measurement of a depth of a feature in a structure, includes using a scanning electron microscope (SEM) image to navigate to find the feature in an X-ray...
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