Matches 251 - 300 out of 1654 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >
Match Document Document Title
7361896 Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope  
In a scanning electron microscope, scanning region is set to be narrow, upon which focused electron beam is scanned, so that the focused electron beam can be irradiated at the almost same position...
7361897 Imaging apparatus for high probe currents  
An imaging apparatus is provided, comprising a first lens, a Wien filter having a first opening and a second opening, and further comprising a 2*m-pole element, m≧2, and a second lens, wherein...
7362123 Inspection apparatus for thin film transistor substrate  
An inspection apparatus for a TFT substrate formed with a plurality of pixels, includes a reference substrate being opposite to and spaced from the TFT substrate and formed with a plurality of...
7358490 Methods and apparatus of spatially resolved electroluminescence of operating organic light-emitting diodes using conductive atomic force microscopy  
A conductive atomic force microscopy (cAFM) technique which can concurrently monitor topography, charge transport, and electroluminescence with nanometer spatial resolution. This cAFM approach is...
7355174 Charged particle beam emitting device and method for adjusting the optical axis  
A charged-particle beam emitting device which includes the following configuration devices so that a lowering in the image resolution will be suppressed even if a primary beam is tilted relative to...
7355175 Method and apparatus for automatically correcting charged-particle beam and method of controlling aberration corrector for charged-particle beam  
There is disclosed a method and apparatus for automatically correcting a charged-particle beam with an aberration corrector without the operator performing manual operations. The apparatus has an...
7355176 Method of forming TEM specimen and related protection layer  
A method of forming a protection layer on a specimen for TEM inspection and a method of forming a specimen for TEM inspection are provided. The method of forming a protection layer on a specimen...
7351968 Multi-pixel electron emission die-to-die inspection  
One embodiment disclosed is a method of detecting defects in objects. A selected surface area of an object is inspected with a multi-pixel electron microscope, and first set of data is generated...
7350404 Scanning type probe microscope and probe moving control method therefor  
The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12 . The...
7351966 High-resolution optical channel for non-destructive navigation and processing of integrated circuits  
An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection...
7351971 Charged-particle beam instrument and method of detection  
A charged-particle beam instrument and method are offered which can inspect side and rear surfaces of the outer periphery of a specimen. The instrument has a source of the charged-particle beam and...
7348571 Scanning mechanism for scanning probe microscope and scanning probe microscope  
A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the...
7348558 Charged particle beam apparatus and automatic astigmatism adjustment method  
According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged...
7342225 Crystallographic metrology and process control  
A system ( 70 ) for crystallography including a sample holder ( 74 ), an electron source ( 76 ) for generating an electron beam, and a scanning actuator ( 80 ) for controlling the relative movement...
7339167 Charged particle beam apparatus  
A charged particle beam apparatus in which an electrostatic lens is used as a main focusing element to obtain a subminiature high-sensitivity high-resolution SEM, a drift tube for an electron beam...
7335880 Technique for CD measurement on the basis of area fraction determination  
The present invention provides a technique for estimating critical dimensions of highly scaled circuit features on the basis of scanning electron microscopy, wherein area fractions of a scan area...
7328446 Apparatus for reducing sensitivity of an article to mechanical shock  
Apparatus for reducing sensitivity of an article to mechanical shock comprises a frame; first and second planar masses mounted in the frame for bi-directional movement relative to the frame along a...
7323684 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope  
In order to provide a scanning probe microscope capable of measuring with high throughput distribution information relating to local characteristics of a sample concurrently with accurate...
7321118 Scanning transmission ion microscope  
Scanning Transmission Ion Microscope. The microscope includes a bright helium ion source to generate an ion beam and a focusing electrostatic optical column to focus the ion beam. A translation...
7321232 Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam  
A charge amount measurement method comprises: interposing a measurement subject between a first substance and a second substance having a through hole; measuring a first collision position where a...
7319224 Semiconductor probe with resistive tip and method of fabricating the same  
Provided are a semiconductor probe with a resistive tip, and a method of fabricating the semiconductor probe. The method includes forming a stripe-shaped mask layer on a substrate doped with a...
7319528 Surface texture measuring instrument  
A surface texture measuring instrument provided with a near-field measuring unit ( 30 ) including a near-field probe ( 33 ) that forms a near-field light at a tip end thereof when a laser beam is...
7319223 Method and apparatus for characterizing a recess located on a surface of a substrate  
Method and apparatus for characterizing a recess located on a surface of a substrate are provided. One embodiment of the invention provides a method for characterizing a recess located on a surface...
7315022 High-speed electron beam inspection  
One embodiment disclosed relates to an electron beam apparatus for inspection of a semiconductor wafer, wherein substantially an entire area of the wafer surface is scanned without moving the...
7312445 Pyramid-shaped near field probe using surface plasmon wave  
Disclosed herein is a pyramid-shaped near field probe which forms and changes a near field at the aperture of the probe. The pyramid-shaped near field probe of the present invention includes a...
7309991 Scanning probe inspection apparatus  
A pair of pads is formed on an insulating layer formed on a top surface of a substrate, and a plurality of through-holes is laid out at equal intervals between the pads. Adjoining through holes are...
7304302 Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis  
Various systems configured to reduce distortion of a resist during a metrology process are provided. The systems include an electron beam metrology tool configured to measure one or more...
7304320 Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device  
A charged beam exposure apparatus includes: a first shaping aperture provided with a plurality of rectangular openings which are different from each other in at least one of area and shape thereof;...
7301146 Probe driving method, and probe apparatus  
A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the...
7301159 Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same  
A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with...
7297946 Automated nanoassembly  
An automated nanomanipulation system is provided for manufacturing a nanoscale structure. The system includes: a design model for the nanoscale structure; image data of a sample surface upon which...
7297947 Apparatus and method for evaluating cross section of specimen  
An apparatus for evaluating a cross section of a specimen in a specimen chamber, wherein the apparatus includes a specimen stage for placing the specimen, a temperature regulation unit for...
7297965 Method and apparatus for sample formation and microanalysis in a vacuum chamber  
Methods and apparatus are disclosed for forming a sample of an object, extracting the sample from the object, and subjecting this sample to microanalysis including surface analysis and electron...
7291849 Calibration standard for transmission electron microscopy  
A calibration standard includes a silicon substrate having a plurality of defined regions and a plurality of calibration marks placed on respective defined regions of the silicon substrate. Each...
7288762 Fine-adjustment mechanism for scanning probe microscopy  
The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be...
7288763 Method of measurement accuracy improvement by control of pattern shrinkage  
A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the...
7288772 Diagnostic system for profiling micro-beams  
An apparatus for characterization of a micro beam comprising a micro modified Faraday cup assembly including a first layer of material, a second layer of material operatively connected to the first...
7285779 Methods of scanning an object that includes multiple regions of interest using an array of scanning beams  
A multi beam inspection method and system. The inspection system includes: (i) a beam array generator adapted to generate an array of beams characterized by a beam array axis; and (ii) at least one...
7285775 Endpoint detection for the patterning of layered materials  
Photoelectron emissions are used to detect an endpoint of a thickness alteration of a topmost layer in a set of layers undergoing patterning. The set of layers are irradiated, which causes an...
7285778 Probe current imaging  
A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of...
7285781 Characterizing resist line shrinkage due to CD-SEM inspection  
A CD-SEM (critical dimension-scanning electron microscope) system may utilize a technique for characterizing and reducing shrinkage carryover due to CD-SEM measurements. The system may identify the...
7281419 Multifunctional probe array system  
A probe array for includes a handle, a first probe and a second probe. The first probe has a first shank, connected to the handle, and a first tip; and the second probe has a second shank,...
7282710 Scanning probe microscopy tips composed of nanoparticles and methods to form same  
A structure and method for improving the spatial resolution of a scanning probe microscope (SPM) tip, which has been coated with a layer of chemically-synthesized nanoparticles. The nanoparticles...
7278299 Method of processing vertical cross-section using atomic force microscope  
An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for...
7276708 Diagnostic resonant cavity for a charged particle accelerator  
Disclosed is a diagnostic resonant cavity for determining characteristics of a charged particle beam, such as an electron beam, produced in a charged particle accelerator. The cavity is based on...
7276693 Inspection method and apparatus using charged particle beam  
A scanning electron microscope or inspection system includes a sample stage on which a sample such as a wafer is loaded, an electro optical unit to scan an electron beam to the sample, and a charge...
7268358 Method of modulating laser-accelerated protons for radiation therapy  
Methods of optimizing a laser-accelerated proton radiation dose to a targeted region are disclosed. Disclosed methods include providing a plurality of modulated polyenergetic proton beamlets and...
7268348 Scanning probe for data storage and microscopy  
A cantilever device for scanning a surface comprises a support, a tip platform and a flexible arm arrangement. The tip platform has a plurality of tips. These comprise at least two contact tips...
7265361 Beam blanker driver system and method  
A particle beam lithography system and method of blanking a beam such as a particle or other beam. The system may include a frequency divider adapted to convert a master clock signal at a first...
7262408 Process and apparatus for modifying a surface in a work region  
An apparatus and process for manufacturing changes of a substrate in a work region which is 100×100×100 microns or smaller is described. The apparatus uses a plasma source adjacent to the work...
Matches 251 - 300 out of 1654 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >