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6596992 |
Method of operating scanning probe microscope
In the first operation, the cantilever is oscillated at a frequency which is at opposite sides of a frequency band having a half value of an oscillation frequency f and amplitude A on a dependent...
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6593583 |
Ion beam processing position correction method
The present invention provides a focused ion beam method in which positional correction is performed with reference to reference points on a sample and for carrying out processing using an ion...
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6593571 |
Scanning probe microscope
A scanning probe microscope has a cantilever section comprised of a single cantilever chip, at least one first conductive cantilever having a first probe at a free end thereof and extending from...
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6586734 |
Hyperbaric hydrothermal atomic force microscope
A hyperbaric hydrothermal atomic force microscope (AFM) is provided to image solid surfaces in fluids, either liquid or gas, at pressures greater than normal atmospheric pressure. The sample can be...
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6586753 |
Electron beam apparatus and electron beam adjusting method
An electron beam apparatus for irradiating a target with an electron beam includes a reference sample including at least one reference pattern which has a plurality of lattice structures arranged...
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6586735 |
Method for detecting an element in a sample
A method for detecting an element in a sample using a transmission electron microscope to measure a first image of the intensities of the sample at an energy loss in the range of the element...
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6583412 |
Scanning tunneling charge transfer microscope
The present invention develops a new type of SPM, a scanning tunneling charge transfer microscope (STCTM). The STCTM is capable of first, detecting the transfer of an ultrasmall amount of charge...
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6580070 |
Time-of-flight mass spectrometer array instrument
A time-of-flight mass spectrometer (TOF-MS) array instrument is provided. Each TOF-MS of the array instrument includes (1) a gridless, focusing ionization extraction device allowing for the use of...
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6580076 |
Micro-manipulation method
A micro-manipulation method enables micro-objects to be handled as desired with excellent repeatability when using microscopes that radiate electron beams and use secondary, reflected and...
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6580075 |
Charged particle beam scanning type automatic inspecting apparatus
A charged particle beam scanning inspecting apparatus for irradiating a charged particle beam, fetching information of a subject to be inspected at a predetermined beam scanning position and...
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6576902 |
Correction method of scanning electron microscope
A method of correcting a scanning electron microscope using a detection sample for producing light of an intensity corresponding to an electron density of an electron beam irradiating a surface of...
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6573498 |
Electric measurement of reference sample in a CD-SEM and method for calibration
The present invention relates to a system and method for calibrating a scanning electron microscope (SEM). The method comprises measuring an electrical characteristic of a calibration standard...
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6573508 |
Electron beam exposing method
In order to provide an electron beam exposure apparatus and an exposing method using an electron beam that realizes highly precise pattern exposure, an axis difference generated by the variable...
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6574257 |
Near-field laser and detector apparatus and method
A near-field laser and detector apparatus and method wherein both writing and reading of optical media can be carried out using the same laser operating in a single mode for both read and write...
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6573497 |
Calibration of CD-SEM by e-beam induced current measurement
The present invention relates to a system and method for calibrating a scanning electron microscope (SEM). The method comprises measuring an electrical characteristic of a calibration standard...
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6573502 |
Combined electron microscope
A combined electron microscope capable of making SEM/STEM images and TEM image correspond to each other precisely. Angles of rotation of SEM/STEM images for matching TEM images to the angles of...
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6573501 |
Holography transmission electron microscope
A holography electron microscope permitting electron holography without limitations on the magnification. An electron biprism is mounted between a system of intermediate lenses and a system of...
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6570157 |
Multi-pitch and line calibration for mask and wafer CD-SEM system
The present invention relates to a system and method for calibrating a scanning electron microscope (SEM). The method comprises using a reference having multiple features of different dimensions...
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6570164 |
Resolution enhancement device for an optically-coupled image sensor using high extra-mural absorbent fiber
A resolution enhancement device is provided which utilizes either high extra-mural absorbent optical fibers in the transfer optic, and/or which uses a transfer optic which is bonded to the...
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6570390 |
Method for measuring surface leakage current of sample
A method of measuring a surface leakage current includes applying a voltage between a pair of electrodes, which are apart from each other on a sample surface, during a predetermined period of time....
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6566654 |
Inspection of circuit patterns for defects and analysis of defects using a charged particle beam
The present invention is intended to detect defects in a circuit pattern formed on a semiconductor wafer by a circuit pattern forming process, to facilitates the extraction and observation of the...
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6566650 |
Incorporation of dielectric layer onto SThM tips for direct thermal analysis
One of the limitations to current usage of scanning thermal microscopes arises when one needs to obtain a thermal map of an electrically biased specimen. Current practice is for the conductive...
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6566653 |
Investigation device and method
An investigation device includes a time of flight mass spectrometer with an entrance opening, and an electrically conductive tip on a cantilever which is movable from a first position near a sample...
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6566655 |
Multi-beam SEM for sidewall imaging
The present invention provides a system and method that facilitates measuring and imaging topographical features of a substrate, including lines and trenches having reentrant profiles. One aspect...
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6563114 |
Substrate inspecting system using electron beam and substrate inspecting method using electron beam
A host computer controlling a secondary optical system under such an image focusing condition that secondary beams obtained from an arbitrary region on a substrate form an image on a MCP detector,...
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6559458 |
Measuring instrument and method for measuring features on a substrate
A measuring instrument ( 100 ) and a method for measuring features ( 19 ) on a substrate ( 9 ) are described. The measuring instrument ( 100 ) has a support element ( 15 ) that is provided opposite...
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6555818 |
Transmission electron microscope
There is disclosed a transmission electron microscope that uses an accelerating voltage on the order of 200 kV but is capable of correcting spherical aberration. This microscope has an illumination...
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6555815 |
Apparatus and method for examining specimen with a charged particle beam
An apparatus for examining a specimen with a beam of charged particles, where charging of the specimen is avoided or reduced by injecting inert gas onto the sample's surface. In order to avoid...
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6552331 |
Device and method for combining scanning and imaging methods in checking photomasks
An apparatus and method for imaging and scanning masks for semiconductor production includes placing a scanning instrument having a probe at a position to scan a layer side of a mask with the...
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6552338 |
Ion photon emission microscope
An ion beam analysis system that creates microscopic multidimensional image maps of the effects of high energy ions from an unfocussed source upon a sample by correlating the exact entry point of...
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6552339 |
Micro goniometer for scanning probe microscopy
A goniometer for performing scanning probe microscopy on a substrate surface is disclosed. The goniometer has a cantilever, having a cantilevered end and a supported end and a tip disposed at the...
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6552336 |
Non-invasive, opto-acoustic water current measurement system and method
A method and system are provided for measuring water current. An acoustically-modulated beam of radiation is transmitted to a target location on the surface of a body of water. As the beam transits...
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6548810 |
Scanning confocal electron microscope
A scanning confocal microscope and methods are provided for configuring scanning confocal microscopes for imaging specimens, such as, high resolution imaging of thick non-optically transparent...
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6548811 |
Transmission electron microscope apparatus with equipment for inspecting defects in specimen and method of inspecting defects in specimen using transmission electron microscope
In order to detect automatically at a high speed and a high probability rate the crystal defects and shape abnormalities in a specimen over a wide area of said specimen, a transmission electron...
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6546788 |
Nanotomography
The invention relates to a device for determining the spatial distribution of properties of a notably heterogeneous sample ( 1 ). The device comprises: a microscope ( 2 ) having a control ( 21 )...
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6545263 |
Scanning probe microscope with probe integrated in an optical system
An illumination device for a light microscope comprises a scanning microscope probe which is integrated in the center thereof. A scanning probe microscope comprising such illumination device is...
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6545276 |
Near field optical microscope
A light illumination portion illuminates light to a sample surface. A probe has a tip which is smaller than the wavelength of light illuminated by the light illumination portion, the tip is...
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6545495 |
Method and apparatus for self-calibration of capacitive sensors
A method for determining operational characteristics of capacitive sensors adapted for self-calibration includes the steps of providing at least one capacitive sensor having a suspended element and...
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6545273 |
Use of multiple tips on AFM to deconvolve tip effects
The present invention comprises a system for deconvolving tip effects associated with scanning tips in scanning probe microscopes and other scanning systems. The system comprises a scanning system...
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6541779 |
Charged-particle-beam microlithography apparatus including selectable systems for determining alignment-mark position, and device-fabrication methods utilizing same
Charged-particle-beam microlithography apparatus are disclosed that include a system for performing alignment of a reticle and a wafer. The wafer includes at least one alignment mark that is...
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6529793 |
Method of sorting a group of integrated circuit devices for those devices requiring special testing
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
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6528780 |
Optical probe for proximity field
A near-field optical probe has a hole penetrating through a substrate and defining a microscopic aperture at an apex thereof for generating or scattering near field light. The probe is simple and...
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6528807 |
Method for applying or removing material
A process which allows effective application or removal of materials to and from substrates using a scanning probe microscope operated at atmospheric pressure. The substrate is placed in a trough,...
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6528785 |
Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder
The fusion-welded nanotube surface signal probe of the present invention is constructed from a nanotube, a holder which holds the nanotube, a fusion-welded part fastening a base end portion of the...
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6525317 |
Reduction of charging effect and carbon deposition caused by electron beam devices
A method and apparatus for reducing the charging effect of electron beam devices on non-conducting samples includes introducing a water containing gas on the sample surface. Because the water...
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6525316 |
Multiaxis actuator and measuring head, especially for a scanning probe microscope
Finely adjustable actuators are used for positioning a sensor or a scanning tip, especially for scanning tunnelling microscopes and other scanning microscopes, i.e. scanning probe microscopes. The...
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6521889 |
Dust particle inspection apparatus, and device manufacturing method using the same
A dust particle inspection apparatus for detecting size information and height information of a dust particle on the surface of a mask or a wafer, as well as a device manufacturing method using the...
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6519221 |
High-density data storage using atomic force microscope
An atomic force microscope (AFM) tipped with a single-wall conductive nanotube is operated to write bits onto a metal substrate by oxidizing the surface. The oxidized microregions project above an...
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6515277 |
Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images
A scanning probe microscope assembly and corresponding method for making confocal, spectrophotometric, near-field, and scanning probe measurements and forming associated images from the measurements.
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6515282 |
Testing of interconnection circuitry using two modulated charged particle beams
Apparatus and a method for non-contact electrical testing of printed circuit boards, solid state display devices, integrated circuits and other substrates with traces that connect together...
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