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6924484 |
Void characterization in metal interconnect structures using X-ray emission analyses
Disclosed are methods and apparatus for characterizing a potential void or voids by analyzing the X-ray count of one or more emitted X-ray species as emitted from an interconnect structure under...
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6919563 |
Defect evaluation apparatus utilizing positrons
Disclosed is a defect evaluation apparatus comprising a source section having a source for generating positrons and a moderator for decelerating the positrons, a sample holding section for holding...
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6914244 |
Ion beam milling system and method for electron microscopy specimen preparation
An ion beam milling system and method for electron microscopy specimen preparation is provided and is useful for the preparation for analysis by either TEM or SEM of semiconductors, metals, alloys,...
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6911656 |
Rotational stage for high speed, large area scanning in focused beam systems
A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear...
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6909092 |
Electron beam apparatus and device manufacturing method using same
A defect inspecting apparatus is provided for generating a less distorted test image to reliably observe a surface of a sample for detecting defects thereon. The defect detecting apparatus...
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6901800 |
Differential in-plane tunneling current sensor
A sensor arrangement for measuring a displacement of a proof mass using a tunneling current includes a proof mass body suspended by micro-mechanical beams to permit a mass body movement, at least...
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6903337 |
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same
An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge...
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6903351 |
Charged particle beam irradiation equipment having scanning electromagnet power supplies
A power supply for applying a voltage to a scanning electromagnet for deflecting a charged particle beam has a first power supply unit having no filter and a second power supply unit having a...
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6897458 |
Electron beam exposure system
The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising:
a beamlet generator for generating a plurality of electron...
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6897441 |
Reducing chromatic aberration in images formed by emmission electrons
An imaging device, such as an EEM, includes an electric/magnetic lens used to focus pulsed electrons emitted from an object on to a target plane. Before a pulse of emitted electrons reaches the...
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6894288 |
Manipulator for an optical or particle-optical apparatus
The invention is directed to a manipulator for an optical apparatus including a particle-optical apparatus. The manipulator is especially a diaphragm or specimen manipulator in an electron...
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6894272 |
Device for simultaneously carrying out an electrochemical and a topographical near-field microscopy
A device for simultaneously carrying out an electro-chemical and a topographical near field microscopy is described, which device comprises a region for topographical near field measurement and a...
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6891158 |
Nondestructive characterization of thin films based on acquired spectrum
The present invention provides for characterization of a film (e.g., thickness determination for a silicon oxynitride film) using collected spectral data. For example, an acquired spectrum may be...
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6890772 |
Method and apparatus for determining two dimensional doping profiles with SIMS
A method of forming a SIMS monitor device for determining a doping profile of a semiconductor device structure including providing a plurality of regularly repeating semiconductor structures...
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6886395 |
Method of fabricating a surface probing device and probing device produced thereby
A method of making a probe having a cantilever and a tip include providing a substrate having a surface and forming a tip extending substantially orthogonally from the surface. The method includes...
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6888137 |
Instrument and method for observing selected stored images acquired from a scanning charged-particle beam
There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this...
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6888138 |
Absorption current image apparatus in electron microscope
It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional...
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6888135 |
Scanning probe microscope with probe formed by single conductive material
In a scanning probe microscope a probe associated with its sharp end includes a single conductive material.
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6884999 |
Use of scanning probe microscope for defect detection and repair
The present invention provides a system and method for detecting and repairing defects in semiconductor devices. According to the invention, defects are located using a scanning probe microscope,...
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6884981 |
Diffractive optical position detector
An apparatus and method for measuring optically the position or angle of a variety of objects or arrays of objects, including cantilevers in scanning probe microscopy, micromechanical biological...
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6881956 |
Method and apparatus for scanning semiconductor wafers using a scanning electron microscope
An apparatus and method for scanning the surface of a specimen is disclosed for defect inspection purposes. Scanning Electron Microscope (SEM) is used to scan the surface of a specimen. The...
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6881954 |
Scanning probe microscope and method of measurement
A scanning probe microscope has an XY scanner for making a probe scan a sample surface, an approach and separate drive element for making the probe approach to the sample surface at a sampling...
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6881947 |
Near-field optical probe
The present invention has an object, in a near-field optical probe having a microscopic aperture to generate and/or scatter a near field, to obtain a near-field optical probe easy to be made in an...
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6879152 |
Evaluation system and method of measuring a quantitative magnetic field of a magnetic material
The magnetic field intensity distribution of a magnetic material sample, such as a magnetoresistive device, is measured with a probe having a tip portion of a magnetic material to which current is...
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6878937 |
Prism array for electron beam inspection and defect review
One embodiment disclosed relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes illumination optics, objective optics, projection optics, and a beam...
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6875981 |
Scanning atom probe and analysis method utilizing scanning atom probe
In a scanning atom probe ( 100 ), a surface topography of a specimen ( 3 ) is firstly analyzed by a surface topography analyzing unit ( 20 ). In the next place, an extraction electrode ( 5 ) is...
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6872942 |
High-speed inspection of flat substrates with underlying visible topology
One embodiment disclosed relates to a method for inspecting a substrate. The method includes exposing the substrate to an incident beam, inducing relative motion between the incident beam and the...
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6871527 |
Measurement head for atomic force microscopy and other applications
An improvement for atomic force microscopes, more generally for light beam detecting systems, but also in part applicable to scanning probe microscopes, providing significant novel features and...
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6870169 |
Method and apparatus for analyzing composition of defects
In order to be able to detect an irradiation position of an electron beam matching a defect position and conduct composition analysis of a defect with high precision and high efficiency, in the...
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6867407 |
Light probe microscope including picture signal processing means
A light probe microscope has a probe having a tip, a mechanism for positioning the probe tip closely to a sample surface and causing two-dimensional scanning movement between the probe tip and the...
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6864481 |
Probe for scanning probe microscope
A probe for a scanning probe microscope has a cantilever portion and a microscopic probe portion formed of a solid columnar tip at a distal end of the cantilever portion by deposition using an...
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6864487 |
Environmental sampler for mass spectrometer
An environmental sampler for a mass spectrometer is disclosed that provides for controlled introduction of small amounts of fluids or gases into the vacuum system of the mass spectrometer under...
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6862923 |
Atomic force microscope
This atomic force microscope has a probe for surface analysis of a sample (E), comprising a support body and an elastically deformable strip linked to the body, the strip being provided with a tip...
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6862142 |
Multi-detector microscopic inspection system
Techniques for utilizing a microscope inspection system capable of inspecting specimens at high throughput rates are described. The inspection system achieves the higher throughput rates by...
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6858436 |
Near-field transform spectroscopy
An exemplary system and method for detecting at least one analyte in a sample comprises inter alia a source of radiation ( 300 ), a near-field aperture array ( 315 ), a chromatographic field ( 330...
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6858844 |
Method for detecting geometrical-optical aberrations
The invention relates to a method for determining geometrical-optical aberrations up to and including 3rd order in particle-optical, probe-forming systems, in particular scanning electron...
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6858845 |
Scanning electron microscope
A scanning electron microscope has an electron gun for producing an electron beam, a specimen holder holding the specimen, an objective lens for sharply focusing the beam onto the specimen, and a...
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6858851 |
Apparatus for specimen fabrication and method for specimen fabrication
A micro-sample prepared by processing with an ion beam is extracted by a probe and, in this state, a voltage is applied across the probe and a micro-sample holder by a circuit for sending electric...
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6858843 |
Immersion objective lens for e-beam inspection
Disclosed is an apparatus for electron beam inspection of a specimen with improved potential throughput. The apparatus includes an immersion objective lens focusing the primary electrons into a...
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6855926 |
Instrument and method for combined surface topography and spectroscopic analysis
A combined surface topography and spectroscopic analysis instrument comprises a scanning tunnelling microscope tip ( 12 ); and a sample carrier ( 58 ) which supports a sample ( 10 ) so that a...
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6855931 |
Scanning electron microscope and sample observation method using the same
According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be...
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6852973 |
Scanning charged particle microscope
The present invention sets out to provide a scanning charged particle microscope equipped with a rapid control function capable of extrapolating an in-focus point from image information for a...
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6851301 |
Cantilever for scanning probe microscope
Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around...
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6852968 |
Surface-type optical apparatus
A surface optical apparatus that includes a surface optical device with p-side and n-side electrodes, such as a surface emitting laser, a first substrate for supporting the surface optical device...
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6852982 |
Magnetic lens
In one embodiment of the present invention, a magnetic lens is provided that can generate a substantially constant amount of average heat power over a pre-selected range of resultant magnetic field...
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6852969 |
Atmospheric pressure, glow discharge, optical emission source for the direct sampling of liquid media
A glow discharge spectroscopy (GDS) source operates at atmospheric pressure. One of the discharge electrodes of the device is formed by an electrolytic solution 27 containing the analyte...
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6844551 |
Method of determining lattice constant, method of evaluating material by using the same and electronic microscope suitable for using the same
The invention provides a method of determining a lattice constant of an arbitrary material such as a polycrystalline material speedily and easily, and a method of evaluating the stress and strain...
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6841775 |
Electron microscope
An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a...
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6841777 |
Electron diffraction system for use in production environment and for high pressure deposition techniques
An electron source particularly for a RHEED measurement system or a RHEED measurement system as such includes an electron emitter ( 5 ), a first deflection stage ( 6 a, b ) for radiating an...
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6841776 |
Method and apparatus for high-speed inspection and review
One embodiment disclosed relates to an apparatus for substrate inspection and review. The apparatus includes at least a first subsystem, a processor, and a second subsystem. The first subsystem is...
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