Matches 451 - 500 out of 1703 < 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 >
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6817231 Scanning probe microscope for ultra sensitive electro-magnetic field detection and probe thereof  
The object of the present invention is to provide a method and device thereof that captures microscopic magnetic signals such as those developed by electrical current flowing inside a circuit that...
6815678 Raster electron microscope  
The invention relates to a raster electron microscope having a specimen chamber and a detector for electrons mounted in the specimen chamber. The raster electron microscope also includes a specimen...
6815677 Scanning electron microscope and method of controlling the same  
The present invention provides a scanning electron microscope that can obtain a high-precision SEM image and width measurement values, without damaging an object to be measured even at a high...
6812460 Nano-manipulation by gyration  
A method of nano-manipulation, including providing a nano-scale object movably positioned over a substrate and positioning a probe of a scanning probe microscope proximate the nano-scale object....
6812449 Probe opening fabricating apparatus, and near-field optical microscope using the same  
An opening fabricating apparatus for creating an opening with desired dimensions at a mask tip of a near-field optical microscope, and a near-field optical microscope using the same are provided....
6810105 Methods and apparatus for dishing and erosion characterization  
The present invention includes a system for efficient and effective detection and characterization of dishing and/or erosion. An x-ray emission inducer is used to scan a target on a sample. The...
6809306 Scanning unit and scanning microscope having the same  
A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end...
6807314 Method of precision calibration of a microscope and the like  
A method of precision calibration of a microscope magnification with calculating a magnification scale as a quotient obtained when an image size of a test object viewed or collected with the...
6803572 Apparatus and methods for secondary electron emission microscope with dual beam  
Disclosed is an apparatus for inspecting a sample. The apparatus includes a first electron beam generator arranged to direct a first electron beam having a first range of energy levels toward a...
6803570 Electron transmissive window usable with high pressure electron spectrometry  
A vacuum window transmitting keV electrons and usable for high-pressure electron analysis such as XPS and AES in which the sample is positioned outside the UHV analyzer chamber, possibly in a...
6803558 Probe opening fabricating apparatus, and near-field optical microscope using the same  
An opening fabricating apparatus for creating an opening with desired dimensions at a mask tip of a near-field optical microscope, and a near-field optical microscope using the same are provided....
6800864 Method and structure for reducing effects of noise and resonance associated with an e-beam lithography tool  
An apparatus and method for reducing noise and resonance detractors connected with and E beam tool. The invention provides a plurality of embodiments. In one embodiment, the E beam tool will be...
6797952 Scanning atom probe  
According to the invention, in selecting an analyzed area of a scanning atom probe (SAP), there is adopted a method of using a tip of the lead-out electrode of SAP as a scanning probe of a scanning...
6794648 Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method  
An object of the present invention is to provide an ultimate analyzer which can display an element distribution image of an object to be analyzed with high contrast to determine the positions of...
6791081 Method for determining pore characteristics in porous materials  
A method for measuring porosity of nanoporous materials is provided using atomic force microscopy (AFM). A surface topology map with sub-atomic resolution is created using AFM wherein the pore...
6788993 Sorting a group of integrated circuit devices for those devices requiring special testing  
A method for sorting integrated circuit (IC) devices of the type having a fuse identification (ID) into those devices requiring enhanced reliability testing and those requiring standard testing...
6787769 Conductive probe for scanning microscope and machining method using the same  
A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever,...
6787768 Method and apparatus for tool and tip design for nanomachining and measurement  
A single-body structure is presented for use as a tool tip for making modifications and/or collecting measurements on a target object. The single-body structure comprises a first end portion, a...
6785615 Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device  
An apparatus and method for detection of electromechanical and mechanical errors in an electron beam device is provided. First the existing subfield is divided into a gridlike structure where each...
6784427 Samples for transmission electron microscopy  
TEM samples are cut from a solid state material with length (l) and width (b) and with a front-side sample surface ( 7 ) onto which a curable adhesive of the flowable type is applied for fixing a...
6784426 Electron beam irradiation apparatus, electron beam exposure apparatus, and defect detection method  
An electron beam irradiation apparatus which irradiates an electron beam to an object for easily detecting a defect of a backscattered electron detector, including: an electron beam generating...
6784425 Energy filter multiplexing  
The present invention pertains to a technique of electron spectroscopic imaging that is easy to perform and cost effective. This technique allows for spatial resolution enhancement of electron beam...
6784414 Probe opening fabricating apparatus, and near-field optical microscope using the same  
An opening fabricating apparatus for creating an opening with desired dimensions at a mask tip of a near-field optical microscope, and a near-field optical microscope using the same are provided....
6782323 Method and program for evaluating molecular similarity  
A molecular similarity evaluation method has steps of: (a) obtaining an upper threshold and a lower threshold from one of a value specific to an atom included in a first molecule, a value specific...
6781141 Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography tool  
As disclosed herein, a system and method are provided for detection and measurement of noise on E beam tools and devices including a spectrum analyzer which looks at the different frequency...
6777698 Electron beam exposure apparatus exposing method using an electron beam  
In order to provide an electron beam exposure apparatus and an exposing method using an electron beam that realizes highly precise pattern exposure, an axis difference generated by the variable...
6777688 Rotational stage for high speed, large area scanning in focused beam systems  
A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear...
6777679 Method of observing a sample by a transmission electron microscope  
Automatically corrected is a movement of a field of view caused upon changing a magnification. A field of view is searched for with a first magnification. A sample stage coordinate of a designated...
6777678 Sample-stage for scanning electron microscope  
The present invention is a sample-stage for a scanning electron microscope. The sample-stage has a base and a horizontal support member, where there is an aperture in the horizontal support member....
6777676 Non-destructive root cause analysis on blocked contact or via  
Disclosed are apparatus and methods for characterizing a potential defect of a semiconductor structure. A charged particle beam is scanned over a structure which has a potential defect. X-rays are...
6777656 Near-field spectrometer having background spectral information  
The near-field spectrometer 10 comprises a Z-axis scanner 18, 20 for bringing a sample 24 and the tip of a probe 12 close to each other at a predetermined distance within a near-field 26 ...
6774365 SEM inspection and analysis of patterned photoresist features  
A process for improving the accuracy of critical dimension measurements of features patterned on a photoresist layer using a scanning electron microscope (SEM) is disclosed herein. The process...
6774364 Electron microscope, method for operating the same, and computer-readable medium  
In an operation of an electron microscope, at least a spot size of an electron beam on a specimen, an acceleration voltage, a detector type, a specimen position, and an observation magnification...
6771012 Apparatus for producing a flux of charge carriers  
Apparatus for producing a flux of charge carriers that may be used in many applications including imaging and lithography comprises an electron source which includes an emitter with a tip radius of...
6770894 Illumination system with field mirrors for producing uniform scanning energy  
This invention relates to an illumination system for scanning lithography with wavelengths ≦193 nm, particularly EUV lithography, for the illumination of a slit. The illumination system includes...
6768114 Electron microscope, method for operating the same, and computer-readable medium  
In an electron microscope, at least the characteristics of the specimen is set on a first image observation mode screen as an image observation condition. An observation image of the specimen is...
6768113 WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD  
Heights of a sample are calibrated by setting a calibrating substrate on a stage and then irradiating a charged particle beam onto standard marks provided on at least two kinds of surfaces having...
6768110 Ion beam milling system and method for electron microscopy specimen preparation  
An ion beam milling system and method for electron microscopy specimen preparation is provided and is useful for the preparation for analysis by either TEM or SEM of semiconductors, metals, alloys,...
6765204 Microstructured pattern inspection method  
The edges of the reticle are detected with respect to the microstructured patterns exposed by the stepper, and the shapes of the microstructured patterns at the surface and at the bottom of the...
6765203 Pallet assembly for substrate inspection device and substrate inspection device  
A substrate holding pallet assembly of the present invention comprises a pallet for holding a substrate on upper face thereof, and a probe laid on said pallet from above so as to hold said...
6765202 Microscope having an electron beam for illumination  
The microscope ( 2 ) is substantially similar to the configuration of a conventional microscope. The microscope ( 2 ) comprises a foot element ( 4 ) on which a column ( 6 ) sits. An arm ( 8 ) is...
6762415 Vacuum chamber with recessed viewing tube and imaging device situated therein  
A vacuum chamber includes chamber walls separating a chamber interior and a chamber exterior, with one or more access ports defined in the chamber walls. A viewing tube extends from the chamber...
6759653 Probe for scanning microscope produced by focused ion beam machining  
A scanning type microscope that captures substance information of the surface of a specimen by the tip end of a nanotube probe needle fastened to a cantilever, in which an organic gas is decomposed...
6756589 Method for observing specimen and device therefor  
During closer inspection with a local defect area being magnified, it is desirable to reduce image acquisition time by making the number of stage moves as few as possible so that a defect can be...
6750451 Observation apparatus and observation method using an electron beam  
Disclosed is an observation apparatus and method using an electron beam, capable of measuring stress and strain information on a crystal structure in a specimen using electron beam diffraction...
6750450 Scanning magnetism detector and probe  
A scanning magnetism detector includes a probe made of a solid material formed of a single crystal having spin polarization and electrical conductivity properties. When the probe is brought into...
6748795 Pendulum scanner for scanning probe microscope  
A pendulum scanner that utilizes a rocking motion to scan across a sample surface is provided. The scanner is present as a component in a scanning probe microscope that includes a microscope base,...
6748794 Method for replacing a probe sensor assembly on a scanning probe microscope  
A scanning force microscope system that employs a laser ( 76 ) and a probe assembly ( 24 ) mounted in a removable probe illuminator assembly ( 22 ), that is mounted to the moving portion of a...
6745618 Scanning probe microscope  
A scanning probe microscope includes a laser diode ( 1 a ) as a light source for emitting light lower in energy level than band gap of semiconductor as a sample. Laser light ( 2 ) emitted therefrom...
6744058 Geometric compensation method for charged particle beam irradiation  
A charged particle beam method for irradiating an array of sub-regions within an areal region within a substrate with a series of shots of a charged particle beam provides that a sequencing of...
Matches 451 - 500 out of 1703 < 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 >