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9029768 Detector and charged particle beam instrument  
A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission...
8981291 Method for measuring film thickness of SOI layer of SOI wafer  
A method for measuring a film thickness of an SOI layer of an SOI wafer including at least an insulator layer and the SOI layer which is formed on the insulator layer and is formed of a silicon...
8963084 Contamination reduction electrode for particle detector  
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the...
8916823 Method and system for non-destructive distribution profiling of an element in a film  
A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum...
8907276 Measuring the populations in each hyperfine ground state of alkali atoms in a vapor cell while limiting the contribution of the background vapor  
A method for measuring the population of atoms in a vapor cell comprises collecting a sample of atoms, applying radio frequency (RF) spectroscopy to the sample such that a first portion of the...
8901494 Sample analyzer  
A sample analyzer is offered which creates a ternary scatter diagram representing a concentration ratio distribution of three elements out of several elements to be analyzed. This...
8890068 Charged particle ray apparatus and pattern measurement method  
Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured...
8890065 Apparatus and method for performing microdiffraction analysis  
An apparatus for detecting one or each of Kikuchi and Kossel diffraction patterns is provided. The apparatus comprises an electron column adapted in use to provide an electron beam (101) directed...
8884237 Neutron detection  
In exemplary embodiments, an apparatus, includes a first electrode, a second electrode, a first polygonal channel extending between the electrodes, the first channel having a first side having a...
8847158 Device and method for measuring surface charge distribution  
A surface charge measuring distribution method includes the steps of irradiating a sample with a charged particle beam and charging a sample surface in a spot-like manner, irradiating the charged...
8835842 Systems and methods for investigating a characteristic of a material using electron microscopy  
Various embodiments of the present invention provide systems and methods for determining an characteristic of a material. The characteristics may include, but are not limited to, crystallographic...
8822919 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former  
A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate ā€œSā€ to be inspected into an inspection chamber 23-1; maintaining a...
8809783 High spatial resolution non-contact temperature measurement  
Systems, methods, and computer-readable media for temperature measurement of a sample, using new temperature measurement and mapping techniques, are provided. The technique employs a temperature...
8803103 Inspection system by charged particle beam and method of manufacturing devices using the system  
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam...
8803111 Sample preparation apparatus and sample preparation method  
Provided is an apparatus for preparing a sample including: a sample stage that supports a sample; a focused ion beam column that applies a focused ion beam to the same sample and processes the...
8803102 Retarding field analyzer integral with particle beam column  
A retarding field analyzer uses the existing components of a charged particle beam system eliminating the need for inserting a separate retarding field analyzer device. Using components of the...
8803087 Spectrum analyzer and method of spectrum analysis  
A spectrum analysis method is provided in which a composition distribution of a sample in the depth direction is analyzed based on an energy spectrum of scattered particles scattered at the sample...
8791412 Optical system calibration verification  
A sample processing apparatus (102) includes a reference carrier region (106) that supports a reference carrier (108), which includes one or more reference substances that emit radiation with...
8785878 Charged particle beam apparatus  
An apparatus includes an irradiation device configured to irradiate an object with charged particle beams, a measurement device configured to measure a characteristic of each of charged particle...
8766182 Method for detecting information of an electric potential on a sample and charged particle beam apparatus  
An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential...
8748816 Clustering of multi-modal data  
Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined...
8729466 Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination  
One embodiment relates to an apparatus for correcting aberrations introduced when an electron lens forms an image of a specimen and simultaneously forming an electron image using electrons with a...
8723114 Sequential radial mirror analyser  
A sequential radial mirror analyzer (RMA) (100) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen (112) is disclosed. The RMA...
8710452 Charged particle source with integrated electrostatic energy filter  
A charged particle filter with an integrated energy filter, in which the charged particle emitter, the focusing electrodes, and the deflection electrodes are arranged round a straight axis. Where...
8669522 Mask inspection apparatus and mask inspection method  
According to one embodiment, a mask inspection apparatus includes a decompression chamber, a holder, a light irradiation unit, a detection unit, an electrode, and a control unit. The holder is...
8658973 Auger elemental identification algorithm  
System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining...
8642956 Transmission electron microscope and method of operating a transmission electron microscope  
A transmission electron microscope comprises a high-voltage source for outputting a high voltage at two high-voltage outputs and outputting a control signal at a controller output; a focusing lens...
8633438 Ultrafast electron diffraction device  
An ultrafast electron diffraction device for irradiating a sample with a bunch of electrons in an ultrashort pulse in order to perform an ultrafast analysis of the sample. The ultrafast electron...
8629395 Charged particle beam apparatus  
In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each...
8610059 Method and system for non-destructive distribution profiling of an element in a film  
A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum...
8598525 Particle beam system  
A particle beam system comprises a particle beam source for generating a particle beam, an objective lens for focusing the particle beam onto an object plane, wherein the objective lens comprises...
8592761 Monochromator for charged particle beam apparatus  
The monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus comprises a beam adjustment element, two Wien-filter type dispersion units and an...
8592764 X-ray detector for electron microscope  
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on...
8586919 Low-voltage transmission electron microscopy  
Embodiments of the invention relate to electron microscopy. Example embodiments relate to an apparatus including a first electron beam source, a second electron beam source, and a receiving unit....
8575548 Analyzing the transport of plasmonic particles through mineral formations  
A transport of plasmonic particles through a mineral formation is analyzed by flowing a plasmonic particles solution through an immobile phase (e.g., a mineral formation), determining an...
8552369 Obtaining elemental concentration profile of sample  
A method of obtaining an elemental concentration profile of a sample using x-ray photon spectroscopy measurements is described. Each measurement relates to a different depth in the sample. The...
8530835 Imaging energy filter for electrically charged particles and spectroscope having same  
The present invention concerns an imaging energy filter for electrically charged particles with a toroidal energy analyzer, preferably with a hemispherical analyzer, with an entrance plane and an...
8513603 In-situ determination of thin film and multilayer structure and chemical composition using x-ray fluorescence induced by grazing incidence electron beams during thin film growth  
A method utilizing characteristic x-ray emission from a single thin film or multilayer thin film when an electron beam impinges at a grazing angle with respect to the surface of the sample to...
8507853 Method and system for determining depth profiling  
The present invention relates to a novel system and method for the determination of depth profiling with improved accuracy and reliability. The method comprises obtaining spectroscopic data from...
8487250 Method for detecting information of an electronic potential on a sample and charged particle beam apparatus  
An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential...
8481963 Ion slicer with accelleration and decelleration optics  
Described herein is an ion slicer that: a) accelerates an ion beam towards a first electrode comprising an ion entrance slit, where the first electrode blocks a portion of ions with high...
8481931 Electron spectroscopy  
The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a...
8476588 Method of electron diffraction tomography  
The invention relates to a method for electron diffraction tomography in a Transmission Electron Microscope. Known methods involve using Scanning Transmission Electron Microscope, and use the...
8466415 Methods for performing circuit edit operations with low landing energy electron beams  
Methods for using sub-100V electron beam landing energies for performing circuit edit operations. Circuit edit operations can include imaging for navigation and etching in the presence of a...
8466416 Electron detecting mechanism and charged particle beam system equipped therewith  
An electron detecting mechanism having a plate provided with an opening permitting passage of the primary beam, an energy filter, a first light detector, and a second light detector. The plate has...
8461525 Charged particle source with integrated energy filter  
A particle source in which energy selection occurs by sending a beam of electrically charged particles eccentrically through a lens so that energy dispersion will occur in an image formed by the...
8455823 Charged particle beam device  
The present invention provides a charged particle beam device in which signal electrons (14) are generated from a sample when the sample (11) is irradiated with a primary charged particle beam...
8450684 Quantification method of functional groups of organic layer  
A quantification method of functional groups in an organic thin layer includes: a) measuring an absolute quantity per unit area of an analysis reference material having functional groups included...
8450681 Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets  
Apparatus, methods and systems are provided to inhibit a sightline from a charged particle source to an analyzer and for changing a baseline offset of an output spectrum of an analyzer. A supply...
8450685 Electron probe microanalyzer and data processing method implemented therein  
In an electron probe microanalyzer (EPMA) and a method of use thereof, even if plural sets of X-ray image data are obtained at different timings from regions between which a positional deviation...