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6426501 |
Defect-review SEM, reference sample for adjustment thereof, method for adjustment thereof, and method of inspecting contact holes
There is disclosed a defect-review SEM (scanning electron microscope) and method for inspecting contact holes having small aperture diameters (e.g., less than 0.05 μm) and high aspect ratios...
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6420702 |
Non-charging critical dimension SEM metrology standard
An SEM measurement standard for measuring linewidths of 0.1 microns and below utilizes two different conducting materials in order to prevent charging effects. The top material is selected to use...
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6420700 |
Charged-particle-beam exposure device and charged-particle-beam exposure method
A method of exposing a wafer to a charged-particle beam by directing to the wafer the charged-particle beam deflected by a deflector includes the steps of arranging a plurality of first marks at...
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6420703 |
Method for forming a critical dimension SEM calibration standard of improved definition and standard formed
A method for forming a critical dimension scanning electron microscope calibration standard and standard formed are disclosed. In the method, a plurality of metal lines, i.e. formed of a suitable...
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6414305 |
Automated system for determining minimum resolvable temperature differences
An automated system determines the minimum resolvable temperature difference of a thermal imager with respect to a background scene. The system comprises: a) a thermal energy for generating thermal...
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6410912 |
Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation
A method of adjusting the position of a micro-mechanical bi-material cantilever is provided. The bi-material includes a first and a second material and each material has a corresponding thermal...
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6410919 |
Positron gun for pet attenuation measurements
A positron gun is mounted to a PET scanner to illuminate a patient with positrons during a calibration emission scan. A calibration sinogram is produced and used to reconstruct an image which...
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6396056 |
Gas detectors and gas analyzers utilizing spectral absorption
Instrumentation to detect the presence of, or to measure the concentration of, a gas or pollutant in a gaseous environment. With the use of spectroscopic techniques and energy beams having suitable...
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6388250 |
Personal radiation dosimeters
A personal radiation dosemeter comprising a radiation detector means coupled to an electronic measurement circuit arranged in combination therewith to generate signals representative of an amount...
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6387709 |
Method of operating an optical sensor adapted for selective analyte-sensing contact with a plurality of samples
A multiple single use optical sensor includes a series of continuous sensor stripes deposited on a substrate web. At least one sample chamber is adapted to extend transversely across a discrete...
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6384408 |
Calibration of a scanning electron microscope
A scanning electron microscope (SEM) is calibrated for the effects of local charging on a measured critical dimension (CD) of a wafer by first calibrating the microscope with respect to a...
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6377300 |
Compact flat-field calibration apparatus
A portable apparatus for uniformly illuminating a detector that includes an array of charge-coupled devices (CCDs) is provided for facilitating calibration of the respective gains of the CCDs. The...
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6369381 |
Apparatus and method for calibration of nuclear gauges
The present invention is directed to a method and apparatus for calibrating nuclear gauges and confirming gauge calibrations that provide the accuracy of multiple block calibration methods without...
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6369386 |
IR sensor with reflective calibration
A self-calibrating infrared (IR) sensing device having the capability to measure the attenuation effects of surface contamination on the transmission window and to adjust the gain of the sensor...
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6362477 |
Bulk material analyser for on-conveyor belt analysis
The present invention related generally to bulk material analyzers suitable for the direct on-line analysis of materials such as coal and minerals. It is targeted particularly at direct on-conveyor...
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6362471 |
Design of a calibration phantom for in vivo measurement of stable lead or radioactivity in bone
The hazards of exposure to heavy metal contamination, examples of which arsenic, beryllium, lead, cadmium, chromium, nickel, zinc, mercury and barium, and the radioactive substances which deposit...
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6350985 |
Method for calculating gain correction factors in a digital imaging system
A method for developing a set of gain correction coefficients corrected for structural noise to be used in correcting the digital values representing an image captured by a pixelated detector...
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6342947 |
Optical power high accuracy standard enhancement (OPHASE) system
By employing a high-repeatability optical switch that transmits input optical power selectively either to the standard or the unit under test (UUT), OPHASE presents a system for performing a rapid,...
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6342698 |
Method for calibrating photomultiplier tubes in a scintillation camera
A method for calibrating photomultiplier tubes in a scintillation camera having a plurality of light sources includes the steps of: pulsing all light sources simultaneously; reading the output of...
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6337217 |
Method and apparatus for improved focus in optical processing
The present invention provides for a method and an apparatus for performing automatic control adjustments during photolithography processes. A plurality of semiconductor devices are processed....
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6329651 |
Process and device for real time sorting of detection events from a gamma ray detector and correction of the uniformity of detection elements from the detector
Process for real time sorting of signals from several semi-conductor detection elements in which: a) during a calibration phase: amplitude data and signal rise time data are established for...
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6320661 |
Method for measuring transmittance of optical members for ultraviolent use, synthetic silica glass, and photolithography apparatus using the same
A method is provided for evaluating a transmittance of an optical member for ultraviolet use, which is an object of measurement. The method includes the steps of cleaning the object of measurement,...
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6320187 |
Magnification and rotation calibration patterns for particle beam projection system
A method of calibrating a projection particle beam lithography system, comprises the following steps which is embodied in a system provides a magnification reticle pattern of features and a...
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6320186 |
Methods of non-uniformity compensation for infrared detector arrays
Improved methods of calculating offset correction values for detector elements of an infrared detector array. The methods can be used for one-dimensional scanning arrays, and performed twice for...
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6311539 |
Method for calibrating an edge detection system in a friction drive apparatus
A friction drive apparatus includes an edge detection system for determining a lateral position of a strip material advancing in a longitudinal direction. The edge detection system includes a first...
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6293135 |
Method of calibrating a system for detecting contact of a glide head with a recording media surface
A method and apparatus for calibrating a glide head and detector system performs a pre-screening to ensure the quality of the glide head and the piezoelectric sensor in the detection system. The...
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6293696 |
System and process for calibrating pyrometers in thermal processing chambers
A method and system for calibrating radiation sensing devices, such as pyrometers, in thermal processing chambers are disclosed. The system includes a reflective device positioned opposite the...
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6291819 |
Method of calibrating an electron beam system for lithography
A method of calibrating an electron beam system in which a plurality of standard grids are mounted in various presentations in the electron beam system and treated as different presentations of the...
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6288395 |
Passive infrared detection system and method with adaptive threshold and adaptive sampling
A detection system and method are capable of reducing the occurrence of false alarms and detection failures by compensating for variations in the amplitude of a detection signal generated by a PIR...
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6283629 |
Method of calibrating a radiation thermometer
A method of calibrating a radiation thermometer including a radiation sensor that is characterized by a sensitivity (S) and a temperature-responsive resistor that serves as an ambient temperature...
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6271516 |
G.M. tube environment radioactivity meter having a sensitivity degradation monitoring device with a natural radioisotope and means for automatically correcting the measured radioactivity
A G.M. tube environment radiameter including a sensitivity degradation monitoring device, comprising: a cyclic counter circuit for counting the pulses coming from the G.M. tube; b) a power operated...
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6271517 |
Pet scanner point source locator
An apparatus for providing a radiation point source for testing PET scanner detector accuracy in an annular PET scanner which defines a scanning region, the apparatus including a supporter...
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6268602 |
Method for manufacturing calibrated radiation dosimeter
In a method for manufacturing a calibrated radiation dosimeter, a layer of radiation sensitive material is applied to a substrate, the radiation sensitive material having an optical density which...
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6265720 |
Radiographic apparatus
An apparatus for photographing a radiographic image, has an image sensing system for obtaining a radiographic image; an image process system for correcting the radiographic image obtained by the...
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6264365 |
Background monitoring of CT data for existence and location of a bad detector
A monitoring apparatus analyzes detector data from a CT system to detect a signature of a bad detector. The apparatus generates a plurality of Helgason-Ludwig condition values from the detector...
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6246053 |
Non-contact autofocus height detector for lithography systems
In a particle beam lithography system, focus adjustment is controlled by a measurement of the gap between the workpiece being processed and a reference surface, such as the bottom surface of the...
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6239554 |
Open-loop light intensity calibration systems and methods
The input light settings in many vision systems often do not correspond to fixed output light intensities. The relationships between the measured output light intensity and the input light...
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6228664 |
Calibration method for radiation spectroscopy
A method of calibrating and using a radiation detector to quantify the radioactivity in or on a wide variety of objects, over a wide range of object sizes (points to hundreds of cubic meters), over...
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6224257 |
Device for simulating a patient's blood vessels
Device for simulating a patient's body for the testing of a vascular X-ray apparatus of the type comprising a means for emitting an X-ray beam, and a means for receiving the X-ray beam after it has...
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6225622 |
Dynamic radiation scanning device
The present invention is a dynamic radiation scanning system for detecting radiation dosimetry of a beam emitted along an axis from a radiotherapy treatment machine and a method for its use. The...
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6207952 |
Water phantom type dose distribution determining apparatus
A sensor is inserted into a closed water tank filled with water to the brim and the closed water tank is fixed directly to a radiation beam irradiating section, and the sensor is moved freely with...
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6194714 |
Method of processing autoradiography image
This is a method of generating a plurality of images of a substrate from radioactive radiation coming from a plurality of radioactive tracers contained in the substrate. To this end, data...
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6194716 |
Method for mass calibration
A method for performing a mass calibration under an application of a desired ion peak position of mass spectrum attained by a mass scanning of ions of substance having a known value of m/z and the...
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6191851 |
Apparatus and method for calibrating downward viewing image acquisition systems
The present invention is an apparatus and method for calibrating a downward viewing image acquisition system. The apparatus comprises a calibration panel with calibrative material of known...
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6184527 |
Dither correction for infrared detector arrays
Methods of calculating gain correction values and offset correction values for detector elements of an infrared detector array, under "abnormal" conditions, such as when the scene is in motion or...
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6184529 |
Methods and apparatus for performing scene based uniformity correction in imaging systems
Methods and apparatus for generating uniform reference sources for use in calibrating multiple-detector imaging devices. In exemplary embodiments, a plano-plano reference lens is inserted at a...
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6181474 |
Scanning confocal microscope with objective lens position tracking
A calibration device which has at least two targets. Each target has at least one surface exhibiting areas of optical contrast, and each surface has a general plane of orientation. The targets are...
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6175113 |
Thermal imaging system
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6175750 |
System and method for calibrating a reflection imaging spectrophotometer
The invention comprises a system and method of calibrating a reflected spectral imaging apparatus used for analysis of living tissue. In addition to the reflected spectral imaging apparatus itself,...
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6166377 |
Infrared image sensor with incorporated functions
An infrared image sensor, in particular one of the interlaced parallel scanning type, is described. The infrared image sensor has an optical focusing system for focusing an image on a matrix of...
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