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7622707 |
Polaroid absolute encoder
A polaroid encoder system for detecting movement is disclosed. The system includes a movable polarizing code element. A detector module detects an amplitude based on how much illumination passes...
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7619745 |
Optical encoder including aperture with diffusion element and collimator lens
An optical encoder which is designed to convert light generated from a light source into parallel light rays by using a collimator lens, thereby allowing the collimated light to radiate to gratings...
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7619210 |
Encoder with a combined position and index track
An optical encoder. The encoder includes a coding element, an emitter, and a detector. The coding element has a track with a track pattern. The track pattern includes a plurality of optically...
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7619209 |
Encoder with a combined position and index track
An optical encoder. The encoder includes a coding element, an emitter, and a detector. The coding element has a track with a track pattern. The track pattern includes a plurality of optically...
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7612331 |
Code disk with a plurality of tracks having different patterns
A code disk for a high-resolution encoder that can detect an absolute position and a method for manufacturing a mold to produce the code disk are provided. The code disk is formed by using...
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7608814 |
Optical structure for localising an electromagnetic field and detector or emitter device including such a structure
An optical structure enabling properties of the surface plasmons to be used is defined from a substantially binary, parameterizable unit pattern M E . The parameters a, b, c, d and h g of the...
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7601947 |
Encoder that optically detects positional information of a scale
When an incident light is obliquely incident on an index scale, the optical path length of light A becomes longer than the optical path length of light B and an optical path length difference...
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7596880 |
Scanning unit of an optical position measuring device and optical position measuring device
A scanning unit including a light source for illuminating a scale by a light beam and a detector for detecting the light beam which has been modulated by the scale as a function of a relative...
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7573581 |
Position-measuring device
A position-measuring device is for measuring the position of two objects that are movable relative to one another. The device includes a measuring graduation, which is connected to one of the two...
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7554078 |
Photoelectric encoder
A photoelectric encoder using a lens array for dividing an image of a scale pattern into a plurality of regions to be detected and focusing them onto an array of light receiving elements,...
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7541564 |
Optical pickup
The invention relates to an optical pickup for an optical recording medium, an electrically controlled diffraction grating suitable for use in such a pickup, and to an apparatus for reading from...
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7521669 |
Multi-bit absolute position optical encoder with reduced number of tracks
An optical encoder includes a coding element having a track with a track pattern that comprises multiple optically distinguishable sections. The optical encoder compares photodetector outputs with...
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7504648 |
Method and apparatus for determining focus of a scanning system
A non-imaging tool for assisting in determining a focus in a scanning system that scans a planar object with a scanning beam in a fast scan direction, while the planar object is moved under the...
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7502127 |
Sensor device and stage device
According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of...
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7485847 |
Displacement sensor employing discrete light pulse detection
Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source...
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7485845 |
Photoelectric encoder capable of effectively removing harmonic components
A three-grating type photoelectric encoder includes a second grating formed on a scale and first and third gratings disposed on a side of a detector. A part of at least the first grating is shifted...
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7480060 |
Interferometric optical position encoder employing spatial filtering of diffraction orders for improved accuracy
An optical position encoder employs spatial filtering of diffraction orders other than +/− 1st diffraction orders for greater accuracy. The encoder includes a light source, a scale including a...
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7477362 |
Moiré interferometric strain sensor
A moiré interferometric strain sensor for detecting strain on a specimen, a diffraction grating being on the specimen, the strain sensor including an array of a plurality of microlenses for...
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7475489 |
Scanning system of a position measuring device
A scanning system of a position measuring device for photo-electric scanning of a measuring graduation, the scanning system including a support carrying measuring components, an adapter including a...
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7470892 |
Optical encoder
An optical encoder includes an incoherent light source; a first grating, which is an amplitude grating having a first grating period, for spatial amplitude modulation of the incoherent light from...
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7462815 |
Absolute encoder utilizing a code pattern carrier having a varying mixture of phosphors deposited thereon
An encoder having a code carrier, light source, and detector is disclosed. The code carrier includes a track that emits light at each of a plurality of track points on the track when that track...
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7446873 |
Reflective alignment grating
A wafer may be aligned with an imaging plate including an alignment grating with a pitch P. A pupil filter in the pupil plane of the optical system may be used so that the periodicity of the...
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7446694 |
System for synchronization of multi-sensor data
A multi-sensor system includes a first analog sensor sub-system, a second analog sensor sub-system, and a system for synchronizing the outputs of the first and second analog sub-systems. Each...
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7443518 |
Measuring instrument, in particular for transmission measurement in vacuum system
A measuring instrument, in particular for transmission measurement with transparent substrates, comprises a measuring head with a light emitting element for emitting a light beam and a light...
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7440113 |
Littrow interferometer
An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component...
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7433048 |
Interferometer systems for measuring displacement and exposure systems using the same
Interferometer systems for measuring displacement include a displacement interferometer. This interferometer includes a displacement converter responsive to a measuring beam of light. The...
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7425697 |
Origin detection method for optical encoder
An optical encoder equipped with an origin detection apparatus has a scale provided with an optical grating, a plurality of light receiving elements that is provided in association with the pitch...
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7417218 |
Triple grating optical encoder with light transmitting area in optical path
An optical encoder is a reflecting triple grating type optical encoder. A light projecting section of the optical encoder which includes a combination of a bare chip LED and a first grating of a...
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7414731 |
Microscope and interferometer thereof
An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser...
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7414730 |
High precision interferometer apparatus employing a grating beamsplitter
Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to...
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7405392 |
Optical rotary encoder
An optical encoder includes: a rotary slit plate having a rotation angle detection track including an optical slit; a light source for applying light to the optical slit; light detecting elements...
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7405389 |
Dense multi-axis array for motion sensing
The present disclosure describes an optical displacement sensor having a dense multi-axis array of photosensitive elements. Generally, the sensor includes a two dimensional array of multiple...
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7394550 |
Displacement detector
The displacement detector includes: a light source 140 ; a beam splitter 170 for dividing the light, which is sent from the light source 140 , into two beams of light; reflection mirrors 181,...
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7394062 |
Displacement-measuring optical scale and optical encoder using same
When a convex lens 13 comes close to 0-th order transmitted light T 0 with rotation of an optical scale 11 , the 0-th order transmitted light T 0 derived from a light beam L emitted from a...
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7391011 |
Optical encoder capable of detecting absolute position
In two phases signals (A, B) outputted from a scale or a scale having a discontinuous portion provided in its incidental member to a light receiving portion, a region in which amplitudes of the two...
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7388181 |
Apparatus for adjusting applied voltage in display system using diffractive optical modulator
Disclosed herein is an apparatus for adjusting applied voltage in a display system using a diffractive optical modulator. The apparatus for adjusting applied voltage can measure the intensity of...
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7385179 |
Optical encoder for measuring displacement
At least one exemplary embodiment is directed to an optical encoder which includes a first diffraction grating having a desired optical effective aperture ratio at an appropriate gap position so as...
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7369253 |
Systems and methods for measuring sample surface flatness of continuously moving samples
Measurement of sample surface flatness of a continuously moving sample. A conveyor continuously conveys a sample beneath a grating disposed at a non-zero angle with respect to the plane of...
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7358865 |
Optical encoder and apparatus using optical encoder
An optical encoder includes a cylindrical reflective scale, a point light source for irradiating the reflective scale, and light-receiving elements for receiving the light beams reflected by the...
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7348544 |
Optical encoder with discontinuous optical grating
An optical encoder includes a light-emitting unit, a scale with a discontinuous part, and a plurality of light-receiving elements arranged in relationship to a pitch of the scale. In the optical...
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7348529 |
Optical device and optical pickup device
An optical device diffracts incident light with a hologram element 19 and receives the diffracted light with light receiving regions 20 A to 29 on a light receiving element 12. The light...
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7345273 |
Integrated optical encoder
A rotary switch including a control element, a light-emitting device arranged on a printed circuit board and configured to emit light, and at least two receivers arranged on the printed circuit...
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7332711 |
Photoelectric encoder, scale therefor and method for manufacturing the same
A main scale 10 has protrusive grating 12 of a thin film of e.g. Cr formed on a base member 11 . The base member 11 and the Cr thin film constitute a reflecting face which is set to provide...
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7332709 |
Photoelectric encoder
A photoelectric encoder includes a light source of an illumination light beam. The encoder also includes a movable grating which has grating lines and which is displaceable in a direction...
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7329858 |
Optical encoder and electronic equipment having same
An optical encoder includes a mobile object having a plurality of aligned slits, a light-emitting portion for emitting light toward the mobile object, and a light-receiving portion 103 for...
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7324212 |
Optical encoder having slanted optical detector elements for harmonic suppression
An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated...
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7319509 |
Attenuator for attenuating wavelengths unequal to a used wavelength
There is provided an attenuator for attenuating electromagnetic radiation of wavelengths Unequal to a used wavelength, including a grating element having i) grating grooves that produce a grating...
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RE39978 |
Scanning phase measuring method and system for an object at a vision station
A method and system are provided including an optical head which moves relative to an object at a vision station to scan a projected pattern of imagable electromagnetic radiation across the surface...
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7312437 |
Displacement sensor, method for detecting the optimal reference position, and method for judging stability of detecting the reference position of displacement sensor
A displacement sensor which detects a positional displacement of a movable member, comprises a position signal generating section configured to generate a periodical signal in accordance with...
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7297935 |
Position-measuring device
A position-measuring device includes: a measuring graduation provided on a measuring standard device arranged around in ring-like fashion; a scanning unit for optically scanning the measuring...
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