Matches 101 - 150 out of 253 < 1 2 3 4 5 6 >
Match Document Document Title
7019268 Wafer processing apparatus and method of use  
A system, apparatus, and method for thermal processing of substrates undergoing lithographic chemical processes is provided. The thermal processing system includes at least one heating element, a...
7011712 Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof  
A supporting structure is provided, including a ceramic susceptor to be heated and having a mounting face and a back face. A ceramic supporting member is joined with the back face of the susceptor....
6997993 Susceptor supporting construction  
A susceptor supporting construction has a susceptor for heating a member to be processed and a supporting member, in which an inner space is arranged, connected to the susceptor. A chamber having...
6995342 Apparatus and method for bonding electronic component, circuit board, and electronic component mounting apparatus  
Disclosed are an apparatus and a method for bonding electronic components, a circuit board, and an electronic component mounting apparatus, whereby various kinds of circuit boards can be...
6992270 Wafer bake system and method for operating the same  
A wafer bake system includes a heating plate for heating a wafer, and means for supporting the wafer to be spaced from the heating plate, wherein a gap distribution between the wafer and the...
6989513 Heat-generating element, heat-generating substrates, heat-generating substrate manufacturing method, microswitch, and flow sensor  
A stable and durable heat-generating element and substrate, a method of efficient and highly precise manufacture of same, and equipment utilizing same are obtained. Employing as material a silicon...
6969830 Wafer chuck having thermal plate with interleaved heating and cooling elements  
A workpiece chuck includes a thermal plate assembly which includes both heating and cooling capability. The heating element can be a resistive heater in a coiled configuration disposed in a plane....
6967312 Semiconductor manufacturing/testing ceramic heater, production method for the ceramic heater and production system for the ceramic heater  
A process for producing a ceramic heater includes forming a resistance heating element on a surface of a ceramic substrate. The resistance heating element is divided into plural sections....
6963052 Heater module for semiconductor manufacturing equipment  
Heater module, and semiconductor manufacturing equipment in which the heater module is utilized, for raising the cooling speed of a post-heating heater markedly more than conventional, and that can...
6960743 Ceramic substrate for semiconductor manufacturing, and method of manufacturing the ceramic substrate  
A ceramic substrate for a semiconductor-producing/examining device, in which it is possible to promptly raise its temperature, a heating face thereof has a small temperature variation, and no...
6958462 Ceramic heaters  
An object of the present invention is to provide a ceramic heater so that hot spots around the end portions of a heat resistor may be prevented. A ceramic heater has a ceramic substrate having a...
6956186 Ceramic heater  
An objective of the present invention is to provide a ceramic heater making it possible to heat an object to be heated, such as a silicon wafer, evenly. The ceramic heater of the present invention...
6949722 Method and apparatus for active temperature control of susceptors  
A method and an apparatus utilized for thermal processing of substrates during semiconductor manufacturing. The method includes heating the substrate to a predetermined temperature using a heating...
6949726 Heating apparatus having electrostatic adsorption function  
A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting...
6924468 System and method for heating materials  
A system and method for heating materials is provided. Generally, the system contains a first layer upon which a material may be placed for heating the material, wherein the first layer has...
6924464 Ceramic heater and manufacturing method of ceramic heater  
A ceramic heater manufacturing method capable of preventing reflection of a laser beam at the time the performing trimming by irradiation using a laser beam and performing trimming of a resistance...
6919541 Apparatus for preventing rapid temperature variation during wafer processing  
An apparatus for fabricating a semiconductor device, whereby a semiconductor wafer is thermally treated with a wafer treatment device. The semiconductor wafer is delivered with a conveyer to the...
6917021 Heating apparatus with electrostatic attraction function  
There is disclosed a heating apparatus with electrostatic attraction function 1 , comprising at least a supporting base 2 , an electrode for electrostatic attraction 4 and a heating layer 5 ...
6914222 Wafer heating apparatus  
To provide a wafer heating apparatus that can measure a surface temperature of a wafer accurately and responsively. A front surface of a ceramic plate 2 serves as a mounting surface on which a...
6905333 Method of heating a substrate in a variable temperature process using a fixed temperature chuck  
A method is provided for heating a substrate in a process chamber using a heated chuck. In accordance with the method, the substrate is lowered onto the chuck and heated to a first temperature less...
6897414 Ceramic heater for semiconductor manufacturing/testing apparatus  
A ceramic beater for a semiconductor producing/examining device having a resistance heating element superior in adhesion to a substrate. The ceramic heater includes a ceramic substrate and a...
6897415 Workpiece stage of a resist curing device  
A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated...
6893507 Self-centering wafer support system  
Improvements in the design of a low mass wafer holder are disclosed. The improvements include the use of peripherally located, integral lips to space a wafer or other substrate above the base plate...
6891134 Integrally formed bake plate unit for use in wafer fabrication system  
A bake plate is integrally formed from a copper disk whose lower surface defines a desired heater element channel pattern that is filled with electrically conductive resistive material. Copper...
6891263 Ceramic substrate for a semiconductor production/inspection device  
The present invention provides a ceramic substrate which can keep a sufficiently large breakdown voltage even if the pore diameter of its maximum pore is 50 μm or less to be larger than that of...
6888106 Ceramic heater  
A ceramic heater making it possible to prevent a short circuit in its resistance heating element and heat a semiconductor wafer evenly. The ceramic beater includes a ceramic substrate, an...
6884972 Ceramic plate for a semiconductor producing/inspecting apparatus  
A ceramic heater for a semiconductor producing/examining device including a ceramic substrate having a disc form with a diameter exceeding 200 mm and first and second surfaces, the first surface...
6878907 Ceramic substrate and process for producing the same  
It is a an object of the present invention to provide a ceramic substrate for a semiconductor producing/examining device which has high fracture toughness value, exellent thermal shock resistivity,...
6878211 Supporting structure for a ceramic susceptor  
A supporting structure for attaching a ceramic susceptor into a processing chamber is provided. The ceramic susceptor is used for placing and heating an article to be processed. The supporting...
6878906 Ceramic heater for semiconductor manufacturing and inspecting equipment  
An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device which is capable of accurately measuring the temperature of an object to be heated...
6875960 Heating system  
A heating system 25 has a main electric heat-generating element 3 and a heating surface 4 a for heating an object, auxiliary electric heat-generating elements 5 A to 5 D, and a main power...
6863734 Substrate processing apparatus and method for manufacturing semiconductor device  
By indirectly monitoring a warping amount of a substrate, it is possible to examine causes easily when substrate processing such as deposition is performed with nonuniform in-plane temperature of...
6861619 Method and apparatus for preparing semiconductor wafers for measurement  
A wafer-cleaning module can remove contaminants from a semiconductor wafer prior to measurement in a metrology tool. A heating chamber and heater plate of the cleaning module can be used to heat...
6858821 Method of adapting an operating device to user behavior and adaptive operating device  
An operating device for an electrical and/or electronic apparatus is adapted to the operating behavior of a user. The apparatus has a plurality of operating states which can be chosen or set by way...
6838645 Heater assembly for manufacturing a semiconductor device  
A heater assembly that is capable of uniformly heating a wafer in an apparatus for manufacturing a semiconductor device is provided. The heater assembly preferably includes a susceptor configured...
6838646 Susceptor device  
A susceptor device comprises a susceptor base body, a temperature controlling section, an adhesive layer which attaches the susceptor base body and the temperature controlling section unitarily, an...
6835917 Molding heater for heating semiconductor wafer and fabrication method thereof  
A molding heater includes a first metal plate having a recess formed on one side and a flat surface formed at the other side. A groove is formed at a lower portion of the recess and a wafer is...
6815647 Heat treatment unit and heat treatment method  
A heat treatment unit comprises a heat plate made of aluminum nitride which is excellent in heat conductivity and strength inside thereof. The entire circumference of the heat plate is supported by...
6815646 Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober  
The present invention discloses a ceramic substrate for semiconductor manufacture and/or inspection conducive to decrease radiated α-rays and to minimize changes in thermal conductivity as a...
6812434 Ceramic heaters, a method for producing the same and heating apparatuses used for a system for producing semiconductors  
A ceramic heater is provided, including a ceramic substrate with a heating face and a heat generator so that the temperature on the heating face may be controlled without a temperature controlling...
6809299 Hot plate for semiconductor manufacture and testing  
A hot plate for a semiconductor producing/examining device, in which hot plate, when an object to be heated such as a silicon wafer is heated in a state that the object is distanced by a certain...
6787739 Apparatus for processing a substrate including a heating apparatus  
An apparatus for heating a substrate of a semiconductor device includes a hot plate, on which a semiconductor substrate is placed, and a heater for heating the hot plate. The hot plate is...
6780251 Substrate processing apparatus and method for fabricating semiconductor device  
A substrate processing apparatus includes a first holder made of silicon carbide or silicon and a second holder made of quartz. Each of the first and the second holder is of a ring shape and the...
6758669 Variable surface hot plate for improved bake uniformity of substrates  
A system, method and apparatus are described for improving critical dimension uniformity in baked substrates. The system, method and apparatus provide for varying the distance between a substrate...
6756568 Hot plate unit  
A hot plate unit ( 1 ) having a reduced heater temperature rise time and not generating dusts. The hot plate unit comprises a casing ( 2 ) having an opening portion; a heater ( 3 ) arranged on the...
6753507 Wafer heating apparatus  
In a ceramic heater having a plate-like body made of a ceramic, heating element in one main face of the plate like body, and an electric supply portion to be electrically connected with the heating...
6753508 Heating apparatus and heating method  
A heating apparatus includes a central hot plate for heating the center portion of a substrate, a plurality of segment hot plates for heating the peripheral portion of the substrate, a hot plate...
6744020 Heat processing apparatus  
A heat processing apparatus comprises a hot plate for putting the substrate on or near its surface, a ceiling with a first and second concentric regions with a first and second heat pipes,...
6740853 Multi-zone resistance heater  
A substrate holder for holding a substrate (e.g., a wafer or an LCD panel) during plasma processing. The substrate holder is a stack of processing elements which each perform at least one function....
6731496 Electrostatic chuck  
An electrostatic chuck which allows sufficiently rapid temperature rising/dropping thereof, in case that the diameter of a ceramic substrate is 190 mm or more or especially in case that the...
Matches 101 - 150 out of 253 < 1 2 3 4 5 6 >